CN212111821U - X-ray time evolution process measuring device - Google Patents
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Abstract
一种X射线时间演化过程测量装置,涉及X射线辐射流定量测量领域,所述X射线时间演化过程测量装置包括:脉冲展宽系统和信号处理系统,所述脉冲展宽系统包括加速区、漂移区和收集区,所述加速区用于对电子进行加速,且使得不同时间段进入所述加速区的电子的速度不同,所述漂移区用于使电子匀速运动,所述收集区用于收集电子;所述信号处理系统与所述收集区连接,用于通过展宽回推计算获得信号测量结果。所述X射线时间演化过程测量装置能够将信号展宽,然后通过展宽回推计算获得短脉冲信号的测量结果,从而实现高时间分辨的测量。
An X-ray time evolution process measurement device relates to the field of quantitative measurement of X-ray radiation flow, the X-ray time evolution process measurement device comprises: a pulse stretching system and a signal processing system, the pulse stretching system includes an acceleration zone, a drift zone and a collection area, the acceleration area is used to accelerate the electrons, and the speed of the electrons entering the acceleration area in different time periods is different, the drift area is used to make the electrons move at a uniform speed, and the collection area is used to collect the electrons; The signal processing system is connected to the collection area, and is used for obtaining signal measurement results through a spread-back calculation. The X-ray time evolution process measuring device can expand the signal, and then obtain the measurement result of the short pulse signal through the stretching back calculation, so as to realize the measurement with high time resolution.
Description
技术领域technical field
本实用新型涉及X射线辐射流定量测量领域,具体而言,涉及一种X射线时间演化过程测量装置。The utility model relates to the field of quantitative measurement of X-ray radiation flow, in particular to an X-ray time evolution process measurement device.
背景技术Background technique
在惯性约束激光聚变研究中,X光辐射流诊断目前采用两种互补技术测量。In inertial confinement laser fusion research, X-ray radiation flow diagnostics are currently measured using two complementary techniques.
一种技术是利用X射线二极管(XRD)阵列组成的软X光能谱仪,测量X光辐射流与辐射能谱。目前,通过能道响应可得到分辨为100ps量级的时间分辨能谱。One technique is to use a soft X-ray spectrometer composed of an X-ray diode (XRD) array to measure the X-ray radiation flux and radiation energy spectrum. At present, the time-resolved energy spectrum with a resolution of the order of 100ps can be obtained through the energy channel response.
另外一种技术是利用平响应膜配金阴极XRD构成的平响应探测器,该探测器也是基于XRD探测器进行测量的,其时间分辨与XRD阵列组成的软X光能谱仪一致。尽管该技术与装置在X射线时间演化测量中可实现定量测量,能满足研究需要,但是仍存在以下缺点:时间分辨不够高,无法满足更快信号的X射线时间演化过程的测量。Another technique is to use a flat-response detector composed of a flat-response film and gold cathode XRD. The detector is also measured based on an XRD detector, and its time resolution is consistent with that of a soft X-ray energy spectrometer composed of an XRD array. Although this technology and device can realize quantitative measurement in X-ray time evolution measurement, which can meet the research needs, there are still the following shortcomings: the time resolution is not high enough to meet the measurement of X-ray time evolution process of faster signals.
实用新型内容Utility model content
本实用新型的目的在于提供一种X射线时间演化过程测量装置,其能够将信号展宽,然后通过展宽回推计算获得短脉冲信号的测量结果,从而实现高时间分辨的测量。The purpose of the present invention is to provide an X-ray time evolution process measurement device, which can broaden the signal, and then obtain the measurement result of the short pulse signal through the stretching back calculation, thereby realizing the measurement with high time resolution.
本实用新型是这样实现的:The utility model is realized in this way:
一种X射线时间演化过程测量装置,包括:脉冲展宽系统和信号处理系统,其中:An X-ray time evolution process measurement device, comprising: a pulse stretching system and a signal processing system, wherein:
所述脉冲展宽系统包括加速区、漂移区和收集区,所述加速区用于对电子进行加速,且使得不同时间段进入所述加速区的电子的速度不同,所述漂移区用于使电子匀速运动,所述收集区用于收集电子。The pulse stretching system includes an acceleration zone, a drift zone and a collection zone, the acceleration zone is used to accelerate electrons, and the speed of electrons entering the acceleration zone in different time periods is different, and the drift zone is used to make the electrons Moving at a uniform speed, the collection area is used to collect electrons.
所述信号处理系统与所述收集区连接,用于通过展宽回推计算获得信号测量结果。The signal processing system is connected to the collection area, and is used for obtaining signal measurement results through spread-back calculation.
在一种可行实施方案中,所述脉冲展宽系统包括磁聚焦管,所述磁聚焦管内形成磁聚焦飞行区,所述加速区、所述漂移区与所述收集区均位于所述磁聚焦飞行区。In a feasible embodiment, the pulse stretching system includes a magnetic focusing tube, and a magnetic focusing flight zone is formed in the magnetic focusing tube, and the acceleration zone, the drift zone and the collection zone are all located in the magnetic focusing flight zone Area.
在一种可行实施方案中,所述磁聚焦管内设置有阴极板和阳极栅网,所述阴极板与所述阳极栅网在斜坡偏压的作用下产生射频激励时变电场,以形成所述加速区。In a feasible embodiment, a cathode plate and an anode grid are arranged in the magnetic focusing tube, and the cathode plate and the anode grid generate a time-varying electric field excited by radio frequency under the action of a ramp bias, so as to form the the acceleration zone.
在一种可行实施方案中,所述阴极板为平响应透射阴极板。In one possible embodiment, the cathode plate is a flat response transmissive cathode plate.
在一种可行实施方案中,所述磁聚焦管内设置后端栅网,所述阳极栅网与所述后端栅网均接地,所述阳极栅网与所述后端栅网之间形成所述漂移区。In a feasible embodiment, a rear-end grid is arranged in the magnetic focusing tube, the anode grid and the rear-end grid are both grounded, and a gap is formed between the anode grid and the rear-end grid. the drift region.
在一种可行实施方案中,所述磁聚焦管内设置有电子收集器,所述电子收集器与示波器连接。In a feasible implementation, an electron collector is arranged in the magnetic focusing tube, and the electron collector is connected to an oscilloscope.
在一种可行实施方案中,所述电子收集器为反射式X射线二极管。In a possible embodiment, the electron collector is a reflective X-ray diode.
在一种可行实施方案中,所述X射线时间演化过程测量装置还包括偏压T型隔离器,所述电子收集器与所述示波器之间通过所述偏压T型隔离器连接。In a feasible implementation, the X-ray time evolution process measurement device further includes a biased T-type isolator, and the electron collector and the oscilloscope are connected through the biased T-type isolator.
在一种可行实施方案中,所述偏压T型隔离器包括RC隔直电路。In one possible implementation, the biased T-type isolator includes an RC blocking circuit.
在一种可行实施方案中,所述X射线时间演化过程测量装置还包括信号发生器,所述信号发生器分别与所述阴极板和所述阳极栅网连接,以为所述阴极板与所述阳极栅网施加斜坡偏压。In a feasible embodiment, the X-ray time evolution process measurement device further comprises a signal generator, the signal generator is respectively connected with the cathode plate and the anode grid, so as to connect the cathode plate with the anode grid. The anode grid applies a ramp bias.
本实用新型的有益效果至少包括:The beneficial effects of the present utility model at least include:
在使用过程中,X射线在形成光电子后进入加速区,在加速区内,不同时间段进入加速区的光电子的速度不同,在光电子漂移一端时间后进入收集区,于是收集到的信号波形相对入射的信号波形在时域宽度被展宽,从而实现电子脉冲的时间被放大。时域展宽后的信号波形被传递到信号处理系统,信号处理系统通过展宽回推计算获得信号测量结果。During use, X-rays enter the acceleration zone after forming photoelectrons. In the acceleration zone, the photoelectrons entering the acceleration zone at different time periods have different speeds, and enter the collection zone after the photoelectrons drift for a period of time, so the collected signal waveform is relatively incident. The signal waveform is broadened in the time domain width, so that the time of the electronic pulse is amplified. The signal waveform after time domain expansion is transmitted to the signal processing system, and the signal processing system obtains the signal measurement result through the stretching back calculation.
本申请提供的X射线时间演化过程测量装置将短脉冲信号展宽,再通过展宽回推计算即可以获得短脉冲信号测量结果,从而实现了高时间分辨的测量。The X-ray time evolution process measurement device provided by the present application broadens the short pulse signal, and then the measurement result of the short pulse signal can be obtained through the stretching back calculation, thereby realizing the measurement with high time resolution.
附图说明Description of drawings
为了更清楚地说明本实用新型实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,应当理解,以下附图仅示出了本实用新型的某些实施例,因此不应被看作是对范围的限定,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他相关的附图。In order to illustrate the technical solutions of the embodiments of the present invention more clearly, the accompanying drawings that need to be used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention. Therefore, it should not be regarded as a limitation of the scope. For those of ordinary skill in the art, other related drawings can also be obtained from these drawings without any creative effort.
图1为本实用新型实施例提供的X射线时间演化过程测量装置中脉冲展宽系统的结构示意图一;1 is a schematic structural diagram one of a pulse stretching system in an X-ray time evolution process measurement device provided by an embodiment of the present invention;
图2为本实用新型实施例提供的X射线时间演化过程测量装置中脉冲展宽系统的结构示意图二;2 is a second structural schematic diagram of a pulse stretching system in an X-ray time evolution process measurement device provided by an embodiment of the present invention;
图3为本实用新型实施例提供的X射线时间演化过程测量装置的结构示意图;3 is a schematic structural diagram of an X-ray time evolution process measurement device provided by an embodiment of the present utility model;
图4为本实用新型实施例提供的X射线时间演化过程测量装置中施加在加速区的斜坡偏压的波形图。FIG. 4 is a waveform diagram of a ramp bias applied to an acceleration region in an X-ray time evolution process measurement device provided by an embodiment of the present invention.
图中:In the picture:
110-加速区;110 - acceleration zone;
120-漂移区;120 - drift zone;
130-收集区;130 - Collection area;
140-磁聚焦飞行区;140 - Magnetic focus flight zone;
150-磁聚焦管;150 - Magnetic focusing tube;
151-阴极板;151 - cathode plate;
152-阳极栅网;152 - Anode grid;
153-后端栅网;153 - rear grid;
154-电子收集器;154 - Electron collector;
160-偏压T型隔离器;160-biased T-type isolator;
170-示波器;170 - oscilloscope;
200-信号发生器。200 - Signal generator.
具体实施方式Detailed ways
为使本实用新型实施例的目的、技术方案和优点更加清楚,下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本实用新型一部分实施例,而不是全部的实施例。通常在此处附图中描述和示出的本实用新型实施例的组件可以通过各种不同的配置来布置和设计。In order to make the purposes, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. The embodiments described above are a part of the embodiments of the present invention, but not all of the embodiments. The components of the embodiments of the invention generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations.
因此,以下对在附图中提供的本实用新型的实施例的详细描述并非旨在限制要求保护的本实用新型的范围,而是仅仅表示本实用新型的选定实施例。基于本实用新型中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本实用新型保护的范围。Accordingly, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.
应注意到:相似的标号和字母在下面的附图中表示类似项,因此,一旦某一项在一个附图中被定义,则在随后的附图中不需要对其进行进一步定义和解释。It should be noted that like numerals and letters refer to like items in the following figures, so once an item is defined in one figure, it does not require further definition and explanation in subsequent figures.
在本实用新型的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,或者是该实用新型产品使用时惯常摆放的方位或位置关系,仅是为了便于描述本实用新型和简化描述,而不是指示或暗示所指的X射线时间演化过程测量装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制。此外,术语“第一”、“第二”、“第三”等仅用于区分描述,而不能理解为指示或暗示相对重要性。In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner" and "outer" The orientation or positional relationship indicated by etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that is usually placed when the utility model product is used, only for the convenience of describing the present utility model and simplifying the description, not Indicating or implying that the X-ray time evolution process measuring device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first", "second", "third", etc. are only used to differentiate the description and should not be construed as indicating or implying relative importance.
此外,术语“水平”、“竖直”、“悬垂”等术语并不表示要求部件绝对水平或悬垂,而是可以稍微倾斜。如“水平”仅仅是指其方向相对“竖直”而言更加水平,并不是表示该结构一定要完全水平,而是可以稍微倾斜。Furthermore, the terms "horizontal", "vertical", "overhanging" etc. do not imply that a component is required to be absolutely horizontal or overhang, but rather may be slightly inclined. For example, "horizontal" only means that its direction is more horizontal than "vertical", it does not mean that the structure must be completely horizontal, but can be slightly inclined.
在本实用新型的描述中,还需要说明的是,除非另有明确的规定和限定,术语“设置”、“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本实用新型中的具体含义。In the description of the present invention, it should also be noted that, unless otherwise expressly specified and limited, the terms "arrangement", "installation", "connection" and "connection" should be understood in a broad sense, for example, it may be a fixed connection It can also be a detachable connection or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or the internal communication between the two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.
下面结合附图,对本实用新型的一些实施方式作详细说明。在不冲突的情况下,下述的实施例及实施例中的特征可以相互组合。Some embodiments of the present utility model will be described in detail below with reference to the accompanying drawings. The embodiments described below and features in the embodiments may be combined with each other without conflict.
第一实施例first embodiment
请参照图1-图3所示,本实施例提供一种X射线时间演化过程测量装置,包括:脉冲展宽系统和信号处理系统,其中:Referring to FIG. 1 to FIG. 3 , this embodiment provides an X-ray time evolution process measurement device, including: a pulse stretching system and a signal processing system, wherein:
脉冲展宽系统包括加速区110、漂移区120和收集区130,加速区110用于对电子进行加速,且使得不同时间段进入加速区110的电子的速度不同,漂移区120用于使电子匀速运动,收集区130用于收集电子。The pulse stretching system includes an
信号处理系统与收集区130连接,用于通过展宽回推计算获得信号测量结果。The signal processing system is connected to the
该装置利用脉冲展宽技术将短脉冲信号展宽,再结合现有XRD诊断技术,通过展宽回推计算即可以获得短脉冲信号测量结果,从而实现了高时间分辨的测量。The device uses pulse broadening technology to broaden the short pulse signal, and combined with the existing XRD diagnosis technology, the measurement result of the short pulse signal can be obtained through the stretching back calculation, thereby realizing the measurement with high time resolution.
假设被测量信号脉冲宽度为20ps,脉冲展宽10倍,则展宽后的信号脉宽为200ps,那么利用现有100ps时间分辨的诊断设备具有足够的能力测量展宽后的信号。Assuming that the pulse width of the measured signal is 20 ps and the pulse width is 10 times, the pulse width of the extended signal is 200 ps, then the existing 100 ps time-resolved diagnostic equipment has sufficient capability to measure the extended signal.
如图1所示,脉冲展宽系统包括磁聚焦管150,磁聚焦管150内形成磁聚焦飞行区140,加速区110、漂移区120与收集区130均位于磁聚焦飞行区140。As shown in FIG. 1 , the pulse stretching system includes a magnetic focusing
如图2所示,磁聚焦管150内设置有阴极板151和阳极栅网152,阴极板151与阳极栅网152在斜坡偏压的作用下产生射频激励时变电场,以形成加速区110。As shown in FIG. 2 , the magnetic focusing
X射线的辐射刘信号与阴极板151相互作用发射出光电子,光电子进入阴极板151和阳极栅网152之间的加速区110,由于阴极板151与阳极栅网152在斜坡偏压的作用下产生射频激励时变电场,该电场的强度是随时间下降的,于是不同时刻产生的光电子即获得不同的速度,越早产生的光电子速度越大,越晚产生的光电子速度越小。The X-ray radiation signal interacts with the
对于短脉冲输入信号,优化加速区110的时变电压,控制光脉冲与阴极板151激励电脉冲的相对时间关系,可减小进入时刻差异引入的展宽倍率差异,实现准线性展宽。具体地,使得X射线同步在斜坡偏压脉冲信号的上升沿,进而使得先发射的光电子较后面的光电子获得更大的能量,从而使得前面的光电子的速度更快。For short-pulse input signals, optimizing the time-varying voltage of the
进一步地,磁聚焦管150内设置后端栅网153,为避免收集区130产生感应电流,阳极栅网152与后端栅网153均接地,即使得阳极栅网152与后端栅网153的电势相同,阳极栅网152与后端栅网153之间形成漂移区120。经由加速区110加速后的光电子带着不同的轴向初始速度进入漂移区120,光电子在漂移区120做匀速漂移,由于光电子的轴向初始速度不同,因此其漂移时间不同。Further, a rear-
在一种可行实施方案中,后端栅网153为XRD栅网。In one possible embodiment, the
在一种可行实施方案中,磁聚焦管150内设置有电子收集器154,电子收集器154与示波器170连接。电子收集器154收集电子后输出至示波器170,以通过示波器170输出信号波形。In a possible embodiment, an
具体实施时,优选地,阴极板151选用平响应透射阴极板。由于所采用的阴极板151为平相应投射阴极板,因此通过标定可容易得到示波器170记录的信号强度与X射线辐射流的试剂总量之间的对应关系,从而可通过示波器170记录的信号反推处X射线辐射流的大小。During specific implementation, preferably, the
在本实施例中,电子收集器154采用电子收集电极。In this embodiment, the
优选地,电子收集器154采用反射式XRD。Preferably, the
如图3所示,进一步地,X射线时间演化过程测量装置还包括偏压T型隔离器160,电子收集器154与示波器170之间通过偏压T型隔离器160连接。偏压T型隔离器160施加偏压至反射式XRD。As shown in FIG. 3 , further, the X-ray time evolution process measurement device further includes a biased T-
优选地,偏压T型隔离器160包括RC隔直电路,保证正偏压施加在输出头,同时不影响脉冲信号的输出。Preferably, the bias T-
在一种可行实施方案中,X射线时间演化过程测量装置还包括信号发生器200,信号发生器200分别与阴极板151和阳极栅网152连接,以为阴极板151与阳极栅网152施加斜坡偏压。In a feasible embodiment, the X-ray time evolution process measurement device further includes a
如图3和图4所示,本实施例提供一组实验,实验在短脉冲激光装置上开展,利用266nm波长的脉冲光作为探测信号。在本实验中,短脉冲激光由信号发生器200产生,且信号发生器200用于为阴极板151和阳极栅网152提供斜坡偏压脉冲。阳极栅网152与后端栅网153均接地,在后端栅网153背离阳极栅网152的一侧设置有电子收集器154,电子收集器154采用反射式XRD,为了保证反射式XRD的时间分辨,需要施加1500V偏压。反射式XRD的偏压施加方式需要借助偏压T型隔离器160。偏压T型隔离器160为RC隔直电路,保证正偏压施加在输出头,同时不影响脉冲信号的输出。反射式XRD的信号输出至示波器170。As shown in FIG. 3 and FIG. 4 , this embodiment provides a set of experiments, and the experiments are carried out on a short-pulse laser device, using pulsed light with a wavelength of 266 nm as a detection signal. In this experiment, the short-pulse laser is generated by the
具体地,图3中的信号发生装置提供266nm波长的短脉冲激光,短脉冲激光照射至平响应投射阴极板,在阴极板151处产生光电子,光电子在加速区110(即斜坡偏压电场)内运动,从而使得不同时期进入加速区110的光电子产生不同的初始速度。不同初始速度的光电子在磁聚焦飞行区140的漂移区120匀速移动一定距离后,最后被电子收集器154接收,并输出至示波器170。电子收集器154采用反射式XRD即可保证时间分辨。Specifically, the signal generating device in FIG. 3 provides a short-pulse laser with a wavelength of 266 nm, and the short-pulse laser is irradiated to the flat response projection cathode plate, and photoelectrons are generated at the
X射线时间演化过程测量装置的时间分辨达到100ps。对于脉宽为8ps的信号,预设展宽倍率M=10。根据脉冲展宽公式:The time resolution of the X-ray time evolution process measurement device reaches 100ps. For a signal with a pulse width of 8ps, the preset stretching magnification M=10. According to the pulse stretching formula:
其中,t1为第一个电子进入加速区的时间,t2为最后一个电子进入加速区的时间,t′1为第一个电子由加速区射出的时间,t2′为最后一个电子由加速区射出的时间,e为电子电量,m为电子质量,k为脉冲偏压源斜坡上升斜率,U0为初始电压,s为电子漂移距离。Among them, t 1 is the time when the first electron enters the acceleration zone, t 2 is the time when the last electron enters the acceleration zone, t' 1 is the time when the first electron is ejected from the acceleration zone, and t 2 ' is the time when the last electron is emitted by the acceleration zone. The ejection time of the acceleration zone, e is the electron quantity, m is the electron mass, k is the ramp-up slope of the pulse bias source, U 0 is the initial voltage, and s is the electron drift distance.
如图4所示,现有k=40V/ps,U0=-4000V。假设电子进入时刻t1=25ps,则s=42mm即可满足展宽需要。为了保证测量效果,将预设展宽倍率提升至100,其它条件不变,电子漂移距离增大到420mm即可。As shown in FIG. 4 , the existing k=40V/ps, U0 = -4000V. Assuming that the electron enters the time t 1 =25ps, then s=42mm can meet the need of widening. In order to ensure the measurement effect, increase the preset magnification to 100, other conditions remain unchanged, and the electronic drift distance can be increased to 420mm.
对于上述短脉冲输入信号,可优化加速区110的时变电压,来控制光脉冲与阴极板151被施加的激励电脉冲的相对时间关系,从而减小进入时刻差异引入的展宽倍率差异,实现准线性展宽。For the above short pulse input signal, the time-varying voltage of the
具体地,使得X射线同步在斜坡偏压脉冲信号的上升沿,例如,在图4中电子进入时刻可控制在0-100ps之间、100ps-200ps之间或200ps-300ps之间等多个上升区间,在这些时间段内,先发射的光电子较后面的光电子获得更大的能量,从而使先发射的光电子的速度更快。Specifically, the X-ray synchronization is made on the rising edge of the ramp bias pulse signal. For example, in FIG. 4, the electron entry time can be controlled to be between 0-100ps, 100ps-200ps, or 200ps-300ps and other rising intervals. , during these time periods, the photoelectrons that are emitted first gain more energy than the photoelectrons that are later, making the photoelectrons emitted first to travel faster.
以上所述仅为本实用新型的优选实施例而已,并不用于限制本实用新型,对于本领域的技术人员来说,本实用新型可以有各种更改和变化。凡在本实用新型的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本实用新型的保护范围之内。The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. For those skilled in the art, the present utility model may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
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