CN2714340Y - Laser internal engraving apparatus for transparent material - Google Patents

Abstract

The utility model provides a laser internal engraving device for transparent materials, which includes a laser, a beam expander, a first vibrating mirror, a second vibrating mirror, an F-θ focusing mirror and a computer. The laser includes a total reflection mirror and an acousto-optic Q-switching device. , semiconductor pump module, frequency doubling crystal, output mirror, the total reflection mirror is coated with a fundamental frequency light total reflection film layer, or is coated with both a fundamental frequency light and a frequency doubler light double total reflection film layer, and the output mirror is coated with a fundamental frequency light at the same time The light transmittance is 4% to 10% and the film layer is completely transparent to frequency doubled light. The laser generates 1 to 10 kHz Q-switched frequency doubled laser pulse output; the computer controls the first vibrating mirror and the second vibrating mirror at X , Rapid vibration in the Y direction, so that the laser beam passing through the beam expander scans in the XY direction, and controls the one-dimensional electronically controlled displacement stage to realize the movement of the F-θ focusing mirror or transparent material in the Z direction. The utility model has good laser output mode, stable optical power and high efficiency; fast engraving speed, and is suitable for engraving large-format transparent materials.

Description

Transparent material laser internal engraving device

technical field

The utility model relates to a laser internal engraving device for transparent materials.

Background technique

Internal engraving devices for ordinary glass and other transparent materials have become an emerging development direction for laser internal engraving. At present, the laser internal engraving device is mainly used for crystal quartz glass. The disadvantages of this laser internal engraving device are: the pulse laser pumped by the flash lamp is mainly used, the beam quality is poor, the explosion point is large after focusing, and the engraved image is not fine; Q-switching, the laser pulse repetition frequency is low (only about 100 Hz), and the speed is slow, so it is not suitable for internal engraving of large-format ordinary glass and other transparent materials; due to the use of flash lamp pumping, the life of the laser pump source is short, and the equipment Trouble in maintenance and use. Therefore, the current laser engraving products are limited to a limited number of small handicrafts, which limits the expansion of the application field of laser transparent material internal engraving.

Contents of the invention

The purpose of the utility model is to overcome the shortcomings of the above-mentioned laser internal engraving device, and provide a transparent material laser internal engraving device. The equipment adopts a high repetition frequency of 1-10 kHz and a semiconductor-pumped solid-state laser as the light source of the laser transparent material, which comprehensively improves the performance index of the laser internal engraving equipment.

In order to achieve the above object, the technical solution adopted by the utility model is: a kind of transparent material laser internal engraving device, comprising a laser, a beam expander, the first vibrating mirror, the second vibrating mirror, F-θ focusing mirror and a computer; the laser comprises Total reflection mirror, acousto-optic Q-switching device and its power supply, semiconductor pump module, frequency doubling crystal, output mirror, the total reflection mirror is coated with a total reflection film layer of fundamental frequency light, or coated with both fundamental frequency light and frequency doubling light The anti-film layer, the output mirror is coated with a film layer with a transmittance of 4% to 10% to the fundamental frequency light and a fully transparent film to the double frequency light. The power supply adjusts the driving frequency of the acousto-optic Q-switching device to generate 1-10 kHz Q-switched frequency doubling laser pulse output; the beam expander expands the diameter of the laser beam output by the laser, and compresses the divergence angle, so that the diameter of the spot after the laser beam is focused by the focusing lens is reduced to obtain a small focused spot; the first vibrating mirror will pass through the expansion The laser beam parallel to the x-axis behind the beam mirror is deflected into a laser beam parallel to the y-axis, and the second galvanometer deflects the above-mentioned laser beam parallel to the y-axis into a laser beam parallel to the z-axis; the F-θ focusing mirror will The laser beam parallel to the z-axis is focused into the transparent material; the computer controls the first vibrating mirror and the second vibrating mirror to vibrate rapidly in the X and Y directions respectively, so that the laser beam passing through the beam expander scans in the XY direction.

The utility model has the advantages of:

(1) The continuous semiconductor pumping method is adopted, which has high efficiency, long service life and convenient equipment maintenance.

(2) Acousto-optic Q-switching method is adopted, the output laser pulse frequency can reach 1-10 kHz, and the engraving speed is fast, which can be greater than 12 m/min. It is suitable for internal engraving of large-format transparent materials.

(3) The output mirror coated with the base frequency light transmittance of 4% to 10% and the frequency doubled light total transmission film layer is adopted, and the frequency doubled laser output with the maximum conversion efficiency can be obtained when the pump power is determined.

(4) The laser output mode is good and the optical power is stable.

(5) Compared with the existing internal engraving equipment, the engraving speed is increased by more than 10 times, and it can engrave large areas of ordinary glass, crystal quartz and other transparent materials at high speed.

Description of drawings

Fig. 1 is a schematic structural view of an embodiment of the utility model.

FIG. 2 is a schematic structural diagram of an embodiment of the laser in FIG. 1 .

FIG. 3 is a schematic structural diagram of another embodiment of the laser in FIG. 1 .

Detailed ways

As shown in FIG. 1 , a laser internal engraving device for transparent materials includes a laser 1 , a beam expander 2 , a first vibrating mirror 3 , a second vibrating mirror 4 , an F-θ focusing mirror 5 and a computer 6 .

Laser 1 generates 1-10 kHz Q-switched frequency-multiplied laser pulses with good beam quality;

The beam expander 2 expands the diameter of the laser beam output by the laser 1, and compresses the divergence angle, so that the diameter of the spot after the laser beam is focused by the focusing lens 5 is reduced to obtain a small focused spot;

The first vibrating mirror 3 and the second vibrating mirror 4 are placed vertically in space; the first vibrating mirror 3 is installed on the x-axis, the reflector surface is parallel to the z-axis, perpendicular to the xy plane, and the angle between the x-axis and the y-axis is the same 45 degrees, the laser beam parallel to the x-axis after the beam expander 2 is deflected into a laser beam parallel to the y-axis; the second vibrating mirror 4 is installed on the y-axis, and the mirror surface is parallel to the x-axis and perpendicular to yz The plane, with an included angle of 45 degrees with the y-axis and the z-axis, deflects the laser beam parallel to the y-axis after passing through the first vibrating mirror 3 into a laser beam parallel to the z-axis;

The optical axis of the F-θ focusing mirror 5 is parallel to the z axis, and the laser beam parallel to the z axis is focused into the transparent material on the laser table;

The computer 6 controls the first vibrating mirror 3 and the second vibrating mirror 4 to vibrate rapidly in the X and Y directions respectively, so that the laser beam passing through the beam expander 2 scans in the XY direction, controls the one-dimensional electronically controlled displacement stage 7, and realizes F -Theta focusing mirror 5 or the movement of the transparent material in the Z direction for three-dimensional engraving inside the laser of the transparent material.

As shown in FIG. 2 , the laser 1 may include a total reflection mirror 8 , an acousto-optic Q-switching device 9 and its power supply 13 , a semiconductor pump module 10 , a frequency doubling crystal 11 , and an output mirror 12 . The total reflection mirror 8 is coated with a total reflection film layer of the fundamental frequency light, or is coated with a double total reflection film layer of the fundamental frequency light and the double frequency light at the same time. The output mirror 12 is coated with a film layer with a transmittance range of 4% to 10% for the fundamental frequency light and fully transparent for the doubled frequency light. The frequency doubling crystal 11 can be KTP, BBO and other crystals. The semiconductor pumping module 10 includes a semiconductor pumping source and a laser crystal, which forms a basic laser resonator with the total reflection mirror 8 and the output mirror 12. 1. Oscillating output between the frequency doubling crystal 11 and the output mirror 12 to generate frequency doubling light. The power supply 13 adjusts the driving frequency of the acousto-optic Q-switching device 9 at 1-10 kHz, and generates 1-10 kHz Q-switched frequency-multiplied laser pulse output.

The laser resonator of the utility model does not use the output mirror coated with the total reflection of the fundamental frequency light and the total transmission film of the double frequency light, but according to the continuous laser under a certain pump power condition, the output mirror has the best transmittance Based on the principle, the frequency doubling efficiency of the nonlinear crystal in the resonator is equated to a part of the transmittance of the output mirror, and the transmittance of the fundamental frequency light of the output mirror is designed when the gain coefficient and loss of the active resonator best match the operating point , to ensure that the CW laser operates in the range of maximum light-to-light conversion efficiency. At this time, the power of the doubled frequency light also reaches the maximum value.

The computer 6 controls the opening and closing of the acousto-optic Q-switching device power supply 13 according to the trigger signal generated by the engraved graphics, thereby controlling the working state of the acousto-optic Q-switching device 9, and the resonant cavity can be in a state of high loss or low loss, so , can control whether the resonator has laser output or not.

As shown in Figure 3, the laser 1 can include a total reflection mirror 8, a semiconductor pump module 10, an acousto-optic Q-switching device 9 and its power supply 13, a frequency doubling crystal 11 and an output mirror 12, and the total reflection mirror 8 is coated with a fundamental frequency light A total reflection film layer, or coated with a double total reflection film layer of the fundamental frequency light and the double frequency light at the same time, the output mirror 12 is coated with a film layer with a transmittance of 4% to 10% for the fundamental frequency light and a fully transparent film for the double frequency light , the power supply 13 adjusts the driving frequency of the acousto-optic Q-switching device 9 at 1-10 kHz, and generates 1-10 kHz Q-switched frequency-multiplied laser pulse output.

Claims (3)

1. the inner carving device of transparent material laser is characterized in that: comprise laser instrument (1), beam expanding lens (2), first galvanometer (3), second galvanometer (4), F-θ focus lamp (5) and computer (6);

Laser instrument (1) comprises total reflective mirror (8), A-O Q-switch device (9) and power supply (13) thereof, semiconductor pumping module (10), frequency-doubling crystal (11), outgoing mirror (12), total reflective mirror (8) is coated with fundamental frequency light all-trans film, perhaps be coated with fundamental frequency light and the frequency doubled light anti-rete of enjoying a double blessing simultaneously, it is 4%～10% and to the rete of frequency doubled light full impregnated that outgoing mirror (12) is coated with the fundamental frequency light transmission rate simultaneously, power supply (13) is regulated the driving frequency of A-O Q-switch device (9), produces the output of 1～10 KHz q-multiplier laser pulse;

Beam expanding lens (2) enlarges the lasing beam diameter of laser instrument (1) output, angle of divergence compression, and the spot diameter that laser beam is passed through after focus lamp (5) focuses on dwindles, and obtains little focal beam spot;

First galvanometer (3) will be deflected into the laser beam that is parallel to the y axle through the laser beam that is parallel to the x axle behind the beam expanding lens (2), and second galvanometer (4) is deflected into the laser beam that is parallel to the z axle with the laser beam of the above-mentioned y of being parallel to axle;

F-θ focus lamp (5) focuses on the laser beam of the above-mentioned z of being parallel to axle in the transparent material;

Computer (6) control first galvanometer (3), second galvanometer (4) be fast vibration on X, Y direction respectively, and the laser beam through beam expanding lens (2) is moved at the XY scanning direction.

2. the inner carving device of transparent material laser according to claim 1 is characterized in that: computer (6) the control automatically controlled displacement platform of one dimension (7), realize F-θ focus lamp (5) or the motion of transparent material on the Z direction.

3. the inner carving device of transparent material laser according to claim 1 and 2, it is characterized in that: described laser instrument (1) comprises total reflective mirror (8), semiconductor pumping module (10), A-O Q-switch device (9) and power supply (13) thereof, frequency-doubling crystal (11) and outgoing mirror (12), total reflective mirror (8) is coated with fundamental frequency light all-trans film, perhaps be coated with fundamental frequency light and the frequency doubled light anti-rete of enjoying a double blessing simultaneously, it is 4%～10% and to the rete of frequency doubled light full impregnated that outgoing mirror (12) is coated with the fundamental frequency light transmission rate simultaneously, power supply (13) is regulated the driving frequency of A-O Q-switch device (9) at 1～10 KHz, produces the output of 1～10 KHz q-multiplier laser pulse.

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