DD29614A - - Google Patents
Info
- Publication number
- DD29614A DD29614A DD29614DA DD29614A DD 29614 A DD29614 A DD 29614A DD 29614D A DD29614D A DD 29614DA DD 29614 A DD29614 A DD 29614A
- Authority
- DD
- German Democratic Republic
Links
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD29614A true DD29614A (de) |
Family
ID=235864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD29614D DD29614A (de) |
Country Status (1)
| Country | Link |
|---|---|
| DD (1) | DD29614A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0004033A1 (de) * | 1978-03-03 | 1979-09-19 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH | Verfahren zur Vergleichmässigung des Polierabtrages von Scheiben beim Polieren |
-
0
- DD DD29614D patent/DD29614A/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0004033A1 (de) * | 1978-03-03 | 1979-09-19 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH | Verfahren zur Vergleichmässigung des Polierabtrages von Scheiben beim Polieren |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5913718A (en) | Head for a chemical mechanical polishing apparatus | |
| US4270316A (en) | Process for evening out the amount of material removed from discs in polishing | |
| US6431968B1 (en) | Carrier head with a compressible film | |
| US6379222B2 (en) | Methods and apparatus for chemical mechanical planarization (CMP) of a semiconductor wafer | |
| US6431959B1 (en) | System and method of defect optimization for chemical mechanical planarization of polysilicon | |
| US6666756B1 (en) | Wafer carrier head assembly | |
| JPH11288906A5 (de) | ||
| JP2003529457A5 (de) | ||
| DE4139205A1 (de) | Verfahren zur herstellung lagerstabiler oberflaechen von siliciumscheiben mit vorteilhaften oxidationseigenschaften | |
| DE1014873B (de) | Vorrichtung zum einseitigen Laeppen von Werkstuecken auf Laeppmaschinen | |
| DD29614A (de) |