DE102017126126A1 - Method and device for generating a vapor by the use of control data obtained in a control mode - Google Patents

Abstract

The invention relates to a method for generating a vapor by evaporation of the solid or liquid particles of an aerosol, which are brought in at least one steam generating step by means of a carrier gas stream to a heated evaporating body (6.1), where they are vaporized by supplying heat of vaporization. In a control mode, a temperature measurement value is determined which is controlled by a control / regulating device (9) by varying heating power fed into the evaporation body (6.1) to a desired value. The chronological course of the heating power is stored in a log file. With the aid of the log data stored in the log file, control data are obtained in order to control the temperature of the evaporation body without regulation in a later process step in order to evaporate the particles of the aerosol.

Description

Field of engineering

The invention relates to a method for generating a vapor by vaporizing the solid or liquid particles of an aerosol with one or more radiators, wherein one of the radiator is an evaporation body, to which the particles are brought in at least one steam generating step by means of a carrier gas stream, where they by feeding vaporized by evaporation heat, wherein in a control mode, a first characteristic parameter of the one or more radiator is determined, which is controlled by a control / regulating device by varying in the radiator, in particular the first evaporation body fed heating power to a desired value and the time course at least one associated with the generation of the heating power control parameter is stored in a log file.

The invention also relates to a device for carrying out the method.

State of the art

Devices for generating a vapor from an aerosol are known, for example from the DE 10 2014 101 792 A1 . WO 2012/175126 A1 or DE 10 2014 109196 A1 ,

Devices of this type or methods for generating a vapor are used in the deposition of organic layers on a substrate, in particular in the manufacture of OLEDs. In an aerosol generator, a constant, but with regard to its mass flow but variable particle flow is fed into a carrier gas stream by means of a metering device. The carrier gas is an inert gas, for example nitrogen, which transports the particles in the form of an aerosol to a steam generator. The steam generator has at least one evaporation body, with which the evaporative heat is supplied to the aerosol particles in order to evaporate the aerosol particles. The vapor is transported through a vapor line to a reactor housing where it is fed to a gas inlet member which distributes the vapor into a process chamber in which the substrate to be coated is placed on top of a cooled substrate holder.

Summary of the invention

The invention has for its object to increase the reliability of a steam generator or specify an alternative operating mode for operating the evaporator.

The object is achieved by the invention specified in the claims. The subclaims represent not only advantageous developments of the invention specified in the independent claims. They also form each with individual features of independent developments of the prior art, wherein individual features of various sub-claims can be combined with each other.

The method mentioned at the outset is developed by a control mode in which the protocol data or control data obtained from the protocol data are used to feed the heating power into a radiator, in particular into the first evaporator body, without determining the characteristic parameter. If the radiator is an evaporation body, the particles of the aerosol are vaporized with the heating power. While in the control mode, a first characteristic parameter, for example a temperature of the radiator, in particular evaporation body, is determined and this is controlled by the control / regulating device by varying heating energy fed into the radiator, in particular evaporator body to a desired value, the feed of the heating power in the radiator, in particular evaporation body in the control mode without control, but using the data obtained in the control mode data. A device according to the invention can thus continue to be operated, for example in the event of failure of a sensor with which the characteristic parameter is determined, without immediate replacement of the sensor being undertaken. The device operates to a certain extent in a "blind mode" without determining the characteristic parameter, for example without a temperature measurement. Production interruptions can thus be avoided. The fiction, contemporary device may in addition to a first evaporation body additionally comprise further evaporation body, for example, a second, third and / or fourth evaporation body. It can be provided that each additional evaporation body is regulated in a control mode to a target temperature assigned to it individually. For this purpose, it may be provided that for each of the further evaporation body an individually assigned sensor, in particular temperature sensor is provided, with which, for example, the actual temperature of the further evaporation body is determined. With the control / regulating this value, in particular temperature actual value is regulated against a target value. It is provided in particular that each of these further evaporation body in a control mode in which a characteristic parameter, for example the actual temperature, by varying the heat output fed into the further evaporation body against a desired value, for example a Target temperature is regulated. In a control mode, for example, after failure of a temperature sensor, the respective further evaporation body is operated unregulated, wherein the data obtained in the control mode log data are used to feed heating power in the evaporator body. It is thus provided in particular that in certain process steps, in particular steam generating steps, in which a steam is generated by the device, all evaporation bodies are operated in control mode or at least one evaporation body is operated in a control mode. It can also be provided that all evaporation bodies are operated in the control mode, wherein the heat output is controlled using the protocol data or control data obtained from the protocol data. The desired values of the one or more characteristic parameters are preferably contained in a recipe. The recipe can be a data record which contains the essential characteristic parameters for one or more successive process steps. The process steps may be heating steps, cooling steps, tempering steps and one or more steam generating steps. The formulation preferably stores the desired time profiles of one or more characteristic parameters, wherein the characteristic parameters may be the desired partial vapor pressure of the vapor which is measured in the steam line with a vapor pressure sensor arrangement as known from the aforementioned prior art , However, the characteristic parameter can also be a desired temperature of the at least one evaporation body. It is further provided that in the recipe also values for the time course of a total pressure, the mass flow of the carrier gas and / or the delivery rate of the aerosol generator are stored. If the characteristic parameter is the temperature of an evaporation body, then the device has a temperature sensor with which the temperature of the evaporation body can be measured. For this purpose, a plurality of thermocouples or other temperature sensors may be provided, wherein it is provided in particular that the temperature of each one or more evaporation body is determined individually. In a preferred variant of the invention it is provided that in a steam generating step at least one or more evaporation body is operated in the control mode, but the last evaporation body in the flow direction is regulated to a desired temperature. The one or more evaporation bodies of the evaporator are preferably arranged one behind the other in the flow direction of the carrier gas, so that the aerosol enters and flows through a first evaporation body in the flow direction, at least parts of the aerosol particles in the first evaporation body being vaporized. But it is also possible that this evaporation body is heated to a temperature which is controlled below an evaporation temperature of the aerosol particles, so that the aerosol particles are not evaporated in the flow direction in the first evaporation body, but accumulate there. A night temperature control can be carried out in the flow direction of the first evaporation body downstream evaporation further body, wherein the temperature of the last evaporation body in the flow direction for process stability is relevant. The control data used to control the at least one evaporation body in the control mode is preferably obtained by data optimization of the log data stored in the log file. It can be an averaging. Not only the respective characteristic parameters can be used to form the control data. It is also possible to use other measured values stored in the log file in the control mode, for example the control data can be formed using in particular the use of start temperatures, end temperatures, ramp temperature ramps, carrier gas pressure, carrier gas flow and / or particle feed rate the particles may be solid or liquid particles. The radiator either controlled or controlled according to the invention can not be just an evaporator body. The radiator may also be a preheater, with which a carrier gas is preheated.

The inventive device is characterized in that the control / control device has a protocol data memory and in particular a control data memory and is programmed so that in a control mode log data are obtained, which are used in a control mode for control.

list of figures

• 1 schematisch eine erfindungsgemäße Vorrichtung zur Beschichtung eines Substrates 14 mit einer Schicht aus einem organischen Material,
• 2a den zeitlichen Verlauf der Temperatur T1, T2, T3, T4, die mit Temperatursensoren 7.1, 7.2, 7.3, 7.4 in verschiedenen Prozessschritten P1, P2, P3, P4, P5 gemessen werden,
• 2b die Heizleistungen I1, I2, I3, I4, die in den Prozessschritten P1, P2, P3, P4, P5 im Steuermodus in die Verdampfungskörper 6.1, 6.2, 6.3, 6.4 eingespeist werden und
• 3 schematisch in einer Darstellung gemäß 1 ein weiteres Ausführungsbeispiel.

An embodiment of the invention will be explained below with reference to accompanying drawings. Show it:

• 1 schematically a device according to the invention for coating a substrate 14 with a layer of an organic material,
• 2a the time course of the temperature T1 . T2 . T3 . T4 that with temperature sensors 7.1 . 7.2 . 7.3 . 7.4 in different process steps P1 . P2 . P3 . P4 . P5 be measured
• 2 B the heating power I1 . I2 . I3 . I4 that in the process steps P1 . P2 . P3 . P4 . P5 in the Control mode in the evaporator body 6.1 . 6.2 . 6.3 . 6.4 be fed and
• 3 schematically in a representation according to 1 another embodiment.

Description of the embodiments

The 1 respectively 3 roughly schematically show a device for the production of OLEDs. In a reactor housing 12 , which is sealed gas-tight to the outside and which is evacuated, there is a substrate holder which can be cooled with a cooling device, not shown 15 , The substrate holder 15 carries the substrate to be coated 14 , The side of the substrate to be coated 14 lies a gas outlet surface of a gas inlet member 13 opposite, in which a steam line 11 opens, which is heated and through which by means of a carrier gas, a vapor is promoted on the surface of the substrate 14 condensed, wherein the structuring of the on the substrate 14 deposited layer is a mask, not shown, for example, shadow mask, is provided.

With a vapor pressure sensor arrangement 10 For example, a QCM sensor may have the partial pressure of the steam within the steam line 11 be determined.

Upstream of the steam line 11 there is an evaporator 5 in the embodiment, four or three in the flow direction successively arranged evaporation body 6.1 . 6.2 . 6.3 . 6.4 having. The evaporation body 6.1 . 6.2 . 6.3 . 6.4 are spaced from each other by a free space. But you can also touch touching each other. The evaporation body 6.1 . 6.2 . 6.3 . 6.4 own evaporation surfaces. Through the evaporation body 6.1 . 6.2 . 6.3 . 6.4 a gas can flow through it. The evaporation body 6.1 . 6.2 . 6.3 . 6.4 For example, they can be formed from an electrically conductive solid-state foam, so that the solid-state foam can be heated by passing an electrical current through it. The in the 1 With 8.1 . 8.2 . 8.3 and 8.4 designated heating power feeders may thus be electrical lines with which an electric current for transmitting the heating power in the evaporation body 6.1 . 6.2 . 6.3 . 6.4 is fed.

In each of the evaporation body 6.1 . 6.2 . 6.3 . 6.4 is a the respective evaporation body 6.1 . 6.2 . 6.3 . 6.4 each individually assigned temperature sensor 7.1 . 7.2 . 7.3 . 7.4 arranged. At the temperature sensors 7.1 . 7.2 . 7.3 . 7.4 it can be a thermocouple. But it is also intended to measure the temperature of the evaporation body 6.1 . 6.2 . 6.3 . 6.4 to use optical temperature sensors.

Upstream of the evaporator 5 is one in the evaporator 5 opening aerosol line 4 through which an aerosol enters the evaporator 5 is fed. By the evaporation body 6.1 . 6.2 . 6.3 . 6.4 Transfer heat of vaporization to the particles of the aerosol, the aerosol particles are evaporated.

The aerosol is delivered with an aerosol generator 3 which is upstream of the aerosol line 4 is arranged. The particle flow rate of the aerosol generator 3 generated, can be adjusted. For this purpose, the aerosol generator 3 have a metering element. In the drawings, a screw is shown for this purpose, which can be operated at varying speeds. The metering element can also be a perforated disk operated at a varying speed.

In the aerosol generator 3 opens a carrier gas line 2 through which a carrier gas G is fed with the aerosol particles or the aerosol particle stream, which depends on the flow rate, through the aerosol line 4 to the evaporator 5 is transported. The volume flow or mass flow of the carrier gas G can be regulated. In the embodiment, this is a mass flow controller 1 intended.

To carry out the method according to the invention has a control / regulating device 9 a log data store 16 and optionally also a control data memory 17 , In addition, has the control / regulating device 9 a controller or microcomputer 18 for electronic data processing. The device according to the invention can be in one or more temporally successive process steps P1 . P2 . P3 . P4 . P5 operate. In a recipe data store 19 is a recipe stored, in particular the temperatures T1 . T2 . T3 . T4 the evaporation body 6.1 . 6.2 . 6.3 . 6.4 in the different process steps P1 . P2 . P3 . P4 . P5 contains. Additionally or alternatively, in the recipe data memory 19 but also for every process step P1 to P5 the steam partial pressure or steam mass flow to be generated must be stored.

With the reference number 6 is in the 1 and 3 denotes a preheater, which is also regulated to a set temperature. The temperature comes with a temperature sensor 7 determined. It can be a thermocouple. By an inert gas supply, not shown, an inert gas, for example nitrogen or a noble gas in a space upstream of the preheater 6 fed. The inert gas, which also forms a carrier gas, is in the preheater 6 heated to an elevated temperature.

The 2a gives an example of the temperature setpoints T1 to T4 as in each of the consecutive process steps to be performed P1 to P5 should be set. It can be seen that when changing from one process step P1 to P4 to the respective subsequent process step P2 to P5 a temperature ramp will go through as the temperature changes T1 to T4 changes.

The device according to the invention is initially operated in a control mode. In this control mode, a characteristic parameter whose setpoint is specified in the recipe is controlled to the setpoint. The characteristic parameter may be that of the vapor pressure sensor arrangement 10 determined vapor pressure act. In the embodiment, however, as a characteristic parameter, for the sake of simplicity, the respective temperature T1 to T4 the individual evaporation body 6.1 to 6.4 discussed.

In a control mode, the device is initially operated in such a way that, successively, the individual process steps P1 to P5 be carried out in which the temperatures T1 to T4 each by feeding heating power I1 . I2 . I3 . I4 through the heating power feeds 8.1 . 8.2 . 8.3 . 8.4 in the evaporation body 6.1 . 6.2 . 6.3 . 6.4 be controlled to a setpoint. This is the heating power I1 . I2 . I3 . I4 varies according to an individual control characteristic (for example PID). In the log data memory, at least the time sequences of the heating powers I1 to I4 stored. But it can also additionally the respective courses of the actual temperatures of the evaporation body 6.1 to 6.4 and further measured values, such as the partial vapor pressure, the total pressure, the aerosol delivery rate or the mass flow of the carrier gas G be stored.

After in one or more passes, in which the evaporation body 6.1 . 6.2 . 6.3 . 6.4 be operated in the rule mode and log data in the log data memory 16 have collected, at least one evaporation body 6.1 . 6.2 . 6.3 . 6.4 be operated in a later pass in a control mode. No control is performed in this control mode. The actual temperature of the evaporation body 6.1 . 6.2 . 6.3 . 6.4 is not determined. The heating power feed 8.1 to 8.4 is done here exclusively by using the in the log data memory 16 stored log data. With this type of operation of one or more of the evaporation body 6.1 . 6.2 . 6.3 . 6.4 can not be just a failure of a temperature sensor 7.1 . 7.2 . 7.3 . 7.4 be reacted. It is also possible to systematically use the device in a new mode of operation in which the temperature of at least one of the evaporation bodies 6.1 . 6.2 . 6.3 . 6.4 not regulated, but controlled.

The control of the one or more evaporation body 6.1 . 6.2 . 6.3 . 6.4 fed heating power I1 to I4 can be done using control data derived from the log data. These can be stored in the control data memory 17 be filed. The control data are preferably calculated by averaging the log data obtained in the control mode.

The 2 B shows, for example, control data for controlling the heating powers I1 to I4 , In a process step P1 the device is in a dormant state. There is no heat input. The through the electrically conductive evaporation body 6.1 . 6.2 . 6.3 . 6.4 flowing current is 0 A. In one process step P2 Only the last two evaporation body in the flow direction 6.3 and 6.4 heated by feeding a current. Due to heat conduction or heat radiation, the upstream evaporation body heats up 6.1 and 6.2 but also on. At the transition from the process step P2 to the process step P3 becomes the heating power I3 . I4 initially lowered and then increased in the form of a ramp. In the process step P4 become the upstream evaporation body 6.1 . 6.2 heated in two consecutive periods of time with different heating powers, but kept constant over their Einspeisezeit.

In a preferred variant of the invention it is provided that the device is operated in one or more passes in the control mode, wherein in each case all process steps P1 to P5 be carried out one behind the other. In the subsequent runs, the device is operated in the control mode, with either all or some evaporation bodies 6.1 . 6.2 . 6.3 . 6.4 be operated in the control mode or exclusively in the flow direction last evaporation body 6.4 is operated in the control mode.

Also the preheater 6 can be operated in control mode as well as in control mode.

The above explanations serve to explain the inventions as a whole, which in each case independently further develop the prior art, at least by the following combinations of features, wherein two, several or all of these combinations of features may also be combined, namely:

A method characterized in that in a control mode the log data stored in the log file or control data obtained from the log data are used to determine the heating power in the radiator without determining the characteristic parameter, in particular the first evaporation body 6.1 feed.

A method characterized in that the timing of the critical parameter is stored in the log file.

A method, which is characterized in that in the control mode, a second, third and / or fourth characteristic parameters of a second, third and / or fourth radiator, in particular evaporation body 6.2 . 6.3 . 6.4 is determined with the control device 9 by varying in the second, third and / or fourth radiator, in particular evaporation body 6.2 . 6.3 . 6.4 fed heating power is controlled to a desired value and the time course of at least one with the generation of the second, third and / or fourth radiator, in particular evaporation body 6.2 . 6.3 . 6.4 In the control mode, the log data and / or control data obtained from the log data are used to determine the heating power in the control mode without determining the second, third and / or fourth characteristic parameters second, third and / or fourth radiator, in particular evaporation body 6.2 . 6.3 . 6.4 feed in order to evaporate the particles of the aerosol.

A method which is characterized in that the setpoint values of the one or more characteristic parameters are contained in a formulation, in particular also the setpoint values of one or more characteristic parameters of further process steps, such as one or more heating steps, one or more cooling steps or one or more Temperierschritte or one or more further steam generating steps contains.

A method characterized in that the one or more characteristic parameters are one of a temperature sensor 7.1 . 7.2 . 7.3 . 7.4 determined actual temperature of the first, second, third and / or fourth radiator, in particular evaporation body 6.1 to 6.4 is.

A method characterized in that the characteristic parameter is one of a vapor pressure sensor arrangement 10 determined vapor pressure of the vapor is.

A method which is characterized in that in a process step in which at least the first heating body, in particular evaporation body 6.1 is operated in the control mode, at least one of the second, third and / or fourth radiator, in particular evaporation body 6.2 . 6.3 . 6.4 is operated in the control mode.

A method which is characterized in that at least the temperature of a last in the flow direction of the carrier gas radiator, in particular evaporation body 6.4 is regulated to a desired value.

A method, which is characterized in that the control data are obtained by a data optimization, in particular an averaging, from the protocol data.

A method which is characterized in that the data stored in the log file additionally comprise the time profile of a carrier gas pressure, a carrier gas flow of a particle feed rate and / or initial temperatures and / or final temperatures of a process step.

A device characterized in that the control device 9 is programmed such that in a control mode, a first characteristic parameter of the radiator is determined, the with a control / regulating device 9 by varying in the first radiator, in particular evaporation body 6.1 is fed to a desired value and the time profile of at least one associated with the generation of the heating power control parameter is stored in a log file, being used in a control mode, the log data stored in the log file or control data obtained from the log data to determine without the characteristic Parameters the heating power in the radiator, especially the first evaporator body 6.1 feed.

A device characterized in that the control device 9 a control data memory 17 has stored in the control data obtained from the log data.

All disclosed features are essential to the invention (individually, but also in combination with one another). The disclosure of the associated / attached priority documents (copy of the prior application) is hereby also incorporated in full in the disclosure of the application, also for the purpose of including features of these documents in claims of the present application. The subclaims characterize, even without the features of a claimed claim, with their features independent inventive developments of the prior art, in particular in order to make divisional applications based on these claims. The invention specified in each claim may additionally have one or more of the features described in the preceding description, in particular with reference numerals and / or given in the reference numerals. The The invention also relates to design forms in which individual features mentioned in the above description are not realized, in particular insofar as they are recognizably dispensable for the respective intended use or can be replaced by other technically equivalent means.

LIST OF REFERENCE NUMBERS

1

Mass flow controller

2

Carrier gas line

3

aerosol generator

4

aerosol line

5

Evaporator

6

preheating body

6.1

Evaporating body

6.2

Evaporating body

6.3.

Evaporating body

6.4

Evaporating body

7

temperature sensor

7.1

temperature sensor

7.2

temperature sensor

7.3

temperature sensor

7.4

temperature sensor

8th

heating power supply

8.1

heating power supply

8.2

heating power supply

8.3

heating power supply

8.4

heating power supply

9

Control / regulating device

10

Vapor pressure sensor assembly

11

steam line

12

reactor housing

13

Gaseinlasorgan

14

substratum

15

substrate holder

16

Log data storage

17

Control data storage

18

microcomputer

19

Recipe data storage

G

carrier gas

I1

heating capacity

I2

heating capacity

I3

heating capacity

I4

heating capacity

P1

process step

P2

process step

P3

process step

P4

process step

P5

process step

T1

temperature

T2

temperature

T3

temperature

T4

temperature

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• DE 102014101792 A1 [0003]
• WO 2012/175126 A1 [0003]
• DE 102014109196 A1 [0003]

Claims (13)

A method of generating a vapor by vaporizing the solid or liquid particles of an aerosol with one or more radiators, one of the radiators being an evaporating body (6.1) to which the particles are brought in at least one steam generating step by means of a carrier gas flow where they are supplied by supply of Evaporating heat to be vaporized, wherein in a control mode, a first characteristic parameter of the one or more radiator is determined, which is controlled by a control / regulating device (9) by varying in the radiator, in particular the first evaporator body (6.1) fed heating power to a desired value is stored and the time profile of at least one associated with the generation of the heating power control parameter in a log file, wherein in a control mode, the log data stored in the log file or control data obtained from the log data are used to Ermittl the characteristic parameter to feed the heating power in the radiator, in particular the first evaporation body (6.1). Method according to Claim 1 , characterized in that the time course of the critical parameter is stored in the log file. Method according to one of the preceding claims, characterized in that in the control mode, a second, third and / or fourth characteristic parameter of a second, third and / or fourth radiator, in particular evaporation body (6.2, 6.3, 6.4) is determined, which with the control Control device (9) by varying in the second, third and / or fourth radiator, in particular evaporation body (6.2, 6.3, 6.4) fed heating power is controlled to a desired value and the time course of at least one with the generation of the second, third and / fourth heating element, in particular evaporation body (6.2, 6.3, 6.4) fed heating power associated second, third and / or fourth control parameters is stored in the log file, and in the control mode, the log data and / or control data obtained from the log data are used to determine without the second, third and / or fourth characteristic parameters d The heating power in the second, third and / or fourth radiator, in particular evaporating body (6.2, 6.3, 6.4) feed to evaporate the particles of the aerosol. Method according to one of the preceding claims, characterized in that the setpoint values of the one or more characteristic parameters are contained in a formulation, in particular the setpoint values of one or more characteristic parameters of further process steps, such as one or more heating steps, one or more cooling steps or or more tempering steps or one or more further steam generating steps. Method according to one of the preceding claims, characterized in that the one or more characteristic parameters determined by a temperature sensor (7.1, 7.2, 7.3, 7.4) actual temperature of the first, second, third and / or fourth radiator, in particular evaporation body (6.1 to 6.4). Method according to one of the preceding claims, characterized in that the characteristic parameter is a vapor pressure of the vapor determined by a vapor pressure sensor arrangement (10). Method according to one of the preceding claims, characterized in that in a process step in which at least the first radiator, in particular evaporation body (6.1) is operated in the control mode, at least one of the second, third and / or fourth radiator, in particular evaporation body (6.2, 6.3 , 6.4) is operated in control mode. Method according to Claim 7 , characterized in that at least the temperature of a last radiator in the flow direction of the carrier gas, in particular evaporation body (6.4) is regulated to a desired value. Method according to one of the preceding claims, characterized in that the control data are obtained by a data optimization, in particular an averaging, from the protocol data. Method according to one of the preceding claims, characterized in that the data stored in the log file additionally comprise the time profile of a carrier gas pressure, a carrier gas flow of a particle feed rate and / or initial temperatures and / or final temperatures of a process step. Device for carrying out the method according to one of the preceding claims, having a carrier gas line (2) opening into an aerosol generator (3) for feeding a volume- and / or mass-controlled carrier gas, one connected to an aerosol line (4) with the aerosol generator (3), at least one radiator, in particular evaporation body (6.1, 6.2, 6.3, 6.4) having evaporator (5) and a control / regulating device (9) having a log data memory (16), characterized in that the Control / regulating device (9) is programmed such that in a control mode, a first characteristic parameter of the radiator is determined, with a control / regulating device (9) by varying in the first radiator, in particular evaporation body (6.1) fed heating power a setpoint is controlled and the time course of at least one associated with the generation of heating power control parameter is stored in a log file, being used in a control mode, the log data stored in the log file or control data obtained from the log data to determine the heater power without determining the characteristic parameter into the radiator, in particular the first evaporation body (6.1) feed. Device after Claim 11 , characterized in that the control / regulating device (9) has a control data memory (17) are stored in the control data obtained from the protocol data. Apparatus or method characterized by one or more of the characterizing features of any one of the preceding claims.

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