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DE10011597A1 - Production of decorative hard layers comprises depositing a metal carbonitride and/or a metal carbonitride oxide on a substrate - Google Patents

Production of decorative hard layers comprises depositing a metal carbonitride and/or a metal carbonitride oxide on a substrate

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Publication number
DE10011597A1
DE10011597A1 DE2000111597 DE10011597A DE10011597A1 DE 10011597 A1 DE10011597 A1 DE 10011597A1 DE 2000111597 DE2000111597 DE 2000111597 DE 10011597 A DE10011597 A DE 10011597A DE 10011597 A1 DE10011597 A1 DE 10011597A1
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Germany
Prior art keywords
layer
metal
hard material
metal component
material layer
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DE2000111597
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German (de)
Inventor
Werner Fleischer
Thong Trinh
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IHI Hauzer Techno Coating BV
Original Assignee
Hauzer Techno Coating Europe BV
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Priority to DE2000111597 priority Critical patent/DE10011597A1/en
Priority to PCT/EP2001/001357 priority patent/WO2001068935A1/en
Publication of DE10011597A1 publication Critical patent/DE10011597A1/en
Withdrawn legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Producing decorative hard layers comprises depositing a metal carbonitride and/or a metal carbonitride oxide on a substrate. The metal is present in an amount of 15-70 at. % and the ratio of the MeC and MeN amounts in the layer is 0.2-2.2. Preferred Features: The metal component is made from Ti, Hf, Zr, Al or Cu. During layer deposition, a further metal, preferably Ta, Cr, Nb, V or W is inserted into the layer. The layers are deposited using an arc process or by sputtering.

Description

Die Erfindung betrifft ein Verfahren zur Herstellung dekorativer Hartstoff­ schichten hoher Farbstabilität im grau-schwarzen Farbbereich sowie de­ korative Hartstoffschichten dieser Art.The invention relates to a method for producing decorative hard material layers of high color stability in the gray-black color range as well as de corative hard coatings of this type.

Die Herstellung von Hartstoffschichten im grauen oder schwarzen Farbbe­ reich ist bekannt und erfolgt nach unterschiedlichen Methoden und auch mit unterschiedlichen Schichtmaterialien. Beispielsweise kann durch Eloxieren, galvanisiertes Schwarzchrom und Schwarznickel, durch Ti­ tanaluminiumnitride sowie amorphe Kohlenstoffschichten ein Herstellen schwarzer dekorativer Farben erfolgen, aber bei all diesen bekannten Verfahren besteht der Nachteil, daß die erzielbaren Farbvariationen be­ schränkt sind, und zwar insbesondere dann, wenn eine Niedrigtempera­ turbeschichtung von galvanisch vormetallisierten Kunststoffteilen erfolgen muß oder wenn stabile mechanische Eigenschaften gefordert werden. Des weiteren bereitet es bei derartigen dekorativen Hartstoffschichten im grau­ en oder schwarzen Farbbereich häufig Schwierigkeiten eine Langzeitstabi­ lität der jeweiligen Farbe sicherzustellen.The production of hard material layers in gray or black color Reich is known and is made using different methods and also with different layer materials. For example, by Anodizing, galvanized black chrome and black nickel, through Ti tanaluminium nitride and amorphous carbon layers black decorative colors are done, but with all these known Processes have the disadvantage that the color variations that can be achieved are restricted, especially when the temperature is low Surface coating of pre-metallized plastic parts must or if stable mechanical properties are required. Of it also prepares such decorative hard material layers in gray or black color range often difficulties a long-term stabilization ensure the color of each color.

Aufgabe der vorliegenden Erfindung ist es, die vorstehend erwähnten Nachteile zu beseitigen und es zu ermöglichen, farbstabile Hartstoff­ schichten im grauen bis schwarzen Farbbereich zu schaffen, die ein in diesem Bereich breites Spektrum der Farbgebung zulassen und eine hohe Farbstabilität gewährleisten. Die Erzeugung dieser Hartstoffschichten soll mittels solcher Verfahren möglich sein, die es gestatten, auch Kunststoff­ teile mit entsprechend hoher Farbstabilität zu beschichten.The object of the present invention is to achieve the aforementioned Eliminate disadvantages and enable color-stable hard material layers in the gray to black color range to create the one in allow a wide range of colors and a high range  Ensure color stability. The generation of these hard material layers is said to be possible by means of such methods that allow plastic to coat parts with a correspondingly high color stability.

Gelöst wird diese Aufgabe nach der Erfindung im wesentlichen dadurch, daß auf dem jeweils zu beschichtenden Substrat als Schichtwerkstoff we­ nigstens ein Metallcarbonitrid und/oder wenigstens ein Metallcarboni­ tridoxid abgeschieden wird, wobei der Anteil der Metallkomponente im Be­ reich von etwa 15 at% bis etwa 70 at% und das Verhältnis der MeC- und MeN-Anteile in der Schicht in einem Verhältnis von etwa 0,2 bis etwa 2,2 gewählt wird.According to the invention, this object is essentially achieved by that we on the substrate to be coated as a layer material at least one metal carbonitride and / or at least one metal carboni Tridoxid is deposited, the proportion of the metal component in the Be range from about 15 at% to about 70 at% and the ratio of MeC and MeN levels in the layer in a ratio of about 0.2 to about 2.2 is chosen.

Durch Variation der Anteile der Metalle und der Reaktivgase, z. B. Stick­ stoff, Sauerstoff und kohlenstoffhaltiges Gas, kann eine Variation der Farbgebung in einem weiten Bereich problemlos erfolgen, wobei dieser Be­ reich von grau bis hin zu tiefschwarz reicht.By varying the proportions of the metals and the reactive gases, e.g. B. stick substance, oxygen and carbon-containing gas, can be a variation of the Coloring can be done in a wide range without any problems, this Be ranges from gray to deep black.

Von besonderem Vorteil ist, daß durch Wahl des Metallgehalts bzw. des Anteils der Metallkomponente während der Schichtabscheidung die Kor­ rosionsstabilität der Schicht wesentlich gesteigert werden kann.It is particularly advantageous that by choosing the metal content or Proportion of the metal component during the layer deposition the cor corrosion resistance of the layer can be increased significantly.

Insbesondere gelingt es im Rahmen der Erfindung, eine zu Farbverände­ rungen führende Nachoxidation an der Atmosphäre im grau-schwarzen Farbbereich zu verhindern und damit sicherzustellen, daß dauerhaft Farbveränderungen oder Farbumschläge vermieden werden können. In particular, it is possible within the scope of the invention to change colors post-oxidation in the atmosphere in gray-black Prevent color area and ensure that permanent Color changes or color changes can be avoided.  

Diese dauerhafte Farbstabilität wird speziell dadurch noch verbessert, wenn in die Schicht zusätzlich eine weitere Metallkomponente eingebaut wird, die wenig zu Oxidbildungen neigt.This permanent color stability is especially improved by if an additional metal component is built into the layer which has little tendency to form oxides.

So kann beispielsweise ein Einbau von Chrom in Verbindung mit Me­ tallcarbonitrid oder Metallcarbonitridoxid zu sehr vorteilhaften Ergebnis­ sen führen, wobei der Chromanteil beispielsweise im Bereich von etwa 5% liegen kann und die Metallkomponente des die Schicht bildenden Stoffes einen Anteil größer 40 at% aufweisen sollte.For example, the installation of chromium in connection with Me tall carbonitride or metal carbonitride oxide to very advantageous result lead, the chromium content, for example, in the range of about 5% can lie and the metal component of the material forming the layer should have a proportion greater than 40 at%.

Weitere vorteilhafte Ausgestaltungen der Erfindung sind in den Unteran­ sprüchen angegeben und sind auch der nachfolgenden Beschreibung zu entnehmen.Further advantageous embodiments of the invention are in the Unteran say specified and are also to the following description remove.

Gemäß einem ersten Ausführungsbeispiel nach Diagramm 1 wird auf ein Substrat im Arc-Verfahren eine dekorative Hartstoffschicht aufgebracht, und zwar mit einer Dicke größer 1 µm, wobei als Schichtwerkstoff ZrCN eingesetzt wird. Der Anteil von Zr liegt in der Größenordnung von 50 at%. Die Reaktivgassteuerung erfolgt so, daß das entstehende Verhältnis von ZrC zu ZrN in der Schicht im Bereich von 0,2 bis 2,2% liegt.According to a first exemplary embodiment according to diagram 1, a A decorative hard material layer is applied to the substrate using the arc process, with a thickness greater than 1 µm, with ZrCN as the layer material is used. The proportion of Zr is of the order of 50 at%. The reactive gas control is carried out so that the resulting ratio of ZrC to ZrN in the layer is in the range of 0.2 to 2.2%.

Gemäß einem zweiten Ausführungsbeispiel, das auf Diagramm 2 bezug­ nimmt, wird analog zum Ausführungsbeispiel 1 vorgegangen, aber zusätz­ lich wird in die Schicht eine Metallkomponente 2, in diesem Fall Chrom mit einer Konzentration von 1 bis 25 at% durch simultane Beschichtung eingebaut. Auf diese Weise wird die Korrosionsstabilität weiter verbessert. According to a second embodiment, referring to diagram 2 takes, is analogous to embodiment 1, but additional Lich is a metal component 2 in the layer, in this case chrome with a concentration of 1 to 25 at% by simultaneous coating built-in. In this way, the corrosion stability is further improved.  

Die dekorative Hartstoffschicht nach der Erfindung kann als Einzel­ schichtsystem, aber auch als Mehrschichtsystem aufgebaut sein. Von be­ sonderem Vorteil ist, wenn bei Mehrlagenschichten nach der Abscheidung einzelner Lagen sowohl eine Unterbrechung zur Abkühlung des Substrats als auch ein Ionenbombardement zur Säuberung der jeweils abgeschiede­ nen Schicht und zur Verankerung der jeweils nachfolgenden Schicht durchgeführt wird. Ionen entstehen dabei sowohl durch Metalle als auch durch Gase, die im gesamten Beschichtungsprozeß verwendet werden. Bevorzugt wird ein Ionenbombardement dieser Art sowohl beim Start als auch am Ende des gesamten Beschichtungsprozesses durchgeführt. Eine derartige Prozeßfolge ist beispielsweise in Fig. 1 angegeben.The decorative hard material layer according to the invention can be constructed as a single layer system, but also as a multi-layer system. It is of particular advantage if, in the case of multi-layer layers, after the deposition of individual layers, both an interruption to cool the substrate and an ion bombardment to clean the respectively deposited layer and to anchor the respectively subsequent layer are carried out. Ions are created both by metals and by gases that are used in the entire coating process. Ion bombardment of this type is preferably carried out both at the start and at the end of the entire coating process. Such a process sequence is given, for example, in FIG. 1.

Zur Durchführung des Beschichtungsverfahrens wird bevorzugt die Arc- Technik verwendet, aber die Erfindung ist darauf nicht beschränkt.To carry out the coating process, the arc is preferably Technique used, but the invention is not limited to this.

Fig. 2 zeigt in schematischer Weise und unter Angabe von Anlagendetails eine Beschichtungsanlage der Anmelderin mit sechs Kathoden mit der Be­ zeichnung HTC 1800. Eine Anlage dieser Art eignet sich besonders gut zur Durchführung des erfindungsgemäßen Verfahrens, da sie sowohl im Arc- Modus als auch UBM-Modus (unbalanced magnetron-modus) betrieben werden kann. Fig. 2 shows in a schematic manner and with details of the system, a coating system of the applicant with six cathodes with the designation HTC 1800. A system of this type is particularly well suited for carrying out the method according to the invention, since it is both in Arc mode and UBM Mode (unbalanced magnetron mode) can be operated.

Claims (20)

1. Verfahren zur Herstellung dekorativer Hartstoffschichten hoher Farbstabilität im grau-schwarzen Farbbereich, dadurch gekennzeichnet, daß auf dem jeweils zu beschichtenden Substrat als Schichtwerk­ stoff wenigstens ein Metallcarbonitrid und/oder wenigstens ein Me­ tallcarbonitridoxid abgeschieden wird, wobei der Anteil der Metall­ komponente im Bereich von etwa 15 at% bis etwa 70 at% und das Verhältnis der MeC- und MeN-Anteile in der Schicht in einem Ver­ hältnis von etwa 0,2 bis etwa 2,2 gewählt wird.1. Process for the production of decorative hard material layers of high color stability in the gray-black color range, characterized in that at least one metal carbonitride and / or at least one metal carbonitride oxide is deposited on the substrate to be coated in each case, the proportion of the metal component being in the range from about 15 at% to about 70 at% and the ratio of the MeC and MeN fractions in the layer in a ratio of about 0.2 to about 2.2 is selected. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß der Anteil der Metallkomponente größer 40 at% gewählt wird.2. The method according to claim 1, characterized, that the proportion of the metal component is chosen to be greater than 40 at%. 3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß als Metallkomponente der Metallcarbonitridschicht oder der Metallcarbonitridoxidschicht die Metalle Ti, Zr, Hf, Al oder Cu oder Kombinationen daraus verwendet werden. 3. The method according to claim 1 or 2, characterized, that as the metal component of the metal carbonitride layer or Metal carbonitride oxide layer the metals Ti, Zr, Hf, Al or Cu or Combinations of these can be used.   4. Verfahren nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, daß während der Schichtabscheidung zusätzlich zumindest ein weiteres Metall als zweite Metallkomponente in die Schicht eingela­ gert wird.4. The method according to claim 1, 2 or 3, characterized, that during the layer deposition an additional at least one further metal as second metal component in the layer is gert. 5. Verfahren nach Anspruch 4, dadurch gekennzeichnet, daß als zusätzliche zweite Metallkomponente die Metalle Ta, Cr, Nb, V oder W oder Kombinationen daraus verwendet werden.5. The method according to claim 4, characterized, that the metals Ta, Cr, Nb, as an additional second metal component V or W or combinations thereof can be used. 6. Verfahren nach Anspruch 5, dadurch gekennzeichnet, daß die zusätzliche zweite Metallkomponente mit einer Konzentrati­ on von etwa 1 at% bis 25 at% in die Schicht eingelagert wird.6. The method according to claim 5, characterized, that the additional second metal component with a concentrate from about 1 at% to 25 at% is stored in the layer. 7. Verfahren nach Anspruch 6, dadurch gekennzeichnet, daß als zusätzliche zweite Metallkomponente das Metall Chrom in einer Konzentration von etwa 3 bis 7 at%, insbesondere in einer Konzentration von etwa 5 at% eingelagert wird.7. The method according to claim 6, characterized, that as an additional second metal component, the metal chromium in a concentration of about 3 to 7 at%, especially in one Concentration of about 5 at% is stored. 8. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die Schichtabscheidung in Form einer Einzelschicht oder in Form einer Mehrlagenschicht erfolgt. 8. The method according to any one of the preceding claims, characterized, that the layer deposition in the form of a single layer or in Form of a multi-layer layer takes place.   9. Verfahren nach Anspruch 8, dadurch gekennzeichnet, daß vor Beginn der Schichtablagerung und/oder am Ende des je­ weiligen Beschichtungsprozesses ein Ionenbombardement zu Säu­ berungs- und/oder Verankerungszwecken durchgeführt wird.9. The method according to claim 8, characterized, that before the start of layer deposition and / or at the end of each ion bombardment due to the coating process Carrying and / or anchoring purposes is carried out. 10. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß bei der Bildung von Mehrlagenschichten nach der Abscheidung einzelner Lagen eine Unterbrechung zur Abkühlung des Substrats und/oder ein Ionenbombardement zur Säuberung der abgeschiede­ nen Schichten und zur Verankerung der Folgeschicht durchgeführt wird.10. The method according to any one of the preceding claims, characterized, that in the formation of multilayer layers after the deposition individual layers an interruption to cool the substrate and / or ion bombardment to clean the deposited layers and to anchor the subsequent layer becomes. 11. Verfahren nach einem oder mehreren der vorhergehenden Ansprü­ che, dadurch gekennzeichnet, daß zur Schichtabscheidung das Arc-Verfahren oder das Sputter- Verfahren oder Kombinationen dieser Verfahren verwendet werden.11. The method according to one or more of the preceding claims che, characterized, that the arc process or sputtering Methods or combinations of these methods can be used. 12. Dekorative Hartstoffschicht mit hoher Farbstabilität im grau- schwarzen Farbbereich, dadurch gekennzeichnet, daß die Hartstoffschicht aus einem Metallcarbonitrid oder einem Metallcarbonitridoxid besteht, wobei der Anteil der Metallkompo­ nente im Bereich von 15 at% bis 70 at% gelegen und vorzugsweise größer als etwa 40 at% ist. 12. Decorative hard material layer with high color stability in gray black color range, characterized, that the hard material layer made of a metal carbonitride or Metal carbonitride oxide, the proportion of the metal compo nente in the range of 15 at% to 70 at% and preferably is greater than about 40 at%.   13. Dekorative Hartstoffschicht nach Anspruch 12, dadurch gekennzeichnet, daß Ti, Zr, Hf, Al oder Cu als Metallkomponente in der Metallcarbo­ nitridschicht oder der Metallcarbonitridoxidschicht vorgesehen ist.13. Decorative hard material layer according to claim 12, characterized, that Ti, Zr, Hf, Al or Cu as a metal component in the metal carbo nitride layer or the metal carbonitride oxide layer is provided. 14. Dekorative Hartstoffschicht nach einem der Ansprüche 12 und 13, dadurch gekennzeichnet, daß in der Hartstoffschicht Ta, Cr, Nb, V oder W als zusätzliche weitere bzw. zweite Metallkomponente eingelagert ist.14. Decorative hard material layer according to one of claims 12 and 13, characterized, that in the hard material layer Ta, Cr, Nb, V or W as an additional further or second metal component is stored. 15. Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 14, dadurch gekennzeichnet, daß als zusätzliche zweite Metallkomponente Chrom in einer Kon­ zentration von 3 bis 7 at%, insbesondere einer Konzentration von etwa 5 at% in die Schicht eingelagert ist.15. Decorative hard material layer according to one of claims 12 to 14, characterized, that as an additional second metal component chromium in a con concentration of 3 to 7 at%, especially a concentration of about 5 at% is embedded in the layer. 16. Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 15, dadurch gekennzeichnet, daß die Hartstoffschicht in Form einer Einzelschicht aufgebaut ist.16. Decorative hard material layer according to one of claims 12 to 15, characterized, that the hard material layer is constructed in the form of a single layer. 17. Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 15, dadurch gekennzeichnet, daß die Hartstoffschicht als Mehrlagenschicht aufgebaut ist.17. Decorative hard material layer according to one of claims 12 to 15, characterized, that the hard material layer is constructed as a multilayer layer. 18. Dekorative Hartstoffschicht nach Anspruch 17, dadurch gekennzeichnet, daß die einzelnen Lagen der Mehrlagenschicht gleichartig aufgebaut sind. 18. Decorative hard material layer according to claim 17, characterized, that the individual layers of the multilayer layer are constructed in the same way are.   19. Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 18, dadurch gekennzeichnet, daß der Anteil der Metallkomponente bei Mehrlagenschichten zur Schichtoberfläche hin zunimmt.19. Decorative hard material layer according to one of claims 12 to 18, characterized, that the proportion of the metal component in multilayer layers Layer surface increases. 20. Dekorative Hartstoffschicht nach einem der Ansprüche 12 bis 19, dadurch gekennzeichnet, daß zumindest in der äußersten Schicht der Mehrlagenschicht der Anteil der Metallkomponente größer 40 at% gewählt ist.20. Decorative hard material layer according to one of claims 12 to 19, characterized, that at least in the outermost layer of the multilayer The proportion of the metal component selected to be greater than 40 at%.
DE2000111597 2000-03-10 2000-03-10 Production of decorative hard layers comprises depositing a metal carbonitride and/or a metal carbonitride oxide on a substrate Withdrawn DE10011597A1 (en)

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PCT/EP2001/001357 WO2001068935A1 (en) 2000-03-10 2001-02-08 Method for producing hard material layers

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011112288A1 (en) * 2011-09-05 2013-03-07 Oerlikon Trading Ag, Trübbach Trim part for motor vehicles
US9212425B2 (en) 2006-01-13 2015-12-15 Ihi Hauzer Techno Coating B.V. Article having a relatively soft support material and a relatively hard decorative layer and also a method for its manufacture
WO2024133736A1 (en) * 2022-12-23 2024-06-27 Oerlikon Surface Solutions Ag, Pfäffikon Deep black decorative coating with increased thermal stability

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55120936A (en) * 1979-02-27 1980-09-17 Hitachi Metals Ltd Covered tool
DE3503105A1 (en) * 1985-01-30 1986-07-31 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COATING MACHINE PARTS AND TOOLS WITH CARBIDE MATERIAL AND MACHINE PARTS AND TOOLS PRODUCED BY THE METHOD
DE3890319C2 (en) * 1987-04-23 1994-08-25 Nisshin Steel Co Ltd Decorative panel as building material
JPH0874036A (en) * 1994-08-31 1996-03-19 Kobe Steel Ltd Hard ceramic coated member excellent in wear resistance
DE69730576T2 (en) * 1996-12-04 2005-02-03 Sumitomo Electric Industries, Ltd. Coated tool and method for its manufacture

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9212425B2 (en) 2006-01-13 2015-12-15 Ihi Hauzer Techno Coating B.V. Article having a relatively soft support material and a relatively hard decorative layer and also a method for its manufacture
DE102011112288A1 (en) * 2011-09-05 2013-03-07 Oerlikon Trading Ag, Trübbach Trim part for motor vehicles
WO2024133736A1 (en) * 2022-12-23 2024-06-27 Oerlikon Surface Solutions Ag, Pfäffikon Deep black decorative coating with increased thermal stability

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