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DE102005030358B8 - Mit elektromagnetischer Induktion arbeitender Positionssensor - Google Patents

Mit elektromagnetischer Induktion arbeitender Positionssensor Download PDF

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Publication number
DE102005030358B8
DE102005030358B8 DE102005030358.7A DE102005030358A DE102005030358B8 DE 102005030358 B8 DE102005030358 B8 DE 102005030358B8 DE 102005030358 A DE102005030358 A DE 102005030358A DE 102005030358 B8 DE102005030358 B8 DE 102005030358B8
Authority
DE
Germany
Prior art keywords
position sensor
electromagnetic induction
induction position
electromagnetic
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE102005030358.7A
Other languages
English (en)
Other versions
DE102005030358A1 (de
DE102005030358B4 (de
Inventor
Noriyuki Fukui
Yasukazu Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuma Corp
Original Assignee
Okuma Corp
Okuma Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okuma Corp, Okuma Machinery Works Ltd filed Critical Okuma Corp
Publication of DE102005030358A1 publication Critical patent/DE102005030358A1/de
Application granted granted Critical
Publication of DE102005030358B4 publication Critical patent/DE102005030358B4/de
Publication of DE102005030358B8 publication Critical patent/DE102005030358B8/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2046Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable ferromagnetic element, e.g. a core
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F5/00Coils
    • H01F5/003Printed circuit coils

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE102005030358.7A 2004-06-30 2005-06-29 Mit elektromagnetischer Induktion arbeitender Positionssensor Expired - Fee Related DE102005030358B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-194159 2004-06-30
JP2004194159A JP4476717B2 (ja) 2004-06-30 2004-06-30 電磁誘導型位置センサ

Publications (3)

Publication Number Publication Date
DE102005030358A1 DE102005030358A1 (de) 2006-01-26
DE102005030358B4 DE102005030358B4 (de) 2015-05-28
DE102005030358B8 true DE102005030358B8 (de) 2015-08-13

Family

ID=35511643

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102005030358.7A Expired - Fee Related DE102005030358B8 (de) 2004-06-30 2005-06-29 Mit elektromagnetischer Induktion arbeitender Positionssensor

Country Status (3)

Country Link
US (1) US7049924B2 (de)
JP (1) JP4476717B2 (de)
DE (1) DE102005030358B8 (de)

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US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
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JP5189510B2 (ja) * 2009-01-22 2013-04-24 愛三工業株式会社 位置センサ
CA2713309C (en) 2009-08-20 2013-07-02 Howmedica Osteonics Corp. Flexible acl instrumentation, kit and method
JP2012247352A (ja) * 2011-05-30 2012-12-13 Nippon Seiki Co Ltd 位置検出装置
US9445803B2 (en) 2011-11-23 2016-09-20 Howmedica Osteonics Corp. Filamentary suture anchor
DE102012204917A1 (de) * 2012-03-27 2013-10-02 Beckhoff Automation Gmbh Positionserfassungsvorrichtung und Verfahren zum Erfassen einer Position eines beweglichen Elements einer Antriebsvorrichtung
DE202012013152U1 (de) 2012-03-27 2015-02-11 Beckhoff Automation Gmbh Statorvorrichtung für einen Linearmotor und lineares Transportsystem
DE102012204916A1 (de) 2012-03-27 2013-10-02 Beckhoff Automation Gmbh Statorvorrichtung für einen Linearmotor und lineares Transportsystem
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
JP2014002120A (ja) * 2012-06-20 2014-01-09 Tokai Rika Co Ltd 無接点センサ及びシフトレバー装置
US20140039552A1 (en) 2012-08-03 2014-02-06 Howmedica Osteonics Corp. Soft tissue fixation devices and methods
JP6087588B2 (ja) * 2012-11-12 2017-03-01 三菱重工工作機械株式会社 変位センサの配線構造
US9402620B2 (en) 2013-03-04 2016-08-02 Howmedica Osteonics Corp. Knotless filamentary fixation devices, assemblies and systems and methods of assembly and use
US9788826B2 (en) 2013-03-11 2017-10-17 Howmedica Osteonics Corp. Filamentary fixation device and assembly and method of assembly, manufacture and use
US9463013B2 (en) 2013-03-13 2016-10-11 Stryker Corporation Adjustable continuous filament structure and method of manufacture and use
WO2014176270A1 (en) 2013-04-22 2014-10-30 Pivot Medical, Inc. Method and apparatus for attaching tissue to bone
EP3004808B1 (de) * 2013-06-07 2018-05-16 Atlas Copco Industrial Technique AB Drehcodierer
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10495699B2 (en) * 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US10610211B2 (en) 2013-12-12 2020-04-07 Howmedica Osteonics Corp. Filament engagement system and methods of use
JP6327874B2 (ja) * 2014-02-04 2018-05-23 株式会社ミツトヨ 誘導型位置測定装置
US9986992B2 (en) 2014-10-28 2018-06-05 Stryker Corporation Suture anchor and associated methods of use
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US10568616B2 (en) 2014-12-17 2020-02-25 Howmedica Osteonics Corp. Instruments and methods of soft tissue fixation
ITUB20153295A1 (it) * 2015-08-31 2017-03-03 Marposs Spa Sistema e metodo di elaborazione e trasmissione dati
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
KR101901700B1 (ko) * 2016-12-21 2018-09-27 삼성전기 주식회사 인덕터
JP6877829B2 (ja) * 2017-03-23 2021-05-26 株式会社ミツトヨ 電磁誘導型変位検出装置およびこれを用いた測定器
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
DE102017211190A1 (de) 2017-06-30 2019-01-03 Robert Bosch Gmbh Sensorsystem zur Bestimmung mindestens einer Rotationseigenschaft eines rotierenden Elements
CN107356189B (zh) * 2017-07-05 2019-04-02 重庆理工大学 一种时栅直线位移传感器
US11165372B2 (en) * 2017-09-13 2021-11-02 Rockwell Automation Technologies, Inc. Method and apparatus to characterize loads in a linear synchronous motor system
DE102017222063A1 (de) * 2017-12-06 2019-06-06 Dr. Johannes Heidenhain Gmbh Induktive Positionsmesseinrichtung
USD902405S1 (en) 2018-02-22 2020-11-17 Stryker Corporation Self-punching bone anchor inserter
CN112272755A (zh) * 2018-05-23 2021-01-26 Ksr Ip控股有限责任公司 感应位置传感器组件
JP7084807B2 (ja) 2018-07-10 2022-06-15 オークマ株式会社 電磁誘導型位置センサ用のセンサ基板、および、センサ基板の製造方法
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
JP2020056754A (ja) * 2018-10-04 2020-04-09 株式会社ミツトヨ 電磁誘導式エンコーダ
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US10760928B1 (en) * 2019-02-21 2020-09-01 Microsemi Corporation Planar linear inductive position sensor having edge effect compensation
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
JP7346879B2 (ja) * 2019-04-02 2023-09-20 村田機械株式会社 磁気式リニアセンサ
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US20210100098A1 (en) * 2019-09-26 2021-04-01 Integrated Device Technology, Inc. Long Coil Vias Optimization
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
EP4374139A1 (de) * 2021-09-10 2024-05-29 Bosch Car Multimedia Portugal, S.A. Induktiver positionssensor für kleine anwendungen
WO2024224598A1 (ja) * 2023-04-28 2024-10-31 日産自動車株式会社 回転センサ
US12523717B2 (en) 2024-02-15 2026-01-13 Allegro Microsystems, Llc Closed loop magnetic field sensor with current control
DE102024117999A1 (de) * 2024-06-26 2025-12-31 Turck Holding Gmbh Spulenanordnung auf einer Multilayer-Platine und Verfahren zum Herstellen einer Spulenanordnung

Citations (14)

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JPS62274215A (ja) * 1986-05-22 1987-11-28 Yaskawa Electric Mfg Co Ltd サ−フエイスレゾルバ
JPS6324124A (ja) * 1986-05-16 1988-02-01 コルモ−ゲン コ−ポレイシヨン 不安定環境用トランスデュ−サ
US4893077A (en) * 1987-05-28 1990-01-09 Auchterlonie Richard C Absolute position sensor having multi-layer windings of different pitches providing respective indications of phase proportional to displacement
US5003260A (en) * 1987-05-28 1991-03-26 Auchterlonie Richard C Inductive position sensor having plural phase windings on a support and a displaceable phase sensing element returning a phase indicating signal by electromagnetic induction to eliminate wire connections
JPH05180664A (ja) * 1992-01-06 1993-07-23 Murata Mfg Co Ltd 移動体の移動検出装置
JPH0821744A (ja) * 1994-07-08 1996-01-23 Okuma Mach Works Ltd 回転位置検出器
JPH08313295A (ja) * 1995-05-16 1996-11-29 Mitsutoyo Corp 誘導電流を用いた位置検出トランスデューサ
JPH09210611A (ja) * 1996-01-24 1997-08-12 Hans Ulrich Meyer 誘導性変位センサ
US6111402A (en) * 1996-11-29 2000-08-29 Dr. Johannes Heidenhain Gmbh Position measuring instrument having a scanning element with multiple scanning tracks
US6201387B1 (en) * 1997-10-07 2001-03-13 Biosense, Inc. Miniaturized position sensor having photolithographic coils for tracking a medical probe
US6236199B1 (en) * 1997-09-05 2001-05-22 Hella Kg Hueck & Co. Inductive angle sensor
US6636035B2 (en) * 2000-03-13 2003-10-21 Mitutoyo Corporation Position measuring device and error detecting method for the same, and electromagnetic induction position detecting device
US6646433B2 (en) * 2002-02-26 2003-11-11 Mitutoyo Corporation Induced current position transducers using tape scales with apertures
US6720760B2 (en) * 2001-11-14 2004-04-13 Mitutoyo Corporation Induced current position transducers having improved scale loop structures

Patent Citations (18)

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JPS6324124A (ja) * 1986-05-16 1988-02-01 コルモ−ゲン コ−ポレイシヨン 不安定環境用トランスデュ−サ
US4887465A (en) * 1986-05-16 1989-12-19 Kollmorgen Corporation Transducers for hostile environments
JPS62274215A (ja) * 1986-05-22 1987-11-28 Yaskawa Electric Mfg Co Ltd サ−フエイスレゾルバ
US4893077A (en) * 1987-05-28 1990-01-09 Auchterlonie Richard C Absolute position sensor having multi-layer windings of different pitches providing respective indications of phase proportional to displacement
US5003260A (en) * 1987-05-28 1991-03-26 Auchterlonie Richard C Inductive position sensor having plural phase windings on a support and a displaceable phase sensing element returning a phase indicating signal by electromagnetic induction to eliminate wire connections
JPH05180664A (ja) * 1992-01-06 1993-07-23 Murata Mfg Co Ltd 移動体の移動検出装置
US5327077A (en) * 1992-01-06 1994-07-05 Murata Mfg. Co. Ltd. Device including an even number of equally spaced magneto-resistors for detecting rotation or straight motion of a moving body
JPH0821744A (ja) * 1994-07-08 1996-01-23 Okuma Mach Works Ltd 回転位置検出器
JPH08313295A (ja) * 1995-05-16 1996-11-29 Mitsutoyo Corp 誘導電流を用いた位置検出トランスデューサ
US6011389A (en) * 1995-05-16 2000-01-04 Mitutoyo Corporation Induced current position transducer having a low power electronic circuit
JPH09210611A (ja) * 1996-01-24 1997-08-12 Hans Ulrich Meyer 誘導性変位センサ
US5804963A (en) * 1996-01-24 1998-09-08 Meyer; Hans Ulrich Inductive displacement sensor with a cursor and a movable coupling scale
US6111402A (en) * 1996-11-29 2000-08-29 Dr. Johannes Heidenhain Gmbh Position measuring instrument having a scanning element with multiple scanning tracks
US6236199B1 (en) * 1997-09-05 2001-05-22 Hella Kg Hueck & Co. Inductive angle sensor
US6201387B1 (en) * 1997-10-07 2001-03-13 Biosense, Inc. Miniaturized position sensor having photolithographic coils for tracking a medical probe
US6636035B2 (en) * 2000-03-13 2003-10-21 Mitutoyo Corporation Position measuring device and error detecting method for the same, and electromagnetic induction position detecting device
US6720760B2 (en) * 2001-11-14 2004-04-13 Mitutoyo Corporation Induced current position transducers having improved scale loop structures
US6646433B2 (en) * 2002-02-26 2003-11-11 Mitutoyo Corporation Induced current position transducers using tape scales with apertures

Also Published As

Publication number Publication date
US7049924B2 (en) 2006-05-23
DE102005030358A1 (de) 2006-01-26
US20060001518A1 (en) 2006-01-05
JP4476717B2 (ja) 2010-06-09
DE102005030358B4 (de) 2015-05-28
JP2006017533A (ja) 2006-01-19

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R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee