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DE10344656A1 - Device and method for the detection of several substances - Google Patents

Device and method for the detection of several substances Download PDF

Info

Publication number
DE10344656A1
DE10344656A1 DE2003144656 DE10344656A DE10344656A1 DE 10344656 A1 DE10344656 A1 DE 10344656A1 DE 2003144656 DE2003144656 DE 2003144656 DE 10344656 A DE10344656 A DE 10344656A DE 10344656 A1 DE10344656 A1 DE 10344656A1
Authority
DE
Germany
Prior art keywords
resonators
chemically sensitive
piezoelectric layer
substances
sensitive coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE2003144656
Other languages
German (de)
Inventor
Reinhard Gabl
Evan Green
Wolfgang Reichl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
E&E Elektronik GmbH
Siemens Corp
Original Assignee
E&E Elektronik GmbH
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by E&E Elektronik GmbH, Siemens Corp filed Critical E&E Elektronik GmbH
Priority to DE2003144656 priority Critical patent/DE10344656A1/en
Priority to PCT/EP2004/051594 priority patent/WO2005031330A1/en
Publication of DE10344656A1 publication Critical patent/DE10344656A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G01N2291/0215—Mixtures of three or more gases, e.g. air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

Die Erfindung betrifft eine Vorrichtung (1) zur Detektion mindestens zweier Substanzen eines Fluids (9), das mindestens zwei piezoakustische Resonatoren (2) aufweist mit jeweils mindestens einer piezoelektrischen Schicht (4), mindestens einer an der piezoelektrischen Schicht angeordneten ersten Elektrode (5), mindestens einer an der piezoelektrischen Schicht angeordneten zweiten Elektrode (6) und mindestens einer chemisch sensitiven Beschichtung (10) mit mindestens einem Rezeptormaterial zur Sorption der Substanzen des Fluids, wobei bei jedem der Resonatoren die piezoelektrische Schicht, die Elektrodenschichten und die chemisch sensitive Beschichtung derart aneinander angeordnet sind, dass eine elektrische Ansteuerung der Elektroden zu einer Schwingung des Resonators mit einer Resonanzfrequenz führt und die Resonanzfrequenz abhängig ist von einer an der chemisch sensitiven Beschichtung sorbierten Menge der Substanzen. Die Vorrichtung ist dadurch gekennzeichnet, dass die Rezeptormaterialien der chemisch sensitiven Beschichtungen der Resonatoren gleich sind und die chemisch sensitiven Beschichtungen der Resonatoren zueinander unterschiedliche Schichtdicken aufweisen. Der Erfindung liegt die Erkenntnis zugrunde, dass bei geeigneter Ausgestaltung der Resonatoren die Sensitivität gegenüber einer Substanz nicht linear von der Schichtdicke der chemisch sensitiven Beschichtung abhängt. Das Fluid ist beispielsweise ein Gasgemisch. Das Gasgemisch ist beispielsweise Luft. Die ...The invention relates to a device (1) for detecting at least two substances of a fluid (9) which has at least two piezoacoustic resonators (2) each having at least one piezoelectric layer (4), at least one first electrode (5) arranged on the piezoelectric layer. , at least one second electrode (6) arranged on the piezoelectric layer and at least one chemically sensitive coating (10) having at least one receptor material for sorbing the substances of the fluid, the piezoelectric layer, the electrode layers and the chemically sensitive coating being such in each of the resonators are arranged to each other that an electrical control of the electrodes leads to a vibration of the resonator with a resonant frequency and the resonant frequency is dependent on a sorbed on the chemically sensitive coating amount of the substances. The device is characterized in that the receptor materials of the chemically sensitive coatings of the resonators are the same and the chemically sensitive coatings of the resonators have mutually different layer thicknesses. The invention is based on the finding that, with a suitable configuration of the resonators, the sensitivity to a substance does not depend linearly on the layer thickness of the chemically sensitive coating. The fluid is, for example, a gas mixture. The gas mixture is for example air. The ...

DE2003144656 2003-09-25 2003-09-25 Device and method for the detection of several substances Withdrawn DE10344656A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE2003144656 DE10344656A1 (en) 2003-09-25 2003-09-25 Device and method for the detection of several substances
PCT/EP2004/051594 WO2005031330A1 (en) 2003-09-25 2004-07-23 Device and method for detecting a number of substances with piezoacoustic resonators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003144656 DE10344656A1 (en) 2003-09-25 2003-09-25 Device and method for the detection of several substances

Publications (1)

Publication Number Publication Date
DE10344656A1 true DE10344656A1 (en) 2005-05-04

Family

ID=34384291

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003144656 Withdrawn DE10344656A1 (en) 2003-09-25 2003-09-25 Device and method for the detection of several substances

Country Status (2)

Country Link
DE (1) DE10344656A1 (en)
WO (1) WO2005031330A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109155621A (en) * 2016-06-30 2019-01-04 英特尔公司 The resonance device of the integrated chemical species sensitivity of piezoelectric package

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE444481T1 (en) * 1998-11-16 2009-10-15 California Inst Of Techn SIMULTANEOUS DETERMINATION OF EQUILIBRIUM AND KINETIC PROPERTIES
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
DE10308975B4 (en) * 2002-07-19 2007-03-08 Siemens Ag Device and method for detecting a substance

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109155621A (en) * 2016-06-30 2019-01-04 英特尔公司 The resonance device of the integrated chemical species sensitivity of piezoelectric package
CN109155621B (en) * 2016-06-30 2023-12-26 英特尔公司 Piezoelectric package integrated chemical species sensitive resonant device

Also Published As

Publication number Publication date
WO2005031330A1 (en) 2005-04-07

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Legal Events

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8139 Disposal/non-payment of the annual fee