DE102016111224A1 - Layer structure and method for producing this - Google Patents

Abstract

According to various embodiments, a layered structure (100a, 100b, 400a) may include: a workpiece (102) having a surface area (102o) comprising or formed from a polymer; a layer over the surface region (102o), wherein the layer comprises or is formed of a metal; a primer layer (104) disposed between and in physical contact with the surface region (102o) and the layer, wherein the primer layer (104) comprises or is formed from carbon in a carbon modification.

Description

The invention relates to a layer structure and a method for producing these.

In general, a workpiece (e.g., a substrate) may be coated to functionalize it, i. to change its electrical, chemical or mechanical properties. For example, the workpiece can provide a mechanically stable and / or economically favorable framework, which is functionalized by means of a coating. For producing gas permeable, e.g. perforated or woven components, for example, the mechanical properties of the workpiece can be combined with the functional of the layer so as to provide high-performance components cost.

To reduce costs, conventionally, plastic substrates are coated with an electrically conductive material to make them electrically conductive. Conventionally, electroplating, chemical vapor deposition or cathode sputtering (so-called sputtering) is used for the coating. Metal-coated plastic substrates can be used in a variety of applications, for example as electrodes in energy storage devices, as a gas diffusion layer (GDL) in fuel cells, in touch-sensitive displays or in textiles.

However, the chemical differences of both material systems, namely plastic and metal coating, affect their adhesion to each other, so that it often comes to peeling, delamination, or cracking. This affects the lifetime and reliability of the functionalized material.

According to various embodiments, a layer structure (also referred to as a functionalized material) and a method for the production thereof are provided, which enables improved adhesion (adhesion) of a functionalizing layer (functional layer, for example a metallic layer). Illustratively, a carbon primer for a metallic functional layer is used on a polymer-based (e.g., organic) workpiece that has greater adhesion to the workpiece and / or metallic functional layer than the metallic functional layer on the workpiece.

According to various embodiments, a layered structure may include: a workpiece having a surface area that includes or is formed from a polymer; a layer (also referred to as a second layer) over the surface region, wherein the layer comprises or is formed from a metal; an adhesion promoting layer (also referred to as a first layer) disposed between and in physical contact with the surface region and the layer, wherein the adhesion promoting layer comprises or is formed from carbon in a carbon modification.

According to various embodiments, the surface region may include or be formed from a polymer.

According to various embodiments, the polymer may comprise or be formed from an organic polymer, e.g. a hydrocarbon. An organic polymer may denote a polymer which has carbon atoms in the main chain of the polymer or whose main chain is formed of a plurality of carbon atoms.

According to various embodiments, the metal may comprise or be formed from at least one of: aluminum (Al), chromium (Cr), copper (Cu), titanium (Ti), nickel (Ni), zirconium (Zr), niobium (Nb) , Molybdenum (Mo), tantalum (Ta), gold (Au), silver (Ag), platinum (Pt), tungsten (W).

According to various embodiments, the layer may be patterned such that at least a portion of the adhesion promoting layer and / or the surface area is exposed.

According to various embodiments, the workpiece may comprise at least one filament which has or is formed from the surface area.

According to various embodiments, the workpiece may comprise at least one sheet-like support (e.g., a foil) having or being formed from the surface area.

According to various embodiments, the carbon modification may or may not be hydrogenated.

According to various embodiments, the layer structure may further comprise an additional layer (also referred to as third layer) over the layer (also referred to as second layer or wear layer), wherein the additional layer comprises or is formed from a metal, a semi-metal or an active material.

According to various embodiments, a capacitive area sensor may include or be formed from a layered structure according to one or more embodiments.

According to various embodiments, an energy store may include a layered structure according to one or more embodiments.

According to various embodiments, a gas diffusion layer may include or be formed from a layer structure according to one or more embodiments.

According to various embodiments, a textile may have a layered structure according to one or more embodiments.

According to various embodiments, a packaging material (e.g., a packaging material such as a packaging film, a container, or an encapsulant) may have a layered structure in accordance with one or more embodiments. The workpiece may, for example, comprise a plastic film coated with the first and second layers. For example, a partially demetallized film, a freshness-keeping container and / or a composite film may each have or be formed from a layer structure according to one or more embodiments.

According to various embodiments, a method of processing a surface area comprising a polymer may include: forming an adhesion-promoting layer in physical contact with the surface area, wherein the adhesion-promoting layer comprises carbon in a carbon modification; and forming a layer in physical contact with the primer layer, the layer comprising a metal.

According to various embodiments, the method may further comprise activating the surface area (e.g., the surface of the polymer) by means of a plasma and / or by means of radiation prior to forming the primer layer.

According to various embodiments, the formation of the adhesion-promoting layer (also referred to as the first layer) and / or of the layer (second layer) may take place using a gaseous coating material.

According to various embodiments, the method may further comprise: patterning the layer such that at least a portion of the adhesion promoting layer and / or the surface area is exposed.

According to various embodiments, the method may further comprise: patterning the adhesion promoting layer such that at least a portion of the surface area is exposed.

According to various embodiments, the method may further comprise: forming an additional layer over the layer (e.g., in physical contact therewith), wherein the additional layer comprises a metal, a semi-metal and / or an active material.

According to various embodiments, a method of processing a workpiece having a surface region comprising a polymer may include: transporting the workpiece in a first vacuum region in which a first gaseous coating material comprising carbon (i.e., the first gaseous coating material comprises carbon) is disposed; and transporting the workpiece from the first vacuum region into a second vacuum region in which a second gaseous coating material comprising a metal (i.e., the second gaseous coating material comprises a metal) is disposed.

According to various embodiments, the workpiece or at least its surface area may include or be formed from a polymer (also referred to as polymer-based workpiece or polymer-based surface area).

Clearly, a polymer-based workpiece or at least its polymer-based surface area (eg one or more filaments, eg as mesh or fabric), which is intrinsically non-electrically conductive, may be coated with the layer (also referred to as second layer, functional layer or functional layer) or which increases its electrical conductivity and has a high mechanical adhesion to the workpiece by means of an adhesion-promoting layer. Optionally, an additional layer can be applied to the second layer, e.g. a chemically stable protective layer which increases a lifetime of the second layer under a corrosive environment.

The workpiece may have exactly one filament (eg a textile filament) or several filaments, eg in the form of meshes (fine meshes, meshes), eg a plastic net, plastic mesh, metal net and / or metal mesh ("plastic meshes" or "metal meshes", also referred to as "wire nets"). For example, the plurality of filaments, for example a plurality of wires, a plurality of threads, and / or a plurality of fibers or the like, may be connected to one another, for example by material bonding and / or form-locking. The or each filament may, for example, comprise or be formed from a stitch, whereby several stitches may intermesh, eg in the form of a knitted fabric, a braid, a fabric or a net. The mesh, or the multiple filaments may be regularly arranged and / or aligned, ie as technological meshes (eg a machine-made filament structure, eg woven fabric and / or knitted fabric). Alternatively, the plurality of filaments may have or be formed of an irregular filament structure, ie, the filaments may have an irregular arrangement and orientation, eg, in the form of a felt or nonwoven fabric.

According to various embodiments, a gaseous coating material (e.g., comprising a metal or carbon) may or may not be provided by a source of coating material. The coating material source may, for example, be designed to thermally evaporate the coating material, e.g. by means of a heater or an electron beam. Alternatively or additionally, the coating material source may be arranged to atomize the coating material, e.g. by means of a plasma source (also referred to as sputtering).

According to various embodiments, the workpiece may be coated on both sides, e.g. from exactly one side or from two opposite sides.

According to various embodiments, the first layer may include or be formed from the first coating material.

According to various embodiments, the first layer may include or be formed from carbon in at least one of the following carbon configurations (also referred to as carbon modification): graphite; amorphous carbon (aC); tetrahedral carbon (ta-C); diamond-like carbon (DLC); graphite like carbon (GLC); Diamond; amorphous tetrahedral carbon; and / or nanocrystalline carbon (NC carbon), eg nanocrystalline graphite (NC graphite). Optionally, hydrogen may be incorporated into the carbon configuration (ie, a hydrogen-added carbon configuration, also referred to as a hydrogenated carbon configuration). Depending on the carbon configurations and hydrogen content, the carbon can have different sp ² hybridization components or sp ³ hybridization components. For example, the areas of the layer of graphite (with a proportion of sp ² hybridized carbon of more than 90 at.%), Nanocrystalline graphite (with a grain size of graphite of 1 nm (nanometers) up to 100 nm), so-called amorphous carbon (with a proportion of sp ² hybridized carbon in a range of about 70 at.% to about 90 at.%) or tetrahedral carbon (having a fraction of sp ³ hybridized carbon of more than 40 at.%) or be formed therefrom.

According to various embodiments, the first layer may have a hydrogen content (in atomic percent - at.%) In a range of about 0.01 at.% To about 10 at.%. According to various embodiments, the first layer may have a carbon content (in atomic percent - at.%) In a range from about 90 at.% To about 100 at.%, E.g. more than about 95 at.%, e.g. more than about 97 at.%. According to various embodiments, hydrogen and carbon together may represent greater than about 95 at.% Of the first layer, based on the atomic fraction (atomic percent), e.g. more than about 97 at.%, e.g. about 100 at.%.

The second layer may include or be formed from the second coating material. The second coating material may include or be formed from an electrically conductive coating material, e.g. the metal in a metallic alloy. By way of example, the second layer may include or be formed from an electrically conductive current collector layer.

Alternatively or additionally, the metal of the second layer may be present in a nitride or carbide. In other words, the second layer may include or may be formed from a metal nitride (such as TiN, CrN) and / or a metal carbide (such as TiC, CrC). More generally, in addition to the metal, a nonmetal may or may not be incorporated into the second layer. For example, the second gaseous coating material may chemically react, e.g. with a process atmosphere comprising carbon and / or nitrogen.

According to various embodiments, the second layer (e.g., a metal layer) may have a metal content (in atomic percent - at.%) Ranging from about 80 at.% To about 100 at.%, E.g. more than about 90 at.%, e.g. more than about 95 at.%.

According to various embodiments, one (eg the first and / or the second) coating material (or the first layer and / or the second layer) may be electrically conductive. In other words, this may have a specific electrical conductivity of greater than about 10 ⁶ S / m (Siemens per meter), eg, greater than about 2 x 10 ⁶ S / m, eg, greater than about 5 x 10 ⁶ S / m, eg greater than about 10 ⁷ S / m, eg greater than about 2 x 10 ⁷ S / m, eg greater than about 5 x 10 ⁷ S / m, eg in a range from about 10 ⁷ S / m to about 10 x 10 ⁷ S / m. The electrical conductivity of the second coating material (or the second layer) may be greater than the electrical Conductivity of the first coating material (or the first layer) and / or both may have a greater electrical conductivity than the workpiece. The workpiece may be electrically insulating (ie having an electrical conductivity of less than about 10 ^-6 S / m).

According to various embodiments, a method may further include: forming a gas diffusion layer of a fuel cell using the layer stack, i. using the workpiece, the first layer and the second layer. For example, the gas diffusion layer may be formed from the layer stack (e.g., by functionalization and / or use in a fuel cell). The layer stack can illustratively form a gas-permeable surface element (for example a mesh), which can be installed in a fuel cell and takes over the function of the gas diffusion layer there.

According to various embodiments, the first layer and the second layer may differ in at least one layer property, e.g. in at least one of the following layer properties: their density, their material structure, their porosity (if present), their mechanical hardness, their layer thickness, their average pore size (if any), their average density of pores (if any), their electrical conductivity; their gas permeability; their permittivity, their chemical composition or their chemical reactivity; their carbon content.

As used herein, a metal (also referred to as a metallic material) may comprise (or be formed of) at least one metallic element (i.e., one or more metallic elements), e.g. at least one element from the following group of elements: copper (Cu), iron (Fe), titanium (Ti), nickel (Ni), chromium (Cr), platinum (Pt), gold (Au), magnesium (Mg), Aluminum (Al), zirconium (Zr), niobium (Nb), tantalum (Ta), molybdenum (Mo), tungsten (W), vanadium (V), barium (Ba), indium (In), calcium (Ca), Hafnium (Hf), samarium (Sm), silver (Ag), and / or lithium (Li). Optionally, a metal may include or be formed from a metallic compound (e.g., an intermetallic compound or an alloy), e.g. a compound of at least two metallic elements (e.g., the group of elements), e.g. a connection like bronze or brass. Alternatively or additionally, a metal may comprise a compound of at least one metallic element (e.g., of the group of elements) and at least one non-metallic element (e.g., carbon), e.g. a connection like steel.

According to various embodiments, a metal may have a thermal conductivity greater than 10 W / (m · K) (watts per Kelvin and meters), e.g. greater than 50 W / (m · K).

According to various embodiments, the polymer of the workpiece may include or be formed from a thermoset, a thermoplastic, and / or an elastomer.

According to various embodiments, the polymer of the workpiece may include or be formed from a homopolymer. A homopolymer may refer to a polymer composed of several monomers of exactly one monomer type. Alternatively or additionally, the polymer of the workpiece may comprise or be formed from a heteropolymer (copolymer). A heteropolymer may denote a polymer composed of several monomers of different monomer types.

According to various embodiments, the polymer may comprise or be formed from a biopolymer. A biopolymer may refer to a polymer which is synthesized in the cell of an animal (e.g., a plant or an animal) (e.g., cotton, silk, wool, etc.). Alternatively or additionally, the polymer may comprise or be formed from a synthetic polymer. A synthetic polymer may denote a polymer produced by an artificial polymer synthesis (e.g., a polyreaction) industrially or on a laboratory scale.

According to various embodiments, the surface area may comprise or be formed from a mixture of different homopolymers and / or mutually different heteropolymers (also referred to as polymer mixture).

According to various embodiments, the polymer may include or be formed from an inorganic polymer. An inorganic polymer may refer to a polymer which (unlike the organic polymers) has no carbon atoms in the backbone of the polymer (i.e., is free of carbon in the backbone). The inorganic polymers include, for example, polysiloxanes, polyphosphazenes or polysilazanes. For example, the polymer, e.g. its main chain, comprising or be formed from silicon.

According to various embodiments, the polymer may comprise carbon (e.g., in the case of an organic polymer).

According to various embodiments, the synthetic polymer may be polyvinyl chloride (PVC), polystyrene (PS), polyester and / or Polycarbonate (PC), polyethylene terephthalate (PET), polyethersulfone (PES), polytetrafluoroethylene (PTFE), cyclo-olefin copolymer (COC), cyclo-olefin polymer (COC, trade name: ZEONOR), electroconductive polymer and / or polyethylene naphthalate (PEN ) or be formed therefrom.

According to various embodiments, the workpiece may comprise or be formed from one or more filaments of a textile (i.e., textile filaments, e.g., textile threads or textile fibers). One or more filaments of the workpiece may include or be formed from an organic biopolymer, e.g. Wool, linen, flax, hemp, camel hair, silk, viscose and / or cotton. Alternatively or additionally, one or more filaments of the workpiece may comprise or be formed from a synthetic polymer, e.g. Elastane, polyester, polyamide, polyimide, aramid, polyacrylonitrile, polytetrafluoroethylene, polyethylene, polyethylene terephthalate (PET), polyurethane, or the like. Alternatively or additionally, one or more filaments of the workpiece may comprise or be formed from a metal, e.g. Silver and / or copper, which are incorporated into the textile.

For example, the workpiece may comprise or be formed from a textile fabric and / or a textile knit, e.g. Material. For example, e.g. one or more electrically insulating textile filaments (e.g., polymer fibers, animal and / or vegetable fibers) may or may not be coated by means of an electrically conductive coating material. The one or more coated textile filaments may e.g. are used in a functional textile (i.e., textiles that provide a function such as antibacterial, warming, energy-producing, etc.).

According to various embodiments, a coated textile filament may be incorporated (incorporated) into a textile after coating, e.g. by weaving or knitting. The coated textile filament may then provide an electrically conductive connection between two regions of the fabric, e.g. a communication connection and / or a power supply connection, e.g. for smart textiles, energy-producing textiles, sensory textiles, warming / heating textiles, etc. alternatively or additionally, the coated textile filament may exert an antibacterial effect by e.g. Metal ions in the surrounding textile gives. This may be used, for example, for high performance textiles or smart textiles (also referred to as smart textiles), e.g. Sports textiles, and / or for bandages. Optionally, a metal-coated filament (i.e., coated by the second layer) may or may not be coated with a protective layer which may or may be incorporated into a textile after coating. The protective layer coated textile filament may be resistant to corrosive environments such as e.g. Sweat in sports textiles or heat in protective textiles, be more resistant.

According to various embodiments, a finished textile can be coated. The coated textile may then be e.g. develop an antibacterial effect and / or provide an electrically conductive connection between two regions of the textile, e.g. a communication connection and / or a power supply connection, e.g. for smart textiles, energy producing textiles, sensory textiles, warming / heating textiles, etc.

According to various embodiments, the primer layer may include or be formed from carbon which may be e.g. is arranged to enter into a chemical (e.g., covalent) compound with a polymer of the workpiece and / or with a metal of the second layer.

According to various embodiments, the workpiece may be gas permeable (e.g., a perforated or filamented workpiece). Alternatively or additionally, the workpiece may be porous or penetrated by openings. For example, the workpiece may include or be formed from a (e.g., permeable) membrane.

According to various embodiments, the method may further include: forming a capacitive area sensor using the workpiece.

According to various embodiments, the method may further comprise: forming an energy storage using the workpiece.

According to various embodiments, the method may further include: forming a gas diffusion layer of a fuel cell using the workpiece.

According to various embodiments, the workpiece for forming the first layer and / or the second layer may be arranged and / or transported in a vacuum chamber. For example, a pressure (process pressure) in which coating (forming the first layer and / or forming the second layer) is in a range of about 1 × 10 ^-5 millibar (mbar) to about 8 × 10 ^-4 Be set and / or regulated. By way of example, the process pressure can be set and / or regulated by means of a regulated and / or regulated gas inlet (eg with constant pumping power).

According to various embodiments, the formation of the first layer and / or the second layer may be effected by means of thermal evaporation. By means of the thermal evaporation, the corresponding gaseous coating material can be or are provided.

According to various embodiments, the first layer may have a smaller transparency than the workpiece (e.g., its surface area). Alternatively or additionally, the second layer may have a smaller transparency than the workpiece (e.g., its surface area) and / or as the first layer.

The transparency can be understood as a measure which describes what portion of the incident light penetrates a layer, an area and / or a workpiece. The transparency may be influenced by the material of which the layer, region, and / or the workpiece is formed, and / or by the way the light must travel through the region, the layer, and / or the workpiece , The greater the thickness (e.g., thickness) of the region, the layer, and / or the workpiece, the less light that can penetrate along the thickness. The light can be understood as the visible light, e.g. having a wavelength in a range of about 380 nm to about 780 nm. The transparency may be applied to the entirety of the incident light, e.g. averaged over the wavelengths of light. Alternatively or additionally, the transparency may refer to a particular wavelength in the range of about 380 nm to about 780 nm, e.g. to light having a wavelength of about 650 nm (red), a wavelength of about 520 nm (green), and / or a wavelength of about 470 nm (blue).

According to various embodiments, the workpiece may comprise or be formed from a solid component, e.g. a housing, a tool, a fitting, a plate, a block, a container, etc. For example, the workpiece may include an electrical circuit and / or a semiconductor chip (e.g., integrated therein).

Alternatively, the workpiece may comprise or be formed from a sheet-like support (e.g., a film and / or tape), e.g. a polymer film.

According to various embodiments, a method may include: transporting a workpiece through a first vacuum region in which a first gaseous coating material having carbon is disposed; Transporting the workpiece from the first vacuum region in a second vacuum region in which a second gaseous coating material is arranged, which comprises a metal.

According to various embodiments, a method may include: transporting a workpiece from a first vacuum region to a second vacuum region; Providing a first gaseous coating material comprising carbon in the first vacuum region; Providing a second gaseous coating material comprising a metal in the second vacuum region.

According to various embodiments, the forming of the layered structure (i.e., the method of processing the workpiece) may be carried out in a coating arrangement comprising: a first vacuum region and a second vacuum region; a transit system for transporting a workpiece from the first vacuum region to the second vacuum region; a first coating material source disposed in the first vacuum region and having carbon; a second coating material source disposed in the second vacuum region and comprising a metal.

Optionally, the primer layer may have a gradient in its chemical composition, e.g. a gradient having a decreasing proportion of carbon in the direction of the wear layer (also referred to as a functional layer) and / or a gradient having an increasing proportion of metal in the direction of the wear layer. For example, the adhesion-promoting layer can have a larger proportion of metal near the wear layer than near the surface area. Alternatively or additionally, the adhesion-promoting layer can have a smaller proportion of carbon near the wear layer than near the surface area.

Embodiments of the invention are illustrated in the figures and are explained in more detail below.

Show it

1A and 1B each a layer structure according to various embodiments in a schematic side view or cross-sectional view;

2 a layer structure according to various embodiments in a schematic plan view or cross-sectional view;

3A and 3B each a layer structure according to various embodiments in a schematic side view or cross-sectional view;

4A and 4B each a layer structure according to various embodiments in a schematic side view or cross-sectional view;

5A and 5B in each case an energy store according to various embodiments in a schematic side view or cross-sectional view;

6A and 6B each a fuel cell according to various embodiments in a schematic side view or cross-sectional view;

7A a textile according to various embodiments in a schematic plan view;

7B a capacitive area sensor according to various embodiments in a schematic side view or cross-sectional view;

8A and 8B in each case a coating arrangement according to various embodiments in a schematic side view or cross-sectional view;

9 and 10 each a method according to various embodiments in a schematic flowchart;

11A . 11B and 11C each a layer structure according to various embodiments in a schematic plan view;

12 a schematic diagram; and

13A . 13B and 13C each a packaging according to various embodiments in a schematic side view.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. is used with reference to the orientation of the described figure (s). Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and is in no way limiting. It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described herein may be combined with each other unless specifically stated otherwise. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

As used herein, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connection, direct or indirect connection, and direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.

In general, indium tin oxide (ITO for short) can be used as the transparent conductive oxide, e.g. as a functional layer for the realization of touch-sensitive input devices, such as displays (for example, a touch panel in the display industry). For example, a PET film (e.g., having a thickness in a range of about 20 μm (microns) to about 125 μm) can be ITO coated.

The coating with ITO, however, can be very costly, which is why, especially for larger displays, a cheaper replacement is sought. According to various embodiments, a metallic layer is deposited on a light, transparent, polymer-based (e.g., organic) workpiece, such as e.g. a film provided. For example, a so-called metal mesh may be formed over the workpiece (e.g., for use in the display industry), e.g. by depositing or, in a previous step, depositing an electrically conductive wear layer (e.g., having a layer thickness in the range of about 200 nm to about 500 nm), e.g. having copper or formed therefrom. After applying the electrically conductive second layer, multiple areas of the copper may be patterned printed (more generally, a mask may be formed thereon) and then etched. The remaining areas of the wear layer may include crossed metal sheets (lands), e.g. are visually barely visible and therefore applicable in a touch-sensitive input device (e.g., touch panel). The adhesive strength of these copper tracks on a polymer (such as PET or COP) with thicknesses between 100 .mu.m to 188 .mu.m is a major challenge, because often detach areas again. Delaminated webs in turn lead to a strong impairment of the touch-sensitive function, e.g. in a touch panel.

According to various embodiments, the adhesion of the metal traces to the polymer-based workpiece may be enhanced by means of the primer layer.

According to various embodiments, after an optional activation of the surface of the polymer (e.g., by ion bombardment), a thin layer of carbon may be deposited or may be deposited, e.g. by physical vapor deposition (PVD), e.g. Electron beam evaporation and / or sputtering. According to various embodiments, the primer layer may have a thickness (layer thickness) in a range from about 5 nm to about 100 nm, e.g. The carbon layer may be transparent (i.e., more than 95% of the incident light) depending on its thickness (e.g., having a thickness of less than about 50 nm) and carbon coordination (i.e., upon the present modification of the carbon).

According to various embodiments, chemical activation (e.g., an adsorbent) can be understood to increase its reactivity. The chemical activation of a polymer may include increasing the number of open chemical bonds of a polymer, e.g. by breaking chemical bonds of the polymer, e.g. by shortening, splitting and / or splitting off some of the polymer molecules, e.g. Hydrogen or functional groups such as alkyl groups (such as a methyl group) or hydroxyl groups. By chemically activating the polymer, chemisorption of the carbon of the primer layer on the polymer can be effected or at least improved. Chemisorption can be understood as a form of adsorption in which, unlike pure physisorption, the adsorbate (e.g., the carbon on the polymer) is bound to the adsorbent (i.e., the workpiece) by strong chemical bonds (e.g., covalent bonds).

According to various embodiments, a chemical affinity (binding affinity) of the polymer of the workpiece to the primer layer may be greater than to the wear layer. The affinity can be understood as the driving force of a chemical reaction, namely the tendency of ions, atoms or groups of atoms to undergo chemical (e.g., covalent) bonding (reaction affinity).

According to various embodiments, the wear layer may have a thickness (layer thickness) in a range of about 100 nm to about 1 μm, e.g. For example, the wear layer may include or be formed from a copper layer, e.g. having a thickness in a range of about 800 nm to about 1 μm.

For example, the wear layer may include or be formed from a Cr layer (e.g., having a layer thickness of about 500 nm). The Cr layer may be attached to the polymer by means of an adhesion promoting layer (e.g., having a thickness of about 35 nm). The primer layer can cause strong chemical bonding to the polymer and to the chemically affine Cr. An upstream optional ion bombardment can be used to activate the polymer surface (PET surface). Illustratively, the ion bombardment can induce free bonds of the polymer (e.g., a hydrocarbon) that chemisorb the carbon (i.e., the carbon atoms) of the primer layer.

According to various embodiments, a layer stack according to one or more embodiments can be used in the food industry and / or the packaging industry, for example as a packaging film. The wear layer may, for example, develop an antibacterial effect. Alternatively or additionally, a smart packaging may comprise a semiconductor chip which is set up for contactless communication.

1A illustrates a layered structure 100a According to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction along a layer plane 101 . 103 or with a viewing direction transverse to a stacking direction 105 ).

The workpiece 102 (eg a substrate) may have a surface area 102 o which comprises or is formed from a polymer. The second layer 106 (also as a wear layer 106 labeled, eg, having or forming a metal layer) may be in physical contact with the first layer 104 (also as an adhesion layer 104 be formed). The first shift 104 (Adhesive layer 104 ) can be between the surface area 102 o and the second layer 106 (wear layer 106 ) and be in physical contact with them. The adhesive layer 104 may include or be formed from carbon in a carbon modification, eg, amorphous carbon; nanocrystalline amorphous carbon, tetrahedral carbon; diamond-like carbon and / or graphite-like carbon.

According to various embodiments, the surface area 102 o of the workpiece 102 at least one surface 102t (a boundary surface 102t ) of the workpiece 102 have, for example, a polymer surface. For example, can the surface area 102 o from the at least one surface 102t be limited. For example, the surface area 102 o a planar surface 102t of the workpiece 102t exhibit. Optionally, the at least one surface 102t (or the surface area 102 o ) two opposing surfaces 102t . 102b of the workpiece 102 exhibit.

1B illustrates a layered structure 100b According to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction along a layer plane 101 . 103 or with a viewing direction transverse to a stacking direction 105 ).

According to various embodiments, the wear layer 106 be structured or become. For example, the wear layer 106 be structured by an ablative processing (ie by means of ablation of material), for example by means of dry etching and / or wet chemical etching. For structuring the wear layer 106 Optionally, a mask may or may not be used. The mask can clearly one or more areas of the wear layer 106 release in which the wear layer 106 removed, eg open, should be.

After structuring, the wear layer 106 at least one opening 106o (ie, one or more openings) containing the primer layer 104 at least partially uncovered.

Optionally, the at least one opening 106o through the adhesive layer 104 extends through it, so that the surface area 102 o at least partially uncovered. The adhesive layer 104 can also only partially removed or not removed (eg by means of structuring the wear layer 106 ), eg if the adhesive layer 104 is transparent or eg has a thickness of less than about 80 nm.

In one or more embodiments, the primer layer 104 have greater transparency than the wear layer 106 For example, a transparency of greater than about 80%, eg, greater than about 90%, eg, greater than about 95%. This can be achieved that on a removal of the bonding layer 104 can be omitted, for example, even if a transparent appearance is sought (eg in a display).

In one or more alternative embodiments, the primer layer 104 have a smaller transparency than the wear layer 106 For example, a transparency of less than about 50%, eg, less than about 25%, eg, more than about 10%. This can be achieved that the primer layer 104 vividly provides a dark appearance.

2 illustrates a layered structure 200 According to various embodiments in a schematic plan view or cross-sectional view (eg, with a viewing direction along a stacking direction 105 ).

According to various embodiments, the layer structure 200 several openings 106o which are arranged in a pattern (eg at equal intervals 201d from each other). The wear layer 106 can have several bars 106s (vividly metal tracks 106s ) or formed thereof, of which a first group along a first direction 101 and a second group along a second direction 103 (eg, transverse to it) can extend. The first group and the second group can vividly cross each other. The several bars 106s can form a network (metal net).

The distances 201d adjacent openings 106o apart from each other, the web width 201d define. The expansion 203d the openings 106o can be larger than the one of the bars 106s (ie as the web width 201d ), eg more than ten times larger. For example, the extent 203d the openings 106o in a range of about 0.1 mm to about 1 mm. The bridge width 201d may be less than about 100 μm, eg in a range from about 1 μm to about 100 μm, for example in a range from about 3 μm to about 10 μm.

The several openings 106o can be more than 80% of the surface of the layer structure 200 occupy. This is the highest possible transparency of the wear layer 106 eg greater than about 80%, eg greater than about 90%, eg greater than about 95%. For example, the patterning of the wear layer 106 have more than 80% of the wear layer 106 eg greater than about 80%, eg more than about 90%, eg more than about 95%. Alternatively or additionally, the wear layer 106 and / or may be the adhesive layer 104 have a thickness less than about 80 nm, eg less than about 40 nm, eg less than about 20 nm, eg in a range from about 15 nm to about 20 nm.

3A illustrates a layered structure 300a according to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction transverse to the layer plane 101 . 103 or along the stacking direction 105 ).

According to various embodiments, the workpiece 102 at least one filament 102f (ie a filament 102f or more filaments 102f ) exhibit. The several filaments 102f can be or become a mesh, fabric or knit.

According to various embodiments, the or each filament 102f a polymer, eg, an organic polymer (ie, a carbon-based polymer, eg, a vegetable polymer or an animal polymer) or an inorganic polymer (eg, a silicon-based polymer), or be formed therefrom.

The several filaments 102f may be irregularly arranged and / or aligned, ie at varying distances from each other and / or at varying angles to each other. For example, the workpiece may have a plurality of irregular (eg, irregularly shaped and / or arranged) stitches which are filaments 102f are formed. The meshes can be an extension 102p in a range of about 10 μm to about 200 μm, for example, in a range of about 50 μm to about 100 μm.

Alternatively, the multiple filaments 102f be regularly arranged and / or aligned. For example, the workpiece 102 have several regular (eg regularly shaped and / or arranged) meshes, which by means of the filaments 102f are formed, for example, technological mesh. The meshes can have a periodicity 102p and / or an extent 102p in a range of about 10 μm to about 200 μm, for example, in a range of about 50 μm to about 100 μm.

The several filaments 102f can joints 102v in which two intersecting filaments 102f the multiple filaments 102f connected to each other, eg cohesively and / or positively. For example, the two filaments 102f in the connection point 102v glued, sintered and / or vulcanized. A fabric or a knit, however, can form-fitting interconnected filaments 102f exhibit.

According to various embodiments, the plurality of filaments 102f after joining with the primer layer 104 and / or with the wear layer 106 be coated or be. Alternatively or additionally, at least one filament 102f the multiple filaments 102f before joining with the primer layer 104 and / or with the wear layer 106 be coated or be. For example, a functionalized filament 102f be inserted into a fabric or be.

The meshes can have openings 106o exhibit. Alternatively or additionally, the workpiece 102 a perforated sheet-like support, ie a sheet-like support in which a plurality of openings 106o are formed. The openings can be clear 106o through the wear layer 106 , through the adhesive layer 104 , and through the workpiece 102 extend through.

3B illustrates a layered structure 300b According to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction along a layer plane 101 . 103 or transverse to a stacking direction 105 ).

According to various embodiments, the workpiece 102 or the or each filament 102f be coated on both sides (coating 104 . 106 ). The double-sided coating 104 . 106 (comprising the adhesive layer 104 and / or the wear layer 106 ) may be contiguous (ie, uninterrupted) on opposite sides of the or each filament 102f extend.

According to various embodiments, the or each filament 102f comprise or be formed from the polymer.

4A illustrates a layered structure 400a According to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction along a layer plane 101 . 103 or transverse to a stacking direction 105 ).

According to various embodiments, the workpiece 102 a sheet-like carrier 102 have or be formed therefrom, for example a film. A sheet-like carrier 102 can be an extension 102d (vividly thick 102d ) along the stacking direction 105 less than 1 mm (mm) (for example less than about 500 μm, eg less than about 250 μm, eg less than about 125 μm) and / or more than about 10 μm (for example more than about 20 μm).

The sheet-shaped carrier 102 can the surface area 102 o have or be formed from it. For example, the surface area 102 o on through the sheet-like carrier 102 pass through, ie a first surface 102b and a second surface 102t of the sheet-like carrier 102 exhibit. The wear layer 106 and / or the primer layer 104 can get on with the first first surface 102b and / or with the second surface 102t to be in physical contact. Illustratively, the sheet-like carrier 102 optionally be coated on both sides or be. The thickness of the wear layer 106 and / or the adhesive layer 104 may be smaller than that of the sheet carrier 102 ,

4B illustrates a layered structure 400b According to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction along a layer plane 101 . 103 or transverse to a stacking direction 105 ).

According to various embodiments, the layer structure 400b a third layer 108 which, with the wear layer 106 formed in physical contact. The third layer 108 For example, it can be set up as a passivation layer. This can be the third layer 108 have a material which has a lower chemical reactivity than the wear layer 106 ,

The third layer 108 For example, it may comprise or be formed from an additional metal, for example the same or different from the metal of the wear layer 106 and / or in a chemical compound such as a carbide, a nitride, an oxide and / or a silicide. In other words, the additional metal may optionally be present in a metallic compound, as a nitride, silicide and / or carbide. For example, the wear layer can 106 and the third layer 108 differ in their chemical composition. For example, the additional metal may include or be formed from at least one of: aluminum, chromium, copper, titanium, gold, silver, platinum, tungsten. The silicide may, for example, comprise the additional metal and silicon, eg in a chemical compound.

Alternatively or additionally, the third layer 108 For example, a semi-metal (eg carbon, silicon, tin and / or germanium), for example carbon in a carbon modification, in a carbide or in a polymer. For example, the third layer 108 have or be formed from an additional carbon layer.

Alternatively, the third layer 108 have or be formed from an active material, eg an active material of an energy store, eg an active material of a battery.

5A illustrates an energy store 500a in a method according to various embodiments in a schematic side view or a schematic cross-sectional view.

The energy storage 500a may according to various embodiments, a first electrode 1012 which has a first chemical potential. The first electrode 1012 can be a sheet-like carrier 102 (eg comprising a polymer or formed therefrom). The sheet-shaped carrier 102 may comprise or be formed from a film and / or a plate. The film may for example have a thickness of less than 40 microns.

Furthermore, the first electrode 1012 an active material 1012 which is above the sheet-like carrier 102 is arranged, wherein the active material 1012 the first electrode 1012 (also as the first active material 1012 denotes) the first chemical potential of the first electrode 1012 provides. The first active material 1012 For example, it may contain or be formed from lithium iron phosphate (LFPO) (eg, in a lithium iron phosphate energy storage 500a ), Lithium-manganese oxide (LMO) or be formed therefrom (eg in a lithium-manganese oxide energy storage 500a ) or lithium titanate (LTO) or be formed therefrom (eg in a lithium titanate energy storage 500a ) or lithium cobalt oxide (LiCoO) or be formed therefrom (eg in a lithium-cobalt oxide energy storage 500a ). For lithium-ion energy storage 500a can be the active material 1012 also as lithium compound active material 1012 be designated.

The first active material 1012 can optionally by means of the third layer 108 be or be provided.

Furthermore, the first electrode 1012 a wear layer 106 have, which between the sheet-like carrier 102 and the first active material 1012 is arranged. The wear layer 106 can by means of the primer layer 104 on the sheet-like carrier 102 be attached. The wear layer 106 may be in at least partial (ie, partial or complete) physical and / or electrical contact with the first active material 1012 be. The wear layer 106 can be descriptive as a current collector 106 be furnished.

Furthermore, the energy storage 500a a second electrode 1022 having a second chemical potential. Between the first electrode 1012 and the second electrode 1022 can form an electrical voltage, for example, when the energy storage 500a is charged, or which is approximately equal to the difference between the first chemical potential and the second chemical potential.

Optionally, the energy storage 500a by means of an encapsulation 1030 be encapsulated or become the first electrode 1012 and the second electrode 1022 surrounds. The second electrode 1022 and the first electrode 1022 can be or become encapsulated together.

A pair of second electrode 1022 and first electrode 1022 can also be referred to as an energy storage cell. Optionally, the energy storage 500a have multiple energy storage cell.

The workpiece 102 can vividly a sheet-like carrier 102 for the electricity collector 106 or be formed therefrom, for picking up the electrical charges by means of the current collector 106 which is due to an ion exchange between the first electrode 1012 the first electrode 1022 and the second electrode 1022 takes place, for example, when the energy storage 500a discharges. The ions, which are between the first electrode 1012 and the second electrode 1022 move (ion exchange), can be a transformation of stored chemical energy (for example, when the energy storage 500a charged) into electrical energy, the electrical energy being an electrical voltage across the contacts 1012k . 1022k (please refer 5B ).

According to various embodiments, the sheet-like support 102 the first electrode 1012 on both sides with the wear layer 106 be coated or as described above. In other words, the sheet-shaped carrier 102 the first electrode 1012 on the top and on the bottom of the wear layer 106 exhibit.

The encapsulation 1030 For example, it may comprise or be formed from a polymer. Optionally, the encapsulation 1030 with the adhesion mediation layer 104 and the wear layer 106 be coated or, for example, to form a metallization and / or a contact 1012k . 1022k ,

5B illustrates an energy storage 500b According to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction along a layer plane 101 . 103 or transverse to a stacking direction 105 ).

According to various embodiments, the second electrode 1022 analogous to the first electrode 1012 be set up or be, as described in more detail below. The second electrode 1022 can be a sheet-like carrier 102 (eg comprising a polymer or formed therefrom), eg a foil similar to the foil of the first electrode 1012 ,

Furthermore, the second electrode 1022 a second active material 1022a which is on the sheet-like support 102 the second electrode 1022 is or is, wherein the second active material 1022a the second chemical potential of the second electrode 1022 provides.

The second active material 1022a the second electrode 1022 (eg the anode) may be different from the first active material 1012 the first electrode 1012 differ. The second active material 1022a For example, it may include or be formed from graphite (or carbon in another configuration), nanocrystalline and / or amorphous silicon, or lithium titanate (Li ₄ Ti ₅ O ₁₂ ) or tin oxide (SnO ₂ ) or be formed therefrom. The second active material 1022a can optionally by means of the third layer 108 be or be provided.

Furthermore, the second electrode 1022 a wear layer 106 have, for example, an electrically conductive layer, for example in the form of a contact layer, which between the sheet-like support 102 the second electrode 1022 and the second active material 1022a is arranged. The wear layer 106 can by means of the primer layer 104 on the sheet-shaped carrier 102 the second electrode 1022 be attached or become. The wear layer 106 may be in at least partial (ie, partial or complete) physical and / or electrical contact with the second active material 1022a be.

According to various embodiments, the sheet-like support 102 the second electrode 1022 on both sides with the wear layer 106 be coated or as described above. In other words, the sheet-shaped carrier 102 the second electrode 1022 on the top and on the bottom of the wear layer 106 exhibit. For example, the sheet-shaped carrier 102 the first electrode 1012 and / or the second electrode 1022 be or be coated in the form of a plate or an endless workpiece, such as a belt.

Furthermore, the energy storage 1100 a first contact 1012k which has the first electrode 1012 contacted, and eg with the wear layer 106 the first electrode 1012 is electrically connected. The first contact 1012k may have an exposed surface.

Furthermore, the energy storage 1100 a second contact 1022k which has the second electrode 1022 contacted, and eg with the wear layer 106 the second electrode 1022 is electrically connected. The second contact 1022k may have an exposed surface. Between the first contact 1012k and the second contact 1022k can be an electrical voltage train, for example, when the energy storage 1100 which corresponds approximately to the difference between the first chemical potential and the second chemical potential.

Optionally, the energy storage 1100 a separator 1040 exhibit. The separator 1040 can be the first electrode 1012 and the second electrode 1022 in other words spatially and electrically separate the negative and positive electrodes (ie, cathode and anode). The separator 1040 However, for ions that are between the first electrode 1012 and the second electrode 1022 move, be pervious. The ions, which are between the first electrode 1012 and the second electrode 1022 can move, a conversion of stored chemical energy (eg if the energy storage 1100 charged) into electrical energy, the electrical energy being an electrical voltage across the contacts 1012k . 1022k provides. The separator 1040 may comprise or be formed from a microporous plastic and / or the separator 1040 may comprise or be formed from a non-woven fiberglass or polyethylene.

Optionally, the separator 1040 by means of the wear layer 106 and the bonding layer 104 be coated or be, for example, both sides.

6A illustrates a stacking unit 600a a fuel cell and 6B illustrates a detail view 600b the stacking unit 600a wherein a fuel cell comprises one or more stacking units 600a can have.

A gaseous fuel 602 (eg, hydrogen) may be due to a gas diffusion layer 608 (Gas diffusion layer, GDL) on the oxidation side through to the anode 612 while the oxygen 604 by means of an additional GDL 608 finely distributed to the cathode 616 can get.

These can be bipolar plates 600 , eg stainless steel plates 600 , are mechanically stamped for use in fuel cells prior to the coating process, whereby the typical gas channels of the bipolar plates may arise, as in 6A is illustrated.

According to various embodiments, an electrical charge separation carried out in the fuel cell 616 through the electrolyte membrane 614 (Membrane Electron Unit: MEA), the anode 612 (or the cathode 616 ) and the GDL 608 through the bipolar plates 600 can be tapped or contacted, so that a stacking unit of a fuel cell can have a low internal resistance and a high electrical power output.

According to various embodiments, a gas diffusion layer 608 the stacking unit having a sheet-like support (as a workpiece), which with the adhesion-promoting layer 104 and the wear layer 106 is or will be coated. The sheet-shaped carrier 102 may comprise or be formed from a polymer. For example, the sheet-shaped carrier 102 in the form of a plate or an endless workpiece, such as a belt, coated 104 . 106 be or become.

Optionally, the membrane 614 a coating 104 . 106 according to one or more embodiments or be formed therefrom, ie with an adhesion-promoting layer 104 and a wear layer 106 be coated or be, for example, both sides.

7A illustrates a textile 700a in a method according to various embodiments in a schematic plan view.

According to various embodiments, the workpiece 102 one or more filaments 102f of the textile 700a have or be formed therefrom (ie textile filaments, eg textile threads or textile fibers), for example in the form of a fabric.

According to various embodiments, the textile 700a be coated such that this is an electrically conductive connection 1224 between two areas 1202a . 1202b of the textile 700a provides, for example by means of a filament coated according to various embodiments 102f , In at least one of the two areas 1202a . 1202b (eg in both areas 1202a . 1202b ), a semiconductor chip may be or may be arranged, eg a sensor, a processor, an electronic storage medium, a touch-sensitive input device and / or a contactless communication unit.

7B illustrates a capacitive area sensor 700b According to various embodiments in a schematic side view or cross-sectional view (eg, with a viewing direction along a layer plane 101 . 103 or transverse to a stacking direction 105 ).

The capacitive area sensor 700b For example, it may be part of or form part of a touch-sensitive input device (also referred to as a touch-sensitive input device).

The capacitive area sensor 700b can the wear layer 106 having several webs 106s exhibit. The wear layer 106 can be on a sheet-like carrier 102 be or become angry. The sheet-shaped carrier 102 can For example, have a polymer film, which may be optionally laminated to a glass substrate or can be.

One at the corners of the wear layer 106 applied AC voltage generates a constant, uniform electric field. An electrically conductive body penetrates into the vicinity of the electric field (ie the capacitive surface sensor 700b ), for example, when touching the capacitive surface sensor 700b , a small charge transport can be effected, which can be detected in the discharge cycle in the form of a current at the corners. The resulting electrical currents from the corners are in direct proportion to the position of the penetrating body. The capacitive area sensor 700b may include a controller (eg, a processor) that detects the resulting streams and provides information that represents the location.

Optionally, the capacitive area sensor 700b as indicating capacitive area sensor 700b be educated. Then the capacitive area sensor 700b an optional display 1702 , eg a screen. The ad 1702 can have multiple pixels, which by means of a video driver 1702s the ad 1702 be or can be controlled.

8A and 8B each illustrate a coating arrangement 800a . 800b in a method according to various embodiments in a schematic side view or cross-sectional view (with a viewing direction transverse to a transport direction 102s of the workpiece 102 ).

According to various embodiments, the coating arrangement 800a . 800b a vacuum chamber housing 802 in which a vacuum can be generated and maintained. The vacuum chamber housing 802 can be, for example, airtight, dustproof and / or vacuum-tight set up or become. The vacuum chamber housing 802 may have one or more vacuum chambers. The or each vacuum chamber may provide one or more vacuum areas. The vacuum chambers of the vacuum chamber housing 802 may optionally be at least partially gas-separated from each other.

Furthermore, the vacuum chamber housing 802 with a pump system 804 (comprising at least one high vacuum pump) to be coupled. The pump system 804 can be set up, the vacuum chamber housing 802 to withdraw a gas (eg the process gas), so that within the vacuum chamber housing 802 a vacuum (ie, a pressure less than 0.3 bar) and / or a pressure in a range of about 1 mbar to about 10 ^-3 mbar (in other words, a fine vacuum) and / or a pressure in a range of about 10 ^-3 mbar to about 10 ^-7 mbar (in other words high vacuum) or a pressure of less than high vacuum, for example, less than about 10 ^-7 mbar (in other words ultrahigh vacuum) can be provided.

According to various embodiments, the coating arrangement 800a . 800b a gas supply 1716 exhibit. By means of the gas supply 1716 can the vacuum chamber housing 802 a process gas is supplied to form a process atmosphere in the vacuum chamber housing 802 , The process gas may include, for example, an inert gas or be formed therefrom. The process pressure can be formed from a balance of process gas, which by means of the gas supply 1716 supplied and by means of the pump system 804 is withdrawn.

Furthermore, the vacuum chamber housing 802 be set up so that the vacuum conditions (the process conditions) within the vacuum chamber housing 802 (Eg process pressure, process temperature, chemical process gas composition, etc.) can be made or regulated (eg local), for example during coating, for example by means of a controller 116 , For example, by means of the vacuum chamber housing 802 a vacuum region or may be provided multiple vacuum areas with different vacuum conditions from each other. For example, the process gas may comprise or be formed from nitrogen, hydrogen and / or carbon. The carbon of the process gas may be provided by, for example, a gaseous organic material.

According to various embodiments, the controller may 116 have a forward-looking control path and thus vividly implement a flow control, which converts an input variable into an output variable. The control path can also be part of a control loop, so that a control is implemented. The control has, in contrast to the pure forward control on a continuous influence of the output variable on the input variable, which is effected by the control loop (feedback). According to various embodiments, a control may be used instead of the control.

According to various embodiments, the controller may 116 for controlling and / or regulating a workpiece temperature control device 1124 (eg comprising a heating device and / or a cooling device), so that a process temperature (eg of the workpiece 102 and / or the process gas), for example during the Processing (eg during coating), controlled and / or can be regulated. For example, the controller 116 be configured to control and / or regulating an electrical power, which the workpiece temperature control device 1124 supplied, and / or a thermal power which is dissipated by this.

According to various embodiments, the controller may 116 for controlling and / or regulating the gas supply 1716 and / or the pump system 804 be set so that a process pressure and / or a process gas composition can be controlled and / or regulated. For example, the controller 116 be arranged for controlling and / or regulating a standard volume flow of process gas, which by means of the gas supply 1716 supplied and / or by means of the pump system 804 is withdrawn.

In the vacuum chamber housing 802 (eg in a first vacuum chamber) may be a first vacuum area 306b be arranged. Further, in the vacuum chamber housing 802 (eg, in the first vacuum chamber) a first source of coating material 306. be arranged to provide a first gaseous coating material, for example in the form of a material stream (eg mass flow or volume flow) of gaseous coating material (material vapor stream) in the first vacuum region 306b into it. The first coating material may include or be formed from carbon.

In the vacuum chamber housing 802 (eg in a second vacuum chamber) may be a second vacuum area 308b be arranged. Further, in the vacuum chamber housing 802 (eg in the second vacuum chamber) a second source of coating material 308 be arranged to provide a second gaseous coating material, for example in the form of a material stream (eg mass flow or volume flow) of gaseous coating material (material vapor stream) in the second vacuum region 308b into it. The second coating material may include or be formed from the metal.

According to various embodiments, the controller may 116 for controlling and / or regulating the first coating material source 306. and / or the second coating material source 308 be set up, for example by controlling a quantity of material and / or regulate which is evaporated, or for example by controlling and / or regulates a chemical composition of the coating material produced in each case.

Furthermore, the coating arrangement 800a an unwinding roll 502a for unwinding a workpiece 102 have, so that the workpiece 102 in the coating area 803 is brought in. Furthermore, the coating arrangement 800a a take-up roller 502b for winding up the workpiece 102 which, from the coating area 803 is brought out.

Furthermore, the coating arrangement 800a a variety of transport wheels 508 which define a transport path along which the workpiece 102 (For example, a band-shaped workpiece) between the unwinding roll 502a and the take-up roller 502b through the coating area 803 is transported through.

Alternatively, the coating arrangement 800b a variety of transport wheels 508 which is used to transport a plate-shaped workpiece 102 are set up. The plate-shaped workpiece 102 can, for example on the transport wheels 508 lying on and / or inserted into a workpiece carrier, to be transported.

Furthermore, the coating arrangement 800a . 800b a drive system 518 comprising at least part of the plurality of transport rollers 508 , and optionally with the unwinding roller 502a and the take-up roller 502b , coupled 518k is. For example, the drive system 518 by means of chains 518k , Straps 518k or gears 518k with the roles 508 . 502a . 502b be coupled. The transport wheels 508 and the drive system 518 may be part of the positioning device.

The control 116 can to control 518k and / or rules 518k the positioning device to be set up, for example, to control 518k and / or rules 518k a transport speed and / or a position of the workpiece 102 during coating, eg on the basis of a coating progress and / or a vapor property.

According to various embodiments, the coating arrangement 800a . 800b optionally at least one workpiece pretreatment device 310 (ie one or more workpiece pretreatment devices 310 ) for pretreating the workpiece 102 , eg to activate the workpiece 102 , For example, the at least one workpiece pretreatment device 310 be set up the workpiece 102 chemically activate, for example, chemically activate its surface, the workpiece 102 to clean and / or the workpiece 102 to etch.

For example, the at least one workpiece pretreatment device 310 have or be formed from an etching device for etching the workpiece 102 , Alternatively or additionally, the at least one workpiece pretreatment device 310 at least one irradiation device (eg an ion beam source, a flashlamp and / or an electron beam source), at least one sputter etching source, at least one plasma source, at least one glow device and / or at least one etching gas source, or be formed therefrom. For example, pretreating the workpiece may include sputter etching the workpiece; Ion etching, glowing, tempering (eg rapid thermal processing - RTA, eg by means of a flash lamp); Electron beam irradiation to treat ultraviolet light (eg by means of an ultraviolet light source).

Optionally, by means of the at least one workpiece pretreatment device 310 a water film from the workpiece 102 be removed. Alternatively or additionally by means of the workpiece pretreatment device 310 a number of open chemical bonds of the workpiece 102 (Also referred to as chemical activation) are increased, which, for example, the adhesion and the formation of a layer (eg the adhesion-promoting layer 104 ) on the workpiece 102 can improve.

Alternatively or additionally, a workpiece aftertreatment device 310 be used to the workpiece 102 having the wear layer 106 after treatment, eg similar to the pretreatment. For example, the workpiece 102 having the wear layer 106 selectively heated (eg annealed), eg by means of rapid thermal processing.

9 illustrates a method 900 for processing a workpiece 102 according to various embodiments in a schematic flow diagram. The workpiece 102 can have a surface area 102 o with or from a polymer.

The procedure 900 can in 901 comprising: forming a primer layer in physical contact with the surface area. The primer layer may comprise or be formed from carbon in a carbon modification (also referred to as carbon allotrop or polymorphism of carbon). The adhesion promoting layer may be or may be formed by means of a first gaseous coating material (comprising the carbon or formed therefrom).

The procedure 900 can also be found in 903 comprising: forming a layer in physical contact with the primer layer. The layer may comprise or be formed from a metal. The layer may be formed by means of a second gaseous coating material (comprising the metal or formed therefrom).

The procedure 900 can be optional in 905 have: activation of the surface area by means of a plasma and / or by means of radiation (eg electromagnetic radiation and / or particle radiation) prior to forming the adhesion-promoting layer. The activation of the surface area can take place, for example, before the formation of the adhesion-promoting layer.

The procedure 900 can be optional in 907 comprising: structuring the layer and / or the adhesion-promoting layer. By means of structuring the layer, at least a portion of the adhesion-promoting layer and / or the surface area can be or are exposed. Alternatively or additionally, by structuring the adhesion-promoting layer, at least a portion of the surface area can be or become exposed.

The procedure 900 can be optional in 909 comprising: forming an additional layer over the layer, eg in physical contact therewith. The additional layer may comprise a metal, a semimetal and / or an active material and / or be formed by means of a third gaseous coating material (comprising the metal, the semimetal and / or the active material or formed therefrom).

The first gaseous coating material, the second gaseous coating material and / or the optional third gaseous coating material may be or may be provided by means of thermal evaporation.

The process may optionally include hydrogenation of the carbon modification. In other words, hydrogen may or may not be incorporated into the primer layer.

The workpiece may be arranged and / or transported in a vacuum chamber to form the first layer and / or the second layer.

By way of example, a capacitive area sensor, an energy store (for example its electrode), a packaging means, a fuel cell (for example its gas diffusion layer) and / or a textile can be or are formed by means of the coated workpiece.

10 illustrates a method 1000 for processing a workpiece according to various embodiments in a schematic flow diagram. The workpiece may have a surface area with or made of a polymer.

The procedure 1000 can in 1001 comprising: transporting the workpiece in a first vacuum area 306b in which a first gaseous coating material comprising carbon is arranged. The first gaseous coating material may attach to the surface area.

The first gaseous coating material may, for example, comprise or be formed from elemental carbon. Alternatively or additionally, the carbon may be in a carrier gas, wherein the process conditions (e.g., a temperature of the workpiece) are arranged such that the carrier gas releases the elemental carbon and attaches to the surface region.

The procedure 1000 can also be found in 1003 comprising: transporting the workpiece from the first vacuum region into a second vacuum region in which a second gaseous coating material comprising a metal is arranged. The second gaseous coating material may comprise or be formed from elemental metal.

The first vacuum region may be adjacent to the second vacuum region, or both may be provided by at least one common vacuum system (e.g., one or more vacuum chambers coupled together). For example, transporting the workpiece from the first vacuum region to the second vacuum region may be in a vacuum and / or vacuum (i.e., less than 0.3 bar pressure).

The procedure 1000 can be optional in 1005 have: hydrogenation of the carbon modification. In other words, the carbon modification can be added to hydrogen. The hydrogen can form covalent bonds with the carbon of the carbon modification.

The procedure 1000 can be optional in 1007 comprising: transporting the workpiece from the second vacuum region into a third vacuum region in which a third gaseous coating material comprising a metal, semi-metal and / or active material is arranged.

The first gaseous coating material, the second gaseous coating material and / or the optional third gaseous coating material may be or may be provided by means of thermal evaporation. By means of the first gaseous coating material, the second gaseous coating material and / or the optional third gaseous coating material, it is possible for or to form a layer stack which comprises at least the adhesion-promoting layer 104 , the wear layer 106 and optionally the third layer.

The procedure 1000 can be optional in 1009 comprising: forming a mask over (eg on) the layer stack and patterning the layer stack using the mask. For example, a structure of the mask can be imaged onto the layer stack, for example by means of an etchant.

By way of example, a capacitive area sensor, an energy store (for example its electrode), a packaging means, a fuel cell (for example its gas diffusion layer) and / or a textile can be or are formed by means of the coated workpiece.

11A . 11B and 11C each illustrate a layer structure in a method according to various embodiments in a schematic plan view (viewed transversely to the layer plane 101 . 103 ). The workpiece 102 can in the layer plane 101 . 103 extends, for example along the direction of 101 and the direction 103 spanned level.

According to various embodiments, the workpiece 102 (eg its surface area 102 o ) with a current collector layer 106 be coated. The current collector layer 106 may for example comprise or consist of one or more metals. Optionally, a protective layer 108 on the current collector layer 106 be arranged or become. The protective layer 108 For example, it may comprise or be formed from carbon, a metal nitride, metal silicide, and / or a metal carbide.

As in view 1100a and detail view 1100b shown, the current collector layer 106 defects 1102 , For example, wrinkles or microcracks have. These defects 1102 may, for example, adversely affect the electrical properties.

As in view 1100c shown, the surface area 102 o (eg, comprising or having a polymer) with a current collector layer 106 and a primer layer 104 be coated. The primer layer (hidden in the view) may be between the surface area 102 o and the current collector layer 106 be arranged. The current collector layer 106 may for example comprise or consist of one or more metals. The adhesion promoter layer may, for example, comprise or be formed from carbon. Optionally, a protective layer 108 , for example, carbon, on the current collector layer 106 be arranged or become.

According to various embodiments, a method may include: providing a workpiece optionally having one or more filaments or one or more films, wherein a surface region of the workpiece may include or be formed from a polymer; Coating the surface area by thermal evaporation of a first coating material; Coating the surface region by thermal evaporation of a second coating material, wherein the second coating material comprises one or more metals. The first coating material may, for example, comprise carbon.

Furthermore, the coated workpiece can subsequently be obtained by means of thermal evaporation of a third coating material with a protective layer 108 be coated. The protective layer 108 may, for example, have carbon.

As in view 1100c As shown, the resulting layer stack may have fewer defects (such as wrinkles or microcracks) than when the primer layer 104 is omitted (as in view 1100a illustrated).

This can lead, for example, to an improvement in the electrical properties (for example, conductivity of the coating) compared to coatings without an adhesion promoter layer and / or increase the longevity of the layer stack (i.e., its lifetime).

Optionally, the workpiece 102 have or be formed from a filament structure, ie a filament 102f the multiple filaments 102f , Indicates the workpiece 102 the filament structure can, the or each filament 102f along the layer plane 101 . 103 extends its. For example, the filaments 102f a polymer (eg, a carbon-based polymer or a silicon-based polymer) or be formed therefrom.

12 illustrates a schematic diagram 1200 structural properties of a layer comprising or formed from carbon.

In the diagram 1200 represents axis 1201 the relative proportion of sp ³ hybridized carbon in the layer. The relative amount of sp ³ -hybridized carbon may be defined by the quotient of the number of carbon atoms sp ³ hybridized and the sum of sp ² hybridized carbon atoms and sp ³ hybridized carbon atoms in the layer. Furthermore, the axis designates 1203 the atomic fraction of hydrogen in the layer.

The point 1 / 3-0 corresponds to a relative proportion of sp ³ hybridized carbon in the layer of 0% and an atomic fraction of hydrogen in the layer of 0%. The point 1-100 corresponds to a relative proportion of sp ³ hybridized carbon in the layer of 100% and an atomic fraction of hydrogen in the layer of 0%. The point 3-100 corresponds to a relative proportion of sp ³ hybridized carbon in the layer of 0% and an atomic fraction of hydrogen in the layer of 100%.

The area 1112 denotes a layer composition in which graphite or graphite-like carbon is formed. In other words, the carbon can 1112 in the layer substantially or completely in graphite configuration. The area 1114 denotes a layer composition in which amorphous carbon is formed. In other words, the carbon can 1114 is present in the layer substantially or completely in amorphous configuration. The area 1116 denotes a layer composition in which hydrogenated amorphous carbon is formed. In other words, the carbon can 1116 are present in the layer substantially or completely in an amorphous configuration and have additionally taken up hydrogen. The area 1118 denotes a layer composition in which tetragonal carbon is formed. In other words, the carbon can 1118 in the layer substantially or completely in tetragonal configuration. The area 1122 denotes a layer composition in which diamond or diamond-like carbon is formed. In other words, the carbon can 1122 in the layer substantially or completely in diamond configuration.

The term substantially may be understood in this context to mean that more than 90% of the carbon atoms of the primer layer are in a particular configuration.

For example, the composition (proportion of sp ² hybridized carbon and / or sp ³ hybridized carbon) of the layer can be determined by spectroscopy (eg Raman spectroscopy) and the position of the I _G peak correlated with the composition of the layer in the spectrum and the intensity ratio I _D / I _{G are} analyzed (peak I _{D representing} interference, peak I _{G representing} graphene lamella). Starting from graphite with an almost perfect stratification of graphene lamellae, the proportion of sp ³ hybridized carbon can increase, the more perturbations the graphene lamellae have (transition from carbon modification 1112 to carbon modification 1114 ).

The position of the I _G peak and the intensity ratio I _D / I _G may depend on the proportion of sp ² hybridized carbon and sp ³ hybridized carbon. In this case, the proportion of sp ² hybridized carbon in the adhesion-promoting layer can be increased by means of a relatively high temperature (eg by tempering, eg irradiation, of the layer), which leads to a change in the position of the I _G peak and the intensity ratio I _D / I _G can.

For example, a primer layer that is essentially tetrahedrally modified carbon 1118 has been structurally adjusted by means of a heating of the adhesion-promoting layer (eg by means of irradiation after the formation of the adhesion-promoting layer and / or by means of a greater temperature of the workpiece during the formation of the adhesion-promoting layer), such that the adhesion-promoting layer is, for example, amorphous carbon 1114 can have. Alternatively or additionally, the adhesion-promoting layer can be or be provided such that the adhesion-promoting layer contains nanocrystalline graphite (graphite-like carbon) and / or graphite 1112 can have.

13A and 13B each illustrate a packaging means according to various embodiments in a schematic side view, for example a bag 1300a and a container 1300b ,

The packaging 1300a For example, a wall element 1402 have, wherein the wall element 1402 have a layer structure according to one or more embodiments or be formed therefrom, for example a film or plate coated on both sides.

13C each illustrate a packaging 1300c according to various embodiments in a schematic side view, eg a housing 1300c by means of which a semiconductor chip 1406 is packed.

After singulating the semiconductor chip 1406 this can be electrically contacted and in the housing 1300c (Also referred to as chip package) are encapsulated, for example by means of a molding material, which is then suitable for use in electronic devices. For example, the semiconductor chip 1406 mounted on a chip carrier and electrically contacted by wires, and the chip carrier can be soldered to a printed circuit board and / or on a lead frame. For example, the chip carrier may have a chip card (eg comprising a semiconductor chip 1406 that is configured for contactless communication) or be formed therefrom.

The housing 1300b For example, the polymer may comprise or be formed from it, eg a thermoplastic molding material. The wear layer 106 For example, it may include or be formed from a metallization, eg comprising one or more contact pads of the housing 1300b ,

Claims (19)

Layer structure ( 100a . 100b . 400a ), comprising: • a workpiece ( 102 ) with a surface area ( 102 o ) comprising a polymer; • a layer ( 106 ) above the surface area ( 102 o ), the layer ( 106 ) has a metal; • an adhesion layer ( 104 ), which between the surface area ( 102 o ) and the layer ( 106 ) and in physical contact therewith, the primer layer ( 104 ) Has carbon in a carbon modification. Layer structure ( 100a . 100b . 400a ) according to claim 1, wherein the polymer comprises an organic polymer. Layer structure ( 100a . 100b . 400a ) according to claim 1 or 2, wherein the metal comprises at least one of: aluminum, chromium, copper, titanium, nickel, zirconium, niobium, molybdenum, tantalum, tungsten. Layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 3, wherein the layer ( 106 ) is structured such that at least a portion of the primer layer ( 104 ) and / or the surface area ( 102 o ) is exposed. Layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 4, wherein the workpiece ( 102 ) at least one filament ( 102f ) having the surface area ( 102 o ) having. Layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 5, wherein the workpiece ( 102 ) has at least one sheet-like support which covers the surface area ( 102 o ) having. Layer structure ( 100a . 100b . 400a ) according to any one of claims 1 to 6, wherein the carbon modification is hydrogenated. Layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 7, further comprising: an additional layer ( 108 ) above the layer ( 106 ), the additional layer ( 108 ) an additional metal, a semi-metal or an active material ( 1012 . 1022a ) having. Capacitive area sensor ( 700b ), which has a layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 8. Energy storage ( 500a . 500b ), which has a layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 8. Gas diffusion layer ( 608 ), which has a layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 8. Textile ( 700a ), which has a layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 8. Packaging ( 1400a . 1400b ), which has a layer structure ( 100a . 100b . 400a ) according to one of claims 1 to 8. Procedure ( 900 ) for processing a surface area ( 102 o comprising a polymer, the method comprising: • forming ( 901 ) an adhesive layer ( 104 ) in physical contact with the surface area ( 102 o ), the adhesive layer ( 104 ) Has carbon in a carbon modification; and • forming ( 903 ) of a layer ( 106 ) in physical contact with the adhesive layer ( 104 ), the layer ( 106 ) has a metal. Procedure ( 900 ) according to claim 14, further comprising: activating ( 905 ) of the surface area ( 102 o ) by means of a plasma and / or by means of radiation before forming the adhesion-promoting layer ( 104 ). Procedure ( 900 ) according to claim 14 or 15, wherein the formation of the primer layer ( 104 ) and / or the layer ( 106 ) using a gaseous coating material. Procedure ( 900 ) according to one of claims 14 to 16, further comprising: structuring the layer ( 106 ) such that at least a portion of the primer layer ( 104 ) and / or the surface area ( 102 o ) is exposed. Procedure ( 900 ) according to one of claims 14 to 17, further comprising: forming an additional layer ( 108 ) above the layer ( 106 ), the additional layer ( 108 ) an additional metal, a semi-metal and / or an active material ( 1012 . 1022a ) having. Procedure ( 1000 ) for processing a workpiece ( 102 ) with a surface area ( 102 o ) comprising a polymer, the method comprising: • transporting ( 1001 ) of the workpiece ( 102 ) in a first vacuum area ( 306b ) in which a first gaseous coating material is arranged, wherein the first gaseous coating material comprises carbon; and • transporting ( 1003 ) of the workpiece ( 102 ) from the first vacuum area ( 306b ) into a second vacuum region ( 308b ) in which a second gaseous coating material is arranged, wherein the second gaseous coating material comprises a metal.

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