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DE10342800A1 - Apparatus for absorbing and / or emitting radiation, method for producing such apparatus and method for analyzing fluids - Google Patents

Apparatus for absorbing and / or emitting radiation, method for producing such apparatus and method for analyzing fluids Download PDF

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Publication number
DE10342800A1
DE10342800A1 DE2003142800 DE10342800A DE10342800A1 DE 10342800 A1 DE10342800 A1 DE 10342800A1 DE 2003142800 DE2003142800 DE 2003142800 DE 10342800 A DE10342800 A DE 10342800A DE 10342800 A1 DE10342800 A1 DE 10342800A1
Authority
DE
Germany
Prior art keywords
absorption
radiation
absorbing
producing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE2003142800
Other languages
German (de)
Inventor
Joachim Nurnus
Christa Kuenzel
Armin Lambrecht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE2003142800 priority Critical patent/DE10342800A1/en
Priority to PCT/EP2004/005789 priority patent/WO2005036140A1/en
Publication of DE10342800A1 publication Critical patent/DE10342800A1/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Herstellung eines Bauteils zur Absorption und/oder Emission von Strahlung mit den Schritten des Abdünnens eines Substrats und dem Herstellen eines Absorptions- und/oder Emissionselements im Bereich der Abdünnung, wobei das Absorptions- und/oder Emissionselement (3) durch Herausarbeiten aus einem Material (4, 9) des Substrats (4, 7, 8, 9) hergestellt wird. Weiterhin betrifft die Erfindung eine Vorrichtung (1) zur Absorption und/oder Emission von Strahlung, mit einem in einem abgedünnten Bereich (2) eines Substrats (4, 7, 8, 9) angeordneten Absorptions- und/oder Emissionselement (3), wobei das Absorptions- und/oder Emissionselement (3) das gleiche Material (4, 9) wie ein Material (4, 9) des Substrats (4, 7, 8, 9) umfasst. Darüber hinaus betrifft die Erfindung ein Verfahren zur Analyse von Fluiden durch Emission von Strahlung durch ein Emissionselement, Durchtritt der Strahlung durch einen Bereich, der mit einem Fluid füllbar ist, und Absorption der Strahlung, wobei die Emission und/oder die Absorption der Strahlung mit einer obigen Vorrichtung (1) oder einer nach dem obigen Verfahren hergestellten Vorrichtung erfolgt.The invention relates to a method for producing a component for absorbing and / or emitting radiation comprising the steps of thinning a substrate and producing an absorption and / or emission element in the region of the thinning, wherein the absorption and / or emission element (3) by working out of a material (4, 9) of the substrate (4, 7, 8, 9) is produced. The invention further relates to a device (1) for absorbing and / or emitting radiation, having an absorption and / or emission element (3) arranged in a thinned region (2) of a substrate (4, 7, 8, 9) the absorption and / or emission element (3) comprises the same material (4, 9) as a material (4, 9) of the substrate (4, 7, 8, 9). Moreover, the invention relates to a method for the analysis of fluids by emission of radiation through an emission element, passage of the radiation through a region which can be filled with a fluid, and absorption of the radiation, wherein the emission and / or absorption of the radiation with a above device (1) or a device produced by the above method is carried out.

DE2003142800 2003-09-16 2003-09-16 Apparatus for absorbing and / or emitting radiation, method for producing such apparatus and method for analyzing fluids Ceased DE10342800A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE2003142800 DE10342800A1 (en) 2003-09-16 2003-09-16 Apparatus for absorbing and / or emitting radiation, method for producing such apparatus and method for analyzing fluids
PCT/EP2004/005789 WO2005036140A1 (en) 2003-09-16 2004-05-28 Device for absorbing and/or emitting radiation, method for the production of such a device, and method for analyzing fluids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003142800 DE10342800A1 (en) 2003-09-16 2003-09-16 Apparatus for absorbing and / or emitting radiation, method for producing such apparatus and method for analyzing fluids

Publications (1)

Publication Number Publication Date
DE10342800A1 true DE10342800A1 (en) 2005-04-28

Family

ID=34398759

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003142800 Ceased DE10342800A1 (en) 2003-09-16 2003-09-16 Apparatus for absorbing and / or emitting radiation, method for producing such apparatus and method for analyzing fluids

Country Status (2)

Country Link
DE (1) DE10342800A1 (en)
WO (1) WO2005036140A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1821087A2 (en) 2006-02-21 2007-08-22 Deutsches Zentrum für Luft- und Raumfahrt e.V. Temperature emitter
DE102015206745A1 (en) * 2015-04-15 2016-10-20 Infineon Technologies Dresden Gmbh Radiator and method for its production
US10091492B2 (en) 2014-10-21 2018-10-02 Infineon Technologies Ag Imaging apparatuses and a time of flight imaging method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI85426C (en) * 1990-08-03 1992-04-10 Vaisala Oy Apparatus and method for measuring the content of a gas
FI102696B (en) * 1995-02-22 1999-01-29 Instrumentarium Oy Composition of double beam source and measurement detector
US6828172B2 (en) * 2002-02-04 2004-12-07 Delphi Technologies, Inc. Process for a monolithically-integrated micromachined sensor and circuit

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1821087A2 (en) 2006-02-21 2007-08-22 Deutsches Zentrum für Luft- und Raumfahrt e.V. Temperature emitter
DE102006008409A1 (en) * 2006-02-21 2007-08-23 Deutsches Zentrum für Luft- und Raumfahrt e.V. Thermal radiators
EP1821087A3 (en) * 2006-02-21 2008-06-18 Deutsches Zentrum für Luft- und Raumfahrt e.V. Temperature emitter
US8153998B2 (en) 2006-02-21 2012-04-10 Deutsches Zentrum für Luft- und Raumfahrt e.V. Temperature radiator
DE102006008409B4 (en) * 2006-02-21 2016-12-01 Deutsches Zentrum für Luft- und Raumfahrt e.V. Thermal radiators
US10091492B2 (en) 2014-10-21 2018-10-02 Infineon Technologies Ag Imaging apparatuses and a time of flight imaging method
DE102015206745A1 (en) * 2015-04-15 2016-10-20 Infineon Technologies Dresden Gmbh Radiator and method for its production
US9887355B2 (en) 2015-04-15 2018-02-06 Infineon Technologies Desden GmbH Emitter and method for manufacturing the same
US10290805B2 (en) 2015-04-15 2019-05-14 Infineon Technologies Dresden Gmbh Emitter and method for manufacturing the same
DE102015206745B4 (en) 2015-04-15 2022-05-05 Infineon Technologies Dresden Gmbh Radiator and method for its manufacture

Also Published As

Publication number Publication date
WO2005036140A1 (en) 2005-04-21

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R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final

Effective date: 20111210