DE102006011598A1 - Cantilever of a scanning probe microscope - Google Patents

Abstract

The invention relates to a cantilever (15) of a scanning probe microscope (10) with a scanning tip (16). The invention also relates to a scanning probe microscope (10), in particular an atomic force microscope (10), and a method for operating a scanning probe microscope (10), in particular an atomic force microscope (10), a sample being provided with a scanning tip (16) arranged on a cantilever (15) (12) is recorded in a grid. The invention further relates to the use of a cantilever (15). The cantilever (15) is characterized in that the cantilever (15) consists of a piezoelectric body (30) and that the piezoelectric body (30) with a first pair of electrical contacts (26, 31, 32, 35, 36) and a second pair of electrical contacts (27, 32, 33, 37, 38) is provided, the piezoelectric body (30) being supplied with a first electrical quantity on the input side via the first pair of electrical contacts (26, 31, 32, 35, 36) is or will be and with the second pair of electrical contacts (27, 32, 33, 37, 38) a characteristic property of the piezoelectric body (22) is detected on the output side with the aid of detected electrical currents.

Description

The The invention relates to a cantilever of a scanning probe microscope with a tip. Furthermore the invention relates to a scanning probe microscope, in particular an atomic force microscope, and a method for operating a scanning probe microscope, in particular Atomic force microscopes, with one arranged on a cantilever Tip a sample grid-shaped is detected. Furthermore, the invention relates to a use of a Cantilever.

through an Atomic Force Microscope (AFM) can be properties of a sample, in particular properties of a Sample surface, in the subnanometer area. These include, for example, mechanical properties like surface texture (Topography), elasticity, Friction, adhesion etc. as well as electrical properties such as charge distributions and magnetic properties, such as magnetic domain structures.

Atomic force microscopy uses a force sensor as a probe, which detects the electromagnetic forces between a sample and the probe. The electromagnetic forces are typically between 10 ^-7 and 10 ^-12 N.

When Measuring probe is a cantilevered or fixed spring beam (English Cantilever) used, at the free end of which is a tip. With a probe properties of a sample or surfaces of Objects grid-shaped detected.

by virtue of the interaction between sample and tip changes a characteristic Property of the cantilever that is detected, and thus knowledge about properties the sample allowed.

The electromagnetic forces, that affect the top, change a characteristic feature of the cantilever. This measurand is determined by a suitable device detected. To one or more properties a sample spatially resolved (at different XY coordinates), the measuring probe becomes by means of an XY actuator relative to the surface of a Sample moves. The measured variable becomes relative to the XY coordinate relative to the surface detected.

Of Furthermore, it is possible the measurand constant by holding the position of the probe relative to the surface of a Sample is readjusted accordingly. This is done with the help of a Control circuit corresponding to a Z-actuator or actuator retraces. Furthermore At a certain location of the sample, the distance dependence of the Measured variable recorded be by using a Z-actuator the distance between Surface and Measuring probe is varied.

in the static mode of atomic force microscopy is the bending of the Cantilever the measurand, i. the changing one characteristic feature of the cantilever. In dynamic mode oscillates the cantilever. The measurand, i. the changing one characteristic feature of the cantilever, is the frequency, Amplitude or phase of cantilever oscillations.

Depending on the type of sample and the sample property to be examined, suitable measuring probes are selected. The most important parameters are spring constant and resonance frequency of the cantilever. They depend on the modulus of elasticity of the material from which the cantilever is made. In addition, the exact value for spring constant and resonance frequency can be set via the geometric dimensions. Typical spring constants range from 10 ^-2 N / m to 10 ² N / m, while typical resonant frequencies are in the range of 10 kHz to 500 kHz.

When Materials for Measuring probes are often silicon, silicon nitride and metals like Tungsten, iron, nickel and platinum-iridium in use. probes silicon and silicon nitride have either beam- or V-shaped cantilevers and be inclusive the integrated tip at the free end with microelectronic processes produced. Metallic probes are made of a wire, whose one end is etched to a peak. In front of the top will be the wire is bent over. The other end is firmly clamped.

Around a cantilever for to stimulate the dynamic mode to vibrate becomes the measuring probe attached to an external oscillator, which caused it to oscillate becomes and so the cantilever vibrated. As external Oscillator typically a piezoelectric material is used and acted upon by a suitable electrical AC voltage.

To detect the bending of the cantilever in static or dynamic mode, several methods are available. Widely used is the light pointer method, which is exemplified here. A beam of light is focused on the free end of the cantilever, from where it is reflected towards a position sensitive photodetector, a two- or four-segment photodiode. The reflected beam and the position-sensitive photodiode are adjusted to one another in such a way that, when the cantilever deflects, the light intensity irradiated onto the individual segments changes. In the The change in intensity is thus a measure of the bending of the cantilever.

The XY and Z actuator is usually off made of a piezoelectric material. To the measuring probe relative to the surface To move the sample, the inverse piezoelectric effect is used. By applying an electrical voltage, the geometric change Dimensions of the material, creating a movement. To a calibration of the piezoelectric actuator, the XYZ position of the probe relative to the surface of the sample in well-defined length units be specified. The control of the XYZ actuator and the Data is recorded by means of a computer.

Of the Current state of the art requires that the bending of the Cantilevers by means of an external device - a deflection detector - detected becomes the position-sensitive photodiode (in the light-pointer method), whereby in particular an adjustment of the device relative to the cantilever is necessary, as explained using the example of the light pointer method.

Of Furthermore, it is necessary in dynamic mode, the spring bar using an external oscillator.

In addition, for example, off DE 196 33 546 A1 a device for non-contact scanning of a surface described.

outgoing from this prior art, it is an object of the present invention by providing a cantilever the construction as well as the Operation of an atomic force microscope to simplify.

Is solved this task by a cantilever of a scanning probe microscope with a tip that is further developed by the cantilever from a piezoelectric body exists and that the piezoelectric body with a first pair electrical contacts and a second pair of electrical contacts is provided, wherein the piezoelectric body via the first pair of electrical contacts On the input side is acted upon or becomes a first electrical variable and being over the second pair of electrical contacts have a characteristic electrical Size of the piezoelectric body is or is recorded on the output side.

The Invention is based on the idea that the cantilever in operation a scanning probe microscope or the piezoelectric body by a from the outside electrical applied to the first pair of electrical contacts Alternating field, for example by means of an AC voltage to vibrations is stimulated. This will make the piezoelectric body itself to an electrical power source that has an electrical feedback on the excited or exciting vibration of the piezoelectric body exercises. This is due to the input-side loading of the piezoelectric body For example, with an AC voltage a kind of self-excitation device educated. By the output side detected electrical variable is a kind of detection device is formed.

By the (self-) excitation device is the piezoelectric body or the cantilever in operation or in use in a scanning probe microscope in combination with an input-side AC voltage source exposed to an electric field, so that the piezoelectric body a change of shape (reciprocal piezoelectric effect) experiences. This shape change of the body sits down as a muted periodic oscillation with single excitation continues. To the electric Connection, the piezoelectric body, for example, metal electrodes on, causing the piezoelectric body to vibrate becomes.

at the cantilever according to the invention neither an external oscillator is needed to power the cantilever Stimulate vibrations, nor an external device (deflection detector), to detect the bending of the cantilever. This accounts time-consuming and difficult adjustments to the atomic force microscope, the so far according to the current state of the art of experts or experts before the actual beginning of the data acquisition have to.

By the provision of a cantilever according to the invention is further also the sensitivity and Accuracy of measurements by scanning probe microscopy significantly elevated, which continues to be a simple and robust construction of a scanning probe microscope results.

Of the Cantilever is characterized according to a preferred embodiment characterized in that the first pair of electrical contacts and the second Pair of electrical contacts are mounted so that mutual crosstalk electrical signals (so-called cross-talk) after exposure of the first pair of electrical contacts and / or the second pair of electrical Contacts with an electrical size is reduced or is.

In order to arrange the cantilever on a substrate or a carrier, the piezoelectric body is advantageously formed electrically insulated. Further embodiments of the method result from the fact that the electrodes and the piezoelectric body of the cantilever are so electrically isolated from the environment that he in liquid th and reactive gases can be used.

Especially is the piezoelectric body by the application with the first electrical variable in vibration added. Advantageously, this is or is the piezoelectric body offset in at least one resonance oscillation.

Around the piezoelectric body to stimulate self-oscillations, the first electrical variable is one AC voltage. A corresponding AC voltage source is included connected to the input side contact, so that the inventive piezoelectric body in combination with the voltage source as a kind of self-excitation device is operated.

Furthermore is in a preferred embodiment of the cantilever provided that more electrical contacts on piezoelectric body are arranged so that when applying another electrical Size, in particular AC voltage by another voltage source, to these other electrical contacts at least one more additional or predetermined oscillation of the piezoelectric body causes becomes.

moreover it is preferred if the surface of the piezoelectric body partially with an electrically conductive Coating is provided. This makes it possible to use the piezoelectric Body over his to contact entire width. In a further education the are formed electrical contacts as coatings.

To It is envisaged that the electrically conductive coating of gold or silver, which on the piezoelectric body by means of appropriate methods is applied.

Furthermore the cantilever is characterized by the fact that when using the cantilever in a scanning probe microscope, in particular an atomic force microscope, Based on the interaction of the tip or the probe with a Sample, for example, a surface of an object when exposed of the piezoelectric body with an input-side voltage source by means of the detected second electrical size one characteristic property of the means of the first electrical variable to oscillations excited piezoelectric body is detected.

Prefers are doing frequency changes, amplitude changes or phase changes of the piezoelectric body detected, which excited by means of the first electrical variable to vibrate is or is. Here is the strength of the frequency changes, amplitude changes or phase changes of the piezoelectric body Measure of the strength of Interaction between the surface of the object and the probe or the grid peak. The changes frequency, amplitudes or phases as changing characteristic Property of the piezoelectric body serve as a measure of a with an inventive Cantilever powered atomic force microscope.

moreover is the characteristic detected by the second electrical quantity Property of cantilever a frequency amplitude change or phase change.

In a preferred embodiment is the piezoelectric body cuboid formed, resulting in a simple production of the cantilever results. Here is the cuboid Twill of the Cantilever provided with the corresponding intermediate contacts or applied a corresponding electrically conductive coating.

According to one Alternative embodiment, the piezoelectric body is V-shaped.

Especially consists of the piezoelectric body made of quartz.

Furthermore it is envisaged that as a second electrical variable the current, in particular alternating current, the output side is detected or is.

moreover it is preferable in a development that the tip of tungsten, Platinum-iridium, silicon, quartz or silicon nitride exists.

Further the object is achieved by a scanning probe microscope, in particular an atomic force microscope, solved, that with a cantilever invention described above is trained. To avoid repetition is to the above versions expressly directed.

Furthermore, the object is achieved by a method for operating a scanning probe microscope, in particular atomic force microscope, wherein with a arranged on a cantilever tip a surface of an object or a sample to be examined is detected in a raster shape, which is further developed by the formed of a piezoelectric body cantilever is excited to at least one oscillation with a first electrical variable and based on the detected second electrical variable of the cantilever due to an interaction of the tip with the sample or the surface of the object one or more properties of the sample are detected or determined. For example, this may underlie the topology or structure of a sample or sample surface to be looked for.

To it is preferred if the cantilever input side with an AC voltage acted upon by an AC voltage source as the first electrical variable is, whereby the piezoelectric body excited to vibrate becomes.

preferably, on the output side, the second electric variable is the time course of a current, especially AC, detected. In addition, it is preferable when the piezoelectric body of the cantilever is electrically isolated, causing the cantilever on a carrier or the like, and in liquids and reactive gases, i.e. in appropriate and predetermined liquid or gaseous atmospheres operated can be.

Further embodiments of the method result from the fact that the scanning probe microscope is operated with a cantilever according to the invention described above.

In addition, will solved the task by use of a cantilever according to the invention in a scanning probe microscope, in particular atomic force microscope.

to Avoidance of repetitions will be on the above statements to the cantilever according to the invention directed.

The Invention will be described below without limiting the general inventive concept of exemplary embodiments with reference to the drawings described by way of example by the way in terms of the disclosure of all unspecified in the text details of the invention expressly is referenced. Show it:

1a schematically an arrangement of an atomic force microscope according to the prior art, wherein the atomic force microscope in dynamic mode with frequency modulation (FM technique) is operated;

1b schematically an arrangement of an atomic force microscope according to the prior art, wherein the atomic force microscope in the dynamic mode with amplitude modulation (AM technology) is operated;

2a schematically an arrangement of an atomic force microscope with a cantilever according to the invention, wherein the atomic force microscope in the dynamic mode with frequency modulation (FM technology) is operated;

2 B schematically an arrangement of an atomic force microscope with a cantilever according to the invention, wherein the atomic force microscope in the dynamic mode with amplitude modulation (AM technology) is operated;

3a . 3b in each case an embodiment of a beam-shaped cantilever according to the invention in a plan view and a cross-sectional view;

3c an embodiment of a V-shaped cantilever according to the invention in a plan view of the front and back and

4 schematically a cross section through a cantilever according to the invention.

In The following figures are each the same or similar elements or corresponding parts provided with the same reference numerals, so that apart from a corresponding renewed idea becomes.

1a and 1b each show schematically an arrangement of an atomic force microscope 10 according to the prior art. The atomic force microscope 10 has an XYZ actuator 11 with which a sample 12 relative to a probe 13 is moved. The measuring probe 13 is on a bracket 14 appropriate. The measuring probe 13 consists of a cantilevered spring bar 15 (English Cantilever), at the free end of a tip 16 located.

A bending of the cantilever 15 comes with a displacement detector 17 detected. In the case of the light pointer principle is on the free end of the back of the cantilever 15 , ie on the other side of the cantilever facing away from the screen tip 15 , a laser beam focused such that the reflected laser beam onto a position sensitive photodetector 17 (a two- or four-segment photodiode) hits, with the bending of the cantilever 15 can be detected. The reflected beam and the position sensitive photodetector 17 are adjusted to each other so that at a bending of the cantilever 15 the incident on the individual segments light intensity changes and thus a measure of the bending of the cantilever 15 is.

In static mode atomic force microscopy is the most position sensitive photodetector 17 detected bending of the cantilever 15 directly the measurand (the changing characteristic property of the cantilever).

In dynamic mode, the cantilever oscillates 15 , He is on an external oscillator 18 attached, which is excited to oscillate and thereby the cantilever 15 makes you swing. The external oscillator 18 is usually a piezoelectric Material that is exposed to an AC voltage. From the position-sensitive photodetector 17 detected oscillating signal can be determined by a suitable downstream detection electronics, the frequency, amplitude or phase of Cantileveroszillation. The measured variable or the changing characteristic property of the cantilever 15 Thus, it may be either the frequency, amplitude or phase of the cantilever oscillation.

ever according to which measurand is to be used, the downstream detection electronics varies. The following is the frequency modulation technique (FM) and the amplitude modulation technique (AM).

According to the embodiment of the prior art in 1a is the frequency change of the cantilever in the frequency modulation technique 15 , caused by an interaction between measuring probe and sample, the measured variable. Here is the cantilever 15 the frequency-determining element of an oscillator circuit. The cantilever 15 always oscillates with its resonant frequency.

One through an interaction between tip 16 and sample 12 caused frequency change of the cantilever 15 leads through positive feedback to an instantaneous change of the current resonance frequency. The positive feedback is achieved by the position sensitive photodetector 17 detected oscillating signal by means of an amplitude regulator 19 amplified and via a phase shifter 20 to the external oscillator 18 is fed back.

The phase shifter 20 is set so that the positive feedback becomes maximum. The amplitude controller 19 may also be such that an automatic gain control keeps the amplitude of the cantilever oscillation constant to a predetermined desired amplitude value by adjusting the magnitude of the excitation of the external oscillator 18 is varied accordingly. The frequency of the cantilever is obtained from the oscillating signal at the position sensitive photodetector 17 by means of a frequency demodulator 21 , for example, with a phase-locked loop (PLL) recorded.

In order to map one or more properties of a sample spatially resolved (at different XY coordinates), the measuring probe is detected by means of the actuating element 11 moved relative to the surface of a sample. This is the frequency of the cantilever 15 (the measurand) as a function of the XY coordinate of the actuator 11 detected relative to the surface.

Furthermore, it is possible the frequency of the cantilever 15 keep constant by adjusting the position of the sample relative to the probe by means of the Z actuator 11 is readjusted accordingly. This is done with the help of a Z-controller 22 , which is the Z-actuator 11 nachfährt accordingly. Also, at a certain location of the sample 12 the distance dependence of the frequency of the cantilever 15 be detected, in which by means of a Z-actuator 11 the distance between sample and probe is varied.

According to the in 1b The embodiment of the prior art with amplitude modulation shown becomes the cantilever 15 with a fixed frequency from a frequency generator 23 near the resonant frequency excited by the external oscillator 18 is excited to vibrate with a corresponding frequency. The amplitude of the oscillation is controlled by an amplitude regulator 19 set.

An interaction between tip 16 and sample 12 changes the resonance frequency of the cantilever 13 and hence the amplitude of the oscillation, given the exciting frequency with which the external oscillator 18 is driven, remains unchanged. The amplitude of the cantilever oscillation is the measured variable, which with an amplitude detector 24 is detected. At the same time, the phase between the frequency applied to the external oscillator and the frequency of the cantilever also changes. It can work with a phase detector 25 be recorded. Alternatively, therefore, this phase can serve as a measure.

To map one or more properties of a sample spatially resolved (at different XY coordinates), the measuring probe becomes 13 by means of the actuating element 11 relative to the surface of a sample 12 emotional. In this case, the amplitude and / or phase of the cantilever 15 depending on the XY coordinate of the actuator 11 detected relative to the surface.

Furthermore, it is possible to determine the amplitude or phase of the cantilever 15 keep constant, in which the position of the sample relative to the probe 13 with the help of the Z-actuator 11 is readjusted accordingly. This is done with the help of a Z-controller 22 , which is the Z-actuator 11 nachfährt accordingly. Also, at a certain location of the sample 12 the distance dependence of the amplitude and / or phase of the cantilever 15 be detected, in which by means of a Z-actuator 11 the distance between sample 12 and measuring probe 13 is varied.

In the 2a and 2 B are each schematically the structure of an atomic force microscope 10 with a cantilever according to the invention 15 Darge provides.

The atomic force microscope 10 has a measuring probe 13 with a self-detecting and self-excited cantilever 15 , The cantilever according to the invention 15 consists of a piezoelectric body and has two pairs of electrodes 26 . 27 , The self-excitation of the cantilever occurs via the first pair of electrodes 26 and self-detection via the second pair of electrodes 27 , The first electrode pair for self-excitation replaces the external oscillator 18 and the second electrode pair for self-detection the deflection detector 17 ,

Suitable arrangements of the two electrode pairs for the inventive use of the cantilever 15 are in the 3a . 3b and 4 shown. The operation of an atomic force microscope 10 otherwise takes place according to the above 1a and 1b described prior art.

In particular, XYZ actuator can 11 , Z-controller 22 , Frequency demodulator 21 , Amplitude controller 19 , Phase shifter 20 , Frequency generator 23 , Amplitude detector 24 and phase detector 25 be used analogously to the operation of the atomic force microscope.

In the 3a . 3b are each in the upper area plan views of a self-detecting and self-excited cantilever 15 shown. In the lower illustration of the figures is a cross section through the cantilever shown above 15 shown.

As the base body of a cantilever 20 becomes a piezoelectric body 30 provided in the form of a cuboid quartz or quartz quartz with multiple contacts on its outside. On the top and bottom are coatings as ground contacts 31 made of gold or silver. In addition, contact coatings are also on the side edges over the entire width 32 . 33 applied, wherein the contact coating 32 when using the cantilever 15 In an atomic force microscope with an AC voltage is applied, so that via the contacts 31 . 32 applied AC voltage the piezoelectric body 30 vibrated.

The contacts 31 and 32 form in the embodiment in 3a the first pair of electrical contacts or the first electrode pair (see. 2 , Reference number 26 ). The contacts 31 and 33 form the second pair of electrical contacts or the second electrode pair (see. 2 , Reference 27 ).

Due to the interaction of the tip (see. 2 , Reference number 16 ) with the sample to be examined (cf. 2 , Reference number 12 ) become one or more characteristic features of the cantilever 15 changed. This can be, for example, the frequency, amplitude or phase of the cantilever 15 be. The change caused by the interaction of a characteristic property of the piezoelectric body 30 is about the contacts 31 and 33 on the output side detected as alternating current, which is characterized by a changed frequency, amplitude or phase.

Characterized in that by the application of an electrical variable, in particular AC voltage, the piezoelectric body 30 a vibration of the body 30 is reached, the piezoelectric body 30 self-stimulated. As a result of interaction of the top 16 with the sample 12 learns the cantilever invention 15 as a self-oscillating oscillator in the form of the piezoelectric body 30 a frequency change, amplitude change or phase change.

Due to the piezoelectric effect charge shifts in the body 30 generated so that the electric currents generated due to the vibration can be detected. The detected electrical currents are thus a characteristic of the vibration of the piezoelectric body 30 , Thus, changes in one or more characteristic properties of the piezoelectric body 30 be detected by the detected electric currents.

By the arrangement according to the invention and the operation according to the invention of a piezoelectric body 30 existing cantilever 15 with corresponding electrodes we considerably simpler handling of an atomic force microscope is possible. Becomes the piezoelectric body 30 For example, made of quartz, is a cheap and well-known material available, which is widely used as an oscillator, for example in watches. In particular, methods for the production of quartz bodies and for the application of electrical contacts in the submillimeter range are already known, which are necessary for the production of suitable cantilever geometries. By optimizing the cantilever geometry, it is also possible to achieve a significant improvement in the sensitivity and the accuracy of the detection of sample properties with a scanning probe microscope.

In the embodiment in 3b are additional contacts 34 provided on the top and bottom, allowing an additional oscillation on the piezoelectric body 30 can be exercised.

The via the output side contact coating 33 recorded current is then connected on a preamplifier near the cantilever 15 given so that after amplification of the current signal, the signal is applied to another remote amplifier.

In 3c is a V-shaped design of the cantilever 15 shown. The left side of 3c shows the front and the right side of 3c the back of the cantilever 15 , At the narrowing point of the V-shaped cantilever 15 is arranged on a top.

The contacts 31 and 32 form in the embodiment in 3b the first pair of electrical contacts or the first electrode pair (see. 2 , Reference number 26 ). The contacts 31 and 33 form the second pair of electrical contacts or the second electrode pair (see. 2 , Reference 27 ).

In 4 is an example of the arrangement of electrodes on a piezoelectric body 30 shown to stimulate the vibration of the body 30 and the detection of the vibrations of the piezoelectric body 30 to explain schematically and by way of example.

These are on the left in the cross-sectional view on the top and bottom of the body 30 electrodes 35 . 36 arranged, which are acted upon by an AC voltage, so that the piezoelectric body 30 is set in vibration. The upper pair of electrodes generates a field in the -x direction, so that a contraction of the quartz body in the x-direction is generated. The bottom pair of electrodes creates a field in the + x direction, creating an expansion in the x direction.

The net result is a torque in the piezoelectric body 30 generated, causing the cantilever 15 or the piezoelectric body 30 tends to bend upward when one end of the piezoelectric body is fixed.

Due to the stress or vibration in the piezoelectric body 30 Charges are generated due to the piezoelectric effect. The oscillations or charge displacements result in an alternating current of a predetermined frequency, amplitude and phase at the output-side measuring electrodes or contacts 37 . 38 determined.

According to a preferred embodiment, the driving electrodes are 35 . 36 at the piezoelectric body 30 arranged so that the torque is high or the curvature of the body 30 is high.

10

Atomic Force Microscope

11

XYZ actuator

12

sample

13

probe

14

bracket

15

cantilever

16

top

17

displacement detector

18

external oscillator

19

amplitude controller

20

phase shifter

21

frequency demodulator

22

Z-controller

23

frequency generator Coating (mass)

24

amplitude detector Contact coating (input side)

25

phase detector Contact coating (output side)

26

first Pair of electrical contacts (input side)

27

second Pair of electrical contacts (output side)

30

piezoelectric body

31

Contact

32

Contact

33

Contact

34

Contact

35

Contact

36

Contact

37

Contact

38

Contact

Claims (23)

Cantilever ( 15 ) of a scanning probe microscope ( 10 ) with a tip ( 16 ), characterized in that the cantilever ( 15 ) from a piezoelectric body ( 30 ) and that the piezoelectric body ( 30 ) with a first pair of electrical contacts ( 26 . 31 . 32 . 35 . 36 ) and a second pair of electrical contacts ( 27 . 31 . 33 . 37 . 38 ), wherein the piezoelectric body ( 30 ) via the first pair of electrical contacts ( 26 . 31 . 32 . 35 . 36 ) is or is acted on the input side with a first electrical variable and wherein via the second pair of electrical contacts ( 27 . 31 . 33 . 37 . 38 ) a characteristic property of the piezoelectric body ( 30 ) is detected on the output side via an electrical variable or is. Cantilever ( 15 ) according to claim 1, characterized in that the first pair of electrical contacts ( 26 . 31 . 32 . 35 . 36 ) and the second pair of electrical contacts ( 27 . 31 . 33 . 37 . 38 ) are mounted so that a mutual crosstalk of electrical signals after application of the first pair of electrical contacts ( 26 . 31 . 32 . 35 . 36 ) and / or the second pair of electrical contacts ( 27 . 31 . 33 . 37 . 38 ) is reduced or is an electrical quantity. Cantilever ( 15 ) according to claim 1 or 2, characterized in that the piezoelectric body ( 30 ) is electrically isolated. Cantilever ( 15 ) according to claim 1 or 2, characterized in that the piezoelectric body ( 30 ) is or is vibrated by the application of the first electrical quantity. Cantilever ( 15 ) according to claim 4, characterized in that the piezoelectric body ( 30 ) is or will be offset in at least one resonant oscillation. Cantilever ( 15 ) according to one of claims 1 to 5, characterized in that the first electrical variable is an AC voltage. Cantilever ( 15 ) according to one of claims 1 to 6, characterized in that further electrical contacts ( 34 ) on the piezoelectric body ( 30 ) are arranged, so that upon application of a further electrical variable, in particular AC voltage, to these other electrical contacts ( 34 ) an additional oscillation of the piezoelectric body ( 30 ) is effected. Cantilever ( 15 ) according to one of claims 1 to 7, characterized in that the surface of the piezoelectric Kör pers ( 30 ) partially with an electrically conductive coating ( 26 . 27 . 31 . 32 . 33 . 34 . 35 . 36 . 37 . 38 ) is provided. Cantilever ( 15 ) according to claim 8, characterized in that the electrically conductive coating ( 26 . 27 . 31 . 32 . 33 . 34 . 35 . 36 . 37 . 38 ) consists of gold or silver. Cantilever ( 15 ) according to one of claims 1 to 9, characterized in that when using the cantilever ( 15 ) in a scanning probe microscope ( 10 ) based on the interaction of the tip ( 16 ) with a sample ( 12 ) by means of the detected second electrical quantity a characteristic property of the excited by means of the first electrical variable to vibrate piezoelectric body ( 30 ) is detected. Cantilever ( 15 ) according to any one of claims 1 to 10, characterized in that the characteristic property of the cantilever detected by the second electrical quantity ( 15 ) is a frequency amplitude change or phase change. Cantilever ( 15 ) according to one of claims 1 to 11, characterized in that the piezoelectric body ( 30 ) is cuboid. Cantilever ( 15 ) according to one of claims 1 to 11, characterized in that the piezoelectric body ( 30 ) Is V-shaped. Cantilever ( 15 ) according to one of claims 1 to 13, characterized in that the piezoelectric body ( 30 ) consists of quartz. Cantilever ( 15 ) according to one of claims 1 to 14, characterized in that as the second electrical variable of the current, in particular alternating current, the output side is detected or is. Cantilever ( 15 ) according to one of claims 1 to 15, characterized in that the tip ( 16 ) consists of tungsten, platinum-iridium, silicon, silicon nitride or quartz. Scanning probe microscope ( 10 ), in particular atomic force microscope ( 10 ), with a cantilever ( 15 ) according to one of claims 1 to 16. Method for operating a scanning probe microscope ( 10 ), in particular atomic force microscopes ( 10 ), with one on a cantilever ( 15 ) arranged tip ( 16 ) a sample ( 12 ) is detected in a grid shape, characterized in that the piezoelectric body ( 30 ) trained cantilevers ( 15 ) is excited with a first electrical quantity to at least one oscillation and based on a detected second electrical variable of the cantilever ( 15 ) due to an interaction of the tip ( 16 ) with the sample ( 12 ) one or more properties of the sample is detected or determined. Method according to claim 18, characterized in that the cantilever ( 15 ) is initially applied with an AC voltage as the first electrical variable. Method according to claim 18 or 19, characterized on the output side, the second electrical variable is the time course of a Electricity, especially AC, is detected. Method according to one of claims 18 to 20, characterized in that the piezoelectric body ( 30 ) and its contacts ( 26 . 27 . 31 . 32 . 33 . 34 . 35 . 36 . 37 . 38 ) are electrically isolated. Method according to one of claims 18 to 21, characterized in that the scanning probe microscope ( 10 ) with a cantilever ( 15 ) is operated according to one of claims 1 to 11. Use of a cantilever ( 15 ) according to one of claims 1 to 16 in a scanning probe microscope ( 10 ), in particular atomic force microscope ( 10 ).