CN2660175Y

CN2660175Y - Multi-stage vacuum pump

Info

Publication number: CN2660175Y
Application number: CN 200320100640
Authority: CN
Inventors: 刘明信; 方宏声; 沈添沐; 简荣祯; 陈俊宏
Original assignee: Industrial Technology Research Institute ITRI
Current assignee: Industrial Technology Research Institute ITRI
Priority date: 2003-11-17
Filing date: 2003-11-17
Publication date: 2004-12-01
Anticipated expiration: 2013-11-17

Abstract

The utility model relates to a multistage formula vacuum pump is formed with a compression cavity respectively in a plurality of casings, and the group is equipped with a baffle between per two casings, and the gas in the current compression cavity is behind the rotor compression of pivot, can circulate to a latter compression cavity via the air current channel in the baffle to again circulate to a latter compression cavity through the compression. Above-mentioned gas is behind the compression in each compression cavity, can directly circulate to a latter compression cavity through the air current channel in the baffle, and it is different from the tradition must be via encircleing the gas flow path that forms in the compression cavity outside, so the utility model discloses a casing can compare in the design for little in traditional design mode, promptly the utility model discloses a multi-stage formula vacuum pump's external diameter and volume can effectively reduce, and relative reducible weight and reduce cost.

Description

The multistage vacuum pump

Technical field

The utility model relates to a kind of multistage vacuum pump, refers to that especially a kind of being applicable to can reduce outside dimension and volume, and the multistage vacuum pump that can reduce weight and reduce cost.

Background technique

In general cleaning preparation equipment, equipment such as the deposition in for example present semiconductor fabrication process, etching, ion implantation, it all must use a vacuum system to supply its operation to vacuumize formation one suitable vacuum environment.

And in above-mentioned vacuum system, must be by a vacuum pump to reach the effect of vacuum, so the quality of vacuum pump is concerning the effect that vacuum system can be reached.

Seeing also Fig. 1 is the sectional drawing of known multistage vacuum pump, shows that wherein so-called multistage vacuum pump 9 is by the housing 911～915 of a plurality of continuous axial windings, repeats alternately to be laminated with a plurality of dividing plates 921～924.

Fig. 2 also shows the wherein three-dimensional exploded view of one-level housing 914, and see also the sectional drawing that Fig. 3 is Fig. 2, wherein, the central interior hollow out of housing 914 is formed with a compression chamber 904, and is equipped with rotor 933,934 on two parallel shafts 931,932 and is meshing with each other to rotate in this compression chamber 904 and carries out the gas compression operation.Wherein, the gas of last compression chamber 904 is to be hidden in the gas flow 900 in the outer wall thickness of ring week in advance and to flow to next compression chamber 903 (seeing also Fig. 1) to carry out the gas compression operation of next stage via one.

Please note the known gas flow 900 shown in Fig. 2 and Fig. 3, it is to be formed at the ring week of housing 914 in the outer wall thickness, that is gas flow 900 is to be surrounded on compression chamber 904 outsides, therefore the external diameter and the volume of known housing 914 have been increased virtually, thereby cause the overall dimensions of known multistage vacuum pump 9 and volume to strengthen, and cause weight to increase.

Summary of the invention

Main purpose of the present utility model provides a kind of multistage vacuum pump, can reduce the outside dimension and the volume of multistage vacuum pump.

Another purpose of the present utility model provides a kind of multistage vacuum pump, can reduce weight, and reduce cost.

For achieving the above object, multistage vacuum pump of the present utility model includes a plurality of housings, a plurality of dividing plate and rotates module.Wherein, a plurality of housings are continuous axial windings each other, and each housing is formed with a compression chamber in the central interior hollow out.

In addition, a plurality of dividing plates are to be preset with a predetermined wall thickness respectively, and it is to be mounted on respectively between above-mentioned two housings with separating adjacent two compression chambers, and have provided two perforations on each dividing plate.

In addition, rotating module is to include two parallel rotating shafts, it is the compression chamber inside that is located in each housing, and pass the perforation of each dividing plate simultaneously, and in two rotating shafts and convex with a plurality of rotors respectively, and the two adjacent and corresponding interior correspondences of rotor are placed in the above-mentioned wherein compression chamber and the rotation that can be meshing with each other, by this compressible internal gas of engagement rotation.

Of the present utility modelly be characterised in that above-mentioned each dividing plate is formed with a front surface and a rear surface respectively, and dig in the inside of its predetermined wall thickness and to be provided with at least one air-flow path that this at least one air-flow path is to be communicated to the rear surface by front surface.

When running, after the rotor compression of gas in the last compression chamber via rotating shaft, can form pressurized gas, that is this compression chamber cognition forms a zone of high pressure relatively, and above-mentioned after compression high pressure air is known from experience via the air-flow path in the dividing plate and is circulated to back one compression chamber, and after this a compression chamber is to form a low pressure area with respect to last compression chamber.Afterwards, entered the gas of back in one compression chamber can be again via the rotor compression of rotating shaft, and be circulated to back one compression chamber again via the air-flow path in one dividing plate of back again, form multistage compression by this.

From the above, when gas in each compression chamber after overcompression, be directly to be circulated to back one compression chamber via the air-flow path in the dividing plate, itself and be different from tradition must be via around the gas flow that is formed at the compression chamber outside, therefore, housing of the present utility model housing than traditional design mode in design is little, that is the outside dimension of multistage vacuum pump of the present utility model and volume can effectively reduce, and can reduce weight relatively and reduce cost.

Description of drawings

Fig. 1 is the sectional drawing of known multistage vacuum pump.

Fig. 2 is the three-dimensional exploded view of the wherein one-level housing of known multistage vacuum pump.

Fig. 3 is the sectional drawing of Fig. 2.

Fig. 4 is the sectional drawing of the utility model multistage vacuum pump.

Fig. 5 is the wherein three-dimensional exploded view of one-level housing of the utility model.

Fig. 6 is the three-dimensional combination figure of the dividing plate of Fig. 5.

Fig. 7 is one of different embodiment's schematic representation of the utility model dividing plate.

Fig. 8 be the utility model dividing plate different embodiment's schematic representation two.

Wherein, description of reference numerals is as follows:

1-multistage vacuum pump; 21～25-housing; 211～251-compression chamber;

The 212-gas outlet; The 252-gas access; The 253-housing groove;

301,302-perforation; 31～34-dividing plate; 311～341-air-flow path;

The 342-front surface; The 343-rear surface; The 344-left clapboard;

The 345-right clapboard; 346-left side air-flow path; The right air-flow path of 347-;

The 348-ring groove; The 351-open front; The 352-after-opening;

4-rotates module; 41,42-rotating shaft; 411, the 421-rotor;

5-synchromesh gear group; 61～64-elastomer; The 7-dividing plate;

701,702-perforation; 71～73-side plate; The 74-air-flow path;

The 8-dividing plate; 801,802-perforation; 81～84-side plate;

The 85-air-flow path; 9-multistage vacuum pump; The 900-gas flow;

903,904-compression chamber; 911～915-housing; 921～924-dividing plate;

931,932-rotating shaft; 933,934-rotor.

Embodiment

For more understanding technology contents of the present utility model, be described as follows especially exemplified by a preferred embodiment.

At first, seeing also Fig. 4 is the sectional drawing of the utility model multistage vacuum pump, and it shows that multistage vacuum pump 1 of the present utility model includes a plurality of housings 21～25, a plurality of dividing plate 31～34 and rotates module 4.Wherein, a plurality of housings 21～25th, continuous axial winding each other, each housing 21～25 is formed with a compression chamber 211～251 in the central interior hollow out, and a plurality of dividing plates 31～34th are preset with a predetermined thickness t respectively, and are mounted on respectively between above-mentioned two housings 21～25 with separating adjacent two compression chambers 211～251.

Please consult Fig. 4, Fig. 5 simultaneously and be the utility model wherein the one-level housing three-dimensional exploded view, and Fig. 6 be the three-dimensional combination figure of the dividing plate of Fig. 5, it shows wherein a dividing plate 34 and with it as an illustration, the structure of other dividing plate 31～33 is then all identical with it.Be to have provided two perforations 301 on aforesaid dividing plate 34,302, and above-mentioned rotation module 4 is to include two parallel rotating shafts 41,42, this two rotating shaft 41, the 42nd, be located in the inside of compression chamber 211～251, and pass the perforation 301 of each dividing plate 31～34,302, and in two rotating shafts 41, on 42 and integrally formedly respectively convex with a plurality of rotors 411,421, two adjacent and corresponding rotors 411, correspondence is placed in the above-mentioned wherein compression chamber 211～251 in 421, simultaneously, one synchronous gear train 5 drives two parallel shafts 41,42 two adjacent rotor 411,421 rotations synchronously also keep not contacting mutually, and can rotate mutually with the compression internal gas.

In addition, aforementioned barriers 34 is formed with a front surface 342, an and rear surface 343 respectively in axial two, and dig in the inside of the predetermined thickness t of dividing plate 34 and to be provided with an air-flow path 341, simultaneously, on front surface 342, offer an open front 351, offer an after-opening 352 on rear surface 343, forward and backward opening 351,352 can communicate with air-flow path 341 respectively, and air-flow path 341 then is communicated to the after-opening 352 of rear surface 343 by the open front 351 of front surface 342.In present embodiment, dividing plate 34 be respectively by a left clapboard 344, and a right clapboard 345 butt joint groups each other establish and form, and in left clapboard 344, be formed with a left air-flow path 346, in right clapboard 345, be formed with a right air-flow path 347, left side air-flow path 346 is that correspondence is communicated in right air-flow path 347 with formation air-flow path 341, and this air-flow path 341 is to be formed between two perforations 301,302 of dividing plate 34.

When running, air is to enter in the compression chamber 251 via the gas access on the housing 25 252 earlier, after rotor 411,421 compressions of gas via rotating shaft 41,42 afterwards, can form pressurized gas, that is this compression chamber 251 can form a zone of high pressure relatively, and the open front 351 that above-mentioned after compression high pressure air is known from experience via dividing plate 34 flows into air-flow paths 341, flow out to back one compression chamber 241 via after-opening 352 again, this last compression chamber 251 is to form a low pressure area with respect to back one compression chamber 241.Afterwards, entered gas in one compression chamber 241 of back can be again via rotor 411,421 compressions of rotating shaft 41,42, and be circulated to back one compression chamber 231 again via the air-flow path 331 in one dividing plate 33 of back again, order is via air-flow path 321,311 circulations according to this, gas after the compression then flows out via the gas outlet 212 of housing 21 at last, so promptly forms multistage compression.

From the above, when gas in each compression chamber 221～251 after overcompression, be directly to be circulated to back one compression chamber 211～241 via the air-flow path 311～341 in the dividing plate 31～34, itself and be different from tradition must be via around the gas flow that is formed at the compression chamber outside, therefore, housing 21～25 of the present utility model can be little compared to the traditional design mode in design, that is the outside dimension of multistage vacuum pump 1 of the present utility model and volume can effectively reduce, and can reduce weight relatively and reduce cost.Please consult simultaneously and comparison diagram 1 and Fig. 4, for obviously showing the size difference of above-mentioned the utility model and traditional design, ratio is made as necessarily in the accompanying drawings hereby, learns that by knowing in the accompanying drawing size of the present utility model and volume are little compared to traditional approach really.

Please consult Fig. 4 more simultaneously, reach Fig. 5, the utility model is concaved with a ring groove 348 in addition on dividing plate 34, and an elastomer 64 is located in (all same group of other dividing plate 31～33 is provided with elastomer 61～63) in this ring groove 348, when dividing plate 34 is mounted on the housing 25, can avoid vibrating noise to produce in order to the gap between seal compression cavity 251 and absorbing septum 34 thickness t and the housing groove 253.

Seeing also Fig. 7 is one of different embodiment's schematic representation of the utility model dividing plate, and it shows that dividing plate 7 of the present utility model can change to be established by three side plate 71～73 butt joint groups each other and forms, and air-flow path 74 is around the periphery that is formed at perforation 701,702 on the dividing plate 7.See also Fig. 8 and be the utility model dividing plate different embodiment's schematic representation two, it shows that dividing plate 8 of the present utility model also can change to be established by four side plate 81～84 butt joint groups each other and forms, and air-flow path 85 is also around the periphery that is formed at perforation 801,802 on the dividing plate 8, and the size of air-flow path 85 also can be the design of different sizes.Therefore, dividing plate described in the utility model is not limited in by two side plates to be formed, and establish and can change multi-disc side plate butt joint group each other into, and the size of air-flow path also can be suitable variation.

The foregoing description only is to give an example for convenience of description, and interest field of the present utility model is as the criterion so that claims are described, but not only limits to the foregoing description.

Claims

1. A multi-stage vacuum pump, comprising:

A plurality of shells are connected to each other in a continuous axial direction, and each shell is hollowed out to form a compression cavity in the center of the interior;

A plurality of baffles are respectively preset with a predetermined thickness and assembled between the above two casings to separate two adjacent compression chambers, and each baffle is provided with two through holes;

A rotating module includes two parallel rotating shafts, which are accommodated inside the compression cavity and pass through the through holes of the partition plate, and a plurality of rotors protrude from the two rotating shafts, and Two adjacent rotors are correspondingly accommodated in one of the compression chambers; and

A synchronous gear set drives two adjacent rotors of the two parallel shafts of the rotary module to rotate synchronously;

It is characterized in that each partition is formed with a front surface and a rear surface respectively, and at least one airflow passage is dug inside the partition, and the at least one airflow passage is connected from the front surface to the rear surface.

2. The multi-stage vacuum pump as claimed in claim 1, wherein each baffle is formed by butting a left baffle and a right baffle, and a left baffle is formed in the left baffle. The airflow channel is formed in the right partition board with a right airflow channel, and the left airflow channel is correspondingly communicated with the right airflow channel to form the airflow channel.

3. The multi-stage vacuum pump as claimed in claim 1, wherein at least one airflow channel of each partition is formed between two through holes of each partition.

4. The multi-stage vacuum pump as claimed in claim 1, wherein at least one air flow channel of each partition is formed on the periphery of the two through holes of each partition.

5 . The multi-stage vacuum pump as claimed in claim 1 , wherein a ring groove is recessed on each partition plate, and a plurality of elastic bodies are accommodated in the ring groove respectively. 6 .

6. The multi-stage vacuum pump as claimed in claim 1, wherein each partition is formed by butting a first side plate, a second side plate, and a third side plate respectively.

7. The multi-stage vacuum pump as claimed in claim 1, wherein the front surface of each partition is provided with a front opening, and the rear surface is provided with a rear opening, and the front and rear openings communicate with the at least one airflow channel respectively .

8. The multi-stage vacuum pump as claimed in claim 1, wherein each partition is formed by butting four side plates with each other.

9 . The multi-stage vacuum pump as claimed in claim 1 , wherein the synchronous gear set drives two adjacent rotors of the two parallel shafts of the rotary module to rotate synchronously and keep out of contact with each other.

10. The multi-stage vacuum pump as claimed in claim 7, wherein the gas flows into the gas flow channel through the front opening on the front surface of the partition, and flows out from the rear opening on the rear surface of the partition through the gas flow channel.