[go: up one dir, main page]

DE19580372D2 - Mikromechanischer Schwinger eines Schwingungsgyrometers - Google Patents

Mikromechanischer Schwinger eines Schwingungsgyrometers

Info

Publication number
DE19580372D2
DE19580372D2 DE19580372T DE19580372T DE19580372D2 DE 19580372 D2 DE19580372 D2 DE 19580372D2 DE 19580372 T DE19580372 T DE 19580372T DE 19580372 T DE19580372 T DE 19580372T DE 19580372 D2 DE19580372 D2 DE 19580372D2
Authority
DE
Germany
Prior art keywords
gyrometer
oscillation
micromechanical vibrator
micromechanical
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19580372T
Other languages
English (en)
Other versions
DE19580372B4 (de
Inventor
Burkhard Buestgens
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE19580372T priority Critical patent/DE19580372B4/de
Publication of DE19580372D2 publication Critical patent/DE19580372D2/de
Application granted granted Critical
Publication of DE19580372B4 publication Critical patent/DE19580372B4/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
DE19580372T 1994-04-23 1995-04-11 Mikromechanischer Schwinger eines Schwingungsgyrometers Expired - Lifetime DE19580372B4 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19580372T DE19580372B4 (de) 1994-04-23 1995-04-11 Mikromechanischer Schwinger eines Schwingungsgyrometers

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4414237A DE4414237A1 (de) 1994-04-23 1994-04-23 Mikromechanischer Schwinger eines Schwingungsgyrometers
DEP4414237.4 1994-04-23
PCT/DE1995/000499 WO1995029383A1 (de) 1994-04-23 1995-04-11 Mikromechanischer schwinger eines schwingungsgyrometers
DE19580372T DE19580372B4 (de) 1994-04-23 1995-04-11 Mikromechanischer Schwinger eines Schwingungsgyrometers

Publications (2)

Publication Number Publication Date
DE19580372D2 true DE19580372D2 (de) 1997-12-04
DE19580372B4 DE19580372B4 (de) 2004-06-24

Family

ID=6516268

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4414237A Withdrawn DE4414237A1 (de) 1994-04-23 1994-04-23 Mikromechanischer Schwinger eines Schwingungsgyrometers
DE19580372T Expired - Lifetime DE19580372B4 (de) 1994-04-23 1995-04-11 Mikromechanischer Schwinger eines Schwingungsgyrometers

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4414237A Withdrawn DE4414237A1 (de) 1994-04-23 1994-04-23 Mikromechanischer Schwinger eines Schwingungsgyrometers

Country Status (6)

Country Link
US (1) US5895850A (de)
JP (1) JP4047377B2 (de)
KR (1) KR100374431B1 (de)
DE (2) DE4414237A1 (de)
GB (1) GB2302177B (de)
WO (1) WO1995029383A1 (de)

Families Citing this family (112)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100374804B1 (ko) * 1995-05-25 2003-05-09 삼성전자주식회사 진동형자이로스코프
GB2320571B (en) * 1996-12-20 2000-09-27 Aisin Seiki Semiconductor micromachine and manufacturing method thereof
JP3931405B2 (ja) * 1997-04-10 2007-06-13 日産自動車株式会社 角速度センサ
RU2117916C1 (ru) * 1997-07-04 1998-08-20 ТОО Научно-производственная компания "Вектор" Датчик углового и линейного положения
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
DE19831594C1 (de) * 1998-07-14 2000-01-27 Litef Gmbh Mikromechanischer Drehratensensor mit Koppelstruktur
SG77677A1 (en) * 1999-04-30 2001-01-16 Inst Of Microelectronics A novel structural design for improving the sensitivity of a surface-micromachined vibratory gyroscope
KR100363786B1 (ko) * 1999-05-13 2002-12-11 삼성전기주식회사 마이크로 자이로스코프
KR100374812B1 (ko) * 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
JP3666335B2 (ja) 2000-01-14 2005-06-29 株式会社村田製作所 角速度センサ
DE10040418A1 (de) * 2000-08-18 2002-03-07 Hahn Schickard Ges Drehratensensor und Drehratensensorsystem
US6742389B2 (en) 2001-01-24 2004-06-01 The Regents Of The University Of Michigan Filter-based method and system for measuring angular speed of an object
DE10108198A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10108197A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
JP2002296039A (ja) 2001-03-30 2002-10-09 Murata Mfg Co Ltd ジャイロ装置およびそれを用いた電子装置
US6722197B2 (en) 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
ATE509254T1 (de) * 2002-02-06 2011-05-15 Analog Devices Inc Mikrohergestellter kreisel
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
US6823733B2 (en) * 2002-11-04 2004-11-30 Matsushita Electric Industrial Co., Ltd. Z-axis vibration gyroscope
KR100476562B1 (ko) * 2002-12-24 2005-03-17 삼성전기주식회사 수평형 및 튜닝 포크형 진동식 마이크로 자이로스코프
US6966224B2 (en) * 2003-03-06 2005-11-22 Bei Technologies, Inc. Micromachined vibratory gyroscope with electrostatic coupling
CN100561126C (zh) * 2003-03-06 2009-11-18 Bei科技公司 利用静电耦合的微加工振动陀螺仪
US7395871B2 (en) * 2003-04-24 2008-07-08 Black & Decker Inc. Method for detecting a bit jam condition using a freely rotatable inertial mass
US6845665B2 (en) * 2003-04-28 2005-01-25 Analog Devices, Inc. Micro-machined multi-sensor providing 2-axes of acceleration sensing and 1-axis of angular rate sensing
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
US20050066728A1 (en) * 2003-09-25 2005-03-31 Kionix, Inc. Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
US7458263B2 (en) 2003-10-20 2008-12-02 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US6939473B2 (en) * 2003-10-20 2005-09-06 Invensense Inc. Method of making an X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US7377167B2 (en) * 2004-02-27 2008-05-27 The Regents Of The University Of California Nonresonant micromachined gyroscopes with structural mode-decoupling
US6938483B1 (en) 2004-03-28 2005-09-06 Hai Yan Phase-locked mechanical resonator pair and its application in micromachined vibration gyroscope
EP1735590B1 (de) 2004-04-14 2013-11-27 Analog Devices, Inc. Koppelvorrichtung für trägheitssensoren
FR2874257B1 (fr) * 2004-08-13 2006-10-13 Commissariat Energie Atomique Micro gyrometre a detection frenquentielle
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
FR2876180B1 (fr) 2004-10-06 2006-12-08 Commissariat Energie Atomique Resonateur a masses oscillantes.
JP2006119001A (ja) * 2004-10-22 2006-05-11 Sony Corp 角速度検出装置およびその製造方法
JP4385937B2 (ja) * 2004-12-15 2009-12-16 セイコーエプソン株式会社 アクチュエータ
FI116543B (fi) 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
US7442570B2 (en) 2005-03-18 2008-10-28 Invensence Inc. Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
US7621183B2 (en) * 2005-11-18 2009-11-24 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
JP2009529697A (ja) * 2006-03-10 2009-08-20 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツング 微小機械回転速度センサ
US8316958B2 (en) * 2006-07-13 2012-11-27 Black & Decker Inc. Control scheme for detecting and preventing torque conditions in a power tool
US8020441B2 (en) * 2008-02-05 2011-09-20 Invensense, Inc. Dual mode sensing for vibratory gyroscope
US20100071467A1 (en) * 2008-09-24 2010-03-25 Invensense Integrated multiaxis motion sensor
US20090262074A1 (en) * 2007-01-05 2009-10-22 Invensense Inc. Controlling and accessing content using motion processing on mobile devices
US7934423B2 (en) * 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US7796872B2 (en) * 2007-01-05 2010-09-14 Invensense, Inc. Method and apparatus for producing a sharp image from a handheld device containing a gyroscope
US8250921B2 (en) * 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8141424B2 (en) 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US8952832B2 (en) * 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8462109B2 (en) * 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US8047075B2 (en) 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
DE102007017209B4 (de) * 2007-04-05 2014-02-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanischer Inertialsensor zur Messung von Drehraten
DE102007057042A1 (de) * 2007-09-10 2009-03-12 Continental Teves Ag & Co. Ohg Mikromechanischer Drehratensensor mit Kopplungsbalken und Aufhängungs-Federelementen zur Unterdrückung der Quadratur
US8042394B2 (en) 2007-09-11 2011-10-25 Stmicroelectronics S.R.L. High sensitivity microelectromechanical sensor with rotary driving motion
DE102007054505B4 (de) 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
IT1391972B1 (it) 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
ITTO20090489A1 (it) * 2008-11-26 2010-12-27 St Microelectronics Srl Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse
IT1391973B1 (it) * 2008-11-26 2012-02-02 St Microelectronics Rousset Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari
US8146424B2 (en) * 2008-12-16 2012-04-03 Honeywell International Inc. Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
IT1392741B1 (it) 2008-12-23 2012-03-16 St Microelectronics Rousset Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
IT1394007B1 (it) * 2009-05-11 2012-05-17 St Microelectronics Rousset Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione
FR2945621B1 (fr) * 2009-05-15 2011-08-26 Commissariat Energie Atomique Structure de couplage pour gyrometre resonnant
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
DE102009048139A1 (de) * 2009-10-02 2011-04-07 Siemens Aktiengesellschaft Mikromechanischer Sensor
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
US8616057B1 (en) * 2010-01-23 2013-12-31 Minyao Mao Angular rate sensor with suppressed linear acceleration response
US8459111B1 (en) 2010-01-23 2013-06-11 Minyao Mao Angular rate sensor with suppressed linear acceleration response
US8453504B1 (en) 2010-01-23 2013-06-04 Minyao Mao Angular rate sensor with suppressed linear acceleration response
EP2378246A1 (de) * 2010-04-16 2011-10-19 SensoNor Technologies AS MEMS-Struktur für einen Winkelgeschwindigkeitssensor
US8567246B2 (en) 2010-10-12 2013-10-29 Invensense, Inc. Integrated MEMS device and method of use
US8947081B2 (en) 2011-01-11 2015-02-03 Invensense, Inc. Micromachined resonant magnetic field sensors
US8860409B2 (en) 2011-01-11 2014-10-14 Invensense, Inc. Micromachined resonant magnetic field sensors
US9664750B2 (en) 2011-01-11 2017-05-30 Invensense, Inc. In-plane sensing Lorentz force magnetometer
JP2012173055A (ja) 2011-02-18 2012-09-10 Seiko Epson Corp 物理量センサー、電子機器
ITTO20110806A1 (it) 2011-09-12 2013-03-13 St Microelectronics Srl Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro
EP2570770B1 (de) * 2011-09-13 2021-06-23 IMEC vzw Dreimassige gekoppelte oszillationstechnik für mechanisch robuste mikroverarbeitete gyroskope
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US9170107B2 (en) * 2011-09-16 2015-10-27 Invensense, Inc. Micromachined gyroscope including a guided mass system
US8833162B2 (en) * 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9863769B2 (en) 2011-09-16 2018-01-09 Invensense, Inc. MEMS sensor with decoupled drive system
US9714842B2 (en) * 2011-09-16 2017-07-25 Invensense, Inc. Gyroscope self test by applying rotation on coriolis sense mass
JP6338813B2 (ja) 2012-04-03 2018-06-06 セイコーエプソン株式会社 ジャイロセンサー及びそれを用いた電子機器
JP6195051B2 (ja) 2013-03-04 2017-09-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
CN104215236B (zh) * 2013-06-05 2016-12-28 中国科学院地质与地球物理研究所 一种mems反相振动陀螺仪及其制造工艺
JP6339669B2 (ja) 2013-07-08 2018-06-06 モーション・エンジン・インコーポレーテッド Ｍｅｍｓデバイスおよび製造する方法
US10273147B2 (en) 2013-07-08 2019-04-30 Motion Engine Inc. MEMS components and method of wafer-level manufacturing thereof
EP3028007A4 (de) 2013-08-02 2017-07-12 Motion Engine Inc. Mems-bewegungssensor und verfahren zur herstellung
US9404747B2 (en) 2013-10-30 2016-08-02 Stmicroelectroncs S.R.L. Microelectromechanical gyroscope with compensation of quadrature error drift
DE102013223227A1 (de) * 2013-11-14 2015-05-21 Robert Bosch Gmbh Vibrationsrobuster Drehratensensor
JP6248576B2 (ja) * 2013-11-25 2017-12-20 セイコーエプソン株式会社 機能素子、電子機器、および移動体
JP6590812B2 (ja) 2014-01-09 2019-10-16 モーション・エンジン・インコーポレーテッド 集積ｍｅｍｓシステム
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
JP2015184009A (ja) * 2014-03-20 2015-10-22 セイコーエプソン株式会社 振動素子、電子機器、および移動体
WO2015154173A1 (en) 2014-04-10 2015-10-15 Motion Engine Inc. Mems pressure sensor
EP2955480B1 (de) 2014-05-21 2023-09-06 InvenSense, Inc. Mems-sensor mit entkoppeltem antriebssystem
WO2015184531A1 (en) 2014-06-02 2015-12-10 Motion Engine Inc. Multi-mass mems motion sensor
EP2963387B1 (de) * 2014-06-30 2019-07-31 STMicroelectronics Srl Mikroelektromechanische vorrichtung mit kompensierung von fehlern auf grundlage von störkräften, wie etwa quadraturkomponenten
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
WO2016112463A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity
EP3257074A1 (de) 2015-02-11 2017-12-20 InvenSense, Inc. 3d-integration mit eutektischer al-ge-gebundener verbindung
US20180209791A1 (en) * 2015-07-07 2018-07-26 Agency For Science, Technology And Research Motion measurement devices and methods for measuring motion
ITUA20162172A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Sensore accelerometrico realizzato in tecnologia mems avente elevata accuratezza e ridotta sensibilita' nei confronti della temperatura e dell'invecchiamento
US20180231090A1 (en) * 2016-05-26 2018-08-16 Honeywell International Inc. Systems and methods for a tuned mass damper in mems resonators
US10589413B2 (en) 2016-06-20 2020-03-17 Black & Decker Inc. Power tool with anti-kickback control system
US10192850B1 (en) 2016-09-19 2019-01-29 Sitime Corporation Bonding process with inhibited oxide formation
IT201900017546A1 (it) 2019-09-30 2021-03-30 St Microelectronics Srl Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico
US20240271932A1 (en) * 2023-02-15 2024-08-15 AAC Kaitai Technologies (Wuhan) CO., LTD. Mems gyroscope and electronic product technical field

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2574209B1 (fr) * 1984-12-04 1987-01-30 Onera (Off Nat Aerospatiale) Resonateur a lame vibrante
US4656383A (en) * 1986-02-14 1987-04-07 The Singer Company-Kearfott Division Vibrating beam force transducer with single isolator spring
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
EP0664438B1 (de) * 1994-01-25 1998-10-07 The Charles Stark Draper Laboratory, Inc. Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente
US5492596A (en) * 1994-02-04 1996-02-20 The Charles Stark Draper Laboratory, Inc. Method of making a micromechanical silicon-on-glass tuning fork gyroscope
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
US5635640A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses

Also Published As

Publication number Publication date
GB2302177B (en) 1998-06-10
JPH09512106A (ja) 1997-12-02
JP4047377B2 (ja) 2008-02-13
GB2302177A (en) 1997-01-08
KR970702474A (ko) 1997-05-13
GB9620475D0 (en) 1996-11-20
US5895850A (en) 1999-04-20
DE4414237A1 (de) 1995-10-26
KR100374431B1 (ko) 2003-05-09
WO1995029383A1 (de) 1995-11-02
DE19580372B4 (de) 2004-06-24

Similar Documents

Publication Publication Date Title
DE19580372D2 (de) Mikromechanischer Schwinger eines Schwingungsgyrometers
DE69837905D1 (de) Vibratoren und Vibrationskreisel
DE69512703D1 (de) Vibrationskreisel
DK46595A (da) Vibrator
FI924341A7 (fi) Ultraäänellä toimivan kaasu/neste-virtausmittarin parannus
KR900006741A (ko) 액체무화기의 압전진동자장착구조
DE69831217D1 (de) Elektrodynamischer inertial-schwingungserreger
DE69631405D1 (de) Vibrierender Kompressor
EP0640822A3 (de) Prüfung der Unversehrtheit poröser Strukturen mittels Schallemission.
DE69830260D1 (de) Vibrationskreisel
DE60041472D1 (de) Anregungsvorrichtung eines piezoelektrischen Vibrators
DE69736731D1 (de) Herstellungsverfahren eines Quartzvibrators
DE69613737D1 (de) Vibrationsgerät
DE69833078D1 (de) Vibrationskreisel
DE69832843D1 (de) Vibrationskreisel
DE69824691D1 (de) Vibrationskreisel
NO940609D0 (no) Forbedret sveipfrekvensvibrator
DE69405812D1 (de) Einstelleinrichtung eines Vibrationskreisels
FR2789171B1 (fr) Structure monolithique de gyrometre vibrant
DE59505464D1 (de) Kompensation von querschwingungen an unwuchtvibratoren
DE69525419D1 (de) Vibrationskreisel
FR2743225B1 (fr) Resonateur piezoelectrique
DE19581726T1 (de) Horizontal vibrierende Zentrifuge
DE60021499D1 (de) Winkelgeschwindigkeitsmessverfahren und Vibrationskreisel
DE69604127D1 (de) Vibrationskreisel

Legal Events

Date Code Title Description
8141 Disposal/no request for examination
8170 Reinstatement of the former position
8364 No opposition during term of opposition
R071 Expiry of right
R071 Expiry of right