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DE10081632D2 - Abgasreinigungssystem - Google Patents

Abgasreinigungssystem

Info

Publication number
DE10081632D2
DE10081632D2 DE10081632T DE10081632T DE10081632D2 DE 10081632 D2 DE10081632 D2 DE 10081632D2 DE 10081632 T DE10081632 T DE 10081632T DE 10081632 T DE10081632 T DE 10081632T DE 10081632 D2 DE10081632 D2 DE 10081632D2
Authority
DE
Germany
Prior art keywords
control system
emission control
emission
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10081632T
Other languages
English (en)
Inventor
Lutz Fabian
Gunter Kroedel
Dietmar Resch
Horst Stelzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centrotherm Elektrische Anlagen GmbH and Co
Original Assignee
Centrotherm Elektrische Anlagen GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrotherm Elektrische Anlagen GmbH and Co filed Critical Centrotherm Elektrische Anlagen GmbH and Co
Priority to DE10081632T priority Critical patent/DE10081632D2/de
Application granted granted Critical
Publication of DE10081632D2 publication Critical patent/DE10081632D2/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/79—Injecting reactants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2204/00—Supplementary heating arrangements
    • F23G2204/20—Supplementary heating arrangements using electric energy
    • F23G2204/201—Plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/40—Sorption with wet devices, e.g. scrubbers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Treating Waste Gases (AREA)
DE10081632T 1999-06-16 2000-05-15 Abgasreinigungssystem Ceased DE10081632D2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10081632T DE10081632D2 (de) 1999-06-16 2000-05-15 Abgasreinigungssystem

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19927540A DE19927540A1 (de) 1999-06-16 1999-06-16 Abgasreinigungssystem
DE10081632T DE10081632D2 (de) 1999-06-16 2000-05-15 Abgasreinigungssystem
PCT/DE2000/001576 WO2000077452A1 (de) 1999-06-16 2000-05-15 Abgasreinigungssystem

Publications (1)

Publication Number Publication Date
DE10081632D2 true DE10081632D2 (de) 2002-05-29

Family

ID=7911471

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19927540A Withdrawn DE19927540A1 (de) 1999-06-16 1999-06-16 Abgasreinigungssystem
DE10081632T Ceased DE10081632D2 (de) 1999-06-16 2000-05-15 Abgasreinigungssystem

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19927540A Withdrawn DE19927540A1 (de) 1999-06-16 1999-06-16 Abgasreinigungssystem

Country Status (5)

Country Link
US (1) US7438869B1 (de)
EP (1) EP1185826A1 (de)
AU (1) AU5389800A (de)
DE (2) DE19927540A1 (de)
WO (1) WO2000077452A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10291177D2 (de) * 2001-03-27 2004-04-15 Ct Therm Elek Sche Anlagen Gmb Anordnung und Verfahren zur Reinigung von Abgasen
FR2834226B1 (fr) * 2001-12-28 2004-11-05 St Microelectronics Sa Procede de pyrolyse basse pression
DE10355970A1 (de) * 2003-11-24 2005-06-23 DAS-Dünnschicht Anlagen Systeme GmbH Dresden Vorrichtung und Verfahren für die Separation von Partikeln aus thermisch nachbehandelten Prozessabgasen
KR100634173B1 (ko) * 2006-06-23 2006-10-16 주식회사 이즈컨텍 폐가스 처리장치
JP4955027B2 (ja) * 2009-04-02 2012-06-20 クリーン・テクノロジー株式会社 排ガス処理装置における磁場によるプラズマの制御方法
CN102438732B (zh) * 2009-06-03 2014-10-01 艺科环球科技私人有限公司 从烟气中去除污染物和温室气体的方法和系统
DE102010020591A1 (de) * 2010-05-14 2011-11-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Plasmagenerator sowie Verfahren zur Erzeugung und Anwendung eines ionisierten Gases
MX2012009381A (es) * 2010-05-26 2012-09-12 Ecospec Global Technology Pte Ltd Metodos y sistema para retirar componentes del gas a partir de los gases de proceso.
DE102013016660A1 (de) * 2013-10-09 2015-04-09 Ralf Spitzl Verfahren und Vorrichtung zur plasmakatalytischen Umsetzung von Stoffen
FR3019471B1 (fr) * 2014-04-04 2016-05-06 Thales Sa Dispositif de conversion d'un effluent gazeux par plasma multi-source
CN109312954B (zh) * 2016-02-17 2020-10-16 齐鲁工业大学 一种等离子体加热器
EP3492165A1 (de) * 2017-11-29 2019-06-05 Siemens Aktiengesellschaft Reaktorkomplex zur umsetzung gleichgewichtslimitierter reaktionen und verfahren hierzu
JP2022508353A (ja) 2018-08-23 2022-01-19 トランスフォーム マテリアルズ エルエルシー 気体を処理するための系および方法
US11633710B2 (en) 2018-08-23 2023-04-25 Transform Materials Llc Systems and methods for processing gases
AT526238B1 (de) * 2022-08-09 2024-01-15 Thermal Proc Solutions Gmbh Vorrichtung zur Bereitstellung eines Plasmas
JP2024053878A (ja) * 2022-10-04 2024-04-16 株式会社荏原製作所 排ガス処理装置
US20250149314A1 (en) * 2023-11-03 2025-05-08 Samsung Electronics Co., Ltd. Scrubber, substrate processing system including the same, and substrate processing method using the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1225441A (en) * 1984-01-23 1987-08-11 Edward S. Fox Plasma pyrolysis waste destruction
DE3729971A1 (de) 1987-09-08 1989-03-16 Wuenning Joachim Heissgaserzeugungseinrichtung mit thermischer nachverbrennung
US5224441A (en) * 1991-09-27 1993-07-06 The Boc Group, Inc. Apparatus for rapid plasma treatments and method
US5387775A (en) * 1993-03-31 1995-02-07 The United States Of America As Represented By The United States Department Of Energy Apparatus for the plasma destruction of hazardous gases
GB2279447A (en) * 1993-06-29 1995-01-04 Ind Tech Res Inst Plasma waste disposal
DE4428418C2 (de) * 1994-08-11 1997-03-06 Buck Chem Tech Werke Verfahren und Vorrichtung zum Inertisieren toxischer Gase oder toxischer vergasbarer Stoffe
DE19501914C1 (de) 1995-01-23 1996-04-04 Centrotherm Elektrische Anlage Vorrichtung zur Reinigung von Abgasen
US5750823A (en) * 1995-07-10 1998-05-12 R.F. Environmental Systems, Inc. Process and device for destruction of halohydrocarbons
JP2985762B2 (ja) 1996-03-18 1999-12-06 日本電気株式会社 排気ガスの処理方法及び処理装置
GB9615859D0 (en) 1996-07-29 1996-09-11 Boc Group Plc Processes and apparatus for the scrubbing of exhaust gas streams

Also Published As

Publication number Publication date
EP1185826A1 (de) 2002-03-13
WO2000077452A1 (de) 2000-12-21
DE19927540A1 (de) 2000-12-21
AU5389800A (en) 2001-01-02
US7438869B1 (en) 2008-10-21

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Legal Events

Date Code Title Description
8131 Rejection