CN223155303U - Wide-range spectrum confocal dispersion lens - Google Patents
Wide-range spectrum confocal dispersion lensInfo
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- CN223155303U CN223155303U CN202422437787.XU CN202422437787U CN223155303U CN 223155303 U CN223155303 U CN 223155303U CN 202422437787 U CN202422437787 U CN 202422437787U CN 223155303 U CN223155303 U CN 223155303U
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Abstract
本实用新型提供了一种大量程光谱共焦色散镜头，在光源的光纤端到像面之间依次设置具有负光焦度的第一透镜，具有负光焦度的第二透镜，具有正光焦度的第三透镜，具有正光焦度的第四透镜，具有正光焦度的第五透镜，具有负光焦度的第六透镜，具有负光焦度的第七透镜，具有正光焦度的第八透镜，具有正光焦度的第九透镜；所述第五透镜和第六透镜胶合，第七透镜和第八透镜胶合。镜头成像质量好，分辨率高，能解决现有的色散镜头测量范围小，公差敏感，成本高等特点。
The utility model provides a large-range spectral confocal dispersion lens, wherein a first lens with negative focal power, a second lens with negative focal power, a third lens with positive focal power, a fourth lens with positive focal power, a fifth lens with positive focal power, a sixth lens with negative focal power, a seventh lens with negative focal power, an eighth lens with positive focal power, and a ninth lens with positive focal power are sequentially arranged between the optical fiber end of the light source and the image plane; the fifth lens and the sixth lens are glued together, and the seventh lens and the eighth lens are glued together. The lens has good imaging quality and high resolution, and can solve the problems of small measurement range, sensitive tolerance, high cost, etc. of the existing dispersion lens.
Description
Technical Field
The utility model belongs to the technical field of optical detection, and particularly relates to a wide-range spectral confocal dispersion lens.
Background
The spectral confocal technology is insensitive to environmental changes, light emission and light receiving are completed through the same light path, and the risk that the light path is blocked is avoided. The method has the advantages of high precision and low environment dependence, and can be suitable for various measurement tasks. In addition to measuring surface contours and topography, it can also be used to detect the thickness of transparent materials. The technique can also enable more functional measurements through the cooperation of multiple probes. The characteristics of no damage, non-contact and high efficiency, and can be widely applied to the fields of industrial manufacture, aerospace, medical appliances and semiconductors.
The spectral confocal dispersion lens is a core component of the spectral confocal displacement sensor, the axial dispersion range of the spectral confocal dispersion lens determines the dispersion range of the spectral confocal displacement sensor, the image space numerical aperture NA determines the maximum measurement angle of the spectral confocal displacement sensor, and the spot size is influenced.
Currently, with the continuous increase of industrial detection demands, the required measurement range and the comprehensiveness of information are also significantly increased. Especially in the field with high requirements on measuring range. Taking a measured object with a larger thickness such as flat glass and toughened glass as an example, the detection difficulty is obviously improved along with the increase of the thickness of the material. To meet this complex detection requirement, it is often necessary to measure using a spectral confocal lens featuring a large measurement range, high resolution and high accuracy. However, such high performance lenses are relatively less supplied, and are long in length, and have a large number of lenses and various types, and the use of various optical materials makes the production process complicated and the process requirements high, which directly results in a great increase in manufacturing cost. In addition, the assembly and debugging process of the lenses is time-consuming and labor-consuming, and the use difficulty and cost are further increased.
Disclosure of utility model
The utility model provides a wide-range spectral confocal dispersion lens, which aims to solve the problems of small measurement range and the like in the prior art.
According to a first aspect of the present utility model, one or more embodiments of the present utility model provide a wide-range spectral confocal dispersion lens comprising:
A first lens with negative focal power, a second lens with negative focal power, a third lens with positive focal power, a fourth lens with positive focal power, a fifth lens with positive focal power, a sixth lens with negative focal power, a seventh lens with negative focal power, an eighth lens with positive focal power and a ninth lens with positive focal power are sequentially arranged between the optical fiber end of the light source and the image surface;
the fifth lens is glued to the sixth lens, and the seventh lens is glued to the eighth lens.
The effective focal length of the wide-range spectral confocal dispersion lens is f, the focal length of the first lens is f1, the focal length of the ninth lens is f9, and 0.88< |f1/f| <1.3,3.92< |f9/f| <7.98.
The first lens is a plano-concave lens, the incident surface is a concave surface, and the emergent surface is a plane;
the second lens is a meniscus lens, the incident surface is a concave surface, and the emergent surface is a convex surface;
the third lens is a meniscus lens, the incident surface is a concave surface, and the emergent surface is a convex surface;
The fourth lens is a meniscus lens, the incident surface is a concave surface, and the emergent surface is a convex surface;
The fifth lens is a plano-convex lens, the incident surface is a convex surface, and the emergent surface is a plane;
the sixth lens is a plano-concave lens, the incident surface is a plane, and the emergent surface is a concave surface;
the seventh lens is a biconcave lens, the incident surface is a concave surface, and the emergent surface is a concave surface;
the eighth lens is a biconvex lens, the incident surface is a convex surface, and the emergent surface is a convex surface;
the ninth lens is a biconvex lens, the incident surface is a convex surface, and the emergent surface is a convex surface;
wherein the diaphragm is located at the concave surface of the first lens.
The first lens is made of lanthanum crown glass material, the second lens is made of lanthanum flint glass material, the third lens is made of heavy flint glass material, the fourth lens is made of heavy flint glass material, the fifth lens is made of heavy flint glass material, the sixth lens is made of light crown glass material, the seventh lens is made of light crown glass material, and the eighth lens and the ninth lens are made of heavy flint glass material.
The total length of the wide-range spectral confocal dispersion lens is smaller than 100mm, the measurement angle is at least 30 degrees, and the dispersion range is 18mm.
Wherein the apertures of the first lens, the second lens, the third lens, the fourth lens, the fifth lens, the sixth lens, the seventh lens, the eighth lens and the ninth lens are all smaller than 32mm.
Wherein, the light emitted by the light source is polychromatic light.
The utility model provides a wide-range spectral confocal dispersion lens, which comprises 9 lenses in total, wherein the architecture of the spectral confocal displacement sensor dispersion lens sequentially comprises a light source, a first lens with negative focal power, a second lens with positive focal power, a third lens with positive focal power, a fourth lens with positive focal power, a fifth lens with positive focal power, a sixth lens with negative focal power, a seventh lens with negative focal power, an eighth lens with positive focal power and a ninth lens with positive focal power along an optical axis from a light source optical fiber end to an object to be measured, wherein the fifth lens and the sixth lens are glued together, and the seventh lens and the eighth lens are glued together. The light emitted from the object plane by the lens light source sequentially passes through the lenses from left to right, and finally is sequentially converged at the image plane according to different wavelengths. The adoption of the inverse long-distance structure is beneficial to shortening the lens length, the first negative lens is beneficial to expanding the divergence angle for receiving light, and the 9 mirrors are mutually combined to correct aberration; there is mainly an aperture-dependent spherical aberration in the system, in which the third, fourth and fifth lenses are split by one lens, sharing the optical power. The middle group is combined into a double-cemented lens through positive and negative lenses to assist in correcting monochromatic aberration, and the focal power distribution of the system is reasonable. The total length of the lens is not more than 100mm, and the lens is convenient to assemble and debug. The working distance is 42mm, the dispersion range is 18mm in the wave band of 450-700 nm, the maximum measuring angle is larger than 30 degrees, the imaging quality of the lens is good, and the characteristics of small measuring range, sensitive tolerance, high cost and the like of the existing dispersion lens can be solved by high resolution.
Drawings
Fig. 1 is a schematic structural diagram of a wide-range spectral confocal dispersion lens according to an embodiment of the present utility model.
Fig. 2 is a schematic diagram of an optical path of a wide-range spectral confocal dispersion lens according to an embodiment of the present utility model.
FIG. 3 is a plot of the 450nm wavelength of a polychromatic light according to an embodiment of the present utility model.
FIG. 4 is a plot of the 537.5nm wavelength of a polychromatic light according to an embodiment of the utility model.
Fig. 5 is a dot column diagram of 700nm wavelength in polychromatic light according to an embodiment of the present utility model.
FIG. 6 is a graph of MTF at a wavelength of 450nm for an embodiment of the present utility model.
FIG. 7 is a graph of MTF at 537.5nm for an example of the present utility model.
FIG. 8 is a graph of MTF at 700nm wavelength for an embodiment of the present utility model.
The optical fiber includes an end face 0, a first lens G1, a second lens G2, a third lens G3, a fourth lens G4, a fifth lens G5, a sixth lens G6, a seventh lens G7, an eighth lens G8, and a ninth lens G9.
Detailed Description
For the purposes of promoting an understanding of the principles and advantages of the disclosure, reference will now be made to the embodiments illustrated in the drawings and specific language will be used to describe the same.
It is noted that unless otherwise defined, technical or scientific terms used in one or more embodiments of the present application should be given the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of the terms "first," "second," and the like in one or more embodiments of the present application does not denote any order, quantity, or importance, but rather the terms "first," "second," and the like are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
As shown in fig. 1-8, a wide-range spectral confocal dispersion lens of one or more embodiments of the present application includes:
A first lens G1 with negative focal power, a second lens G2 with negative focal power, a third lens G3 with positive focal power, a fourth lens G4 with positive focal power, a fifth lens G5 with positive focal power, a sixth lens G6 with negative focal power, a seventh lens G7 with negative focal power, an eighth lens G8 with positive focal power and a ninth lens G9 with positive focal power are sequentially arranged between the optical fiber end of the light source and the image surface;
The fifth lens G5 and the sixth lens G6 are cemented, and the seventh lens G7 and the eighth lens G8 are cemented.
In one possible implementation, the effective focal length of the wide-range spectral confocal dispersing lens is f, the focal length of the first lens G1 is f1, the focal length of the ninth lens G9 is f9, and then 0.88< |f1/f| <1.3,3.92< |f9/f| <7.98.
In a possible embodiment, the first lens G1 is a plano-concave lens, the incident surface is a concave surface, the exit surface is a plane, and the optical power is-0.106 mm -1;
the second lens G2 is a meniscus lens, the incident surface is a concave surface, the emergent surface is a convex surface, and the focal power is-0.06 mm -1;
the third lens G3 is a meniscus lens, the incident surface is a concave surface, the emergent surface is a convex surface, and the focal power is 0.0323mm -1;
The fourth lens G4 is a meniscus lens, the incident surface is a concave surface, the emergent surface is a convex surface, and the focal power is 0.0209mm -1;
The fifth lens G5 is a plano-convex lens, the incident surface is a convex surface, the emergent surface is a plane, and the focal power is 0.026mm -1;
The sixth lens G6 is a plano-concave lens, the incident surface is a plane, the emergent surface is a concave surface, and the focal power is-0.025 mm -1;
The seventh lens G7 is a biconcave lens, the incident surface is a concave surface, the emergent surface is a concave surface, and the focal power is-0.0255 mm -1;
The eighth lens G8 is a biconvex lens, the incident surface is a convex surface, the emergent surface is a convex surface, and the focal power is 0.0315mm -1;
The ninth lens G9 is a biconvex lens, the incident surface is a convex surface, the emergent surface is a convex surface, and the focal power is 0.0166mm -1;
Wherein the diaphragm is located at the concave surface of the first lens G1.
In one possible implementation, the first lens G1 is made of lanthanum crown glass material, the second lens G2 is made of lanthanum flint glass material, the third lens G3 is made of heavy flint glass material, the fourth lens G4 is made of heavy flint glass material, the fifth lens G5 is made of heavy flint glass material, the sixth lens G6 is made of light crown glass material, the seventh lens G7 is made of light crown glass material, and the eighth lens G8 and the ninth lens G9 are made of heavy flint glass material.
In one possible embodiment, the total length of the wide-range spectral confocal dispersion lens is less than 100mm, the measurement angle is at least 30 °, and the dispersion range is 18mm.
In one possible embodiment, the apertures of the first lens G1, the second lens G2, the third lens G3, the fourth lens G4, the fifth lens G5, the sixth lens G6, the seventh lens G7, the eighth lens G8, and the ninth lens G9 are all smaller than 32mm.
In one possible embodiment, the light emitted by the light source is polychromatic light. And the light with different wavelengths is formed by dispersing the light with the complex color after passing through the spectrum confocal lens and irradiates the object to be measured, if the object is exactly at a certain wavelength converging point, the light with the wavelength is reflected on the surface of the object to be measured, and the optical fiber is used for receiving the light reflected from the object to be measured and converging the light back to the optical fiber port through the spectrum confocal lens.
Specifically, in this embodiment, the combination of the light-transmitting multiple lenses realizes linear dispersion, a positive lens and a negative lens are combined, a negative lens is placed at the object side optical fiber light source to generate positive dispersion, a positive lens is placed at the side of the object to be measured to generate negative dispersion, and the positive lens and the negative lens are subtracted to obtain a larger dispersion range.
Specifically, in this embodiment, a reverse distance structure with a front group of negative powers at the front and a rear group of positive powers at the rear is adopted, which is beneficial to obtaining larger dispersion. During the power distribution process, an excessive amount of bearing power of a single lens will enlarge its curvature while increasing spherical aberration. In the lens, main aberration is related to the aperture size, on one hand, positive and negative focal power is adopted to match for reducing spherical aberration, and on the other hand, focal power is adopted for splitting, so that strong focal power is dispersed to the other two lenses, and the angle of light is reduced.
For convenience of implementation, as an illustration, in the present embodiment the refractive index n1 of the first lens G1 satisfies 1.63< n1<1.75, the refractive index n2 of the second lens G2 satisfies 1.69< n2<1.83, the refractive index n3 of the third lens G3 satisfies 1.92< n3<1.96, the refractive index n4 of the fourth lens G4 satisfies 1.92< n4<1.96, the refractive index n5 of the fifth lens G5 satisfies 1.92< n5<1.96, the refractive index n6 of the sixth lens G6 satisfies 1.45< n6<1.5, the refractive index n7 of the seventh lens G7 satisfies 1.45< n7<1.5, the refractive index n8 of the eighth lens G8 satisfies 1.92< n8<1.96, and the refractive index n9 of the ninth lens G9 satisfies 1.7< n9<1.84;
The abbe number v1 of the first lens G1 satisfies 44< v1<57, the abbe number v2 of the second lens G2 satisfies 45< v2<57, the abbe number v3 of the third lens G3 satisfies 17< v3<29, the abbe number v4 of the fourth lens G4 satisfies 17< v4<29, the abbe number v5 of the fifth lens G5 satisfies 17< v5<29, the abbe number v6 of the sixth lens G6 satisfies 66< v6<79, the abbe number v7 of the seventh lens G7 satisfies 66< v7<79, the abbe number v8 of the eighth lens G8 satisfies 17< v8<29, and the abbe number v9 of the ninth lens G9 satisfies 28< v9< 33.
Further, the range of the radius of curvature R of the lens in the present embodiment is as follows:
The object side of the first lens G1 is-10 mm < R < -5mm, and the image side of the first lens G1 is R= infinity;
15mm < R < -8mm on the object side of the second lens G2, 68mm < R < -50mm on the image side of the second lens G2;
The object side of the third lens G3 is 28mm < R < -19mm, and the image side of the second lens G2 is 20mm < R < -12mm;
The object side of the fourth lens G4 is-230 mm < R < -200mm, and the image side of the second lens G2 is-48 mm < R < -35mm;
The object side of the fifth lens G5 is 32mm < R <45mm, and the image side of the second lens G2 is R= infinity;
An object side of the sixth lens G6 is R= infinity, and an image side of the second lens G2 is 10mm < R <25mm;
The object side of the seventh lens G7 is 57mm < R < -40mm, and the image side of the second lens G2 is 20mm < R <39mm;
the object side of the eighth lens G8 is 20mm < R <35mm, and the image side of the second lens G2 is-400 mm < R < -300mm;
The object side of the ninth lens G9 is 78mm < R <110mm, and the image side of the second lens G2 is-100 mm < R < -57mm;
Specific parameters of each lens are shown in table 1, wherein the surface numbers S1 to S18 are the arrangement numbers of the optical surfaces from the object side to the image side.
TABLE 1
The lenses in the table above are all glass spherical lenses, the surfaces represent two surfaces of each lens, the radius is the curvature radius corresponding to each surface, and the thickness is the center thickness of each optical element and the distance between the surfaces.
The wide-range spectral confocal dispersion lens disclosed by the embodiment generates axial dispersion in the working wavelength range of 450-700nm, the axial dispersion range is 18mm, the maximum measurement angle is more than 30 degrees, and the total optical length of the lens is within 100mm.
According to the wide-range spectral confocal dispersion lens, the radius and the thickness of different lenses are optimally designed through optical element combination and material selection, so that the wide-range spectral confocal dispersion lens has a large dispersion range and low tolerance sensitivity, the production quality of the lens is greatly improved, and the wide production of the spectral confocal dispersion lens is facilitated. The lens cost in the dispersive lens is reduced by using the lens made of the same material, so that the lens cost is reduced, the problem of various lens materials in the spectral confocal dispersive lens is solved on the basis of ensuring the index of the dispersive lens, and the wide production and application of the lens are facilitated, and the applicability of the lens is improved. Referring to fig. 3, fig. 4 and fig. 5, standard point column diagrams of the dispersion lens at 450nm, 537.5nm and 700nm are provided for the present embodiment. The imaging quality of the system is researched through the light concentration degree reaching the image surface, the RMS root mean square radius of each view field can be seen in the figure to be smaller than the Yu Aili spot radius, the imaging quality of the system is relatively good, the image quality is shown to reach the diffraction limit, and the index requirement of the spectrum confocal dispersion lens is met.
Referring to fig. 6, 7 and 8, the transfer functions of the dispersion lens provided in this embodiment at 450nm, 537.5nm and 700nm can be seen that the three wavelength curves in the dispersion lens system values all approach the diffraction limit.
While preferred embodiments of the present utility model have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the utility model.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present utility model without departing from the spirit or scope of the utility model. Thus, it is intended that the present utility model also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (8)
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| CN202422437787.XU CN223155303U (en) | 2024-10-10 | 2024-10-10 | Wide-range spectrum confocal dispersion lens |
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