CN221371280U - Boat structure cooling device and boat structure buffer memory system - Google Patents

Abstract

The utility model discloses a boat structure cooling device and a boat structure buffer system, the boat structure cooling device comprises a shell, a heat radiation part and a suction part, wherein the shell comprises a main body part and a support part which is positioned at one side of the main body part in the horizontal direction, the support part is provided with a support platform for supporting a boat structure, the heat radiation part is arranged on the support part, the heat radiation part is used for radiating heat of the boat structure, the suction part is arranged on the main body part, and the suction part is used for drawing out air flow below the support part. When a plurality of boat structure cooling devices are used simultaneously, hot air generated by heat dissipation of the heat dissipation parts of the boat structure cooling devices below can be pumped away under the suction effect of the suction parts of the boat structure cooling devices above, so that adverse effects of the heat dissipation parts of the boat structure cooling devices below on the heat dissipation parts of the boat structure cooling devices above are avoided. In addition, the heat dissipation part and the suction part can accelerate the airflow flowing speed around the boat structure, thereby improving the heat dissipation efficiency.

Description

Boat structure cooling device and boat structure buffer memory system

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a boat structure cooling device and a boat structure caching system.

Background

PECVD (PLASMA ENHANCED CHEMICAL Vapor Deposition) equipment is a commonly used technical equipment in the solar photovoltaic industry, a graphite boat is a carrier of a silicon wafer in the film coating process, the graphite boat and the silicon wafer are heated to the process temperature together, and after the process is finished, the graphite boat and the loaded silicon wafer are required to be placed in a cooling device to be cooled to the room temperature. In the conventional cooling device, a fan is usually arranged below the contact surface with the graphite boat, and the cooling of the graphite boat is realized by forced airflow through the rotation of the fan. In order to promote cooling efficiency, can set up a plurality of cooling device along vertical direction on the casing generally, every cooling device all can support and cool off the graphite boat, this kind arranges multilayer cooling device's technical scheme along vertical direction, in actual cooling process, the cooling device that is located the below can blow the hot air to the cooling device that is located the top to reduce the cooling effect that is located the cooling device of top.

Disclosure of utility model

The utility model aims to provide a boat structure cooling device which can cool boat structures faster, and a plurality of boat structure cooling devices can not interfere with each other when being used side by side, so that the time required for cooling the boat structures is shortened, and the cooling efficiency is improved.

A second object of the present utility model is to provide a boat structure buffer system, which can rapidly cool a plurality of boat structures, and improve cooling efficiency.

In order to achieve the technical effects, the technical scheme of the utility model is as follows:

The utility model discloses a boat structure cooling device, comprising: a housing including a main body portion and a support portion positioned at one side of the main body portion in a horizontal direction, the support portion having a support platform for supporting a boat structure; the heat dissipation component is arranged on the supporting part and is positioned below the supporting platform, and the heat dissipation component is used for dissipating heat of the boat structure; and the suction component is arranged on the main body part and is used for sucking out air flow below the supporting part.

The boat structure cooling device has the beneficial effects that: in the actual working process, a plurality of boat structure cooling devices are arranged at intervals along the vertical direction, after a plurality of boat structures are placed on a plurality of supporting platforms, all heat dissipation components are started, the heat dissipation components can cool the boat structures, in the process of dissipating heat of the boat structures, hot air generated by the boat structure cooling devices below can flow to the supporting parts of the boat structure cooling devices above, and due to the fact that the suction components are arranged on the main body part of the shell, the hot air flowing to the supporting parts can be pumped out by the suction components, and the hot air is output to one end of the main body part far away from the supporting parts. Therefore, when a plurality of boat structure cooling devices are used at the same time, hot air generated by heat dissipation of the heat dissipation part of the boat structure cooling device below can be pumped away under the suction effect of the suction part of the boat structure cooling device above, so that adverse influence of the heat dissipation part of the boat structure cooling device below on the heat dissipation part of the boat structure cooling device above is avoided. In addition, the heat dissipation part and the suction part can accelerate the airflow flowing speed around the boat structure, thereby improving the heat dissipation efficiency.

In some embodiments, the housing defines a first cavity and a second cavity therein, a baffle is disposed within the housing, the baffle vertically separates the first cavity from the second cavity, the heat sink is disposed within the first cavity, and the suction component is disposed within the second cavity.

In some specific embodiments, the boat structure cooling device includes an auxiliary heat sink located in the first cavity and located on one side of the heat sink member, the auxiliary heat sink being configured to blow air toward an air inlet end of the heat sink member.

In some more specific embodiments, the housing includes a first mounting plate, the first mounting plate being connected to the baffle, the first mounting plate having a plurality of first mounting holes, a portion of the first mounting holes being configured to mount the auxiliary heat sink, and another portion of the first mounting holes being configured to mount the suction component.

In some specific embodiments, the housing further includes a third cavity, where the third cavity is located in the main body and is communicated with both the first cavity and the second cavity, and a cooling mechanism is disposed in the third cavity, and the cooling mechanism can cool the airflow generated by the heat dissipation component and the suction component.

In some more specific embodiments, the cooling mechanism is a liquid cooling plate or a heat dissipating fin.

In some specific embodiments, the upper end of the first cavity is opened, the housing includes a second mounting plate, the second mounting plate is connected to the open end of the first cavity, the upper surface of the second mounting plate forms the supporting platform, a plurality of second mounting holes are formed in the second mounting plate, and one heat dissipation component is disposed in each second mounting hole.

The utility model also discloses a boat structure caching system, which comprises: a support frame; the above-mentioned boat structure cooling device, wherein the number of the boat structure cooling devices is plural, and the plurality of boat structure cooling devices are arranged on the supporting frame at intervals.

The boat structure buffer system has the beneficial effects that: due to the fact that the boat structure cooling device is arranged, in the actual working process, hot air generated by heat dissipation of the boat structure cooling device at the lower part can be pumped away under the suction effect of the boat structure cooling device at the upper part, adverse effects of heat dissipation parts of the boat structure cooling device at the lower part on heat dissipation parts of the boat structure cooling device at the lower part are avoided, and therefore the boat structure cache system can rapidly cool a plurality of boat structures, and cooling efficiency is improved.

In some embodiments, the support frame further comprises a plurality of brackets, the plurality of brackets are arranged in one-to-one correspondence with the plurality of boat structures, and each bracket is used for supporting the boat structure.

In some specific embodiments, each of the brackets includes two sub-frames arranged in pairs, the two sub-frames arranged in pairs being connected to opposite sides of the hull of the boat structure cooling device.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic view of a boat structure cooling device according to an embodiment of the present utility model;

FIG. 2 is a vertical sectional view of a boat structure cooling device of an embodiment of the present utility model;

FIG. 3 is a schematic view of the structure of a casing of the boat structure cooling device of the embodiment of the present utility model;

FIG. 4 is a schematic view showing the structure of the boat structure cooling device in another direction of the housing of the embodiment of the present utility model;

FIG. 5 is a schematic diagram of a boat structure buffer system according to an embodiment of the present utility model.

Reference numerals:

100. A boat structure cooling device;

10. A housing; 101. a first cavity; 102. a second cavity; 103. a third cavity; 11. a main body portion; 12. a support part; 13. a deflector; 14. a first mounting plate; 141. a first mounting hole; 15. a second mounting plate; 151. a second mounting hole;

20. A heat radiating member; 30. a suction part;

40. An auxiliary heat sink;

50. a cooling mechanism;

200. A support frame; 300. a bracket; 310. a sub-rack; 400. boat structure.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the boat structure cooling device 100 according to the embodiment of the present utility model will be described below with reference to fig. 1 to 3.

The utility model discloses a boat structure cooling device 100, as shown in fig. 1 and 2, the boat structure cooling device 100 comprises a shell 10, a heat dissipation part 20 and a suction part 30, wherein the shell 10 comprises a main body part 11 and a support part 12 positioned at one side of the main body part 11 in the horizontal direction, the support part 12 is provided with a support platform for supporting a boat structure 400 (refer to fig. 4), the heat dissipation part 20 is arranged below the support part 12 and is positioned below the support platform, the heat dissipation part 20 is used for dissipating heat of the boat structure 400, the suction part 30 is arranged at the main body part 11, and the suction part 30 is used for drawing out air flow below the support part 12.

It will be appreciated that, in the actual operation, the plurality of boat structure cooling devices 100 are arranged at intervals along the vertical direction, and after the plurality of boat structures 400 are placed on the plurality of support platforms, all the heat dissipation members 20 are started, the heat dissipation members 20 can cool the boat structures 400, and in the process of dissipating heat from the plurality of boat structures 400, the hot air generated by the boat structure cooling devices 100 below will flow to the support portion 12 of the boat structure cooling device 100 above, and due to the suction members 30 provided on the main body portion 11 of the housing 10, the suction members 30 can draw out the hot air flowing to the support portion 12, and output the air to the end of the main body portion 11 far from the support portion 12. Therefore, when a plurality of boat structure cooling devices 100 are used at the same time, the hot air generated by the heat dissipation of the heat dissipation part 20 of the lower boat structure cooling device 100 is pumped away under the pumping action of the pumping part 30 of the upper boat structure cooling device 100, so that the heat dissipation part 20 of the lower boat structure cooling device 100 is prevented from adversely affecting the heat dissipation part 20 of the upper boat structure cooling device 100. In addition, the heat radiating part 20 and the suction part 30 can accelerate the flow velocity of the air around the boat structure 400, thereby improving the heat radiating efficiency.

In some embodiments, as shown in fig. 2, the housing 10 defines a first cavity 101 and a second cavity 102 inside, a baffle 13 is provided inside the housing 10, the baffle 13 separates the first cavity 101 and the second cavity 102 in a vertical direction, the heat dissipation component 20 is located in the first cavity 101, and the suction component 30 is located in the second cavity 102. Specifically, the support portion 12 is provided in a hollow manner, the main body portion 11 is also provided in a hollow manner, the baffle 13 is provided in the main body portion 11 so as to divide the space in the main body portion 11 into two, one part is communicated with the space in the support portion 12 to form the first chamber 101, and the other part is communicated with the space in the support portion 12 to form the second chamber 102. In the actual working process, the external air enters the first cavity 101 under the driving of the heat dissipation component 20 and passes through the boat structure 400 to dissipate heat, the side wall of the second cavity 102 facing the supporting part 12 is provided with an air inlet, and the hot air flow below the supporting part 12 can be pumped into the second cavity 102 from the air inlet under the action of the suction component 30, so that the air flow blown to the boat structure 400 by the heat dissipation component 20 can be prevented from being the air flow with higher temperature generated by the lower boat structure cooling device 100. In this embodiment, the baffle 13 is provided to separate the first cavity 101 from the second cavity 102, so as to avoid the interaction between the heat dissipation component 20 and the suction component 30 during operation, and avoid the occurrence of airflow disorder in the housing 10.

In some specific embodiments, as shown in fig. 2-3, the boat structure cooling device 100 includes an auxiliary heat sink 40, where the auxiliary heat sink 40 is located in the first cavity 101 and on one side of the heat sink 20, and the auxiliary heat sink 40 is used to blow air toward the air inlet end of the heat sink 20. It will be appreciated that, according to the foregoing, the first cavity 101 includes the inner space of the supporting portion 12 and a portion of the inner space of the main body portion 11, and the additional auxiliary heat dissipation element 40 is disposed in the inner space of the main body portion 11. In the actual heat dissipation process, the external air is blown to the inner space of the supporting part 12 under the action of the auxiliary heat dissipation component 40, and then is blown to the boat structure 400 under the action of the heat dissipation component 20, so that the air flow speed in the first cavity 101 can be increased, the heat dissipation effect on the boat structure 400 is improved, and the cooling efficiency is improved.

In some more specific embodiments, as shown in fig. 2 and 3, the housing 10 includes a first mounting plate 14, where the first mounting plate 14 is connected to the baffle 13, and a plurality of first mounting holes 141 are provided on the first mounting plate 14, and one portion of the first mounting holes 141 is used for mounting the auxiliary heat sink 40, and another portion of the first mounting holes 141 is used for mounting the suction member 30. It will be appreciated that the auxiliary radiator 40 and the suction member 30, although having different roles, are installed in the inner space of the main body 11 and the air flow generated by the two can be separated by the baffle 13 according to the foregoing, so that the auxiliary radiator 40 and the suction member 30 can be mounted to the first mounting plate 14 and then the first mounting plate 14 can be directly mounted to the side of the second chamber 102 facing away from the support 12 during the installation, simplifying the assembly process.

Optionally, as shown in fig. 2 and 3, in order to further enhance the cooling effect, a third cavity 103 may be provided inside the housing 10. The third cavity 103 is located in the main body 11 and is communicated with both the first cavity 101 and the second cavity 102, and the cooling mechanism 50 is provided in the third cavity 103, and the cooling mechanism 50 can cool the air flows generated by the heat radiating member 20 and the suction member 30. It will be appreciated that, specifically, the supporting portion 12 is hollow, the main body portion 11 is also hollow, the first mounting plate 14 is disposed in the main body portion 11 to divide the space of the main body portion 11 into a first space and a second space, the second space directly forms the third cavity 103, the baffle 13 is disposed in the main body portion 11 to divide the first space into two, one part is communicated with the space in the supporting portion 12 to form the first cavity 101, and the other part is formed into the second cavity 102. Thus, in the actual working process, both the air flow flowing to the heat dissipation part 20 and the air flow pumped by the pumping part 30 can be cooled under the action of the cooling mechanism 50, the air flow flowing to the heat dissipation part 20 can be cooled to enable the cooling speed of the boat structure 400 to be faster, so that the cooling efficiency is further improved, and the air flow pumped by the pumping part 30 can be cooled to enable the temperature of the air around the whole boat structure cooling device 100 to be lower, so that the cooling speed of the boat structure 400 is indirectly improved.

In some more specific embodiments, the cooling mechanism 50 is a liquid cooling plate or a heat sink fin. The structures of the liquid cooling plate and the radiating fins are all of the prior art, and are not described herein. Of course, in other embodiments of the present utility model, the cooling mechanism 50 may have other structures such as a cooling fan, and is not limited to a liquid cooling plate or a cooling fin.

In some specific embodiments, as shown in fig. 2 and fig. 4, the upper end of the first cavity 101 is opened, the housing 10 includes a second mounting plate 15, the second mounting plate 15 is connected to the open end of the first cavity 101, the upper surface of the second mounting plate 15 forms a supporting platform, a plurality of second mounting holes 151 are formed in the second mounting plate 15, and a heat dissipation component 20 is disposed in each second mounting hole 151. It can be appreciated that in the installation process, the plurality of heat dissipation components 20 can be installed on the second installation plate 15, and then the second installation plate 15 is directly installed on the open end of the first cavity 101, so that the assembly process is simplified, and the boat structure 400 is cooled by adopting the plurality of heat dissipation components 20, so that the cooling time can be shortened, and the cooling efficiency can be improved.

The utility model also discloses a boat structure buffer system, as shown in fig. 5, which comprises a support frame 200 and the boat structure cooling devices 100, wherein the boat structure cooling devices 100 are a plurality of, and the boat structure cooling devices 100 are arranged on the support frame 200 at intervals. It can be appreciated that, with the above-mentioned boat structure cooling device 100, in the actual working process, the hot air generated by heat dissipation of the boat structure cooling device 100 below will be pumped away under the pumping action of the boat structure cooling device 100 above, so that adverse effects of the heat dissipation component 20 of the boat structure cooling device 100 below on the heat dissipation component 20 of the boat structure cooling device 100 above are avoided, and therefore, the boat structure buffer system can rapidly cool the plurality of boat structures 400, and the cooling efficiency is improved.

In some embodiments, as shown in fig. 5, the support frame 200 further includes a plurality of brackets 300 thereon, where the plurality of brackets 300 are disposed in one-to-one correspondence with the plurality of boat structures 400, and each bracket 300 is used to support a boat structure 400. It can be appreciated that the bracket 300 is matched with the boat structure cooling device 100 to support the boat structure 400, so that the stability of the boat structure buffer system for supporting the boat structure 400 can be improved, and the falling phenomenon of the boat structure 400 can be avoided.

In some specific embodiments, as shown in fig. 5, each bracket 300 includes two sub-frames 310 arranged in pairs, and the two sub-frames 310 arranged in pairs are connected to opposite sides of the housing 10 of the boat structure cooling device 100. It can be appreciated that in the actual installation process, the boat structure cooling device 100 can be installed between the two sub-frames 310 arranged in pairs, and the boat structure cooling device 100 supports the middle of the boat structure 400 through the support of the two sub-frames 310 to the end of the boat structure 400, so that the supporting stability of the boat structure buffer system to the boat structure 400 can be improved, the phenomenon that the boat structure 400 falls off can be avoided, and the boat structure cooling device 100 can be ensured to stably and rapidly cool the boat structure 400.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims (10)

1. A boat structure cooling device, comprising:

A housing including a main body portion and a support portion positioned at one side of the main body portion in a horizontal direction, the support portion having a support platform for supporting a boat structure;

The heat dissipation component is arranged on the supporting part and is positioned below the supporting platform, and the heat dissipation component is used for dissipating heat of the boat structure;

And the suction component is arranged on the main body part and is used for sucking out air flow below the supporting part.

2. The boat structure cooling device of claim 1 wherein the housing defines a first cavity and a second cavity therein, a baffle is provided within the housing, the baffle vertically separating the first cavity from the second cavity, the heat dissipating member is located within the first cavity, and the suction member is located within the second cavity.

3. The boat structure cooling device of claim 2, comprising an auxiliary heat sink located within the first cavity and on one side of the heat sink member, the auxiliary heat sink being configured to blow air toward an air intake end of the heat sink member.

4. The boat structure cooling device of claim 3 wherein the housing includes a first mounting plate, the first mounting plate being connected to the deflector, the first mounting plate being provided with a plurality of first mounting holes, one portion of the first mounting holes being for mounting the auxiliary heat sink, and another portion of the first mounting holes being for mounting the suction member.

5. The boat structure cooling device of claim 2, wherein the housing further has a third cavity inside the main body portion, the third cavity being in communication with both the first cavity and the second cavity, and a cooling mechanism being provided inside the third cavity, the cooling mechanism being capable of cooling the air flow generated by the heat radiating member and the suction member.

6. The boat structure cooling device of claim 5 wherein the cooling mechanism is a liquid cooling plate or a heat radiating fin.

7. The boat structure cooling device of any one of claims 2 to 6, wherein the upper end of the first cavity is open, the housing includes a second mounting plate, the second mounting plate is connected to the open end of the first cavity, the upper surface of the second mounting plate forms the support platform, a plurality of second mounting holes are formed in the second mounting plate, and one heat dissipation component is disposed in each second mounting hole.

8. A boat structure caching system, comprising:

A support frame;

The boat structure cooling device of any one of claims 1-7, wherein a plurality of boat structure cooling devices are provided, and a plurality of boat structure cooling devices are provided at intervals on the support frame.

9. The boat structure caching system of claim 8, further comprising a plurality of brackets on the support frame, the plurality of brackets being disposed in one-to-one correspondence with the plurality of boat structures, each bracket being configured to support the boat structure.

10. The boat structure buffering system of claim 9 wherein each of the brackets includes two sub-frames arranged in pairs, the two sub-frames arranged in pairs being connected to opposite sides of the boat structure cooling device housing.