[go: up one dir, main page]

DE102006002461B8 - Spiegeloptik für nahfeldoptische Messungen - Google Patents

Spiegeloptik für nahfeldoptische Messungen Download PDF

Info

Publication number
DE102006002461B8
DE102006002461B8 DE102006002461A DE102006002461A DE102006002461B8 DE 102006002461 B8 DE102006002461 B8 DE 102006002461B8 DE 102006002461 A DE102006002461 A DE 102006002461A DE 102006002461 A DE102006002461 A DE 102006002461A DE 102006002461 B8 DE102006002461 B8 DE 102006002461B8
Authority
DE
Germany
Prior art keywords
near field
field optical
optical measurements
mirror optics
optics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE102006002461A
Other languages
English (en)
Other versions
DE102006002461A1 (de
DE102006002461B4 (de
Inventor
Fritz Dr. Keilmann
Rainer Dr. Hillenbrand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority to DE102006002461A priority Critical patent/DE102006002461B8/de
Priority to US11/653,601 priority patent/US7591858B2/en
Publication of DE102006002461A1 publication Critical patent/DE102006002461A1/de
Application granted granted Critical
Publication of DE102006002461B4 publication Critical patent/DE102006002461B4/de
Publication of DE102006002461B8 publication Critical patent/DE102006002461B8/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
DE102006002461A 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen Expired - Lifetime DE102006002461B8 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102006002461A DE102006002461B8 (de) 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen
US11/653,601 US7591858B2 (en) 2006-01-18 2007-01-16 Mirror optic for near-field optical measurements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006002461A DE102006002461B8 (de) 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen

Publications (3)

Publication Number Publication Date
DE102006002461A1 DE102006002461A1 (de) 2007-07-19
DE102006002461B4 DE102006002461B4 (de) 2008-04-10
DE102006002461B8 true DE102006002461B8 (de) 2008-07-24

Family

ID=38190127

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102006002461A Expired - Lifetime DE102006002461B8 (de) 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen

Country Status (2)

Country Link
US (1) US7591858B2 (de)
DE (1) DE102006002461B8 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008057097A1 (de) * 2008-11-13 2010-05-27 Carl Zeiss Ag Objektivanordnung und Justageverfahren
US8832861B2 (en) 2009-03-23 2014-09-09 Neaspec Gmbh Near field optical microscope
EP2360481B1 (de) 2010-02-23 2018-09-12 Neaspec GmbH Optisches Nahfeldmikroskop mit optischem Bildgebungssystem
EP2678695A2 (de) 2011-02-23 2014-01-01 RHK Technology Inc. Integriertes mikroskop sowie zugehörige verfahren und vorrichtungen
FR3010194B1 (fr) * 2013-08-28 2017-10-27 Imagine Optic Systeme et methode de microscopie par eclairage par la tranche
EP3067701A1 (de) 2015-03-13 2016-09-14 Asociación-centro De Investigación Cooperativa En Nanociencias - CIC Nanogune Optisches Nahfeldmikroskop zur Erfassung von Spektren

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE599970C (de) * 1932-02-26 1934-07-12 Zeiss Carl Fa Vorrichtung zur Beleuchtung mikroskopischer Objekte mit auffallendem Lichte
DE10301633A1 (de) * 2003-01-17 2004-07-29 Daimlerchrysler Ag Katadioptrische Kamera
US20050117227A1 (en) * 2001-09-18 2005-06-02 Ehud Gal Panoramic imaging system with optical zoom capability
WO2005078502A1 (en) * 2004-02-06 2005-08-25 Interscience, Inc. Integrated panoramic and forward optical device, system and method for omnidirectional signal processing

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225737A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd 表面分析方法および装置
DE9414582U1 (de) * 1994-09-09 1994-11-10 Fischer, Ulrich, Dr., 48159 Münster Mikroskopischer Sender oder Detektor elektromagnetischer Strahlung
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ
US6833904B1 (en) * 1998-02-27 2004-12-21 Nikon Corporation Exposure apparatus and method of fabricating a micro-device using the exposure apparatus
TW531662B (en) * 2002-09-27 2003-05-11 Delta Electronics Inc Structure for reflection of light
JP2004264039A (ja) * 2003-01-30 2004-09-24 Hitachi Ltd 走査プローブ顕微鏡及びｃｄ・断面プロファイル計測方法並びに半導体デバイス製造方法
US7217913B2 (en) * 2003-12-18 2007-05-15 Micron Technology, Inc. Method and system for wavelength-dependent imaging and detection using a hybrid filter
JP4546326B2 (ja) * 2004-07-30 2010-09-15 キヤノン株式会社 センシング装置
JP2006107584A (ja) * 2004-10-01 2006-04-20 Konica Minolta Opto Inc 光学素子及び光スポット位置調整方法
JP4423168B2 (ja) * 2004-11-02 2010-03-03 株式会社ミツトヨ 表面性状測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE599970C (de) * 1932-02-26 1934-07-12 Zeiss Carl Fa Vorrichtung zur Beleuchtung mikroskopischer Objekte mit auffallendem Lichte
US20050117227A1 (en) * 2001-09-18 2005-06-02 Ehud Gal Panoramic imaging system with optical zoom capability
DE10301633A1 (de) * 2003-01-17 2004-07-29 Daimlerchrysler Ag Katadioptrische Kamera
WO2005078502A1 (en) * 2004-02-06 2005-08-25 Interscience, Inc. Integrated panoramic and forward optical device, system and method for omnidirectional signal processing

Also Published As

Publication number Publication date
US7591858B2 (en) 2009-09-22
DE102006002461A1 (de) 2007-07-19
DE102006002461B4 (de) 2008-04-10
US20070183060A1 (en) 2007-08-09

Similar Documents

Publication Publication Date Title
EP2034337A4 (de) Optische linse
ATE489655T1 (de) Laser scanner-gerät für fluoreszenzmessungen
EP2083300A4 (de) Optischer verbinder
EP2274595A4 (de) Optisches zeitbereichsreflektometer
EP2186847A4 (de) Optischer film
EP2176695A4 (de) Optisches verbindungselement
EP2347213A4 (de) Optisches visier
EP2043205A4 (de) Optischer verstärker
EP2249189A4 (de) Optischer verbinder
EP2006643A4 (de) Optischer codierer
EP2057968A4 (de) Einführinstrument für eine intraokularlinse
FR2929717B1 (fr) Boitier optique
EP1925958A4 (de) Optischer verbinder
EP2191328A4 (de) Vorrichtung für optische projektionen
FR2925181B1 (fr) Lentille optique electrochrome
EP2075605A4 (de) Optisches kabel
EP2096754A4 (de) Optische empfänger
EP2312353A4 (de) Vorrichtung für einen optischen stecker
DE602007002585D1 (de) Herstellungsverfahren für eine optische Wellenleitervorrichtung
DE502005010766D1 (de) Optisches Instrument
EP2106628A4 (de) Faserlaser
EP2108993A4 (de) Brillenlinse
EP1963448A4 (de) Beschichtungen für optische elemente
DE602008002853D1 (de) Optische Lesekopfvorrichtung
EP2067070A4 (de) Optische verbindungskomponente

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8396 Reprint of erroneous front page
8364 No opposition during term of opposition
R071 Expiry of right