Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hellmann-Hygrex Luft- und Klimatechnik 22339 GmbH
Original Assignee
Hellmann-Hygrex Luft- und Klimatechnik 22848 Norderstedt De GmbH
Schlierbach 35435 Wettenberg De GmbH
HELLMANN HYGREX LUFT und KLIMA
SCHLIERBACH GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19644717Aexternal-prioritypatent/DE19644717A1/de
Application filed by Hellmann-Hygrex Luft- und Klimatechnik 22848 Norderstedt De GmbH, Schlierbach 35435 Wettenberg De GmbH, HELLMANN HYGREX LUFT und KLIMA, SCHLIERBACH GmbHfiledCriticalHellmann-Hygrex Luft- und Klimatechnik 22848 Norderstedt De GmbH
Application grantedgrantedCritical
Publication of DE19781220D2publicationCriticalpatent/DE19781220D2/de
DE19781220D1996-10-281997-10-14Verfahren zum Trocknen von dünnen Schichten sowie Vorrichtung zur Durchführung des Verfahrens
Expired - LifetimeDE19781220D2
(de)