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DE102004011896B8 - Schwingungsisolator - Google Patents

Schwingungsisolator Download PDF

Info

Publication number
DE102004011896B8
DE102004011896B8 DE200410011896 DE102004011896A DE102004011896B8 DE 102004011896 B8 DE102004011896 B8 DE 102004011896B8 DE 200410011896 DE200410011896 DE 200410011896 DE 102004011896 A DE102004011896 A DE 102004011896A DE 102004011896 B8 DE102004011896 B8 DE 102004011896B8
Authority
DE
Germany
Prior art keywords
vibration isolator
isolator
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200410011896
Other languages
English (en)
Other versions
DE102004011896A1 (de
DE102004011896B4 (de
Inventor
Süleyman Dr.-Ing. Güney
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ISOLOC SCHWINGUNGSTECHNIK GmbH
Original Assignee
ISOLOC SCHWINGUNGSTECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ISOLOC SCHWINGUNGSTECHNIK GmbH filed Critical ISOLOC SCHWINGUNGSTECHNIK GmbH
Priority to DE200410011896 priority Critical patent/DE102004011896B8/de
Publication of DE102004011896A1 publication Critical patent/DE102004011896A1/de
Publication of DE102004011896B4 publication Critical patent/DE102004011896B4/de
Application granted granted Critical
Publication of DE102004011896B8 publication Critical patent/DE102004011896B8/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F13/00—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs
    • F16F13/04—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs comprising both a plastics spring and a damper, e.g. a friction damper
    • F16F13/06—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs comprising both a plastics spring and a damper, e.g. a friction damper the damper being a fluid damper, e.g. the plastics spring not forming a part of the wall of the fluid chamber of the damper
    • F16F13/08—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs comprising both a plastics spring and a damper, e.g. a friction damper the damper being a fluid damper, e.g. the plastics spring not forming a part of the wall of the fluid chamber of the damper the plastics spring forming at least a part of the wall of the fluid chamber of the damper
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F13/00—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs
    • F16F13/04—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs comprising both a plastics spring and a damper, e.g. a friction damper
    • F16F13/06—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs comprising both a plastics spring and a damper, e.g. a friction damper the damper being a fluid damper, e.g. the plastics spring not forming a part of the wall of the fluid chamber of the damper
    • F16F13/20—Units comprising springs of the non-fluid type as well as vibration-dampers, shock-absorbers, or fluid springs comprising both a plastics spring and a damper, e.g. a friction damper the damper being a fluid damper, e.g. the plastics spring not forming a part of the wall of the fluid chamber of the damper characterised by comprising also a pneumatic spring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/022—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using dampers and springs in combination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
DE200410011896 2004-03-11 2004-03-11 Schwingungsisolator Expired - Lifetime DE102004011896B8 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE200410011896 DE102004011896B8 (de) 2004-03-11 2004-03-11 Schwingungsisolator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200410011896 DE102004011896B8 (de) 2004-03-11 2004-03-11 Schwingungsisolator

Publications (3)

Publication Number Publication Date
DE102004011896A1 DE102004011896A1 (de) 2005-10-06
DE102004011896B4 DE102004011896B4 (de) 2005-12-29
DE102004011896B8 true DE102004011896B8 (de) 2010-04-22

Family

ID=34980475

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200410011896 Expired - Lifetime DE102004011896B8 (de) 2004-03-11 2004-03-11 Schwingungsisolator

Country Status (1)

Country Link
DE (1) DE102004011896B8 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010060699B3 (de) * 2010-12-28 2012-02-09 Isoloc Schwingungstechnik Gmbh Rotierendes Maschinenteil
DE102012110385A1 (de) 2012-10-30 2014-04-30 Von Ardenne Gmbh Lagerung für eine stoßempfindliche Substratbehandlungsapparatur
DE102019213950B3 (de) * 2019-09-12 2020-11-26 Thyssenkrupp Ag Vorrichtung und Verfahren zum Ausgleichen von zumindest vertikalen Lageänderungen in Reaktion auf Schwankungen des Untergrunds sowie Verwendung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4120840C1 (de) * 1991-06-25 1992-07-02 Fa. Carl Freudenberg, 6940 Weinheim, De
US5141201A (en) * 1988-11-07 1992-08-25 Bridgestone Corporation Vibration damping apparatus for transportation
DE3926696C3 (de) * 1989-08-12 1998-02-26 Freudenberg Carl Fa Gummilager mit hydraulischer Dämpfung
DE4133037C2 (de) * 1990-10-05 1999-07-22 Canon Kk Belichtungsvorrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5141201A (en) * 1988-11-07 1992-08-25 Bridgestone Corporation Vibration damping apparatus for transportation
DE3926696C3 (de) * 1989-08-12 1998-02-26 Freudenberg Carl Fa Gummilager mit hydraulischer Dämpfung
DE4133037C2 (de) * 1990-10-05 1999-07-22 Canon Kk Belichtungsvorrichtung
DE4120840C1 (de) * 1991-06-25 1992-07-02 Fa. Carl Freudenberg, 6940 Weinheim, De

Also Published As

Publication number Publication date
DE102004011896A1 (de) 2005-10-06
DE102004011896B4 (de) 2005-12-29

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8364 No opposition during term of opposition
8381 Inventor (new situation)

Inventor name: GUENEY, SUELEYMAN, DR.-ING., 70499 STUTTGART, DE

8396 Reprint of erroneous front page
R071 Expiry of right