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CN2733299Y - High vacuum cryostat by employing low heat-leakage flexible connection structure - Google Patents

High vacuum cryostat by employing low heat-leakage flexible connection structure Download PDF

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CN2733299Y
CN2733299Y CN 200420081572 CN200420081572U CN2733299Y CN 2733299 Y CN2733299 Y CN 2733299Y CN 200420081572 CN200420081572 CN 200420081572 CN 200420081572 U CN200420081572 U CN 200420081572U CN 2733299 Y CN2733299 Y CN 2733299Y
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connection structure
refrigerator
heat sink
flexible connection
low
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陈国邦
金滔
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Zhejiang University ZJU
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Abstract

本实用新型公开了一种采用低热漏柔性连接结构的高真空低温恒温器。它具有制冷机固定法兰,制冷机固定法兰外侧与恒温器上端的外壁采用螺栓结构固定,制冷机固定法兰内侧与恒温器上端的外壁采用波纹管焊接固定,恒温器内,制冷机固定法兰下依次设有真空夹套、上热沉、柔性热连接结构、下热沉。本实用新型的优点:真空夹套采用薄壁不锈钢管、波纹管或折叠套管等型式,具有低热漏的特点;固定结构中的不锈钢波纹管能够消除由于低温制冷机的运行带来的机械振动;柔性连接结构允许制冷机冷头与被冷却物体间有一定的机械偏动;冷头与热沉及热沉与被冷物体间附加铟片则能降低连接件间的接触热阻以图减少有效制冷量的损失。

Figure 200420081572

The utility model discloses a high-vacuum low-temperature thermostat adopting a flexible connection structure with low heat leakage. It has a refrigerator fixing flange, the outer side of the refrigerator fixing flange and the outer wall of the upper end of the thermostat are fixed by a bolt structure, the inner side of the refrigerator fixing flange and the outer wall of the upper end of the thermostat are fixed by bellows welding, inside the thermostat, the refrigerator is fixed A vacuum jacket, an upper heat sink, a flexible thermal connection structure, and a lower heat sink are arranged sequentially under the flange. The utility model has the advantages: the vacuum jacket adopts the type of thin-walled stainless steel pipe, bellows or folded sleeve, which has the characteristics of low heat leakage; the stainless steel bellows in the fixed structure can eliminate the mechanical vibration caused by the operation of the low-temperature refrigerator ; The flexible connection structure allows a certain mechanical deflection between the cold head of the refrigerator and the object to be cooled; the additional indium sheet between the cold head and the heat sink and the heat sink and the object to be cooled can reduce the contact thermal resistance between the connecting parts in an attempt to reduce Loss of effective cooling capacity.

Figure 200420081572

Description

采用低热漏柔性连接结构的高真空低温恒温器High vacuum cryostat with low heat leakage flexible connection structure

技术领域technical field

本实用新型涉及一种采用低热漏柔性连接结构的高真空低温恒温器。The utility model relates to a high-vacuum low-temperature thermostat adopting a flexible connection structure with low heat leakage.

背景技术Background technique

许多应用场合(例如真空环境模拟室的冷却)需要提供一个低温环境,以往更多地采用低温液体流经盘绕在被冷物体上的盘管的方式来达到冷却目的,然而这样的方式在运行过程中操作复杂,而且需要附加液化设备或低温储槽提供大量的低温液体,换热蒸发后的气体的处理也是一个比较棘手的问题,如低温气体的高昂价格和安全性问题都要求装设气体回收装置,这又将大大增加了系统的复杂性。在此背景下,采用低温制冷机直接冷却的无制冷剂方案得到了越来越广泛的应用。与传统的利用制冷剂冷却的方案相比,无制冷剂方案也带来了一个新的问题,即如何把低温制冷机的冷量高效率地传递到被冷物体,这不但要克服刚性连接导致的机械应力问题,而且在结构安装方面要求被冷却物体允许有一定的移动自由度。此外,还需要克服由制冷机的运转带来的机械振动问题。这些问题要求提供一种低热漏的柔性连接方案。Many applications (such as the cooling of the vacuum environment simulation chamber) need to provide a low-temperature environment. In the past, the low-temperature liquid was used to flow through the coil coiled on the object to be cooled to achieve cooling purposes. The operation is complex, and additional liquefaction equipment or cryogenic storage tanks are required to provide a large amount of cryogenic liquid. The treatment of the evaporated gas after heat exchange is also a difficult problem. For example, the high price and safety issues of cryogenic gas require the installation of gas recovery device, which in turn will greatly increase the complexity of the system. In this context, refrigerant-free solutions using direct cooling with cryogenic refrigerators have become more and more widely used. Compared with the traditional solution using refrigerant for cooling, the non-refrigerant solution also brings a new problem, that is, how to efficiently transfer the cold energy of the cryogenic refrigerator to the object to be cooled, which not only has to overcome the rigid connection that causes The problem of mechanical stress, and in terms of structural installation, the object to be cooled is required to allow a certain degree of freedom of movement. In addition, there is a need to overcome the problem of mechanical vibration caused by the operation of the refrigerator. These issues require a flexible connection solution with low heat leakage.

发明内容Contents of the invention

本实用新型的目的是提供一种采用低热漏柔性连接结构的高真空低温恒温器。The purpose of the utility model is to provide a high-vacuum low-temperature thermostat adopting a flexible connection structure with low heat leakage.

它具有制冷机固定法兰,制冷机固定法兰外侧与恒温器上端的外壁采用螺栓结构固定,制冷机固定法兰内侧与恒温器上端的外壁采用波纹管焊接固定,恒温器内,制冷机固定法兰下依次设有真空夹套、上热沉、柔性热连接结构、下热沉。It has a refrigerator fixing flange, the outer side of the refrigerator fixing flange and the outer wall of the upper end of the thermostat are fixed by bolt structure, the inner side of the refrigerator fixing flange and the outer wall of the upper end of the thermostat are fixed by bellows welding, inside the thermostat, the refrigerator is fixed A vacuum jacket, an upper heat sink, a flexible thermal connection structure, and a lower heat sink are arranged in sequence under the flange.

本实用新型的优点:真空夹套采用薄壁不锈钢管、波纹管或折叠套管等型式,增加了导热热阻进而减少轴向热漏,具有低热漏的特点;真空夹套与恒温器上端外壁的固定结构中采用了不锈钢波纹管,能够消除由于低温制冷机的运行带来的机械振动;低温制冷机的冷头同被冷却物体间的热连接采用柔性连接结构,允许制冷机冷头与被冷却物体间有一定的自由度可实现机械偏动;柔性连接结构中的柔性无氧铜编制带与热沉之间的连接采用银焊的方式以减少接触热阻,同时各个焊接孔被相互串通并设有一个共同的出气通道,能防止封闭在焊接孔内的气体逐步向真空环境释放出来而影响真空度;冷头与热沉及热沉与被冷物体间附加铟片则能降低连接件间的接触热阻以图减少有效制冷量的损失。The utility model has the advantages: the vacuum jacket adopts the type of thin-walled stainless steel pipe, bellows or folded sleeve, which increases the heat conduction resistance and reduces the axial heat leakage, and has the characteristics of low heat leakage; the vacuum jacket and the outer wall of the upper end of the thermostat The stainless steel bellows are used in the fixed structure, which can eliminate the mechanical vibration caused by the operation of the cryogenic refrigerator; the thermal connection between the cold head of the cryogenic refrigerator and the object to be cooled adopts a flexible connection structure, allowing the cold head of the cryogenic refrigerator to be connected to the cooled object There is a certain degree of freedom between the cooling objects to achieve mechanical deflection; the connection between the flexible oxygen-free copper braid and the heat sink in the flexible connection structure adopts silver welding to reduce contact thermal resistance, and at the same time, the welding holes are connected with each other And there is a common air outlet channel, which can prevent the gas sealed in the welding hole from being gradually released to the vacuum environment and affect the vacuum degree; the additional indium sheet between the cold head and the heat sink and the heat sink and the object to be cooled can reduce the connection. The contact thermal resistance between them is used to reduce the loss of effective cooling capacity.

附图说明Description of drawings

图1(a)是采用低热漏柔性连接结构的高真空低温恒温器结构示意图;Fig. 1(a) is a structural schematic diagram of a high vacuum cryostat using a low heat leakage flexible connection structure;

图1(b)是本实用新型上热沉b-b视图;Fig. 1 (b) is the b-b view of the upper heat sink of the utility model;

图1(c)是本实用新型下热沉c-c视图;Fig. 1 (c) is the c-c view of the lower heat sink of the utility model;

图2是本实用新型真空夹套采用不锈钢波纹管的连接结构示意图;Fig. 2 is a schematic diagram of the connection structure of a stainless steel bellows used in the vacuum jacket of the present invention;

图3是本实用新型真空夹套采用不锈钢折叠套管的连接结构示意图。Fig. 3 is a schematic diagram of the connection structure of the vacuum jacket of the present invention using a stainless steel folded sleeve.

具体实施方式Detailed ways

本实用新型为了实现低热漏的目的,在真空夹套方面采用了三种方案,即薄壁不锈钢管、波纹管和折叠套管。薄壁管方案(图1-3a)是通过薄壁管来增加导热热阻,而波纹管(图2-3b)和折叠套管(图3-3c)的共同点在于通过增长导热路径来实现减少轴向热漏的目的。后两种方案更加适用于制冷温度比较低的场合,因为此时减少热漏、有效利用制冷机的冷量是系统中需要重点解决的问题。与此同时,由于冷头与热沉及热沉与被冷物体间的接触热阻会导致连接件间温差的增大和有效制冷量的损失,采用附加软金属铟片可以减少热阻。In order to achieve the purpose of low heat leakage, the utility model adopts three schemes in the aspect of the vacuum jacket, that is, a thin-walled stainless steel tube, a corrugated tube and a folded sleeve. The thin-walled tube solution (Fig. 1-3a) is to increase the heat conduction resistance through the thin-walled tube, while the common point of the corrugated tube (Fig. 2-3b) and the folded sleeve (Fig. 3-3c) is to increase the heat conduction path to achieve The purpose of reducing axial heat leakage. The latter two solutions are more suitable for occasions where the cooling temperature is relatively low, because at this time, reducing heat leakage and effectively utilizing the cooling capacity of the refrigerator are the key problems to be solved in the system. At the same time, since the contact thermal resistance between the cold head and the heat sink and between the heat sink and the object to be cooled will lead to an increase in the temperature difference between the connecting parts and a loss of effective cooling capacity, the use of additional soft metal indium sheets can reduce the thermal resistance.

低温制冷机的冷头同被冷却物体间的热连接不是直接采用硬连接方式,而是采用柔性连接结构,即制冷机冷头通过铟片把冷量传递到上热沉,然后,通过高热导率的柔性无氧铜编制带把冷量传递到下热沉,最后再通过附加铟片的螺栓结构连接到被冷物体。这种软连接结构,允许制冷机冷头与被冷却物体间有一定的自由度可实现机械偏动。The thermal connection between the cold head of the cryogenic refrigerator and the object to be cooled is not a direct hard connection, but a flexible connection structure, that is, the cold head of the refrigerator transfers the cold energy to the upper heat sink through the indium sheet, and then, through the high thermal conductivity The high-efficiency flexible oxygen-free copper braid transfers the cold energy to the lower heat sink, and finally connects to the object to be cooled through the bolt structure with additional indium sheets. This flexible connection structure allows a certain degree of freedom between the cold head of the refrigerator and the object to be cooled to achieve mechanical deflection.

柔性连接结构中的柔性无氧铜编制带与热沉之间的连接采用银焊的方式以减少接触热阻。为了防止封闭在焊接孔内的气体逐步向真空环境释放出来,各个焊接孔被相互串通,并通过一个共同的出口通道以释放孔内的气体。The connection between the flexible oxygen-free copper braid and the heat sink in the flexible connection structure adopts silver soldering to reduce contact thermal resistance. In order to prevent the gas sealed in the welding holes from being gradually released to the vacuum environment, each welding hole is connected with each other and passes through a common outlet channel to release the gas in the holes.

低温制冷机与被冷物体间的低热漏柔性连接方案整体上由低温制冷机1、制冷机固定套壳结构2、真空夹套3、上热沉4、下热沉6、柔性热连接结构5和被冷却物体7等部分组成。The low-heat-leakage flexible connection scheme between the low-temperature refrigerator and the object to be cooled generally consists of a low-temperature refrigerator 1, a refrigerator fixed casing structure 2, a vacuum jacket 3, an upper heat sink 4, a lower heat sink 6, and a flexible thermal connection structure 5 It is composed of parts such as cooled object 7 and the like.

首先低温制冷机1需要被安装到整个系统上去,由于被冷物体7通常是被置于恒温器内的真空环境中13,为了便于制冷机的安装和拆卸维修,低温制冷机部分1采用了一由真空夹套3构成的独立真空空间14,先把真空夹套3固定到装备被冷却物体的真空环境13恒温器的外壁15上,然后将低温制冷机1固定到真空夹套3中,通过O型圈18实现夹套内的真空密封。First of all, the cryogenic refrigerator 1 needs to be installed in the whole system. Since the object to be cooled 7 is usually placed in a vacuum environment 13 inside the thermostat, in order to facilitate the installation and disassembly of the refrigerator, the cryogenic refrigerator part 1 adopts a In the independent vacuum space 14 formed by the vacuum jacket 3, the vacuum jacket 3 is first fixed to the outer wall 15 of the vacuum environment 13 thermostat equipped with the object to be cooled, and then the cryogenic refrigerator 1 is fixed in the vacuum jacket 3, through The O-ring 18 achieves a vacuum seal within the jacket.

为了消除由制冷机运转带来的振动对系统的影响,真空夹套3与恒温器外壁15的连接部分采用了波纹管16--螺栓结构17固定。真空夹套3的套管,可采用三种形式:薄壁不锈钢直管3a、不锈钢波纹管3b和不锈钢折叠管3c等。后两者是通过增大导热途径的热阻来减少热传导损失。后两种方案在结构上更加适用于制冷温度比较低的场合,因为此时的热漏问题是系统中需要重点克服的问题。此外,在采用波纹管3b形式时为了防止刚度不够而带来结构稳定性问题,不锈钢波纹管3b本身的管壁厚度应该不小于薄壁不锈钢直管3a的管壁厚度。In order to eliminate the impact of the vibration brought by the operation of the refrigerator on the system, the connection between the vacuum jacket 3 and the outer wall 15 of the thermostat is fixed by a bellows 16-bolt structure 17. The sleeve pipe of the vacuum jacket 3 can adopt three forms: a thin-walled stainless steel straight pipe 3a, a stainless steel corrugated pipe 3b, and a stainless steel folded pipe 3c. The latter two are to reduce heat conduction loss by increasing the thermal resistance of the heat conduction path. The latter two schemes are structurally more suitable for occasions where the refrigeration temperature is relatively low, because the heat leakage problem at this time is a problem that needs to be overcome in the system. In addition, in order to prevent structural stability problems caused by insufficient rigidity when the corrugated tube 3b is used, the wall thickness of the stainless steel bellows 3b itself should not be smaller than that of the thin-walled stainless steel straight tube 3a.

制冷机的冷头9对被冷却物体7的冷却是通过上热沉4、下热沉6来实现的,之间附加软金属铟片8来减少接触热阻,降低传热温差。考虑到连接系统的热胀冷缩以及提高与被冷却物体7的连接柔性(包括形状和位置等),低温制冷机1-上热沉4、下热沉6-被冷却物体7之间采用柔性连接结构5,并通过9根(其中8根沿圆周均布、中心1根)柔性无氧铜编制带10连接,其分布方式见图1(b)和图1(c)。柔性无氧铜编制带10与上热沉4、下热沉6之间采用银焊的方式。为了防止被封闭在焊接孔内的气体逐步向真空环境释放出来,影响周围的真空环境,各个焊接孔被相互串通,并通过一个共同的出口通道12以释放孔内的气体。热沉6同被冷物体7间的连接采用螺栓固定,两者之间也夹有软金属铟片11。The cooling of the cooled object 7 by the cold head 9 of the refrigerator is realized through the upper heat sink 4 and the lower heat sink 6, and a soft metal indium sheet 8 is added between them to reduce contact thermal resistance and heat transfer temperature difference. Considering the thermal expansion and contraction of the connection system and the improvement of the connection flexibility (including shape and position, etc.) with the object to be cooled 7, the low-temperature refrigerator 1-upper heat sink 4, lower heat sink 6-to-be-cooled object 7 adopts flexible The connection structure 5 is connected by 9 flexible oxygen-free copper braided strips 10 (8 of which are evenly distributed along the circumference and 1 in the center). The distribution is shown in Figure 1(b) and Figure 1(c). Silver soldering is used between the flexible oxygen-free copper braid 10 and the upper heat sink 4 and the lower heat sink 6 . In order to prevent the gas sealed in the welding holes from gradually releasing to the vacuum environment and affecting the surrounding vacuum environment, each welding hole is communicated with each other and passes through a common outlet channel 12 to release the gas in the holes. The connection between the heat sink 6 and the cooled object 7 is fixed by bolts, and a soft metal indium sheet 11 is sandwiched between the two.

Claims (7)

1.一种采用低热漏柔性连接结构的高真空低温恒温器,其特征在于它具有制冷机固定法兰(2),制冷机固定法兰(2)外侧与恒温器上端的外壁(15)采用螺栓结构(17)固定,制冷机固定法兰(2)内侧与恒温器上端的外壁(15)采用波纹管(16)焊接固定,恒温器内,制冷机固定法兰(2)下依次设有真空夹套(3)、上热沉(4)、柔性热连接结构(5)、下热沉(6)。1. A high vacuum cryostat adopting a low heat leakage flexible connection structure is characterized in that it has a refrigerator fixing flange (2), and the outer wall (15) of the refrigerator fixing flange (2) and the upper end of the refrigerator adopts The bolt structure (17) is fixed, the inner side of the refrigerator fixing flange (2) and the outer wall (15) of the upper end of the thermostat are welded and fixed by bellows (16), inside the thermostat, the refrigerator fixing flange (2) is sequentially provided with A vacuum jacket (3), an upper heat sink (4), a flexible thermal connection structure (5), and a lower heat sink (6). 2.根据权利要求1所述的一种采用低热漏柔性连接结构的高真空低温恒温器,其特征在于所说的真空夹套(3)采用不锈钢波纹管(3b)。2. A high vacuum cryostat using a low heat leakage flexible connection structure according to claim 1, characterized in that said vacuum jacket (3) is made of stainless steel bellows (3b). 3.根据权利要求1所述的一种采用低热漏柔性连接结构的高真空低温恒温器,其特征在于所说的真空夹套(3)采用不锈钢折叠管(3c)。3. A high-vacuum cryostat adopting a low-heat-leakage flexible connection structure according to claim 1, characterized in that said vacuum jacket (3) adopts a stainless steel folded tube (3c). 4.根据权利要求1所述的一种采用低热漏柔性连接结构的高真空低温恒温器,其特征在于所说的柔性热连接结构(5)采用柔性无氧铜编制带(10)。4. A high-vacuum cryostat using a low-heat-leakage flexible connection structure according to claim 1, characterized in that said flexible thermal connection structure (5) uses a flexible oxygen-free copper braid (10). 5.根据权利要求1所述的一种采用低热漏柔性连接结构的高真空低温恒温器,其特征在于所说的上热沉(4)和下热沉(6)设有出气通道(12)。5. A high vacuum cryostat using a low heat leakage flexible connection structure according to claim 1, characterized in that said upper heat sink (4) and lower heat sink (6) are provided with an air outlet channel (12) . 6.根据权利要求1所述的一种采用低热漏柔性连接结构的高真空低温恒温器,其特征在于所说的上热沉(4)内侧设有软金属铟片(8)。6. A high vacuum cryostat adopting a low heat leakage flexible connection structure according to claim 1, characterized in that a soft metal indium sheet (8) is provided inside the upper heat sink (4). 7.根据权利要求1所述的一种采用低热漏柔性连接结构的高真空低温恒温器,其特征在于所说的下热沉(6)下端设有软金属铟片(11)。7. A high vacuum cryostat adopting a low heat leakage flexible connection structure according to claim 1, characterized in that a soft metal indium sheet (11) is provided at the lower end of said lower heat sink (6).
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1304810C (en) * 2004-08-05 2007-03-14 浙江大学 High vacuum low temperature thermostat using low temperature leak flexible connecting structure
CN108831665A (en) * 2018-06-29 2018-11-16 苏州超磁半导体科技有限公司 An integrated device for inspection and maintenance neck pipe and refrigerator installation container

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1304810C (en) * 2004-08-05 2007-03-14 浙江大学 High vacuum low temperature thermostat using low temperature leak flexible connecting structure
CN108831665A (en) * 2018-06-29 2018-11-16 苏州超磁半导体科技有限公司 An integrated device for inspection and maintenance neck pipe and refrigerator installation container
CN108831665B (en) * 2018-06-29 2020-08-11 苏州超磁半导体科技有限公司 An integrated device for repairing neck tube and refrigerator installation container

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