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DE112008001620A5 - Method and device for slugging overly long substrates in a vacuum coating plant - Google Patents

Method and device for slugging overly long substrates in a vacuum coating plant Download PDF

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Publication number
DE112008001620A5
DE112008001620A5 DE112008001620T DE112008001620T DE112008001620A5 DE 112008001620 A5 DE112008001620 A5 DE 112008001620A5 DE 112008001620 T DE112008001620 T DE 112008001620T DE 112008001620 T DE112008001620 T DE 112008001620T DE 112008001620 A5 DE112008001620 A5 DE 112008001620A5
Authority
DE
Germany
Prior art keywords
slugging
vacuum coating
coating plant
overly long
long substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE112008001620T
Other languages
German (de)
Other versions
DE112008001620B4 (en
Inventor
Dietmar Dr. Schulze
Hans-Christian Hecht
Jochen Krause
Michael Hofmann
Steffen Mosshammer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Von Ardenne Asset GmbH and Co KG
Original Assignee
Von Ardenne Anlagentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Von Ardenne Anlagentechnik GmbH filed Critical Von Ardenne Anlagentechnik GmbH
Publication of DE112008001620A5 publication Critical patent/DE112008001620A5/en
Application granted granted Critical
Publication of DE112008001620B4 publication Critical patent/DE112008001620B4/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE112008001620.8T 2007-07-03 2008-07-03 Method and device for sluicing long substrates in a vacuum coating system, vacuum coating system and method for their operation Active DE112008001620B4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007030909.2 2007-07-03
DE102007030909 2007-07-03
PCT/EP2008/058556 WO2009004048A1 (en) 2007-07-03 2008-07-03 Method and device for transferring over-long substrates in a vacuum coating installation

Publications (2)

Publication Number Publication Date
DE112008001620A5 true DE112008001620A5 (en) 2010-05-12
DE112008001620B4 DE112008001620B4 (en) 2021-08-26

Family

ID=39769520

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112008001620.8T Active DE112008001620B4 (en) 2007-07-03 2008-07-03 Method and device for sluicing long substrates in a vacuum coating system, vacuum coating system and method for their operation

Country Status (2)

Country Link
DE (1) DE112008001620B4 (en)
WO (1) WO2009004048A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011007619A1 (en) 2011-04-18 2012-10-18 Von Ardenne Anlagentechnik Gmbh System, useful for processing a substrate in a continuous process, comprises lock areas arranged at two opposite ends of the system, a process region arranged between the lock areas, and a transport unit
CN104136385A (en) * 2011-12-23 2014-11-05 洛尔等离子技术有限公司 Method and device for producing vacuum tubes for solar thermal installations
DE102013205709B4 (en) * 2013-03-28 2017-03-09 Von Ardenne Gmbh Locking method and vacuum substrate treatment system
DE102014102002A1 (en) 2013-08-06 2015-02-12 Von Ardenne Gmbh The substrate processing method
WO2016128581A1 (en) * 2015-02-13 2016-08-18 Bühler Alzenau Gmbh Method for operating an inline coating system and inline coating system
DE202015007404U1 (en) 2015-10-26 2015-11-11 Grenzebach Maschinenbau Gmbh Apparatus for coating overlong sheet-like substrates, in particular glass sheets, in a vacuum coating installation
DE102015013799A1 (en) * 2015-10-26 2017-04-27 Grenzebach Maschinenbau Gmbh Apparatus and method for coating overlong planar substrates, in particular glass panes, in a vacuum coating installation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19808163C1 (en) * 1998-02-27 1999-07-15 Ardenne Anlagentech Gmbh Airlock system for transfer chamber of vacuum coating installation
DE10348639B4 (en) * 2003-10-15 2009-08-27 Von Ardenne Anlagentechnik Gmbh Lock system for a vacuum system
DE102004008598B4 (en) * 2004-02-21 2006-12-28 Applied Films Gmbh & Co. Kg Method for operating an in-line coating system
ES2316892T3 (en) * 2004-03-31 2009-04-16 APPLIED MATERIALS GMBH & CO. KG CLOSURE PROVISION FOR A VACUUM TREATMENT INSTALLATION AND PROCEDURE FOR OPERATION.

Also Published As

Publication number Publication date
DE112008001620B4 (en) 2021-08-26
WO2009004048A1 (en) 2009-01-08

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R016 Response to examination communication
R082 Change of representative

Representative=s name: PATENTANWAELTE LIPPERT, STACHOW & PARTNER, DE

R081 Change of applicant/patentee

Owner name: VON ARDENNE GMBH, DE

Free format text: FORMER OWNER: VON ARDENNE ANLAGENTECHNIK GMBH, 01324 DRESDEN, DE

Effective date: 20140624

Owner name: VON ARDENNE ASSET GMBH & CO. KG, DE

Free format text: FORMER OWNER: VON ARDENNE ANLAGENTECHNIK GMBH, 01324 DRESDEN, DE

Effective date: 20140624

R082 Change of representative

Representative=s name: PATENTANWAELTE LIPPERT, STACHOW & PARTNER, DE

Effective date: 20140624

Representative=s name: LIPPERT STACHOW PATENTANWAELTE RECHTSANWAELTE , DE

Effective date: 20140624

R016 Response to examination communication
R082 Change of representative
R081 Change of applicant/patentee

Owner name: VON ARDENNE ASSET GMBH & CO. KG, DE

Free format text: FORMER OWNER: VON ARDENNE GMBH, 01324 DRESDEN, DE

R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final