CN221822325U - Rotating table in vacuum cavity - Google Patents

Abstract

The utility model relates to the field of thin film deposition, and provides a vacuum chamber rotating table, which is used for rotating materials in semiconductor thin film deposition equipment, including a carrier, a hollow rotating platform and a magnetic fluid transmission shaft. The carrier is arranged in the vacuum chamber of the semiconductor thin film deposition equipment, and the carrier is suitable for placing materials; the hollow rotating platform is arranged outside the vacuum chamber of the semiconductor thin film deposition equipment; the magnetic fluid transmission shaft connects the carrier and the output end of the hollow rotating platform and penetrates the side wall of the semiconductor thin film deposition equipment, so that the hollow rotating platform can drive the carrier to rotate. The utility model provides a vacuum chamber rotating table, in which the hollow rotating platform is arranged outside the semiconductor thin film deposition equipment, and the magnetic fluid transmission shaft connects the carrier and the hollow rotating platform, which has a significant sealing effect, is easy to maintain, has a low cost, can adapt to large load scenarios, and improves the ability to resist off-center loads.

Description

A rotating table in a vacuum chamber

Technical Field

The utility model relates to the field of thin film deposition, and further to a rotary table in a vacuum chamber.

Background Art

Semiconductor thin film deposition equipment requires a turntable device to adjust the processing position of the wafer, and the entire processing process is carried out in the vacuum chamber of the semiconductor thin film deposition equipment. Most of the existing turntable devices are completely installed inside the vacuum chamber, and the entire machine is exposed to the vacuum environment, which is costly and troublesome to maintain. Moreover, most turntable devices have a small load and low anti-eccentric load capability.

Utility Model Content

In view of the above technical problems, the purpose of the utility model is to provide a rotating table in a vacuum chamber, in which the hollow rotating platform is arranged on the outside of the semiconductor thin film deposition equipment, and the magnetofluid transmission shaft connects the carrier and the hollow rotating platform. It has significant sealing effect, is easy to maintain, has low cost, can adapt to large load scenarios, and improves the ability to resist unbalanced loads.

In order to achieve the above-mentioned purpose, the utility model provides a vacuum chamber rotating table for rotating materials in a semiconductor thin film deposition device, comprising a carrier, a hollow rotating platform and a magnetic fluid transmission shaft, wherein the carrier is arranged in the vacuum chamber of the semiconductor thin film deposition device, and the carrier is suitable for placing materials; the hollow rotating platform is arranged outside the vacuum chamber of the semiconductor thin film deposition device; the magnetic fluid transmission shaft connects the carrier and the output end of the hollow rotating platform and passes through the side wall of the semiconductor thin film deposition device, so that the hollow rotating platform can drive the carrier to rotate.

In some embodiments, the magnetic fluid transmission shaft includes a fixed seat and a rotating shaft, the fixed seat is arranged on the outside of the semiconductor thin film deposition equipment, the rotating shaft is partially arranged on the inside of the fixed seat and connects the carrier and the hollow rotating platform, and a magnetic fluid is arranged between the rotating shaft and the fixed seat.

In some embodiments, the rotating shaft includes a first section and a second section, the first section is coaxially arranged on the inner side of the fixed seat and connected to the hollow rotating platform, a magnetic fluid is arranged between the first section and the fixed seat, a first opening is arranged on the bottom wall of the semiconductor thin film deposition equipment, and the second section is connected to the carrier after passing through the first opening.

In some embodiments, the second section of the rotating shaft passes through the first opening and is connected to the bottom center key of the carrier, and the fixing seat is sealed and installed on the outer side wall of the semiconductor thin film deposition device.

In some embodiments, a mounting frame is further included, wherein the mounting frame is fixedly installed on the outside of the vacuum chamber of the semiconductor thin film deposition equipment, and the hollow rotating platform is installed on one end of the mounting frame away from the semiconductor thin film deposition equipment.

In some embodiments, the fixing seat of the magnetic fluid transmission shaft is relatively located inside the mounting frame, and a plurality of notches are provided at intervals on the side wall of the mounting frame.

In some embodiments, the hollow rotating platform includes a motor, a first gear, a second gear and a rolling bearing, the motor drives the first gear to rotate, the first gear is transmission-connected to the second gear, and the rolling bearing connects the second gear and the rotating shaft of the magnetic fluid transmission shaft.

In some embodiments, a shaft sleeve is further provided at one end of the rotating shaft of the magnetic fluid transmission shaft away from the carrier, and the shaft sleeve connects the end of the rotating shaft and the rolling bearing.

In some embodiments, a plurality of placement grooves are provided at intervals in the circumferential direction of the carrier, and the placement grooves are suitable for placing film boxes containing materials.

In some embodiments, a position sensor is further provided in the mounting frame for sensing the rotational position of the carrier.

Compared with the prior art, the vacuum chamber rotating table provided by the present invention has at least one of the following beneficial effects:

1. The hollow rotating platform is arranged on the outside of the semiconductor thin film deposition equipment. The magnetic fluid transmission shaft connects the carrier and the hollow rotating platform. It has significant sealing effect, is easy to maintain, has low cost, can adapt to large load scenarios, and improves the ability to resist off-center loads.

2. Magnetic fluid seal is used between the fixed seat and the rotating shaft, which can adapt to high vacuum and high pressure scenes, with low torque loss, smooth high-speed rotation and long service life.

3. The rotating shaft is connected to the carrier key, with simple structure and easy assembly.

4. The hollow rotating platform can directly install the equipment to be installed on the rolling bearing, reducing the time and cost of research and development and shortening the delivery period; the hollow rotating platform can also achieve high-precision positioning, large output torque, and can withstand large loads, and is suitable for applications that require high torque output.

BRIEF DESCRIPTION OF THE DRAWINGS

The preferred implementation modes will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above-mentioned characteristics, technical features, advantages and implementation methods of the present utility model.

FIG. 1 is an overall view of a rotary table in a vacuum chamber.

Description of Figure Numbers:

Carrier 1, hollow rotating platform 2, magnetic fluid transmission shaft 3, fixed seat 31, rotating shaft 32, mounting frame 4, motor 5.

DETAILED DESCRIPTION

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the specific implementation methods of the utility model will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.

In order to simplify the drawings, only the parts related to the utility model are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically drawn or marked. In this article, "one" not only means "only one", but also means "more than one".

It should be further understood that the term “and/or” used in the specification and appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

In this article, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

In addition, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance. It should be noted that the above embodiments can be freely combined as needed. The above are only preferred implementations of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the utility model, and these improvements and modifications should also be regarded as the scope of protection of the utility model.

Referring to Figure 1, the utility model provides a vacuum chamber rotating table, which is used for rotating materials in a semiconductor thin film deposition device, and includes a carrier 1, a hollow rotating platform 2 and a magnetic fluid transmission shaft 3. The carrier 1 is arranged in the vacuum chamber of the semiconductor thin film deposition device, and the carrier 1 is suitable for placing materials; the hollow rotating platform 2 is arranged outside the vacuum chamber of the semiconductor thin film deposition device; the magnetic fluid transmission shaft 3 connects the output ends of the carrier 1 and the hollow rotating platform 2 and passes through the side wall of the semiconductor thin film deposition device, so that the hollow rotating platform 2 can drive the carrier 1 to rotate.

In this embodiment, the hollow rotating platform 2 is arranged on the outside of the semiconductor thin film deposition equipment, and the magnetofluid transmission shaft 3 connects the carrier 1 and the hollow rotating platform 2. The sealing effect is significant, maintenance is convenient, the cost is low, it can adapt to large load scenarios, and the ability to resist unbalanced loads is improved.

Furthermore, the magnetic fluid transmission shaft 3 includes a fixed seat 31 and a rotating shaft 32. The fixed seat 31 is arranged on the outside of the semiconductor thin film deposition equipment, and the rotating shaft 32 is partially arranged on the inside of the fixed seat 31 and connects the carrier 1 and the hollow rotating platform 2. A magnetic fluid is arranged between the rotating shaft 32 and the fixed seat 31.

In this embodiment, a magnetic fluid seal is used between the fixed seat 31 and the rotating shaft 32, which can adapt to high vacuum and high pressure scenes, has small torque loss, smooth high-speed rotation and long service life.

Specifically, the rotating shaft 32 includes a first section and a second section, the first section is coaxially arranged inside the fixed seat 31 and connected to the hollow rotating platform 2, a magnetic fluid is arranged between the first section and the fixed seat 31, a first opening is arranged on the bottom wall of the semiconductor film deposition device, and the second section is connected to the carrier 1 after passing through the first opening. The fixed seat 31 is arranged on the side wall of the semiconductor film deposition device, and a sealing ring is arranged between the fixed seat 31 and the side wall of the semiconductor film deposition device, so that the fixed seat 31 seals the first opening to prevent leakage of the semiconductor film deposition device. Of course, the sealing structure between the fixed seat 31 and the side wall of the semiconductor film deposition device includes but is not limited to a sealing ring, and can also be a sealant seal, a liquid seal, etc., which are all easy to think of by those skilled in the art and are within the scope of protection of this application. The second section of the rotating shaft 32 is connected to the bottom center key of the carrier 1 after passing through the first opening, and the fixed seat 31 is sealed and installed on the outer wall of the semiconductor film deposition device. The rotating shaft 32 is key-connected to the carrier 1, with a simple structure and convenient assembly. Specifically, the rotating shaft 32 is connected to the carrier 1 by a flat key. It is worth noting that the rotating shaft 32 and the carrier 1 may also adopt other key connection structures, which are easily conceivable by those skilled in the art based on the concept of this application.

Furthermore, it also includes a mounting frame 4, which is fixedly installed outside the vacuum chamber of the semiconductor thin film deposition equipment, and the hollow rotating platform 2 is installed at one end of the mounting frame 4 away from the semiconductor thin film deposition equipment.

Specifically, the mounting frame 4 connects the hollow rotating platform 2 and the semiconductor thin film deposition equipment for easy installation. The mounting frame 4 has an installation cavity inside, and the fixing seat 31 of the magnetic fluid transmission shaft 3 is relatively located in the installation cavity inside the mounting frame 4. A number of notches are arranged on the side wall of the mounting frame 4, and the notches allow the fixing seat 31 in the installation cavity of the mounting frame 4 to communicate with the outside world. The hollow rotating platform 2 and the magnetic fluid transmission shaft 3 can be assembled and repaired through the notches, simplifying the difficulty of assembly and maintenance. It is worth noting that the hollow rotating platform 2 can also be fixed to other components, and the output end of the hollow rotating platform 2 is connected to the rotating shaft 32 of the magnetic fluid transmission shaft 3.

Furthermore, the hollow rotating platform 2 includes a motor 5, a first gear, a second gear and a rolling bearing. The motor 5 drives the first gear to rotate. The first gear is connected to the second gear in transmission. The rolling bearing connects the second gear and the rotating shaft 32 of the magnetic fluid transmission shaft 3.

In this embodiment, the hollow rotating platform 2 can directly install the equipment to be installed on the rolling bearing. Compared with the use of mechanical parts such as pulleys, it can reduce the time and cost of mechanical design, parts allocation, belt state adjustment and other links, and shorten the delivery period. At the same time, the hollow rotating platform 2 can also achieve high-precision positioning, large output torque, and can withstand large loads, which is suitable for applications that require high torque output.

Specifically, there are many types and structures of the hollow rotating platform 2, which are not further limited in this application. The end of the rotating shaft 32 of the magnetic fluid transmission shaft 3 away from the carrier 1 is also provided with a sleeve, which connects the end of the rotating shaft 32 and the rolling bearing. The sleeve reduces the wear of the rotating shaft 32, fixes the relative position of the rotating shaft 32 and the rolling bearing, and reduces friction.

It is worth noting that the hollow rotating platform 2 is made of high-strength materials, has high durability and high reliability, and can withstand high pressure and high temperature environments. The hollow rotating platform 2 can be installed in any direction and can be set at any position of the semiconductor thin film deposition equipment.

Furthermore, a plurality of placement grooves are provided at intervals in the circumferential direction of the carrier 1, and the placement grooves are suitable for placing film boxes containing materials.

In this embodiment, the film box is fixed in the placement groove by a fixing member, and the fixing member is a locking part such as a screw or a bolt. At the same time, the placement groove includes but is not limited to being arranged at intervals along the circumference of the carrier 1, and can also be arranged at intervals, etc.

Furthermore, a position sensor is provided in the mounting frame 4 for sensing the rotation position of the carrier 1 .

In this embodiment, the position sensor senses the rotation position of the magnetic fluid transmission shaft 3, and then determines the rotation position of the carrier 1. Specifically, the position sensor is arranged inside the mounting frame 4. In another embodiment, the position sensor can also be arranged at the notch of the mounting frame 4, and even the position sensor can be arranged on the semiconductor thin film deposition equipment, as long as it can achieve position positioning.

It should be noted that the above embodiments can be freely combined as needed. The above are only preferred implementations of the utility model. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the utility model, and these improvements and modifications should also be regarded as the protection scope of the utility model.

Claims (10)

1. A vacuum intracavity spin stand for rotation of material in a semiconductor thin film deposition apparatus, comprising:

The carrier is arranged in the vacuum cavity of the semiconductor thin film deposition equipment and is suitable for placing materials;

The hollow rotating platform is arranged outside the vacuum cavity of the semiconductor thin film deposition equipment;

The magnetic fluid transmission shaft is connected with the carrier and the output end of the hollow rotating platform and penetrates through the side wall of the semiconductor thin film deposition equipment, so that the hollow rotating platform can drive the carrier to rotate.

2. The turntable in a vacuum chamber according to claim 1, wherein,

The magnetofluid transmission shaft comprises a fixed seat and a rotating shaft, the fixed seat is arranged on the outer side of the semiconductor thin film deposition equipment, the rotating shaft is arranged on the inner side of the fixed seat and is connected with the carrying platform and the hollow rotating platform, and magnetofluid is arranged between the rotating shaft and the fixed seat.

3. A vacuum chamber turntable according to claim 2, wherein,

The rotary shaft comprises a first section and a second section, the first section is coaxially arranged on the inner side of the fixed seat and connected with the hollow rotary platform, magnetic fluid is arranged between the first section and the fixed seat, a first opening is formed in the bottom wall of the semiconductor thin film deposition device, and the second section penetrates through the first opening and then is connected with the carrying platform.

4. A vacuum chamber turntable according to claim 3, wherein,

The second section of the rotating shaft penetrates through the first opening and then is connected with the bottom center key of the carrying platform, and the fixing seat is mounted on the outer side wall of the semiconductor thin film deposition device in a sealing mode.

5. A turntable in a vacuum chamber according to any one of claims 1 to 4,

Still include the mounting bracket, mounting bracket fixed mounting in the vacuum chamber outside of semiconductor thin film deposition equipment, hollow rotary platform install in the mounting bracket is kept away from semiconductor thin film deposition equipment's one end.

6. The turntable in a vacuum chamber according to claim 5, wherein,

The fixing seat of the magnetic fluid transmission shaft is relatively positioned inside the mounting frame, and a plurality of notches are formed in the side wall of the mounting frame at intervals.

7. The turntable in a vacuum chamber according to claim 5, wherein,

The hollow rotary platform comprises a motor, a first gear, a second gear and a rolling bearing, wherein the motor drives the first gear to rotate, the first gear is in transmission connection with the second gear, and the rolling bearing is connected with the second gear and the rotating shaft of the magnetic fluid transmission shaft.

8. The turntable in a vacuum chamber according to claim 7, wherein,

And one end, far away from the carrier, of the rotating shaft of the magnetic fluid transmission shaft is also provided with a shaft sleeve, and the shaft sleeve is connected with the end part of the rotating shaft and the rolling bearing.

9. The turntable in a vacuum chamber according to claim 1, wherein,

The carrying platform circumference is still equipped with a plurality of standing grooves at intervals, be suitable for in the standing groove and place the magazine that deposits the material.

10. The turntable in a vacuum chamber according to claim 5, wherein,

And a position sensor is arranged in the mounting frame and used for sensing the rotating position of the carrying platform.