DE102023121741A1 - sensor arrangement - Google Patents

Abstract

A sensor arrangement (1) with at least two sensor elements (5, 7, 9) arranged on a carrier element (3) enables an analysis of a gas mixture. Depending on the configuration of the sensor elements (5, 7, 9), different physical properties of the gas mixture can be measured, processed and provided as data at a common measuring location.

Description

The invention relates to a sensor arrangement for determining physical or chemical situations in a respiratory gas mixture, for example in an inhalation gas or in an exhalation gas of a living being. The invention includes both sensor arrangements in which the phenomenon of paramagnetism of gases is used as a measuring effect, as well as sensor arrangements in which a degree of absorption of infrared light is used as a measuring effect, as well as sensor arrangements in which the difference in the thermal conductivity of different gases is used as a measuring effect.

It is known to measure the composition of respiratory gases optically. The absorption of light in a certain wavelength range specific to the respective gas serves as a measure of the concentration of the respective gas. In this way, in the medical field - especially during anesthesia of a living being - the concentrations of volatile anesthetic gases, carbon dioxide (CO2) and nitrous oxide (N2O) are measured in the respiratory gas mixture of ventilated patients.

In the US5739535B An infrared optical gas measuring device is described. From the US8399839B An infrared optical carbon dioxide sensor, a so-called IR carbon dioxide sensor, is known. US6571622B A combination sensor consisting of an infrared optical carbon dioxide sensor and a flow sensor is known, which can be arranged in the main stream in the respiratory gas path of a patient. From the US2004238746A , US2002036266A Infrared optical carbon dioxide sensors are known, which can be arranged in the side stream in or on the respiratory gas path of a patient. The US6954702B , US7606668B , US8080798B , US7501630B , US7684931B , US7432508B , US7183552B show gas measuring systems for detecting gas concentrations in the side stream and main stream.

The EP3421947 B1 shows a method for operating a flow sensor device with a first sensor arrangement for measuring a flow of a fluid and a first fluid property and with a second sensor arrangement for measuring a further second fluid property using thermocouples or thermopiles. The US 6,779,395 B2 shows a device for measuring the flow of a fluid with a main channel and a bypass. The US 9,952,079 B2 shows a sensor that is exposed to a fluid in the bypass channel and measures a value related to the flow rate of the fluid flowing through the bypass channel.

Paramagnetic methods are often used to determine the oxygen concentration in gases. These methods are based on the fact that oxygen molecules are paramagnetic due to their permanent magnetic dipole moment, whereas most other gases have diamagnetic properties. It is well known that the thermal conductivity of paramagnetic gases changes under the influence of magnetic fields. The reason for this behavior is apparently the fact that paramagnetic gases have a permanent magnetic moment, which is normally not visible to the outside due to the thermal molecular movement of the gas molecules. However, a sufficiently strong external magnetic field ensures that the magnetic dipole moments of the individual molecules are aligned. On the one hand, this causes a change in the susceptibility, which leads to an increase in the magnetic flux, and on the other hand, a certain molecular arrangement is established in the gas, which limits the degrees of freedom and thus the possibilities of transferring heat energy to neighboring molecules via collisions. This changes the thermal conductivity of the gas to a small extent. Paramagnetic measuring devices for determining oxygen concentrations, especially in respiratory gases, are known, for example, from US6952947 BB, US2011094293 AA, US8596109 BB, US9360441 BB, US6895802 BB, US6405578 BB, US6430987 BA, US4808921 A , US4683426 A , US3646803 A , US3584499 A , US2944418 A known.

The US6430987 BA shows a paramagnetic gas sensor for determining oxygen concentrations. Thermoelectric elements are arranged in a magnetic field. The oxygen concentration in a gas mixture can be determined by measuring the heat flow without the influence of the magnetic field and under its influence.

In current designs for gas measurement tasks for an analysis of a gas composition when anesthetizing a living being, two or three of the previously mentioned measurement tasks, i.e. flow rate measurement, oxygen concentration measurement, anesthetic gas concentration measurement, are usually combined in a serial arrangement to form a measuring system. The serial arrangement means that, for example, a measured value of a flow rate and a measured value of the oxygen concentration measurement cannot be recorded at the same time or that measurements recorded at the same time values do not indicate the same flow state of the gas mixture with regard to the course of inhalation and exhalation of the living being below the performance of anesthesia.

Based on the state of the art, the task therefore arises of designing a sensor arrangement which, based on thermocouples or thermopiles, provides an integrated measuring system which is capable of simultaneously detecting concentrations of oxygen, other gases as well as flow rates.

Preferably, the thermocouples or thermopiles can be designed to provide solutions to the problem (as?) microstructured components, in particular semiconductor structures in the form of so-called micro-electro-mechanical systems (MEMS).

The problem is solved by a measuring system with the features of patent claim 1.

The problem is also solved by a measuring system with the features of patent claim 2.

Advantageous further developments are specified in the subclaims, some of which are explained in more detail with reference to the figures.

A first sensor arrangement according to the invention is designed to determine physical or chemical properties of a gas or gas mixture. For this purpose, the sensor arrangement has at least one planar carrier element and a number of at least two sensor elements. The at least two sensor elements are arranged on surfaces of the at least one planar carrier element. The surfaces are formed by a bottom and a top of the carrier element. The at least two sensor elements can be arranged on the same surface of the at least one planar carrier element. The at least two sensor elements can be arranged on different surfaces - i.e. on the bottom and on the top of the at least one planar carrier element. The carrier element and the at least two sensor elements are arranged as an integrated arrangement in a common gas or flow space and thus form the sensor arrangement according to the invention. In the common gas or flow space, simultaneous measurement value recording of the measuring elements for the same flow state in the common gas or flow space can take place.

The carrier element is at least partially designed as a semiconductor substrate. The carrier element can be at least partially designed as a ceramic carrier element or as a film carrier element (flexible PCB). The at least two sensor elements are designed as thermocouples or as thermopiles. Thermopiles are often also referred to as thermopiles. An arrangement of two elements made of a magnetically conductive material is arranged on the carrier element. This arrangement of two elements made of magnetically conductive materials is designed to be suitable for guiding a magnetic field and can be designed as an arrangement of two pole shoes, for example as a pair of pole shoes arranged on the carrier element. The guidance of the magnetic field preferably enables the magnetic field lines and the magnetic flux to spread essentially perpendicular to the planar surface of the carrier element and in particular also perpendicular to the sensor elements designed as thermocouples or as thermopiles. Examples of magnetically conductive materials include ferrites, metals, such as iron cores, sintered pole shoes made of compounds made of epoxy resins with metal powder. The arrangement of the elements for guiding a magnetic field and at least one (of the at least one?) of the two sensor elements is designed in such a way that the magnetic field is guided essentially at right angles in relation to the surface of the planar carrier element. At least one of the at least two sensor elements designed as a thermocouple or thermopile forms a measuring module for paramagnetic gas concentration measurement with the arrangement of the two elements designed for guiding a magnetic field. Another of the at least two sensor elements designed as a thermocouple or thermopile forms a measuring module for infrared optical gas concentration measurement or a measuring module for flow or flow rate measurement.

A second sensor arrangement according to the invention is designed to determine physical or chemical properties of a gas or gas mixture. For this purpose, the sensor arrangement has at least one planar carrier element and a number of at least two sensor elements. The at least two sensor elements are arranged on a surface of the at least one planar carrier element. The carrier element and the at least two sensor elements are arranged as an integrated arrangement in a common gas or flow space and thus form the sensor arrangement according to the invention. In the common gas or flow space simultaneous measurement value acquisition of the measuring elements for the same flow state in the common gas or flow space.
The carrier element is at least partially designed as a semiconductor substrate. The carrier element can be at least partially designed as a ceramic carrier element or as a film carrier element (flexible PCB). The at least two sensor elements are designed as thermocouples or as thermopiles. Thermopiles are often also referred to as thermopiles.

At least one of the two sensor elements is sensitive to radiation in the infrared range of 3 µm - 12 µm and is intended to detect radiation quantities in the infrared range of 3 µm - 12 µm. An arrangement with a radiation source for emitting infrared radiation in the infrared range of 3 µm - 12 µm is arranged in or on the flow space or on or on the at least one carrier element. In optional embodiments of the arrangement with the radiation source, a mirror element can (optionally) be provided which directs the infrared radiation from the radiation source towards the sensor element. At least one of the at least two sensor elements forms a measuring module with the radiation source for infrared optical gas concentration measurement. Another of the at least two sensor elements designed as a thermocouple or thermopile forms a measuring module for a paramagnetic gas concentration measurement or a measuring module for a flow or flow rate measurement.

Preferred and advantageous embodiments of the first and second sensor arrangement according to the invention are given below.

In a particularly preferred embodiment, the sensor arrangement can have a planar carrier element on which three sensor elements are arranged. This particularly preferred embodiment represents a combination of the first embodiment according to the invention with the second embodiment according to the invention. This particularly preferred embodiment can therefore also be regarded as a third embodiment according to the invention. In this particularly preferred embodiment, the three sensor elements are arranged on surfaces of the at least one planar carrier element in a common gas or flow space. The carrier element is at least partially designed as a semiconductor substrate.

The three sensor elements are designed as thermocouples or thermopiles. An arrangement with a radiation source for emitting infrared radiation in the infrared range of 3 µm - 12 µm is arranged in or on the flow space or on or on the at least one carrier element. In optional embodiments of the arrangement with the radiation source, an optional mirror element can be provided that directs the infrared radiation from the radiation source towards the sensor element. An arrangement of two elements made of a magnetically conductive material is arranged on the carrier element. In this preferred embodiment, one of the two sensor elements designed as a thermocouple or thermopile forms a measuring module for paramagnetic gas concentration measurement with the arrangement of the two elements designed to guide a magnetic field. In this preferred embodiment, one of the three sensor elements is designed to be sensitive to radiation in the infrared range of 3 µm - 12 µm and is intended to detect radiation quantities in the infrared range of 3 µm - 12 µm and forms a measuring module for infrared-optical gas concentration measurement with the radiation source. In this preferred embodiment, one of the three sensor elements forms a measuring module for flow or throughput measurement.

In a further preferred embodiment of the sensor arrangement, the at least two measuring modules can form a measuring arrangement, wherein the at least two measuring modules can be arranged at least partially on surfaces of a common, planar carrier element. This embodiment offers the advantage of an integrated measuring system in which the carrier element is designed as a type of platform for the arrangement of measuring modules.

• • als ein Thermoelement oder als eine Thermosäule;
• • als ein thermoelektrisches Sensorelement;
• • als ein optisch sensitives Sensorelement;
• • als ein resistives Sensorelement;
• • als ein piezoelektrisches Sensorelement;
• • als ein katalytisches Sensorelement;
• • oder als ein piezoresistives Sensorelement

ausgebildet sein. Diese Ausführungsform bietet den Vorteil, ein multifunktionales, integriertes Messsystem zu einer Überwachung von Anästhesie oder Beatmung eines Patienten oder Lebewesens in einer mikrostrukturierten Technologie (MEMS) ausgestalten zu können. Damit können dann je nach Anwendungsfall und Messaufgaben die unterschiedlichen Sensorelemente in den Messvorgang und die Datenerfassung einbezogen werden. Mit einem solch multifunktionalen, integrierten Messsystem kann eine Vielzahl von Messwerten und Daten bereitgestellt werden, die von unterschiedlichen Anwendungen auf einem Medizintechniksystem für die Begleitung von Patienten im medizintechnischen Umfeld verwendet werden können. Zudem können diese so gewonnenen Daten mithilfe von Schnittstellen in einem Kommunikationsumfeld (Netzwerkumgebung: LAN, WLAN, etc.) verteilt werden.In a further preferred embodiment of the sensor arrangement or measuring arrangement, at least one further sensor element or measuring module can be arranged on the at least one planar carrier element. The further sensor element or measuring module can

• • as a thermocouple or as a thermopile;
• • as a thermoelectric sensor element;
• • as an optically sensitive sensor element;
• • as a resistive sensor element;
• • as a piezoelectric sensor element;
• • as a catalytic sensor element;
• • or as a piezoresistive sensor element

This embodiment offers the advantage of a multifunctional, integrated measuring system for monitoring anesthesia or ventilation of a patient or living being in a microstructured technology (MEMS). This means that the different sensor elements can be included in the measurement process and data acquisition depending on the application and measurement tasks. With such a multifunctional, integrated measurement system, a large number of measured values and data can be provided that can be used by different applications on a medical technology system for accompanying patients in the medical technology environment. In addition, the data obtained in this way can be distributed using interfaces in a communication environment (network environment: LAN, WLAN, etc.).

In a preferred embodiment of the sensor arrangement or measuring arrangement, the at least two measuring modules and the further sensor element or measuring module can be arranged on surfaces of a common, planar carrier element. This embodiment also offers the advantage of a further integrated measuring system in which the carrier element is designed as a type of platform for the arrangement of measuring modules.

In a preferred embodiment of the sensor arrangement or measuring arrangement, the common gas or flow space can form a housing element or a measuring cuvette designed to guide the flow of a gas mixture.

• • wobei mindestens eines der Sensorelemente oder eines der Messmodule in Zusammenwirkung mit der Betriebselektronik eine messtechnische Funktion eines Strömungs- oder Durchflussmengensensors ausbildet
• • oder wobei mindestens eines der Sensorelemente oder eines der Messmodule in Zusammenwirkung mit der Betriebselektronik, den Elementen zur Führung des Magnetfeldes und einer Spulenanordnung eine messtechnische Funktion eines paramagnetischen Sauerstoffsensors ausbildet
• • oder wobei mindestens eines der Sensorelemente oder eines der Messmodule in Zusammenwirkung mit der Betriebselektronik, Strahlungsquelle und mindestens einem optischen Filterelement (16) eine messtechnische Funktion eines infrarot- optischen Gassensors ausbildet.

In a further preferred embodiment, the measuring arrangement can have operating electronics which are designed for commissioning, adjusting or calibrating the measuring arrangement and/or coordinating a measuring operation of the measuring arrangement, the sensor arrangement and/or the sensor elements,

• • wherein at least one of the sensor elements or one of the measuring modules in conjunction with the operating electronics forms a metrological function of a flow or flow rate sensor
• • or wherein at least one of the sensor elements or one of the measuring modules in conjunction with the operating electronics, the elements for guiding the magnetic field and a coil arrangement forms a metrological function of a paramagnetic oxygen sensor
• • or wherein at least one of the sensor elements or one of the measuring modules in cooperation with the operating electronics, radiation source and at least one optical filter element (16) forms a metrological function of an infrared optical gas sensor.

The operating electronics preferably have a computing unit, for example in the form of a microcontroller or similar (µC, µP, DSP, FPGA, ASIC, GAL) and a data memory (RAM, ROM). The operating electronics with computing unit (µC, µP, DSP, FPGA, ASIC, GAL), data memory (RAM, ROM) are designed to carry out conversions, linearizations and conversions of the measured values of ^the measuring modules and to connect them to a medical device (anesthesia machine, ventilator, heat therapy device, physiological monitoring system (PPM)) or a data network (LAN, WLAN) using the interfaces (USB, SPI, I 2 C, 1-Wire). For example, characteristic curves or data fields (array, vector) can be stored in the data memory, which can be included by the computing unit for signal processing, signal conversion, signal conversion in the quantitative and/or qualitative determination of measured variables, such as flow rates, gas concentrations, temperatures. It is also possible to store typical and specific calibration data or information (offset, gain, drift) of the measuring modules or sensor elements in the data memory and use them in operation to enable improved accuracy or reliability of the measuring system.

Preferred particular embodiments can be formed by arranging further components, assemblies or elements in or on the carrier element or the housing element. The sensor arrangement can thus be arranged on the at least one planar carrier element.

In a particular embodiment, the at least one optical filter element can be arranged on the at least one planar carrier element.

In a particular embodiment, the at least one optical filter element can be arranged on the housing element.

In a particular embodiment, the at least one optical filter element can be formed as a part of the housing element.

In a particular embodiment, the radiation source can be arranged on the at least one planar carrier element.

In a particular embodiment, the radiation source can be arranged on the housing element.

In a particular embodiment, the radiation source can be formed as part of the housing element.

In a particular embodiment, the mirror element can be arranged on the at least one planar carrier element.

In a particular embodiment, the mirror element can be arranged on the housing element.

In a particular embodiment, the mirror element can be formed as part of the housing element.

In a particular embodiment, the coil arrangement can be formed as an integral part of the at least one planar carrier element or can be arranged on the at least one planar carrier element.

In a preferred embodiment, the coil arrangement can be arranged on the housing element.

In a preferred embodiment, the coil arrangement can be formed as a part of the housing element.

In a preferred embodiment, the housing element can have at least one gas inlet and at least one gas outlet and/or elements for flow guidance.

In a preferred embodiment, the thermocouples or thermopiles of the sensor elements can be formed as structured semiconductor elements in the form of PN-doped semiconductor elements on the semiconductor substrate of the surface of the at least one planar carrier element.

• • zu einer Druckmessung;
• • zu einer Dichtemessung;
• • zu einer Viskositätsmessung;
• • zu einer Konzentrationsmessung;
• • zu einer Wärmeleitfähigkeitsmessung;
• • Durchflussmengenmessung;
• • Strömungsmessung;
• • Strömungsgeschwindigkeitsmessung;
• • zu einer Feuchtigkeitsmessung;
• • zu einer Temperaturmessung

ausgebildet sein.
Die Temperaturmessung kann beispielsweise durch einen auf dem Trägerelement angeordneten NTC- Sensor erfolgen. Damit kann sowohl eine Messung der Temperatur des Gasgemisches in dem Strömungsraum wie auch eine Messung einer Oberflächentemperatur des Trägerelementes ermöglicht sein.In a further preferred embodiment, the measuring arrangement can enable a determination of physical or chemical properties of a gas or gas mixture. At least one of the sensor elements and/or another sensor element

• • to a pressure measurement;
• • to a density measurement;
• • to a viscosity measurement;
• • to measure concentration;
• • to a thermal conductivity measurement;
• • Flow rate measurement;
• • Flow measurement;
• • Flow velocity measurement;
• • to a humidity measurement;
• • to a temperature measurement

be trained.
The temperature measurement can be carried out, for example, by an NTC sensor arranged on the carrier element. This makes it possible to measure both the temperature of the gas mixture in the flow space and the surface temperature of the carrier element.

In a preferred embodiment, the operating electronics can be arranged at least partially with the sensor elements on the planar, common carrier element, and the planar, common carrier element can be arranged integrated in a common gas and flow space. This preferred embodiment also offers the advantage of a further integrated, in this case highly integrated, measuring system, in which the carrier element is designed as a type of platform for the arrangement of measuring modules and electronics. The operating electronics with computing unit (µC, µP, DSP, FPGA, ASIC, GAL), data storage (RAM, ROM) are designed to carry out conversions, linearizations, and conversions of the measured values of the measuring modules and to provide them to a medical device (anesthesia device, ventilator, heat therapy device, physiological monitoring system (PPM)) or a data network (LAN, WLAN) using the interfaces (bus systems such as USB, SPI, I ² C, 1-Wire). For example, characteristic curves or data fields (array, vector) can be stored in the data memory, which can be included by the computing unit for signal processing, signal conversion, signal conversion in the quantitative and/or qualitative determination of measured variables, such as flow rates, gas concentrations, temperatures. It is also possible to store typical and specific calibration data or information (offset, gain, drift) of the measuring modules or sensor elements in the data memory and use them in operation to enable improved accuracy or reliability of the measuring system. This embodiment with an "on-chip" integration of electronic components for signal processing, a computing unit (µC), data storage (RAM, ROM) and interfaces (bus systems such as USB, SPI, I ² C, 1-Wire) offers the possibility of recording measured values with measured variables on the properties of gas mixtures with flow rates, flow rates, concentrations of gas components in the gas mixture, density, viscosity, temperature and pressure level or moisture content in the gas mixture and temporal changes in the moisture content or temperature and pressure levels in the gas mixture. This also makes it possible to record physical states with the cycle of inhalation and exhalation and dosing into the gas mixture in real time during ventilation or anesthesia. in a common flow space. In addition, any necessary adjustments to the signal processing, signal filtering, signal corrections, calculations (max, min, mean), normalization or linearization can be carried out in real time for several measured variables. A data set can thus be provided which describes the physical situation in the common gas space at an identical location and at an identical time and contains it in the form of several measured variables.

• • Anordnung zu Strömungs- oder Durchflussmengenmessung, Sauerstoffstoffkonzentrationsmessung und Gaskonzentrationsmessung für einen weiteren Gasbestandteil oder einen Feuchtigkeitsanteil im Gas oder Gasgemisch;
• • Anordnung zu Strömungs- oder Durchflussmengenmessung und Sauerstoffstoffkonzentrationsmessung und Temperaturmessung;
• • Anordnung zu Strömungs- oder Durchflussmengenmessung, Sauerstoffstoffkonzentrationsmessung und Druckmessung;
• • Anordnung zu Strömungs- oder Durchflussmengenmessung, Sauerstoffstoffkonzentrationsmessung und Dichtemessung;
• • Anordnung zu Sauerstoffstoffkonzentrationsmessung, Gaskonzentrationsmessung für einen weiteren Gasbestandteil oder einen Feuchtigkeitsanteil im Gas oder Gasgemisch und Temperaturmessung;
• • Anordnung zu Sauerstoffstoffkonzentrationsmessung, Gaskonzentrationsmessung für einen weiteren Gasbestandteil oder einen Feuchtigkeitsanteil im Gas oder Gasgemisch und Druckmessung;
• • Anordnung zu Sauerstoffstoffkonzentrationsmessung, Gaskonzentrationsmessung für einen weiteren Gasbestandteil oder einen Feuchtigkeitsanteil im Gas oder Gasgemisch und Dichtemessung;
• • Anordnung zu Sauerstoffstoffkonzentrationsmessung, Druckmessung und Dichtemessung.

In a further preferred embodiment, one of the following arrangements for determining physical or chemical properties of a gas or gas mixture can be formed on the at least one planar carrier element with three sensor elements:

• • Arrangement for measuring flow or throughput, oxygen concentration and gas concentration for another gas component or a moisture content in the gas or gas mixture;
• • Arrangement for flow or flow rate measurement and oxygen concentration measurement and temperature measurement;
• • Arrangement for flow rate measurement, oxygen concentration measurement and pressure measurement;
• • Arrangement for flow or flow rate measurement, oxygen concentration measurement and density measurement;
• • Arrangement for measuring oxygen concentration, gas concentration for another gas component or a moisture content in the gas or gas mixture and temperature measurement;
• • Arrangement for measuring oxygen concentration, gas concentration for another gas component or a moisture content in the gas or gas mixture and pressure measurement;
• • Arrangement for measuring oxygen concentration, gas concentration for another gas component or a moisture content in the gas or gas mixture and density measurement;
• • Arrangement for oxygen concentration measurement, pressure measurement and density measurement.

The sensor arrangement and the measuring arrangement according to the invention thus offer a cost-effective and practical solution for the integrative joint metrological detection and monitoring of gas concentrations (oxygen, anesthetic gas) and flow rates.

• 1: Perspektivische Ansicht einer Messküvette;
• 2: Ansicht der Messküvette nach 1 in Einströmrichtung;
• 3a: Draufsicht der Messküvette nach 1;
• 3b: Draufsicht einer Variante der Messküvette nach den 1, 3a;
• 4: Erweiterung der Messküvette nach der 2;
• 5: Erweiterung der Messküvette nach der 1;
• 6a, 6b, 6c: Ansichten eines Trägerelementes.

The following description, with partial reference to the 1 , 2 , 3a , 3b 4, 5, 6a, 6b, 6c the invention is explained in more detail. The same elements in the 1 , 2 , 3a , 3b 4, 5, 6a, 6b, 6c are in the 1 , 2 , 3a , 3b , 4 , 5 , 6a , 6b , 6c designated with identical reference symbols or reference numbers. Shown are:

• 1 : Perspective view of a measuring cuvette;
• 2 : View of the measuring cuvette after 1 in the inflow direction;
• 3a : Top view of the measuring cuvette after 1 ;
• 3b : Top view of a variant of the measuring cuvette according to the 1 , 3a ;
• 4 : Extension of the measuring cuvette after the 2 ;
• 5 : Extension of the measuring cuvette after the 1 ;
• 6a , 6b , 6c : Views of a support element.

In the 1 a perspective view of a measuring cuvette 19 is shown as a housing or housing element as a common gas and flow space. Shown are the measuring cuvette 19, a mirror element 17 on a right side wall of the measuring cuvette 19, a sensor arrangement 1, a carrier element 3 with a radiation source 15, a first sensor element (O ₂ ) 5 and a second sensor element (IR) 7, as well as elements 11 for guiding a magnetic field on the carrier element 3. The mirror element 17 directs the infrared radiation 151 of the radiation source 15 to the second sensor element (IR) 7.

The 2 shows a view of the measuring cuvette after 1 in the inflow direction with a mirror element 17 on the right side wall of the measuring cuvette 19 with the carrier element 3 in the middle, the first sensor element (O ₂ ) 5, the second sensor element (IR) 7 and a third sensor element (Flow) 9, with a gas inlet 21 for the inflow 25 of gas quantities into the measuring cuvette 19 and a flow division for the distribution of the inflowing gas quantities to the sensor elements 5, 7, 9. The elements 11 for guiding a magnetic field are in the 2 shown in a vague way.

The 3a shows a top view of the measuring cuvette 19 after 1 . The 3b shows a top view of a variant of the measuring cuvette 19 according to the 1 . Shown are the 3a , 3b the measuring cuvette 19 with a mirror element 17 on the right side wall of the measuring cuvette 19 with the carrier element 3 in the middle, with representation of a flow 25 in and through the measuring cuvette 19. The elements 11 for guiding a magnetic field are in the 3a shown in outline. Walls and flow barriers are arranged in the measuring cuvette 19, whereby a first space 191 and a second space 192 are formed in the measuring cuvette 19 as a "bypass" as a "flow-calmed space". A main flow can flow into the first space 191 and its flow rate can be measured using the third sensor element (Flow) 9 in terms of direction and size. A partial flow reaches the second space 192 to the first sensor element (O ₂ ) 5 and the second sensor element (IR) 7. The first sensor element 5 is arranged and designed in cooperation with the elements 11 to guide a magnetic field for metrological detection of an oxygen concentration in the second space 192 of the measuring cuvette 19. The second sensor element (IR) 7 is arranged and designed in cooperation with the radiation source 15 for measuring the concentration of another gas, for example carbon dioxide (CO ₂ ) in the second chamber 192 of the measuring cuvette 19. The sensor elements 5, 7, 9 can be connected to the electronic components 27 ( 4 ), interfaces 26 ( 4 ), the radiation source 15 ( 1 ), mirror element 17, optical filter element (16)s 16 ( 6a) , Control Unit 28 ( 4 ), signal processing elements (OP-amps, filters) ( 4 ) form measuring modules 51, 71, 91 respectively.
In the 3a There are two sensor elements 5 (O ₂ ), 7 (IR) on one side of the carrier element 3, while in the first space on the opposite side of the carrier element 3 the sensor element 9 (Flow, Flow_1) is arranged.

In the 3b is in contrast to 3a An additional sensor element 9' (Flow_2) is arranged in the second chamber 192 of the measuring cuvette 19. This additional sensor element 9' is arranged in such a way that it enables measurement of flow situations in the second chamber (bypass). This enables, for example, a check to determine whether there is a gas exchange 25 between the measuring cuvette 19 and the outside world in the second chamber.

In alternative embodiments, the flow 25 can be divided between the first chamber 191 and the second chamber 192 by a “flow division” as a division in a defined ratio, e.g. in a ratio of 10:1. In this way, the flow rate through the first chamber 191 can also be determined indirectly for a predetermined measuring range of the flow rate by means of the additional sensor element 9' in the second chamber 192. In such a constellation, the sensor element 9 (Flow_1) in the first chamber 191 is optional and can also be omitted in alternative embodiments of the measuring cuvette 19, so that all sensor elements (5, 7, 9') can be arranged on the same surface of the carrier element 3.

The 4 shows an extension of the measuring cuvette after the 2 with sensor arrangements 5, 7, 9, interfaces 26 and/or electronic components 27 on the carrier element 3, as well as an arrangement of elements 11 for guiding the magnetic field with a coil arrangement 33 with an iron core 34. The electronic components 27 can be arranged at least partially on the carrier element 3, as well as at least partially on the measuring cuvette 19 and comprise a control unit (µC, ADµC) 28, elements 29 for signal processing (OP amps, filters) as well as interfaces (USB, SPI, I ² C, 1-Wire) 26 for possible connections 39, such as power supply connection and data connection to networks 37, equipment or external devices 35.

The 5 shows an extension of the measuring cuvette 19 after the 1 or a variant of the design according to the 4 in a simplified schematic representation with electronic components 27 on the carrier element 3, as well as an arrangement of elements 11 for guiding the magnetic field. The electronic components 27 include a control unit (µC, ADµC) 28, elements for signal processing (OP amps, filters) 29 and also interfaces (USB, SPI, I ² C, 1-Wire) 26.

The 6a , 6b , 6c show schematic views of the carrier element with an exemplary arrangement of three sensor elements 5, 7, 9. The 6a shows a sectional view of a schematic side view of a carrier element 3 in the measuring cuvette 19 with sensor elements 5, 7, 9, a radiation source 15 and elements 11 for guiding the magnetic field. Visible is an area C1 31 of a surface 13 of the carrier element 3 above the cutting line C 10 after the 6b .

The 6b shows a schematic view of the support element 3 in the drawing plane A 20 of the support element 3 after the 6a . Three sensor elements 5, 7, 9 are visible on the carrier element 3. A gas inlet 21, a gas outlet 23 with flow arrows 25, which are intended to symbolize inflow and outflow, are shown in an allusive manner.

The 6c shows a schematic view of the support element 3 in the drawing plane B 40 of the support element 3 after the 6a The carrier element 3, the radiation source 15 and the elements 11 for guiding the magnetic field are visible.

reference number list

1

sensor arrangement

3

support element

5, 7, 9

sensor elements

10

measuring arrangement

11

Elements made of magnetically conductive material

13

surface of the carrier element

15

radiation source

151

infrared radiation

16

optical filter elements (16)

17

mirror element

19

measuring cuvette, housing element, housing

191, 192

spaces in the measuring cuvette

20, 30, 40

levels A, C, B

21

gas inlet

23

gas outlet

25

flow arrows

26

interfaces (USB, SPI, I ² C, 1-Wire)

27

electronic components

28

control unit (µC, ADµC)

29

elements for signal processing (OP amps, filters)

31

area C1 of the support element

32

area C2 of the support element

33

coil arrangement

34

iron core

35, 37, 39

possibilities for connections

51, 71, 91

measuring modules

110

Arrangement with elements 11 made of magnetically conductive material or materials

QUOTES INCLUDED IN THE DESCRIPTION

This list of documents listed by the applicant was generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions.

Cited patent literature

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Claims (15)

Sensor arrangement (1) for determining physical or chemical properties of a gas or gas mixture with at least one planar carrier element (3) and a number of at least two sensor elements (5, 7, 9, 9'), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged on surfaces (13) of the at least one planar carrier element (3), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged in a common gas or flow space (19), • wherein the carrier element (3) is at least partially designed as a semiconductor substrate, • wherein the at least two sensor elements (5, 7, 9, 9') are designed as thermocouples or as thermopiles, • wherein an arrangement of elements (11) made of a magnetically conductive material designed to guide a magnetic field is arranged on the carrier element (3), • wherein the arrangement of the elements (11) for guiding a magnetic field and the at least one of the two sensor elements (5, 7, 9, 9') are designed in such a way that the magnetic field is guided essentially at right angles with respect to the surface (13) of the planar carrier element (3), • wherein at least one of the at least two sensor elements (5, 7, 9, 9') designed as a thermocouple or thermopile forms a measuring module (51) for a paramagnetic gas concentration measurement with the arrangement of the two elements (11) designed to guide a magnetic field • and wherein another of the at least two sensor elements (5, 7, 9, 9') designed as a thermocouple or thermopile: ◯ is designed as a measuring module (71) for an infrared-optical gas concentration measurement ◯ or as a measuring module (91) for a flow or flow rate measurement. Sensor arrangement (1) for determining physical or chemical properties of a gas or gas mixture with at least one planar carrier element (3) and a number of at least two sensor elements (5, 7, 9, 9'), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged on surfaces (13) of the at least one planar carrier element (3), • wherein the at least two sensor elements (5, 7, 9, 9') are arranged in a common gas or flow space (19), • wherein the carrier element (3) is at least partially designed as a semiconductor substrate, • wherein the at least two sensor elements (5, 7, 9, 9') are designed as thermocouples or as thermopiles, • wherein at least one of the two sensor elements (5, 7, 9, 9') is designed to be sensitive to radiation in the infrared range of 3 µm - 12 µm and to detect radiation quantities in the infrared range of 3 µm - 12 µm is provided, • wherein an arrangement with a radiation source (15) for emitting infrared radiation in the infrared range of 3 µm - 12 µm is arranged in or on the flow space (19) or on or on the at least one carrier element (3), • wherein at least one of the at least two sensor elements (5, 7, 9, 9') with the radiation source (15) and an optional mirror element (17) is designed (as?) a measuring module (71) for an infrared-optical gas concentration measurement and another of the at least two sensor elements (5, 7, 9, 9') designed as a thermocouple or thermopile: ◯ as a measuring module (51) for a paramagnetic gas concentration measurement ◯ or as a measuring module (91) for a flow or flow rate measurement. Sensor arrangement (1) according to claim 1 or after claim 2 with a planar carrier element (3) with an arrangement of three sensor elements (5, 7, 9, 9'), • wherein the at least three sensor elements (5, 7, 9, 9') are arranged on surfaces (13) of the at least one planar carrier element (3), • wherein the at least three sensor elements (5, 7, 9, 9') are arranged in a common gas or flow space (19), • wherein the carrier element (3) is at least partially designed as a semiconductor substrate, • wherein the at least three sensor elements (5, 7, 9, 9') are designed as thermocouples or as thermopiles, • wherein an arrangement with a radiation source (15) for emitting infrared radiation in the infrared range of 3 µm - 12 µm is arranged in or on the flow space (19) or on or on the at least one carrier element (3), • wherein an arrangement of two formed elements (11) for guiding a magnetic field made of a magnetically conductive material, • wherein the arrangement of the elements (11) for guiding a magnetic field (pole shoes) and of the at least one of the two sensor elements (5, 7, 9, 9') is designed in such a way that a substantially right-angled guidance of the magnetic field in relation to the surface (13) of the planar carrier element (3) is provided and one of the at least three sensor elements (5, 7, 9, 9') with the Arrangement of the three elements (11) designed to guide a magnetic field forms a measuring module (51) for a paramagnetic gas concentration measurement, • wherein one of the three sensor elements (5, 7, 9, 9') is designed to be sensitive to radiation in the infrared range of 3 µm - 12 µm and is provided for detecting radiation quantities in the infrared range of 3 µm - 12 µm and, with the radiation source (15) and an optional mirror element (17), forms a measuring module (71) for an infrared-optical gas concentration measurement, • wherein one of the at least three sensor elements (5, 7, 9, 9') is designed as a measuring module (91) for a flow or flow rate measurement. Sensor arrangement (1) according to one of the Claims 1 until 3 , wherein the at least two measuring modules (51, 71, 91) are arranged according to the claims 1 or 2 form a measuring arrangement (10) and wherein the at least two measuring modules (51, 71, 91) are at least partially arranged on surfaces (13) of a common, planar carrier element (3). Sensor arrangement (1) or measuring arrangement (10) according to one of the Claims 1 until 4 , wherein at least one further sensor element (5, 7, 9, 9') or measuring module (51, 71, 91) is arranged on the at least one planar carrier element (3) and is designed: • as a thermocouple or as a thermopile; • as a thermoelectric sensor element; • as an optically sensitive sensor element; • as a resistive sensor element; • as a piezoelectric sensor element; • as a catalytic sensor element • or as a piezoresistive sensor element. Measuring arrangement (10) according to one of the Claims 3 until 5 , wherein the at least two measuring modules (51, 71, 91) according to claim 1 or claim 2 and the further sensor element or measuring module (51, 71, 91) according to claim 4 are arranged on surfaces (13) of a common, planar carrier element (3). Measuring arrangement (10) with a sensor arrangement (1) according to one of the Claims 3 until 6 , wherein the common gas or flow space (19) forms a housing element or a measuring cuvette designed to guide the flow of a gas mixture. Measuring arrangement (10) with a sensor arrangement (1) according to one of the Claims 3 until 7 , wherein the measuring arrangement (10) has operating electronics (26, 27, 28, 29) which are designed for commissioning, adjusting or calibrating the measuring arrangement (10) and/or coordinating a measuring operation of the measuring arrangement (10), the sensor arrangement (1) and/or the sensor elements (5, 7, 9, 9'), • wherein at least one of the sensor elements (5, 7, 9, 9') or one of the measuring modules (51, 71, 91) in cooperation with the operating electronics (26, 27, 28, 29) forms a metrological function of a flow or flow rate sensor • or wherein at least one of the sensor elements (5, 7, 9, 9') or one of the measuring modules (51, 71, 91) in cooperation with the operating electronics (26, 27, 28, 29), the elements (11) for guiding the Magnetic field and a coil arrangement (33) forms a metrological function of a paramagnetic oxygen sensor • or wherein at least one of the sensor elements (5, 7, 9, 9') or one of the measuring modules (51, 71, 91) in cooperation with the operating electronics (26, 27, 28, 29), radiation source (15), an optional mirror element (17) and at least one optical filter element (16) forms a metrological function of an infrared-optical gas sensor. Measuring arrangement (10) according to claim 8 , wherein the at least one optical filter element (16) • is arranged on the at least one planar carrier element (3) • or on the housing element • or is formed as a part of the housing element, and wherein the radiation source (15) and/or the optional mirror element (17) • is arranged on the at least one planar carrier element (3) • or is arranged on the housing element • or is formed as a part of the housing element. Measuring arrangement (10) according to claim 8 , wherein the coil arrangement (33) • is designed as an integral part of the at least one planar carrier element (3) • or is arranged on the at least one planar carrier element (3) • or is arranged on the housing element • or is designed as a part of the housing element. Measuring arrangement (10) according to one of the Claims 3 until 8 , wherein the housing element has at least one gas inlet and at least one gas outlet and/or elements for flow guidance. Sensor arrangement (1) according to claim 1 or claim 2 , and measuring arrangement (10) according to one of the Claims 3 until 11 , wherein the thermocouples or thermopiles of the sensor elements (5, 7, 9, 9') as structured semiconductor elements in the form of PN-doped semiconductor elements on the semiconductor substrate of the surface (13) of the at least one planar carrier element (3). Measuring arrangement (10) according to one of the Claims 3 until 12 , wherein the measuring arrangement (10) enables a determination of physical or chemical properties of a gas or gas mixture, wherein at least one of the sensor elements (5, 7, 9, 9') and/or a further sensor element is designed • for a pressure measurement; • for a density measurement; • for a viscosity measurement; • for a concentration measurement; • for a thermal conductivity measurement; • for a flow rate measurement; • for a current measurement; • for a flow velocity measurement; • for a humidity measurement; • for a temperature measurement. Measuring arrangement (10) according to one of the Claims 6 until 13 , wherein the operating electronics (26, 27, 28, 29) are arranged at least partially together with the sensor elements (5, 7, 9, 9') on the planar, common carrier element (3), wherein the planar, common carrier element (3) is arranged integrated in a common gas and flow space (19). Measuring arrangement (10) according to one of the Claims 9 until 14 , wherein the operating electronics (26, 27, 28, 29) and the sensor elements (5, 7, 9, 9') or measuring modules (51, 71, 91) are arranged on the at least one planar carrier element (3) in the common gas or flow space (19), wherein one of the following arrangements for determining physical or chemical properties of a gas or gas mixture is formed on the at least one planar carrier element (3): • Arrangement for flow or throughput measurement, oxygen concentration measurement and gas concentration measurement for a further gas component or a moisture content in the gas or gas mixture; • Arrangement for flow or throughput measurement and oxygen concentration measurement and temperature measurement; • Arrangement for flow or throughput measurement, oxygen concentration measurement and pressure measurement; • Arrangement for flow or throughput measurement, oxygen concentration measurement and density measurement; • Arrangement for measuring oxygen concentration, gas concentration for another gas component or a moisture content in the gas or gas mixture and temperature measurement; • Arrangement for measuring oxygen concentration, gas concentration for another gas component or a moisture content in the gas or gas mixture and pressure measurement; • Arrangement for measuring oxygen concentration, gas concentration for another gas component or a moisture content in the gas or gas mixture and density measurement; • Arrangement for measuring oxygen concentration, pressure measurement and density measurement.

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