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DE1013216B - Process for the vacuum-tight connection of a metal object with a ceramic body - Google Patents

Process for the vacuum-tight connection of a metal object with a ceramic body

Info

Publication number
DE1013216B
DE1013216B DEN12126A DEN0012126A DE1013216B DE 1013216 B DE1013216 B DE 1013216B DE N12126 A DEN12126 A DE N12126A DE N0012126 A DEN0012126 A DE N0012126A DE 1013216 B DE1013216 B DE 1013216B
Authority
DE
Germany
Prior art keywords
metal
vacuum
ceramic
ceramic body
tight connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEN12126A
Other languages
German (de)
Inventor
Popko Reinder Dijksterhuis
Albertus Remko Hovingh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of DE1013216B publication Critical patent/DE1013216B/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001—Interlayers, transition pieces for metallurgical bonding of workpieces
    • B23K35/005—Interlayers, transition pieces for metallurgical bonding of workpieces at least one of the workpieces being of a refractory metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/122—Metallic interlayers based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/123—Metallic interlayers based on iron group metals, e.g. steel
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/124—Metallic interlayers based on copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/125—Metallic interlayers based on noble metals, e.g. silver
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C04B2237/127—The active component for bonding being a refractory metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/403—Refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/59—Aspects relating to the structure of the interlayer
    • C04B2237/592—Aspects relating to the structure of the interlayer whereby the interlayer is not continuous, e.g. not the whole surface of the smallest substrate is covered by the interlayer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/62—Forming laminates or joined articles comprising holes, channels or other types of openings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/74—Forming laminates or joined articles comprising at least two different interlayers separated by a substrate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • C04B2237/765—Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc at least one member being a tube
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/80—Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/84—Joining of a first substrate with a second substrate at least partially inside the first substrate, where the bonding area is at the inside of the first substrate, e.g. one tube inside another tube

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)

Description

Verfahren zum vakuumdichten Verbinden eines metallenen Gegenstandes mit einem keramischen Körper Die Erfindung bezieht sich auf ein Verfahren zum vakuumdichten Verbinden eines metallenen Gegenstandes mit einem keramischen Körper und insbesondere auf eine elektrische Entladungsröhre mit mindestens einer Durchführungsleitung, die vakuumdicht mit mindestens einer keramischen Oberfläche verbunden ist.Process for the vacuum-tight connection of a metal object with a ceramic body The invention relates to a method for vacuum sealing Connecting a metal object to a ceramic body and in particular to an electrical discharge tube with at least one feed-through line, which is connected in a vacuum-tight manner to at least one ceramic surface.

Es ist bekannt, daß titan- und zirkoniumhaltige Legierungen gut an keramischen, insbesondere aus Aluminiumoxyd bestehenden Oberflächen haften. Im allgemeinen wird die keramische Oberfläche zunächst mit einer Ti-Schicht überzogen, an der die Metallgegenstände festgelötet werden können. Das Titan wird in Form von Ti H2 angebracht und durch Erhitzung in einer nicht oxydierenden Atmosphäre zersetzt. Es ist auch bekannt, daß Silberlot mit einem Zusatz von Li, P oder Mn sich auch zum Festlöten eines Gegenstandes an einer keramischen Oberfläche eignet, mit welcher Oberfläche die Zusatzstoffe eine glasartige Verbindung bilden. Zur Herstellung einer guten Verbindung kann die keramische Oberfläche vorher mit Oxyden von Vanadium, Niobium oder Tantal überzogen werden.It is known that alloys containing titanium and zirconium work well Adhere to ceramic surfaces, especially those made of aluminum oxide. In general the ceramic surface is first coated with a Ti layer on which the Metal objects can be soldered in place. The titanium is attached in the form of Ti H2 and decomposed by heating in a non-oxidizing atmosphere. It is also known that silver solder with the addition of Li, P or Mn can also be used for solid soldering of an object on a ceramic surface, with which surface the additives form a vitreous compound. To make a good The ceramic surface can be bonded beforehand with oxides of vanadium, niobium or tantalum coated.

A11 diese bekannten Verfahren sind jedoch verhältnismäßig verwickelt. Es wird gemäß der Erfindung ein sehr einfaches Verfahren zur Befestigung eines metallenen Gegenstandes an einer keramischen Fläche dadurch erhalten, daß der Metallgegenstand aus Titan oder Zirkonium unter Zwischenfügung einer Schicht aus einem Metall oder einer Metalllegierung mit einem niedrigeren Schmelzpunkt als Ti oder Zr, in der Ti oder Zr in geringem Maße löslich ist, mit der keramischen Oberfläche in Berührung gebracht wird, worauf im Vakuum dermaßen erhitzt wird, daß das zwischenliegende Metall durch das sich darin lösende Titan oder Zr schmilzt und an der keramischen Fläche haftet. Man kann die Erhitzung fortsetzen, bis eine solche Menge Ti oder Zr im zwischenliegenden Metall gelöst worden ist, daß der Schmelzpunkt bis zu der Erhitzungstemperatur oder . darüber hinaus gestiegen ist, so daß das Metall während der Erhitzung fest wird. Geeignete Zwischenmetalle sind Silber, Gold, Kupfer, Nickel, Eisen, Kobalt oder Mangan oder Legierungen derselben. Das keramische Material besteht vorzugsweise aus Aluminiumoxyd, da dessen Ausdehnungskoeffizient annähernd dem von Ti und Zr entspricht.However, these known processes are relatively involved. According to the invention, there is a very simple method of attaching a metal Object obtained on a ceramic surface in that the metal object made of titanium or zirconium with the interposition of a layer of a metal or a metal alloy with a lower melting point than Ti or Zr, in which Ti or Zr is slightly soluble in contact with the ceramic surface is brought, whereupon it is heated in a vacuum to such an extent that the intermediate Metal through the dissolving titanium or Zr melts and on the ceramic Surface adheres. Heating can be continued until such an amount of Ti or Zr has been dissolved in the intermediate metal that the melting point is up to Heating temperature or. moreover has risen so that the metal during becomes solid after heating. Suitable intermediate metals are silver, gold, copper, nickel, Iron, cobalt or manganese or alloys thereof. The ceramic material is made preferably made of aluminum oxide, since its coefficient of expansion approximates that of Ti and Zr corresponds.

Dem Verfahren liegt höchstwahrscheinlich die Erscheinung zugrunde, daß das Ti oder Zr sich im flüssigen Zwischenmetall, das an sich nicht an der keramischen Oberfläche zu haften braucht, löst und dann eine Benetzung der keramischen Oberfläche ermöglicht, so daß das Metall an der keramischen Oberfläche haftet. Infolge der Lösung von Ti oder Zr wird der Schmelzpunkt des Zwischenmetalls immer höher, so daß dieses Metall sich nach einer bestimmten Zeit wieder erhärten kann.The procedure is most likely based on the phenomenon that the Ti or Zr is in the liquid intermediate metal, which is not in itself in the ceramic Surface needs to adhere, dissolves and then wets the ceramic surface allows the metal to adhere to the ceramic surface. As a result of Solution of Ti or Zr, the melting point of the intermediate metal becomes higher and higher, so that this metal can harden again after a certain time.

Die Erfindung wird an Hand einer Zeichnung näher erläutert, die ein Ausführungsbeispiel einer durch das Verfahren nach der Erfindung hergestellten Entladungsröhre darstellt.The invention is explained in more detail with reference to a drawing that shows a Embodiment of a discharge tube manufactured by the method according to the invention represents.

In der Figur bezeichnet 1 eine Titanscheibe, an der der Anodenzylinder 5 befestigt ist; 2 bezeichnet die Titanscheibe, an der das Gitter 6 angebracht ist, während die Titanscheibe 3 die Kathode 7 trägt. Ein Ende des Glühfadens 8 ist an der Kathodenscheibe 3, das andere Ende an der Titanscheibe 4 befestigt.In the figure, 1 denotes a titanium disk on which the anode cylinder 5 is attached; 2 denotes the titanium disc to which the grid 6 is attached, while the titanium disk 3 carries the cathode 7. One end of the filament 8 is on the cathode disk 3, the other end attached to the titanium disk 4.

Zwischen den Titanscheiben sind keramische Zylinder 15, 16 und 17 vorgesehen, deren Höhe derart ist, daß der richtige Abstand zwischen den Elektroden erhalten wird, wenn die Teile der Röhre aufeinandergestapelt werden.Ceramic cylinders 15, 16 and 17 are located between the titanium disks provided, the height of which is such that the correct distance between the electrodes is obtained when the parts of the tube are stacked on top of each other.

Zwischen den Scheiben und den keramischen Endflächen der Zylinder sind z. B. aus Ag, Au, Cu, Ni, Fe, Co oder Mn bestehende Ringe 9, 10, 11, 12, 13 und 14 angebracht, deren Stärke äußerst gering sein muß, z. B. 5 bis 10,u, da sonst eine zu große Menge Ti in diesem Metall gelöst wird. Das Schmelzen dieser Ringe übt keinen nennenswerten Einfluß auf die Elektrodenabstände aus. Die Röhre wird unter einer Vakuumglocke entlüftet. Während der Entgasung kann auf übliche Weise erhitzt werden, z. B. mittels Hochfreqenzströme. Darauf wird die Erhitzung der Metallscheiben 1 bis 4 derart gesteigert, daß die Ringe 9 bis 14 schmelzen, weil sich eine kleine Menge Ti hierin löst und den Schmelzpunkt herabsetzt. Das geschmolzene Metall der Ringe 9 bis 14 führt eine Benetzung der keramischen Oberfläche mit diesem Metall herbei, so daß eine gute Haftung entsteht. Weil sich allmählich immer mehr Ti auflöst, nimmt die Schmelztemperatur des flüssigen Metalls zu, so daß dieses nach einiger Zeit während der Erhitzung erhärten kann. Die heißen Ti- oder Zr-Scheiben wirken dabei außerdem als Getter, so daß ein gutes Vakuum in der Röhre erhalten wird, nachdem die Röhrenteile aneinandergelötet sind. Die Röhre kann nach Abkühlung aus der Glocke entfernt werden. Das Verfahren nach der Erfindung eignet sich besonders zur Herstellung von Röhren für sehr kurze Wellen. Eine Röhre nach der Figur kann einen Durchmesser von etwa 10 mm und eine Höhe von z. B. 12 mm haben. Abmessungen können jedoch nach Bedarf beliebig größer oder kleiner gewählt werden, ohne daß die Anschmelzung gemäß der Erfindung Schwierigkeiten bereitet. Obgleich nur eine einzige Ausführungsform beschrieben ist, wird es einleuchten, daß die Verbindung von Titanium oder Zirkonium mit Keramik unter Zwischenfügung eines der erwähnten Metalle oder Legierungen mit niedrigerem Schmelzpunkt jede beliebige Gestalt im Rahmen der Erfindung aufweisen kann.Between the discs and the ceramic end faces of the cylinders are z. B. made of Ag, Au, Cu, Ni, Fe, Co or Mn existing rings 9, 10, 11, 12, 13 and 14 attached, the strength of which must be extremely small, e.g. B. 5 to 10, u, otherwise too much Ti in this metal is dissolved. The melting this ring has no significant influence on the electrode spacing. the The tube is vented under a bell jar. During the degassing can be done on usual Way to be heated, e.g. B. by means of high frequency currents. Thereupon the heating the metal disks 1 to 4 increased so that the rings 9 to 14 melt, because a small amount of Ti dissolves in it and lowers the melting point. That molten metal of rings 9 to 14 wets the ceramic surface with this metal, so that good adhesion is created. Because gradually as more Ti dissolves, the melting temperature of the liquid metal increases, so that this can harden after some time during heating. The hot ti- or Zr disks also act as a getter, so that a good vacuum in the Tube is obtained after the tube parts are soldered together. The tube can can be removed from the bell after cooling. The method according to the invention is particularly suitable for the production of tubes for very short shafts. One tube according to the figure can have a diameter of about 10 mm and a height of, for. B. 12 mm have. However, dimensions can be selected to be larger or smaller as required be without the fusing according to the invention causing difficulties. Although only a single embodiment is described, it will be evident that the connection of titanium or zirconium with ceramic with interposition any of the lower melting point metals or alloys mentioned, any May have shape within the scope of the invention.

Claims (2)

PATENTANSPRÜCHE: 1. Verfahren zum vakuumdichten Verbinden eines metallenen Gegenstandes mit einem keramischen Körper, dadurch gekennzeichnet, daß der metallene Gegenstand aus Titanium oder Zirkonium besteht und unter Zwischenfügung einer Schicht aus einem Metall oder einer Metalllegierung mit niedrigerem Schmelzpunkt als Zirkonium, worin Ti oder Zr in einem geringen Ausmaß gelöst werden kann, mit der keramischen Oberfläche in Berührung gebracht wird, worauf im Vakuum derart erhitzt wird, daß das zwischenliegende Metall infolge des darin gelösten Ti oder Zr schmilzt und an der keramischen Oberfläche haftet. PATENT CLAIMS: 1. Process for the vacuum-tight connection of a metal Object with a ceramic body, characterized in that the metallic The object is made of titanium or zirconium and has a layer in between made of a metal or a metal alloy with a lower melting point than zirconium, wherein Ti or Zr can be dissolved to a small extent with the ceramic Surface is brought into contact, whereupon it is heated in a vacuum in such a way that the intermediate metal melts and adheres due to the Ti or Zr dissolved therein adheres to the ceramic surface. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß als Zwischenmetall Silber, Gold, Kupfer, Nickel, Eisen, Kobalt oder Mangan verwendet wird.2. The method according to claim 1, characterized in that that silver, gold, copper, nickel, iron, cobalt or manganese are used as intermediate metals will.
DEN12126A 1955-04-23 1956-04-19 Process for the vacuum-tight connection of a metal object with a ceramic body Pending DE1013216B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1013216X 1955-04-23

Publications (1)

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DE1013216B true DE1013216B (en) 1957-08-01

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DEN12126A Pending DE1013216B (en) 1955-04-23 1956-04-19 Process for the vacuum-tight connection of a metal object with a ceramic body

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DE (1) DE1013216B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5057048A (en) * 1989-10-23 1991-10-15 Gte Laboratories Incorporated Niobium-ceramic feedthrough assembly and ductility-preserving sealing process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5057048A (en) * 1989-10-23 1991-10-15 Gte Laboratories Incorporated Niobium-ceramic feedthrough assembly and ductility-preserving sealing process

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