DE102007027508A1 - Device for production of optically sensitive probes for scanning probe microscopy, has substrate, which is formed transparently, and immersion fluid is placed on substrate and below transparent substrate - Google Patents

Abstract

The device (1) has a substrate (3), which is formed transparently. An immersion fluid (11) is placed on the substrate and below the transparent substrate. The immersion fluid has a refractive index similar to substrate and is embedded in the nano-particles (41,42,43). An illumination source (9) is provided for lighting a particle lying on the substrate by radiography of the transparent substrate and an inverted optical system arranged on the substrate for receiving the backscattering light (13) of the nano-particle.

Description

The The invention relates to a device and a method for the production of optically sensitive probes for scanning probe microscopy, wherein the probe with at least one adhesion molecule in the associated Probe tip area is occupied, containing a substrate, the at least a nanoparticle is assigned, wherein the probe in a given Distance above the substrate, and a 3D positioner, which is in communication with the substrate, wherein for guidance the probe between the 3D positioner and the probe positioning is switched, in the position signals of the substrate and / or the Probe for determining the position of a selected, readable by the probe Nanoparticles are coordinated and processed.

In Optical scanning probe microscopy is useful over to have a probe whose optical part consists of a There will be nanoscale particles at the top of the probe the signal-to-noise ratio, the optical image resolution and the optical contrast improved significantly.

Such probes can be prepared by the following procedure, which is described in the document Sqalli, Bernal, Hoffmann, Marquis-Weibel: Improved Tip performance for scanning near-field optical microscopy by the attachment of a single gold nanoparticle, Applied Physics Letters, Volume 76, no. 15, p. 2134-2136 , in which the probe tips are immersed in a suspension of nanoparticles and then hoped for application of a nanoparticle.

Another method is in the document Kalkbrenner, Ramstein, Mlynek and Sandoghdar: A single gold particle as a sample for apertureless near-field optical microscopy, Journal of Microscopy, Volume 202-1, p.72-76 (2001) described in which a metal-free probe is coated with a predetermined adhesion molecule for attachment of a nanoscale particle. A substrate carries the nanoparticle to be attached. The probe is moved over the substrate as a scanning probe, whereby the particles generate height information. From the altitude information, a particle is located and selected. The position of the selected nanoparticle is approached and the height regulation is manipulated so that the nanoparticle can be bound by the adhesion molecule.

One The problem is that the scanning of the substrate is time consuming and the optical quality of the nanoparticle is uncertain. It is a retrospective optical characterization of the so bound nanoparticles required, which, however, for Particles smaller than 100 nm are difficult to impossible proves.

Of the Invention is based on the object, an apparatus and a method for the production of optically sensitive probes for scanning probe microscopy, which are designed so that a time-consuming Scanning of the particles having the substrate largely avoided becomes.

• – ein Substrat, dem mindestens ein Nanopartikel zugeordnet ist, wobei die Sonde in einem vorgegebenen Abstand oberhalb des Substrats angeordnet ist,
• – einen 3D-Positionierer, der mit dem Substrat in Verbindung steht,

wobei zur Führung der Sonde zwischen dem 3D-Positionierer und der Sonde eine Positioniereinrichtung geschaltet ist, in der Positionssignale des Substrats und/oder der Sonde zur Lagefestlegung eines ausgewählten, von der Sonde auflesbaren Nanopartikels koordiniert und verarbeitet werden,
wobei gemäß dem Kennzeichenteil des Patentanspruchs 1
das Substrat transparent ausgebildet ist, auf dem sich eine Immersionsflüssigkeit, die einen substratgleichen Brechungsindex aufweist und in der mindestens ein Nanopartikel eingebettet ist, befindet,
und unterhalb des transparenten Substrats

• – eine Beleuchtungsquelle zur Beleuchtung mindestens eines auf dem Substrat aufliegenden Nanopartikels mittels Durchstrahlung des transparenten Substrats und
• – zumindest ein invertes, auf das Substrat gerichtetes optisches System zur Aufnahme des Rückstreulichtes des Nanopartikels

vorgesehen sind, wobei unterhalb des Substrats im partikelreflektierten Rückstreulicht das ausgewählte, von der Sonde auflesbare Nanopartikel Hell auf Dunkel registrierbar ist.The object is solved by the features of claims 1 and 14. The device for producing optically sensitive probes for scanning probe microscopy, wherein the probe is coated with at least one adhesive molecule in the associated probe tip region contains

• A substrate, to which at least one nanoparticle is assigned, the probe being arranged at a predetermined distance above the substrate,
• A 3D positioner that communicates with the substrate,

a positioning device being connected between the 3D positioner and the probe for guiding the probe, in which position signals of the substrate and / or the probe for positional determination of a selected nanoparticle which can be read by the probe are coordinated and processed,
wherein according to the characterizing part of patent claim 1
the substrate is transparent, on which an immersion liquid, which has a substrate-like refractive index and in which at least one nanoparticle is embedded, is located,
and below the transparent substrate

• - An illumination source for illuminating at least one resting on the substrate nanoparticle by irradiation of the transparent substrate and
• - At least one inverted, directed to the substrate optical system for receiving the backscattered light of the nanoparticle

are provided, below the substrate in the particle-reflected backscatter light, the selected, readable by the probe nanoparticles Bright on dark is registered.

The Illumination source may be one above the bottom of the substrate arranged, angled, semi-transparent mirror directable, white-light source that can be directed onto the substrate or the ends or tips of a white light over fiber optic cable, which arranged below the substrate guided to the substrate is, represent.

The optical system may consist of a lens, in particular a microscope objective, which is arranged below the substrate consist.

• – einem Mikroskopobjektiv und
• – einem halbdurchlässigen Spiegel bestehen,

die in der angegebenen Reihenfolge unterhalb des Substrats angeordnet sind, wobei seitlich zum abgewinkelt eingesetzten Spiegel eine Weißlichtquelle platziert ist, deren Strahlenbündel auf den Spiegel trifft und durch das Mikroskopobjektiv als Beleuchtungslicht zum Substrat abgelenkt wird sowie das Substrat durchstrahlt und auf mindestens ein Nanopartikel gerichtet ist, wobei im partikelreflektierten Rückstreulicht, das durch den halbdurchlässigen Spiegel hindurch geführt ist, ein auflesbares Nanopartikel Hell auf Dunkel sichtbar ist.The optical system can off

• - a microscope lens and
• - consist of a semitransparent mirror,

which are arranged below the substrate in the stated order, wherein a white light source is placed laterally to the angled mirror whose beam impinges on the mirror and is deflected by the microscope objective as illuminating light to the substrate and irradiates the substrate and is directed to at least one nanoparticle, wherein in the particle-reflected backscatter light, which is guided through the semitransparent mirror, a readable nanoparticle is visible bright on dark.

Below subordinate to the substrate and the optical system can optionally a detection unit for recognizing a readable nanoparticle be provided, wherein the detection unit in the particle-reflected Backscattered by the angled semi-permeable Mirror is guided through, is arranged and the nanoparticles Bright on dark registered.

The Detection unit can with the positioning and / or the 3D positioner keep in touch.

The Detection unit can, for. As a spectrometer or a camera with represent a connected digital image processing.

Instead of The detection unit can also be an observer for visualization of the selected nanoparticle to be read below be placed in the optical system.

The optical properties of the nanoparticle are preferably present Use of the probe defined.

Of the Probe tip area may be provided with a blunt tip, the blunt tip being a flat plateau or a domed one Surface can represent.

The Plateau may have a diameter of less than 100 nm.

The Nanoparticles can be made of metal or metallic alloys exist or be coated metallically.

• – Versehen des Sondenspitzenbereiches mit einem Haftmolekül,
• – Positionierung der Sonde über dem Substrat mit mindestens einem auf dem Substrat aufliegenden, auflesbaren Nanopartikel und
• – Zuordnung des Substrats zu einem 3D-Positionierer,

wobei gemäß dem Kennzeichenteil des Patentanspruchs 14 folgende Schritte durchgeführt werden:

• – Einsetzen eines transparenten Substrats in den 3D-Positionierer,
• – Aufbringen einer einen substratgleichen Brechungsindex aufweisenden Immersionsflüssigkeit auf das Substrat und Einbettung von auflesbaren Nanopartikeln in der Immersionsflüssigkeit,
• – Beleuchtung des Substrats von der den Nanopartikeln abgewandten Gegenseite des Substrats,
• – Detektion eines auf dem Substrat aufliegenden und positionierten, für die Auflesung ausgewählten Nanopartikels in dem Rückstreulicht des Nanopartikels auf dunklem Hintergrund,
• – Auflesen und Anbinden des Hell auf Dunkel registrierten, ausgewählten Nanopartikels durch die vertikal verschiebbare Sonde.

The method for the production of optically sensitive probes for scanning probe microscopy by means of the previously mentioned device comprises the following steps:

• Providing the probe tip region with an adhesion molecule,
• - Positioning of the probe over the substrate with at least one resting on the substrate, readable nanoparticles and
• Assignment of the substrate to a 3D positioner,

according to the characterizing part of patent claim 14, the following steps are carried out:

• Inserting a transparent substrate in the 3D positioner,
• Applying an immersion liquid having a substrate-like refractive index to the substrate and embedding readable nanoparticles in the immersion liquid,
• Illumination of the substrate from the opposite side of the substrate from the nanoparticles,
• Detection of a nanoparticle lying on the substrate and positioned, selected for the reading, in the backscattered light of the nanoparticle on a dark background,
• - Reading and binding of the light on dark registered, selected nanoparticle by the vertically displaceable probe.

The invention will be explained in more detail with reference to an exemplary embodiment by means of several drawings:
Show it:

1 a schematic representation of a device according to the invention for the production of optically sensitive probes for Scanning Probe Microscopy and

2 a schematic representation of the read operation on a single blunt-formed probe tip with a flat plateau, wherein

2a the nanoparticles to be read in the immersion liquid rests on the substrate and

2 B The picked up nanoparticle at the plateau tip rests and sticks.

• – ein Substrat 3, dem mindestens ein Nanopartikel 41, 42, 43 zugeordnet ist, wobei die Sonde 2 in einem vorgegebenen Abstand oberhalb des Substrats 3 angeordnet ist,
• – einen 3D-Positionierer 5, der mit dem Substrat 3 in Verbindung steht,

wobei zur Führung der Sonde 2 zwischen dem 3D-Positionierer 5 und der Sonde 2 eine Positioniereinrichtung 14 geschaltet ist, in der Positionssignale des Substrats 3 und/oder der Sonde 2 zur Lagefestlegung eines ausgewählten, von der Sonde 2 auflesbaren Nanopartikels 42 koordiniert und verarbeitet werden.In 1 is schematically a device 1 for producing an optically sensitive probe 2 for scanning probe microscopy, with the probe 2 with at least one adhesion molecule 4 in the associated probe tip area 20 is occupied, which contains

• A substrate 3 , the at least one nanoparticle 41 . 42 . 43 is assigned, the probe 2 at a predetermined distance above the substrate 3 is arranged
• - a 3D positioner 5 that with the substrate 3 communicates

being to guide the probe 2 between the 3D positioner 5 and the probe 2 a positioning device 14 is switched, in the position signals of the substrate 3 and / or the probe 2 for locating a selected, from the probe 2 readable nanoparticle 42 coordinated and processed.

• – eine Beleuchtungsquelle 9 zur Beleuchtung mindestens eines auf dem Substrat 3 aufliegenden Nanopartikels 41, 42, 43 mittels Durchstrahlung des transparenten Substrats 3 und
• – zumindest ein invertes, auf das Substrat 3 gerichtetes optisches System 6 zur Aufnahme des Rückstreulichtes 13 des Nanopartikels 42

vorgesehen,
wobei unterhalb des Substrats 3 im partikelreflektierten Rückstreulicht 13 das ausgewählte, von der Sonde 2 auflesbare Nanopartikel 42 Hell auf Dunkel registrierbar ist.According to the invention, the substrate 3 formed transparent on which an immersion liquid 11 having a substrate-like refractive index and in the at least one nanoparticle 41 . 42 . 43 embedded, and are below the transparent substrate 3

• - a lighting source 9 for illuminating at least one on the substrate 3 resting nanoparticles 41 . 42 . 43 by irradiation of the transparent substrate 3 and
• - At least one invertes, on the substrate 3 directed optical system 6 for receiving the backscatter light 13 of the nanoparticle 42

intended,
being below the substrate 3 in the particle-reflected backscatter light 13 the selected, from the probe 2 readable nanoparticles 42 Bright on dark is registerable.

The illumination source 9 is one over one below the substrate 3 arranged, angled, semi-transparent mirror 7 on the substrate 3 directable, fade-in white light source, as in 1 shown, or may be the ends or tips of a white light transmitting fiber optic cable, which is below the substrate 3 to the substrate 3 is arranged, represent.

• – einem Mikroskopobjektiv und
• – einem halbdurchlässigen Spiegel 7,

die in der angegebenen Reihenfolge unterhalb des Substrats 3 angeordnet sind, wobei seitlich zum abgewinkelt eingesetzten Spiegel 7 eine Weißlichtquelle 9 platziert ist, deren Strahlenbündel 10 auf den Spiegel 7 trifft und durch das Mikroskopobjektiv 6 als Beleuchtungslicht 12 zum Substrat 3 abgelenkt wird sowie das Substrat 3 durchstrahlt und auf mindestens ein Nanopartikel 42 gerichtet ist, wobei im partikelreflektierten Rückstreulicht 13, das durch den halbdurchlässigen Spiegel 7 hindurch geführt ist, ein auflesbares Nanopartikel 42 Hell auf Dunkel sichtbar ist.The optical system 6 consists

• - a microscope lens and
• - a half-transparent mirror 7 .

in the order listed below the substrate 3 are arranged, wherein laterally to the angled inserted mirror 7 a white light source 9 is placed, whose beam 10 on the mirror 7 hits and through the microscope lens 6 as illumination light 12 to the substrate 3 is deflected and the substrate 3 irradiated and at least one nanoparticle 42 is directed, wherein in the particle-reflected backscatter light 13 passing through the semitransparent mirror 7 passed through, a readable nanoparticle 42 Bright on dark is visible.

As in 1 is shown below the substrate 3 and a detection unit downstream of the optical system 8th for recognizing a readable nanoparticle 41 . 42 . 43 provided, wherein the detection unit 8th in the particle-reflected backscatter light 13 that by the angled semi-transparent mirror 7 is guided through, is arranged and the nanoparticle 42 Bright on dark registered.

The detection unit 8th stands with the positioning unit 14 and / or the 3D positioner 5 in connection.

The detection unit 8th serves to register the of the immersion liquid 11 surrounded nanoparticle 42 on the substrate 3 and can z. B. represent a spectrometer or a camera with a connected digital image processing.

Instead of the detection unit 8th But also an observer can visualize a readable nanoparticle 42 below the optical system 6 be placed.

Preferably, the optical properties of the nanoparticle 42 before using the probe 2 Are defined. The nanoparticles 41 . 42 . 43 may preferably be made of metal or metallic alloys or be coated with metal.

As in 2 can be shown, the probe tip area 20 with a blunt tip 18 Be provided with the blunt tip 18 a flat plateau 19 having.

The plateau 19 may have a diameter of less than 100 nm.

• – Versehen des Sondenspitzenbereiches 20 mit einem Haftmolekül 4,
• – Positionierung der Sonde 2 über dem Substrat 3 mit mindestens einem aufliegenden, auflesbaren Nanopartikel 41, 42, 43 und
• – Zuordnung des Substrats 3 zu einem 3D-Positionierer 5.

The process for producing an optically sensitive probe 2 for scanning probe microscopy by means of the device 1 has the following steps:

• - Provide the probe tip area 20 with an adhesion molecule 4 .
• - Positioning of the probe 2 above the substrate 3 with at least one overlaid, readable nanoparticle 41 . 42 . 43 and
• - Assignment of the substrate 3 to a 3D positioner 5 ,

• – Einsetzen eines transparenten Substrats 3 in den 3D-Positionierer 5,
• – Aufbringen einer einen substratgleichen Brechungsindex aufweisenden Immersionsflüssigkeit 11 auf das Substrat 3 und dadurch Einbettung von auflesbaren Nanopartikeln 41, 42, 43 in der Immersionsflüssigkeit 11,
• – Beleuchtung des Substrats 3 von der den auf dem Substrat 3 aufliegenden Nanopartikeln 41, 42, 43 abgewandten Gegenseite des Substrats 3,
• – Detektion des positionierten, für die Auflesung ausgewählten Nanopartikels 42 in dem Rückstreulicht 13 des Nanopartikels 42 auf dunklem Hintergrund und
• – Auflesen und Anbinden des Hell auf Dunkel registrierten, ausgewählten Nanopartikels 42 durch die vertikal verschiebbare Sonde 2.

According to the invention the following steps are provided:

• - Inserting a transparent substrate 3 in the 3D positioner 5 .
• - Applying a substrate-like refractive index having immersion liquid 11 on the substrate 3 and thereby embedding readable nanoparticles 41 . 42 . 43 in the immersion liquid 11 .
• - Illumination of the substrate 3 from the one on the substrate 3 resting nanoparticles 41 . 42 . 43 remote from the substrate 3 .
• Detection of the positioned nanoparticle selected for reading 42 in the backscatter light 13 of the nanoparticle 42 on a dark background and
• - Reading and linking the light on dark registered, selected nanoparticle 42 through the vertically displaceable probe 2 ,

The following is the operation of the device 1 according to 1 and 2 explained in more detail:
Because the substrate 3 is transparent, can with an inverted optical microscope objective 6 a metal nanoparticle to be read 42 to be analyzed. Larger particles that z. B. greater than 50 nm for gold, can now be readily detected optically. Is not an immersion liquid 11 present, be at the interface 15 between substrate 3 and air, however, always about 2% of the illumination light 12 to the detection unit 8th or an observer placed in place of the detection unit in the lower half space 16 reflected, so in the backscattered light 13 only a weakly lit background arises. The Z. B. metallic nanoparticles 42 scatters a part of the illumination light 12 also in the upper half-space 17 as forward scattering by the nanoparticle 42 and a part in the lower half space 16 as backward scattering by the nanoparticle 42 , By the backward scattering 13 a strongly scattering nanoparticle appears 42 in the backscatter picture bright on dark background. However, the background is not sufficiently dark that smaller nanoparticles can not be seen because the contrast with the background is too weak, because the particles not only backscatter light but also reduce the reflection of light on the glass surface.

For a visualization and detection as well as positional analysis of even smaller nanoparticles 42 the following results:
The backward scattering of the illumination light 12 is prevented by the upper half-space 17 with an immersion liquid 11 is filled, which has the same refractive index as the substrate 3 owns, for. B. for glass as a substrate material is the immersion oil. As a result, only that of the nanoparticle falls in the detection / observation direction 42 backscattered scattered light 13 , which now always appear bright on dark regardless of particle diameter and material. It is essential that the backscatter light 13 of the nanoparticle 42 in its polarization-dependent, spectral properties the properties of the nanoparticle 42 reflects. It is therefore preferable that the optical properties of the nanoparticle 42 before using the probe 2 To be defined.

For the visualization and detection as well as the position analysis of the probe 2 results according to 2 following:
As for the user, the optical interaction of the nanoparticle 42 is of interest, it is sufficient for the probe tip area 20 a dull tip 18 to use, which is a largely flat plateau 19 of less than 100 nm in diameter, as in 2a is shown. Also, a larger plateau is possible, as well as a curved surface. Such a plateau 19 can with conventional light microscopy using the optical system 6 be made visible. Even with glass fiber tips, the nanoparticles can 41 . 42 . 43 via a fiber-coupled light source 9 be illuminated. Thus, the overlying and aufzulesende, to be bound nanoparticles 42 and the flat plateau 19 be positioned sufficiently precisely above each other. The positioning accuracy is generally much higher than the resolution of the microscope objective used 6 , Because the probe 2 previously with the adhesion molecule 4 is provided, a single descent is sufficient (arrow 21 ) of the probe 2 to the metal nanoparticle 42 to read, as in 2a is shown to probe after the reading and connection process 2 to the original position, as in 2 B is shown to go back (arrow direction 22 ). Thus, the method according to the invention also allows the visual tracking of the read-up process of the nanoparticle 42 on the spot (x, y, z) and in real time (t) in the upper half-space 17 ,

• – Durch die Vorrichtung 1 ist keine zeitaufwändige xy-Abrasterung des Substrates 3 zur Auflesung von Nanopartikeln 41, 42, 43 erforderlich,
• – die störende Rückwärtsstreuung des Beleuchtungslichtes 12 an der Substratgrenzfläche ohne Immersionsflüssigkeit 11 wird durch die erfindungsgemäße Vorrichtung 1 unterbunden,
• – die im Strahlengang befindlichen Nanopartikel 41, 42, 43 erscheinen nun stets deutlich hell auf dunklem Hintergrund,
• – die Nanopartikel 41, 42, 43 sind unabhängig von Partikeldurchmesser und Material, immer Hell auf Dunkel, sichtbar,
• – somit sind auch kleinste Partikelgrößen, beispielsweise Goldpartikel von 10 nm, registrierbar und auch visuell identifizierbar,
• – für die Sonde 2 braucht schließlich nur eine stumpfe Spitze 18 eingesetzt zu werden, da an der Spitze nur die optische Wechselwirkung des Nanopartikels 41, 42, 43 von Interesse ist. Die stumpfe Sondenspitze 18 ist folglich mit herkömmlicher Lichtmikroskopie sichtbar.
• – Es reicht ein einmaliges Herabfahren der mit dem Haftmolekül 4 versehenen Sonde 2, um ein Nanopartikel 42 aufzulesen,
• – da das Rückstreulicht 13 des Nanopartikels 42 in seinen polarisationsabhängigen, spektralen Eigenschaften die Eigenschaften des Nanopartikels 42 widerspiegelt, sind vorzugsweise die optischen Eigenschaften des Nanopartikels 41, 42, 43 schon vor Benutzung der Sonde 2 genau definiert,
• – das erfindungsgemäße Verfahren erlaubt auch das visuelle Verfolgen des Auflesevorgangs des Nanopartikels 42 unmittelbar vor dem Sondenspitzenbereich 20 in Echtzeit,
• – der Auflesevorgang 21, 22 in z-Richtung des in 1 angegebenen xyz-Koordinatensystems kann zeitlich schnell und mit einfachen Mitteln vollzogen werden,
• – mithilfe herkömmlicher Optik in Form des angegebenen optischen Systems 6 lässt sich eine Routine mit hoher Reproduzierbarkeit sicherstellen.

The invention opens up the following possibilities:

• - Through the device 1 is no time-consuming xy-scanning of the substrate 3 for the reading of nanoparticles 41 . 42 . 43 required,
• - The disturbing backward scattering of the illumination light 12 at the substrate interface without immersion liquid 11 is achieved by the device according to the invention 1 inhibited
• - The nanoparticles in the beam path 41 . 42 . 43 now always appear clearly bright on a dark background,
• - the nanoparticles 41 . 42 . 43 are visible regardless of particle diameter and material, always bright on dark,
• - Thus, even the smallest particle sizes, such as gold particles of 10 nm, can be registered and also visually identifiable,
• - for the probe 2 All you need is a dull tip 18 be used because at the top only the optical interaction of the nanoparticle 41 . 42 . 43 is of interest. The blunt probe tip 18 is therefore visible with conventional light microscopy.
• - It is sufficient to drive down once with the adhesive molecule 4 provided probe 2 to a nanoparticle 42 glean
• - because the backscatter light 13 of the nanoparticle 42 in its polarization-dependent, spectral properties the properties of the nanoparticle 42 are preferably the optical properties of the nanoparticle 41 . 42 . 43 even before using the probe 2 exactly defined,
• - The inventive method also allows the visual tracking of the read-up of the nanoparticle 42 immediately before the probe tip area 20 Real time,
• - the read-up process 21 . 22 in z-direction of in 1 specified xyz coordinate system can be done quickly and with simple means,
• - using conventional optics in the form of the specified optical system 6 can ensure a routine with high reproducibility.

1

contraption

2

probe

3

substratum

4

adhesion molecule

41

first nanoparticles

42

second nanoparticles

43

third nanoparticles

5

3D positioner

6

optical system

7

semipermeable mirror

8th

detection unit

9

White light source

10

ray beam

11

liquid

12

illumination light

13

Backscatter

14

positioning

15

interface

16

lower half space

17

upper half space

18

dull top

19

plateau

20

Probe tip region

21

moving down the probe

22

return the probe

QUOTES INCLUDE IN THE DESCRIPTION

This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.

Cited non-patent literature

• - Sqalli, Bernal, Hoffmann, Marquis-Weibel: Improved Tip performance for scanning near-field optical microscopy by the attachment of a single gold nanoparticle, Applied Physics Letters, Volume 76, no. 15, p. 2134-2136 [0003]
• Kalkbrenner, Ramstein, Mlynek and Sandoghdar: A single gold particle as a sample for apertureless near-field optical microscopy, Journal of Microscopy, Volume 202-1, p.72-76 (2001) [0004]

Claims (14)

Contraption ( 1 ) for the preparation of optically sensitive probes ( 2 ) for scanning probe microscopy, wherein the probe ( 2 ) with at least one adhesion molecule ( 4 ) in the associated probe tip region ( 20 ), containing - a substrate ( 3 ) containing at least one nanoparticle ( 41 . 42 . 43 ), the probe ( 2 ) at a predetermined distance above the substrate ( 3 ), - a 3D positioner ( 5 ), which is in contact with the substrate ( 3 ), whereby to guide the probe ( 2 ) between the 3D positioner ( 5 ) and the probe ( 2 ) a positioning device ( 14 ), in the position signals of the substrate ( 3 ) and / or the probe ( 2 ) for determining the position of a selected one, of the probe ( 2 ) readable nanoparticle ( 42 ) are coordinated and processed, characterized in that the substrate ( 3 ) is transparent, on which an immersion liquid ( 11 ), which has a substrate-like refractive index and in which at least one nanoparticle ( 41 . 42 . 43 ), and below the transparent substrate ( 3 ) - a lighting source ( 9 ) for illuminating at least one on the substrate ( 3 ) nanoparticle ( 41 . 42 . 43 ) by irradiation of the transparent substrate ( 3 ) and - at least one invertes, on the substrate ( 3 ) directed optical system ( 6 ) for receiving the backscatter light ( 13 ) of the nanoparticle ( 42 ) are provided below the substrate ( 3 ) in the particle-reflected backscatter light ( 13 ) the selected, from the probe ( 2 ) readable nanoparticles ( 42 ) It is possible to register light on dark. Device according to claim 1, characterized in that the illumination source ( 9 ) one via an angled, semi-transparent mirror ( 7 ) on the substrate ( 3 ) directable, insertable white light source or the ends or tips of a white light transmitting optical fiber cable, which are located below the substrate ( 3 ) to the substrate ( 3 ) is arranged guided, represents. Device according to claim 1, characterized in that the optical system ( 6 ) contains a microscope objective. Device according to Claims 1 to 3, characterized in that the optical system ( 6 ) - a microscope objective and - a semitransparent mirror ( 7 ) in the order indicated below the substrate ( 3 ) are arranged, wherein laterally to the angled inserted mirror ( 7 ) a white light source ( 9 ), whose bundles of rays ( 10 ) on the mirror ( 7 ) and through the microscope objective ( 6 ) as illumination light ( 12 ) to the substrate ( 3 ) and the substrate ( 3 ) and at least one nanoparticle ( 42 ), wherein in the particle-reflected backscatter light ( 13 ) through the semitransparent mirror ( 7 ), the readable nanoparticles ( 42 ) Bright on dark is visible. Apparatus according to claim 1 to 4, characterized in that below the substrate ( 3 ) and the optical system, optionally a detection unit ( 8th ) for recognizing a readable nanoparticle ( 41 . 42 . 43 ), the detection unit ( 8th ) in the particle-reflected backscatter light ( 13 ) through the angled semi-transparent mirror ( 7 ) is guided, is arranged and the nanoparticles ( 42 ) Registered in the dark. Apparatus according to claim 5, characterized in that the detection unit ( 8th ) with the positioning unit ( 14 ) and / or the 3D positioner ( 5 ). Apparatus according to claim 5 or 6, characterized in that the detection unit ( 8th ) represents a spectrometer or a camera with a connected digital image processing. Apparatus according to claim 1 to 7, characterized in that instead of the detection unit ( 8th ) an observer for the visualization of an overlaid, readable nanoparticle ( 42 ) below the optical system ( 6 ) is placed. Device according to claim 1, characterized in that the optical properties of the nanoparticle ( 42 ) before using the probe ( 2 ) are defined. Device according to claim 1, characterized in that the probe tip region ( 20 ) with a blunt tip ( 18 ) is provided. Device according to claim 10, characterized in that the blunt tip ( 18 ) in the form of a flat plateau ( 19 ) or a curved surface is formed. Device according to claim 11, characterized in that the plateau ( 19 ) preferably has a diameter of less than 100 nm. Device according to at least one preceding claim, characterized in that the nanoparticles ( 41 . 42 . 43 ) are preferably made of metal or metallic alloys or Metallic coated. Process for the production of optically sensitive probes for scanning probe microscopy by means of the device according to claims 1 to 13, comprising the following steps: - providing the probe tip region ( 20 ) with an adhesion molecule ( 4 ), - positioning of the probe ( 2 ) above the substrate ( 3 ) with at least one superimposed readable nanoparticle ( 41 . 42 . 43 ) and - assignment of the substrate ( 3 ) to a 3D positioner ( 5 ), characterized by the following steps - inserting a transparent substrate ( 3 ) into the 3D positioner ( 5 ), - applying an immersion liquid having a substrate-like refractive index ( 11 ) on the substrate ( 3 ) and thus embedding of readable nanoparticles ( 41 . 42 . 43 ) in the immersion liquid ( 11 ), - illumination of the substrate ( 3 ) of the nanoparticles ( 41 . 42 . 43 ) facing away from the substrate ( 3 ), - detection of one on the substrate ( 3 ) and positioned, selected for the reading nanoparticle ( 42 ) in the backscattered light ( 13 ) of the nanoparticle ( 42 ) on a dark background, - reading and connecting the light-on-dark registered, selected nanoparticle ( 42 ) by the vertically displaceable probe ( 2 ).