DE1964192C - Ion getter pump - Google Patents

Description

The points lying on the cathode are designed as sheet metal strips, which are formed by longitudinal gaps of at least the length of the cathode of the grid-shaped 7th \ iinderv ·. and are separated.

On Fiand the training shown in the drawing ! üi "iriin> j.sbeispiele will be the F.rfinduni: in the following explained in more detail. It is time

Fin. I the schematic side view of the arrangement r.mc '.on components of the ion setter pump.

F i g. 2 the over-step AA according to FIG. 1 and: o

Fig. 3 the cross section of the pump with the das electric field in the area of the anode generating elements, which act as the pump housing in several Segments dividing walls are executed.

iV.is is a cylindrical pump element 1; -. n closed on one side with a bottom 2 and on the other side with a. Since ^{Q is provided with} connection to the space allowing the outgoing / "uir.penden space. Vacuum-tight insulating elements are attached to the bottom 2, on which an electron gun is placed. The cathode 4 Accelerating electrode 5 and focusing electrodes 6, 7, 8 and 9 consists.

The anodes 10. II. 12 and 13 are rods auhoehschmelzcndem Material. ζ. Ii molybdenum, tungsten or tantalum. They are symmetrical and parallel / u arranged on the pump axis. A .if each anode is one of the cylindrical fittings 14. 15. 16 and 17 attached, made of an absorbent material. / .. B. titanium.

Around each anode 10, 11, 12 and 13 are located! itself, an element in the form of a tube that forms the electric field, consisting of grids or from to the anode rod parallel bars is executed. This FIcmenle are attached to the housing 1 in such a way that the associated anodes lie on the axes of these elements. The dividing walls 22, 23, 24 u-! 25 (Fig. 3) attached, which are designed as segments are, the elements generating the electric field in the area of the anode b, .Jen.

In the walls of the generating the electric field Elements 18, 19, 20, 21 and 22, 23, 24 and 25 (F ie. 3) to the between the anode and cathode umbrellas 26, 27, 28 and 29 are arranged which secure the electron gun from sputtering the sorbent.

1 sheet of drawings

Claims (2)

1 U2 P-ii-nfin nrii, -ii ■ · -ciui a large acceleration in the direction of the pump housing walls. v \ o the gas ions in the sorbent 1. Ionization pump with several ionization *; - impact, to which the resulting ions exist,
arrangements in a cylindrical pump. The ionization of the (iase in the pump is achieved with -'lause. that is, the ionization arrangements from each -, icls emitted by an electron gun, a hollow / .vlinder-shaped electrode of lattice-non. These electrons are guided into the area of structure and an electrostatic field opposite to this, in the axis of the arrangement, lying on a positive electrostatic field of local potential. Here they move as shown arranged, thin, essentially raised webs, whereby their stabant'-de exist, in which in a lonisaiions- io W _ »lengthened considerably. arrangement of the rod anode on part of its liie loir ^ atioii of noble gases, and thus the waste Length Geuerma: .ria! deceptive and with a sorption capacity in the ionic converter pump GIi :: ¹ - aihode for injecting electrons into can by multiplying the ionization . '■. is. J jdi j b. ii ekeuu / eich η et. that 15 getter pump, which the pump of the aforementioned: · JiIi- 'only one in de, axis of the pump housing An er.f-pricht. is from the German interpretation! ' ti) Lingeordr.jte (ilühkathode (4) all loni-! 27S6] 4 known operator ion gelterptimpe mi: Mi \ io: -i-.anoidnung (, 18, 19, 20, 21: 22, 23, 24th several lonisatiuiuiisanoidierungen are in jodei 25; is common. that di ionization arrangements of the lunisaiionsanordnuimen separate electron channels niing-e: ν ¹ , p.imeii'i-.ch used around the cathodes (4) annones. The disadvantage of this solution is cm are ordered, and that on all rod anodes (.10. koinp'i / iei ter structure of the pump and its storage - esv- II. 12. 13) Citer material is attached. stones. Furthermore, there must be several hot cathodes in each case. 2. lonengterpump according to claim !, that represent a wear part of the pump, excluded characterized in that the hot cathode (4) are changed. Production and operating costs. .1 an elongated, rotationally symmetricalc. direct or 25 such pumps are therefore high. indirectly heatable cathode is. that they are pumped up by In known ions, the by means of a coil or a ring, steaming the sorbent onto the inner surface of the wall existing acceleration gate (5) is surrounded. of the pump housing by sublimation of this material and that at a distance \ on i ': r cathode (4) rials reaches the z "for this purpose on the anode in the through the axis of the cathode (4) and the 30 or in a separate one inside the pump. Anode rods (10. 11. 12. 13) running marriage ordered sublimator is applied. In the event of now parallel and symmetrical to the cathode, one of the attachment of the sorbent to the anode is rod-shaped focussing electrode (6.7.8. 9Ί otherwise by heating due to the electron is ordered. Shot from the electron gun, and V ion getter pump according to claim 1 or 2. 35 when mounted in a <* m sublimator that will characterized in that the hollow cylinder feed sorbent by heating with an electric with electrodes, circular or polygonal cross-sections, radiators are atomized. The use of a sol- exhibit. and that the cylinder walls on the separately heated sublimators complicate the The structure of the pump lying between the anodes and the cathode and \ attains a complex Places are designed as sheet metal strips, the 40 feed system of the pump. through Eäiusschlitze of at least the length of the present invention is the object of rudder Cathode from the grid-shaped cylinder base, an ion getter pump with simple effort are separated. construction to create that with a simple supply system and in which the number of 45 wearing parts is reduced to a minimum. The ion getter pump according to the invention is characterized is characterized by it. d;: 3 a single hot cathode arranged in the axis of the pump housing all The invention relates to an ion getter pump with ionization arrangements in common. that the lonely several Ionization arrangements in a cylinder arrangement symmetrically around this cathode see pump housing, by which the ionization units are arranged, and that on all rod anodes get arrangements each made of a hollow cylindrical element material is attached. trode of lattice-like structure and an opposite According to a preferred development of the The ion getter pump is characterized by this, which is at a positive potential, in the finching Axis of the cylindrical electrode arranged, 55 from that the hot cathode has an elongated, rotational thin rod anode, in which an ion-symmetrical, directly or indirectly heated channel The rod anode is part of its method. that they come from a helix or Length (carries conductor material and with which an accelerator grille consisting of rings is method for injecting electrons into the interior is hen, and that at a distance from the cathode the ionization arrangements is provided. 60 in the through the axis of the cathode and the The action of the ion getter pumps is based on planes running parallel and symmetrical the absorption of the gases through a rod-shaped focusing elec- Walls of the pump housing vapor-deposited sorptrode is arranged. tioninaterinl. Called sorbent or getter material. According to a further advantageous embodiment the chemically active gases due to the chemi- fi.5 of the invention is characterized by the ion gelterpumpc sl! '.- η processes are absorbed, the absorption from the fact that the hollow cylindrical electrodes the noble gases, on the other hand, have circular or polygonal cross-sections in an ionization of these gases, and that In the inside of the pump and in the one part, the cylinder coil is attached to (Κ · η / wischen {\ c \ y anodes and