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DE10080131D2 - Mikroschaltkontakt - Google Patents

Mikroschaltkontakt

Info

Publication number
DE10080131D2
DE10080131D2 DE10080131T DE10080131T DE10080131D2 DE 10080131 D2 DE10080131 D2 DE 10080131D2 DE 10080131 T DE10080131 T DE 10080131T DE 10080131 T DE10080131 T DE 10080131T DE 10080131 D2 DE10080131 D2 DE 10080131D2
Authority
DE
Germany
Prior art keywords
contact
switch contact
micro switch
nitride
gallium nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE10080131T
Other languages
English (en)
Inventor
Mario Adamschik
Erhard Kohn
Stefan Ertl
Philipp Schmid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GFD Gesellschaft fuer Diamantprodukte mbH
Original Assignee
GFD Gesellschaft fuer Diamantprodukte mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GFD Gesellschaft fuer Diamantprodukte mbH filed Critical GFD Gesellschaft fuer Diamantprodukte mbH
Priority to DE10080131T priority Critical patent/DE10080131D2/de
Priority claimed from PCT/DE2000/000177 external-priority patent/WO2000044061A1/de
Application granted granted Critical
Publication of DE10080131D2 publication Critical patent/DE10080131D2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/02—Contacts characterised by the material thereof
    • H01H1/021—Composite material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0052—Special contact materials used for MEMS
    • H01H2001/0057—Special contact materials used for MEMS the contact materials containing refractory materials, e.g. tungsten
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Contacts (AREA)
  • Micromachines (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Push-Button Switches (AREA)
DE10080131T 1999-01-25 2000-01-19 Mikroschaltkontakt Expired - Lifetime DE10080131D2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE10080131T DE10080131D2 (de) 1999-01-25 2000-01-19 Mikroschaltkontakt

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19902868 1999-01-25
DE10080131T DE10080131D2 (de) 1999-01-25 2000-01-19 Mikroschaltkontakt
PCT/DE2000/000177 WO2000044061A1 (de) 1999-01-23 2000-01-19 Nichtwässrige elektrochemische zelle

Publications (1)

Publication Number Publication Date
DE10080131D2 true DE10080131D2 (de) 2002-04-25

Family

ID=7895324

Family Applications (2)

Application Number Title Priority Date Filing Date
DE10080131T Expired - Lifetime DE10080131D2 (de) 1999-01-25 2000-01-19 Mikroschaltkontakt
DE50002067T Expired - Fee Related DE50002067D1 (de) 1999-01-25 2000-01-25 Mikroschaltkontakt

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE50002067T Expired - Fee Related DE50002067D1 (de) 1999-01-25 2000-01-25 Mikroschaltkontakt

Country Status (6)

Country Link
EP (1) EP1151446B1 (de)
JP (1) JP2003527727A (de)
AT (1) ATE239974T1 (de)
AU (1) AU2440000A (de)
DE (2) DE10080131D2 (de)
WO (1) WO2000044012A1 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6396368B1 (en) 1999-11-10 2002-05-28 Hrl Laboratories, Llc CMOS-compatible MEM switches and method of making
US6426722B1 (en) 2000-03-08 2002-07-30 Hrl Laboratories, Llc Polarization converting radio frequency reflecting surface
US6812903B1 (en) 2000-03-14 2004-11-02 Hrl Laboratories, Llc Radio frequency aperture
US6518931B1 (en) 2000-03-15 2003-02-11 Hrl Laboratories, Llc Vivaldi cloverleaf antenna
US6538621B1 (en) 2000-03-29 2003-03-25 Hrl Laboratories, Llc Tunable impedance surface
US6483480B1 (en) 2000-03-29 2002-11-19 Hrl Laboratories, Llc Tunable impedance surface
US6552696B1 (en) 2000-03-29 2003-04-22 Hrl Laboratories, Llc Electronically tunable reflector
US7217977B2 (en) 2004-04-19 2007-05-15 Hrl Laboratories, Llc Covert transformation of transistor properties as a circuit protection method
US6815816B1 (en) 2000-10-25 2004-11-09 Hrl Laboratories, Llc Implanted hidden interconnections in a semiconductor device for preventing reverse engineering
US6483481B1 (en) 2000-11-14 2002-11-19 Hrl Laboratories, Llc Textured surface having high electromagnetic impedance in multiple frequency bands
US6558380B2 (en) 2000-12-08 2003-05-06 Gfd Gesellschaft Fur Diamantprodukte Mbh Instrument for surgical purposes and method of cleaning same
DE10061278B4 (de) * 2000-12-08 2004-09-16 GFD-Gesellschaft für Diamantprodukte mbH Instrument für chirurgische Zwecke
US7294935B2 (en) 2001-01-24 2007-11-13 Hrl Laboratories, Llc Integrated circuits protected against reverse engineering and method for fabricating the same using an apparent metal contact line terminating on field oxide
US6740942B2 (en) 2001-06-15 2004-05-25 Hrl Laboratories, Llc. Permanently on transistor implemented using a double polysilicon layer CMOS process with buried contact
US6774413B2 (en) 2001-06-15 2004-08-10 Hrl Laboratories, Llc Integrated circuit structure with programmable connector/isolator
US6545647B1 (en) 2001-07-13 2003-04-08 Hrl Laboratories, Llc Antenna system for communicating simultaneously with a satellite and a terrestrial system
US6739028B2 (en) 2001-07-13 2004-05-25 Hrl Laboratories, Llc Molded high impedance surface and a method of making same
US6670921B2 (en) 2001-07-13 2003-12-30 Hrl Laboratories, Llc Low-cost HDMI-D packaging technique for integrating an efficient reconfigurable antenna array with RF MEMS switches and a high impedance surface
WO2003017301A1 (en) * 2001-08-20 2003-02-27 Honeywell International Inc. Snap action thermal switch
US6897535B2 (en) 2002-05-14 2005-05-24 Hrl Laboratories, Llc Integrated circuit with reverse engineering protection
US7276990B2 (en) 2002-05-15 2007-10-02 Hrl Laboratories, Llc Single-pole multi-throw switch having low parasitic reactance, and an antenna incorporating the same
US7298228B2 (en) 2002-05-15 2007-11-20 Hrl Laboratories, Llc Single-pole multi-throw switch having low parasitic reactance, and an antenna incorporating the same
US7049667B2 (en) 2002-09-27 2006-05-23 Hrl Laboratories, Llc Conductive channel pseudo block process and circuit to inhibit reverse engineering
US6979606B2 (en) 2002-11-22 2005-12-27 Hrl Laboratories, Llc Use of silicon block process step to camouflage a false transistor
EP1426992A3 (de) * 2002-12-05 2005-11-30 Omron Corporation Mikroelektromechanische elektrostatische Schalter
JP4182861B2 (ja) 2002-12-05 2008-11-19 オムロン株式会社 接点開閉器および接点開閉器を備えた装置
JP4846239B2 (ja) 2002-12-13 2011-12-28 エイチアールエル ラボラトリーズ，エルエルシー ウェル注入を用いた集積回路の改変
US7164387B2 (en) 2003-05-12 2007-01-16 Hrl Laboratories, Llc Compact tunable antenna
US7071888B2 (en) 2003-05-12 2006-07-04 Hrl Laboratories, Llc Steerable leaky wave antenna capable of both forward and backward radiation
US7068234B2 (en) 2003-05-12 2006-06-27 Hrl Laboratories, Llc Meta-element antenna and array
US7253699B2 (en) 2003-05-12 2007-08-07 Hrl Laboratories, Llc RF MEMS switch with integrated impedance matching structure
US7456803B1 (en) 2003-05-12 2008-11-25 Hrl Laboratories, Llc Large aperture rectenna based on planar lens structures
US7245269B2 (en) 2003-05-12 2007-07-17 Hrl Laboratories, Llc Adaptive beam forming antenna system using a tunable impedance surface
US7242063B1 (en) 2004-06-29 2007-07-10 Hrl Laboratories, Llc Symmetric non-intrusive and covert technique to render a transistor permanently non-operable
US7307589B1 (en) 2005-12-29 2007-12-11 Hrl Laboratories, Llc Large-scale adaptive surface sensor arrays
JP5626972B2 (ja) * 2010-07-21 2014-11-19 独立行政法人物質・材料研究機構 電子機械スイッチの製造方法
US8994609B2 (en) 2011-09-23 2015-03-31 Hrl Laboratories, Llc Conformal surface wave feed
US9466887B2 (en) 2010-11-03 2016-10-11 Hrl Laboratories, Llc Low cost, 2D, electronically-steerable, artificial-impedance-surface antenna
US8982011B1 (en) 2011-09-23 2015-03-17 Hrl Laboratories, Llc Conformal antennas for mitigation of structural blockage

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4954170A (en) * 1989-06-30 1990-09-04 Westinghouse Electric Corp. Methods of making high performance compacts and products
GB9111474D0 (en) * 1991-05-29 1991-07-17 De Beers Ind Diamond Boron doped diamond
US5413668A (en) * 1993-10-25 1995-05-09 Ford Motor Company Method for making mechanical and micro-electromechanical devices
FR2731715B1 (fr) * 1995-03-17 1997-05-16 Suisse Electronique Microtech Piece de micro-mecanique et procede de realisation

Also Published As

Publication number Publication date
JP2003527727A (ja) 2003-09-16
WO2000044012A1 (de) 2000-07-27
DE50002067D1 (de) 2003-06-12
EP1151446B1 (de) 2003-05-07
ATE239974T1 (de) 2003-05-15
EP1151446A1 (de) 2001-11-07
AU2440000A (en) 2000-08-07

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