CN211956009U - An optical system with an annular light spot - Google Patents
An optical system with an annular light spot Download PDFInfo
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- CN211956009U CN211956009U CN202020091614.6U CN202020091614U CN211956009U CN 211956009 U CN211956009 U CN 211956009U CN 202020091614 U CN202020091614 U CN 202020091614U CN 211956009 U CN211956009 U CN 211956009U
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Abstract
本实用新型属于激光加工领域,公开了一种环形光斑的光学系统,包括依次沿光路设置的准直单元、相位调制单元和聚焦单元,相位调制单元包括位于光路内的至少一个螺旋相位板;激光束经位于光路内的螺旋相位板能够被附加上螺旋相位因子实现相位调制,使激光束的能量分布变为环形分布。进一步的,可以将螺旋相位板设置在旋转轴上,通过绕旋转轴旋转切换位于光路内与位于光路外的状态,如此通过切换各个螺旋相位板能够实现可变环形光斑。本实用新型通过对光学系统的组件及各个组件之间的配合作用方式等进行改进,能够获得能量分布集中在边缘,直径更大,焦深更长的环形光斑,进一步的光斑的大小可调,适用于激光切割等多种激光加工领域。
The utility model belongs to the field of laser processing, and discloses an optical system of an annular light spot, which comprises a collimation unit, a phase modulation unit and a focusing unit sequentially arranged along an optical path, wherein the phase modulation unit comprises at least one spiral phase plate located in the optical path; The beam can be modulated by adding a helical phase factor through the helical phase plate located in the optical path, so that the energy distribution of the laser beam becomes a circular distribution. Further, the spiral phase plate can be arranged on the rotation axis, and the state of being in the optical path and the state of being located outside the optical path can be switched by rotating around the rotation axis, so that a variable annular light spot can be realized by switching each spiral phase plate. By improving the components of the optical system and the way of cooperation between the components, the utility model can obtain an annular light spot with energy distribution concentrated at the edge, larger diameter and longer focal depth, and the size of the further light spot can be adjusted. It is suitable for various laser processing fields such as laser cutting.
Description
技术领域technical field
本实用新型属于激光加工领域,更具体地,涉及一种环形光斑的光学系统。The utility model belongs to the field of laser processing, and more particularly relates to an optical system of an annular light spot.
背景技术Background technique
普通高斯能量分布的光斑,大部分能量是集中在中心部位,而环形能量分布的光斑能量分布在四周,中心的能量低。这种能量分布的光斑在进行激光切割、打标、熔覆及微型加工等领域有很大的优势。In the light spot of ordinary Gaussian energy distribution, most of the energy is concentrated in the center, while the energy of the light spot with annular energy distribution is distributed around, and the energy in the center is low. The light spot with this energy distribution has great advantages in the fields of laser cutting, marking, cladding and micromachining.
当使用高斯能量分布的光斑进行激光加工时,中心能量过高可能出现烧蚀等现象,而由于边缘的能量不足,在进行激光切割等深度加工时,加工深度越深,边缘的能量就更加不足,从而导致切割断面不平整。采用环形能量分布的光斑就可以有效解决这些问题,环形分布对比与高斯分布,在能量上分布得更为均匀,并且环形光斑的能量分布在边缘,在进行激光的厚板切割时可以有效避免边缘能量不足而造成的断面不平整的问题。现有技术中产生环形光束的主要方法有计算全息法,根据计算全息的原理,利用空间光调制器产生环形光束,通过设计全息图样可以产生任意空间分布的环形光束。这种方式存在一定的损伤阈值,并且由于能量的损耗以及光束的衍射作用,其环形光束的转换效率不高。When laser processing is performed using a spot with a Gaussian energy distribution, if the center energy is too high, ablation and other phenomena may occur. However, due to insufficient energy at the edge, when deep processing such as laser cutting is performed, the deeper the processing depth, the more insufficient the energy at the edge. , resulting in uneven cutting section. These problems can be effectively solved by using the light spot with annular energy distribution. Compared with the Gaussian distribution, the annular distribution is more evenly distributed in energy, and the energy of the annular light spot is distributed at the edge, which can effectively avoid the edge when cutting thick plates by laser. The problem of uneven section caused by insufficient energy. The main method for generating a ring beam in the prior art is a computational holography method. According to the principle of computational holography, a spatial light modulator is used to generate a ring beam, and a ring beam with arbitrary spatial distribution can be generated by designing a holographic pattern. This method has a certain damage threshold, and the conversion efficiency of the ring beam is not high due to the loss of energy and the diffraction of the beam.
实用新型内容Utility model content
针对现有技术的以上缺陷或改进需求,本实用新型的目的在于提供一种环形光斑的光学系统,尤其是一种可变环形光斑的光学系统,其中通过对光学系统的组件及各个组件之间的配合作用方式等进行改进,能够获得能量分布集中在边缘,直径更大,焦深更长的环形光斑;并且,通过进一步设置旋转轴以调控插入光路中的数量及拓扑荷数,能够改变光斑直径,实现光斑的大小可调,适用于激光切割等多种激光加工领域。激光光束经过准直单元的准直,从相位调制单元中的螺旋相位板一端(如平面端)入射,出射光束被附加相应拓扑荷数的螺旋相位因子,变为环形光束,最后通过聚焦单元的得到环形能量分布的环形光斑。本实用新型可以通过螺旋相位板产生环形光斑,在激光加工技术上具有重大意义,并且可以进一步自主调节螺旋相位板的数量,实现环形聚焦光斑的拓扑荷数可变,在加工不同材料时可根据需求灵活调整。In view of the above defects or improvement requirements of the prior art, the purpose of the present invention is to provide an optical system with an annular light spot, especially an optical system with a variable annular light spot, in which the components of the optical system and the gaps between the components are adjusted. By improving the way of cooperation, etc., the annular light spot with energy distribution concentrated on the edge, larger diameter and longer focal depth can be obtained; and by further setting the rotation axis to adjust the number of inserted light paths and the number of topological charges, the light spot can be changed. The diameter of the light spot can be adjusted, and it is suitable for various laser processing fields such as laser cutting. The laser beam is collimated by the collimating unit and incident from one end of the spiral phase plate (such as the plane end) in the phase modulation unit. A ring-shaped light spot with a ring-shaped energy distribution is obtained. The utility model can generate an annular light spot through a spiral phase plate, which is of great significance in laser processing technology, and can further independently adjust the number of spiral phase plates to realize variable topological charge of the annular focusing spot, and can be processed according to different materials. Flexibility to adjust needs.
为实现上述目的,按照本实用新型的一个方面,提供了一种环形光斑的光学系统,其特征在于,包括依次沿光路设置的准直单元、相位调制单元和聚焦单元,其中,In order to achieve the above object, according to one aspect of the present utility model, an optical system of annular light spot is provided, which is characterized in that it includes a collimation unit, a phase modulation unit and a focusing unit arranged along the optical path in sequence, wherein,
所述准直单元用于对输入激光进行准直处理,得到准直激光束;The collimating unit is used for collimating the input laser to obtain a collimated laser beam;
所述相位调制单元包括位于光路内的至少一个螺旋相位板;任意一个所述螺旋相位板包括两个端面,其中一个端面为平面结构,另一个端面为具有螺旋形状台阶的相对面;并且,对于任意一个螺旋相位板,该螺旋相位板的中心轴线与准直激光束的光束中心相重合,激光束均能够由对应螺旋相位板的平面端面入射或者均能够由对应螺旋相位板的台阶端面入射,经螺旋相位板被附加上螺旋相位因子以进行相位调制,使激光束的能量分布变为环形分布;所述相位调制单元整体通过所述螺旋相位板的作用能够对所述准直激光束的相位进行调制,从而出射得到相位被改变的激光束;The phase modulation unit includes at least one spiral phase plate located in the optical path; any one of the spiral phase plates includes two end surfaces, one of which is a plane structure, and the other end surface is an opposite surface with a spiral shape step; and, for For any spiral phase plate, the central axis of the spiral phase plate coincides with the beam center of the collimated laser beam, and the laser beam can be incident from the plane end face of the corresponding spiral phase plate or can be incident from the stepped end face of the corresponding spiral phase plate, A helical phase factor is added to the helical phase plate for phase modulation, so that the energy distribution of the laser beam becomes a circular distribution; the phase modulation unit as a whole can adjust the phase of the collimated laser beam through the action of the helical phase plate. Modulation is performed to obtain a laser beam whose phase is changed;
所述聚焦单元则用于对所述相位被改变的激光束进行聚焦,从而得到环形光斑。The focusing unit is used for focusing the phase-changed laser beam to obtain an annular light spot.
作为本实用新型的进一步优选,在所述准直单元之前,还设置有激光器,该激光器出射的激光作为所述准直单元的输入激光,该激光器出射的激光为光强呈高斯分布的激光。As a further preference of the present invention, a laser is further provided before the collimating unit, the laser output from the laser is used as the input laser of the collimating unit, and the laser output from the laser is a laser with a Gaussian distribution of light intensity.
作为本实用新型的进一步优选,所述螺旋相位板为多个,对于任意一个拓扑荷数为l螺旋相位板,绕光轴一周的相位改变为2π×l。As a further preference of the present invention, there are multiple spiral phase plates, and for any spiral phase plate whose topological charge number is 1, the phase change around the optical axis is 2π×1.
作为本实用新型的进一步优选,所述准直单元包括配合使用的透镜组。As a further preference of the present invention, the collimating unit includes a lens group used in conjunction.
作为本实用新型的进一步优选,所述聚焦单元包括配合使用的透镜组。As a further preference of the present invention, the focusing unit includes a lens group used in conjunction with it.
按照本实用新型的另一方面,提供了一种可变环形光斑的光学系统,其特征在于,包括依次沿光路设置的准直单元、相位调制单元和聚焦单元,其中,According to another aspect of the present invention, an optical system with variable annular light spot is provided, which is characterized by comprising a collimation unit, a phase modulation unit and a focusing unit sequentially arranged along the optical path, wherein,
所述准直单元用于对输入激光进行准直处理,得到准直激光束;The collimating unit is used for collimating the input laser to obtain a collimated laser beam;
所述相位调制单元包括位于旋转轴上的若干个螺旋相位板,这些螺旋相位板能够通过绕所述旋转轴旋转切换位于光路内与位于光路外的状态;任意一个所述螺旋相位板包括两个端面,其中一个端面为平面结构,另一个端面为具有螺旋形状台阶的相对面;并且,对于任意一个螺旋相位板,当它被旋转至位于光路内的状态时,该螺旋相位板的中心轴线与准直激光束的光束中心相重合,激光束均能够由对应螺旋相位板的平面端面入射或者均能够由对应螺旋相位板的台阶端面入射,经螺旋相位板被附加上螺旋相位因子以进行相位调制,使激光束的能量分布变为环形分布;所述相位调制单元整体通过所述螺旋相位板的作用能够对所述准直激光束的相位进行调制,从而出射得到相位被改变的激光束;The phase modulation unit includes several helical phase plates located on the rotating shaft, and these helical phase plates can be rotated around the rotating shaft to switch the state of being located in the optical path and being located outside the optical path; any one of the helical phase plates includes two. End faces, one end face is a plane structure, and the other end face is an opposite face with a spiral shape step; and, for any spiral phase plate, when it is rotated to the state of being located in the optical path, the central axis of the spiral phase plate is the same as that of the spiral phase plate. The beam centers of the collimated laser beams are coincident, and the laser beams can be incident from the plane end face of the corresponding helical phase plate or can be incident from the stepped end face of the corresponding helical phase plate, and the helical phase factor is added to the helical phase plate for phase modulation. , so that the energy distribution of the laser beam becomes an annular distribution; the phase modulation unit as a whole can modulate the phase of the collimated laser beam through the action of the spiral phase plate, so as to emit a laser beam whose phase is changed;
所述聚焦单元则用于对所述相位被改变的激光束进行聚焦,从而得到环形光斑;The focusing unit is used for focusing the phase-changed laser beam to obtain a ring-shaped light spot;
该可变环形光斑光学系统能够通过切换各个螺旋相位板位于光路内与位于光路外的状态,实现可变环形光斑。The variable annular light spot optical system can realize the variable annular light spot by switching the states of each spiral phase plate in the optical path and outside the optical path.
作为本实用新型的进一步优选,在所述准直单元之前,还设置有激光器,该激光器出射的激光作为所述准直单元的输入激光,该激光器出射的激光为光强呈高斯分布的激光。As a further preference of the present invention, a laser is further provided before the collimating unit, the laser output from the laser is used as the input laser of the collimating unit, and the laser output from the laser is a laser with a Gaussian distribution of light intensity.
作为本实用新型的进一步优选,所述螺旋相位板为多个,对于任意一个拓扑荷数为l螺旋相位板,绕光轴一周的相位改变为2π×l。As a further preference of the present invention, there are multiple spiral phase plates, and for any spiral phase plate whose topological charge number is 1, the phase change around the optical axis is 2π×1.
作为本实用新型的进一步优选,所述准直单元包括配合使用的透镜组。As a further preference of the present invention, the collimating unit includes a lens group used in conjunction.
作为本实用新型的进一步优选,所述聚焦单元包括配合使用的透镜组。As a further preference of the present invention, the focusing unit includes a lens group used in conjunction with it.
通过本实用新型所构思的以上技术方案,与现有技术相比,针对高斯能量分布的聚焦光斑在激光加工中能量集中而边缘能量不足的问题,本实用新型首次用螺旋相位板这种光学元件产生环形聚焦光斑。本实用新型首次将现有技术中的常规光学元件——螺旋相位板,应用于激光加工,产生环形光斑的相关应用;并且进一步的,通过控制插入光路中的螺旋相位板的个数即可调节最终输出激光束的拓扑荷数。而本实用新型利用螺旋相位板产生环形光束,这种方式易于实现,螺旋相位板的台阶高度通常为微米量级,并且初始光束都是通过扩束系统扩束的,基本没有发散,因此,螺旋相位板对光束光强基本没有衰减,而只是改变光束的相位,对于单色性好的光源,产生的环形光束纯度更高。Through the above technical solutions conceived by the present utility model, compared with the prior art, the present utility model uses an optical element such as a spiral phase plate for the first time to solve the problem that the focused spot with Gaussian energy distribution is concentrated in energy and the edge energy is insufficient during laser processing. Produces a circular focused spot. The utility model applies the conventional optical element in the prior art—the spiral phase plate for the first time to the related application of laser processing to generate annular light spots; and further, the adjustment can be achieved by controlling the number of spiral phase plates inserted into the optical path. The topological charge of the final output laser beam. However, the present invention uses a spiral phase plate to generate a ring beam, which is easy to implement. The step height of the spiral phase plate is usually in the order of microns, and the initial beam is expanded by the beam expansion system, and there is basically no divergence. The phase plate basically does not attenuate the light intensity of the beam, but only changes the phase of the beam. For a light source with good monochromaticity, the purity of the ring beam generated is higher.
本实用新型利用螺旋相位板构建相位调制单元,这些螺旋相位板,与现有技术相一致,是一种具有固定折射率的透明板,其一面是平面结构,相对面具有螺旋形状结构(类似于旋转台阶);螺旋相位板其厚度随着方位角的变化而变化。激光光束通过螺旋相位板后,由于在不同方位角走过的光程不同,从而使得出射光束的相位发生相应变化,出射光束被附加一个螺旋相位因子exp(ilθ),其中l为螺旋相位板的拓扑荷数,i代表复数符号,从而变为环形光束。The utility model utilizes spiral phase plates to construct a phase modulation unit. These spiral phase plates are consistent with the prior art and are transparent plates with a fixed refractive index. Rotation steps); helical phase plates whose thickness varies with azimuth angle. After the laser beam passes through the spiral phase plate, the phase of the outgoing beam changes accordingly due to the different optical paths at different azimuth angles, and a spiral phase factor exp(ilθ) is added to the outgoing beam, where l is the helical phase plate. The topological charge number, i represents the complex sign, thus becoming a ring beam.
当螺旋相位板的折射率、厚度参数以及入射光的波长确定以后,得到的环形光束的拓扑荷数也就随之确定,不能灵活调节;因此本实用新型进一步提出了一种更为优选的环形光斑大小可变的光学系统。也就是说,由于一块螺旋相位板当折射率和厚度参数确定以后,只能产生一种拓扑荷数的环形光斑,鉴于此本实用新型通过设计旋转轴能够灵活切换某个螺旋相位板位于光路内与位于光路外的状态,如此,基于环形光束的拓扑荷数叠加原理,利用多块螺旋相位板产生不同拓扑荷数的环形聚焦光斑,进而实现了环形光斑大小可变。When the refractive index, thickness parameters of the spiral phase plate and the wavelength of the incident light are determined, the topological charge of the obtained annular beam is also determined, which cannot be flexibly adjusted; therefore, the present utility model further proposes a more preferred annular beam. Optical system with variable spot size. That is to say, since a helical phase plate can only generate an annular light spot with a topological charge after the refractive index and thickness parameters are determined, the present invention can flexibly switch a certain helical phase plate to be located in the optical path by designing the rotation axis. In this way, based on the superposition principle of the topological charges of the ring beam, multiple helical phase plates are used to generate ring focused spots with different topological charges, thereby realizing the variable size of the ring spot.
相位调制单元中的螺旋相位板,需要保持光束从螺旋相位板的平面端(或台阶端)入射;当相位调制单元中的螺旋相位板被插入光路(即,被旋转至位于光路内的状态)时,螺旋相位板中心必须和激光束中心对准。高斯分布的激光束从每个螺旋相位板的平面端面或每个螺旋相位板的台阶端面入射,光束中心与螺旋相位板中心对齐,出射的光束相位被改变,附加一个螺旋相位因子,能量分布变为环形分布,最后经过聚焦得到环形光斑。The spiral phase plate in the phase modulation unit needs to keep the light beam incident from the flat end (or step end) of the spiral phase plate; when the spiral phase plate in the phase modulation unit is inserted into the optical path (that is, rotated to a state in the optical path) , the center of the spiral phase plate must be aligned with the center of the laser beam. The laser beam with Gaussian distribution is incident from the plane end face of each helical phase plate or the stepped end face of each helical phase plate, the center of the beam is aligned with the center of the helical phase plate, the phase of the outgoing beam is changed, and a helical phase factor is added, and the energy distribution changes. It is a ring-shaped distribution, and finally a ring-shaped light spot is obtained by focusing.
该可变环形光斑的光学系统得到的环形光斑的大小受拓扑荷数影响,拓扑荷数越大,得到的环形光斑能量凹陷的区域越大,光斑直径也越大。本实用新型通过设置位于旋转轴上的若干个螺旋相位板,可以叠加插入系统的螺旋相位片,来改变拓扑荷数,实现环形光斑的可变可调。也就是说,基于本实用新型,通过调整位于光路内的螺旋相位板的数量,可以调节光斑大小。可变环形光斑光学系统中的相位调制单元是由若干块螺旋相位板固定在一个旋转轴上,螺旋相位板可以在旋转轴上通过旋转插入光路或是从光路中移除(即,切换位于光路内与位于光路外的状态)。当任意一个螺旋相位板被插入光路时,螺旋相位板的中心在系统中能够与准直单元和聚焦单元对准。The size of the annular light spot obtained by the optical system of the variable annular light spot is affected by the topological charge, and the larger the topological charge, the larger the energy concave area of the obtained annular light spot and the larger the diameter of the light spot. By arranging several helical phase plates on the rotating shaft, the utility model can superimpose the helical phase plates inserted into the system to change the topological charge and realize variable and adjustable annular light spot. That is to say, based on the present invention, by adjusting the number of the spiral phase plates located in the optical path, the spot size can be adjusted. The phase modulation unit in the variable annular spot optical system is fixed on a rotating shaft by several helical phase plates. inside and outside the optical path). When any one spiral phase plate is inserted into the optical path, the center of the spiral phase plate can be aligned with the collimation unit and the focusing unit in the system.
环形光束拓扑荷数满足叠加原理,也就是说,环形光束拓扑荷数大小满足求和关系,比方说,两个拓扑荷数完全相同的环形光束可以叠加成一个两倍拓扑荷数的环形光束,又比方说,如果两个拓扑荷数值相同符号相反的环形光束叠加就形成拓扑荷数为零的光束(也就是平面光场);因此,通过叠加多个螺旋相位板可以改变环形光束的拓扑荷数l,进而改变最后聚焦得到的环形光斑的大小。The topological charge of the ring beam satisfies the superposition principle, that is to say, the size of the topological charge of the ring beam satisfies the summation relationship. For example, two ring beams with the same topological charge can be superimposed into a ring beam with twice the topological charge, For another example, if two ring beams with the same topological charge value and opposite sign are superimposed, a beam with zero topological charge number (that is, a plane light field) is formed; therefore, the topological charge of the ring beam can be changed by stacking multiple helical phase plates. Count l, and then change the size of the annular light spot obtained by the final focusing.
具体说来,本实用新型具有以下特点:Specifically, the utility model has the following characteristics:
(1)相同条件下,光束被附加螺旋相位因子,聚焦得的环形光斑比普通聚焦光斑半径更大,焦深更长。并且边缘能量高的特点,使其能有效避免激光加工中烧蚀等不良影响,材料受热更均匀,加工质量更好;(1) Under the same conditions, the beam is added with a helical phase factor, and the focused annular spot has a larger radius and a longer focal depth than the ordinary focused spot. And the characteristics of high edge energy make it can effectively avoid adverse effects such as ablation in laser processing, the material is more uniformly heated, and the processing quality is better;
(2)通过螺旋相位板产生环形光斑,可以看作纯相位调制,振幅的改变可以忽略不计,能量转换率高,减小损耗,适用于激光高功率加工;(2) The annular light spot is generated by the spiral phase plate, which can be regarded as pure phase modulation, the change of amplitude can be ignored, the energy conversion rate is high, and the loss is reduced, which is suitable for high-power laser processing;
(3)通过螺旋相位板产生的环形光斑纯度更高,稳定性更强,不易受到衍射等光学作用的影响;(3) The annular light spot produced by the spiral phase plate has higher purity, stronger stability, and is not easily affected by optical effects such as diffraction;
(4)根据实际工作的需要,可以自主调节系统中螺旋相位片个数,通过叠加多个螺旋相位板的方式,改变其拓扑荷数,进而改变环形聚焦光斑的大小,实现环形光斑的大小连续可调,可以满足不同板厚的切割要求;(4) According to the needs of actual work, the number of helical phase plates in the system can be adjusted independently, and the number of topological charges can be changed by stacking multiple helical phase plates, thereby changing the size of the annular focusing spot, and realizing the continuous size of the annular spot. Adjustable, can meet the cutting requirements of different plate thicknesses;
(5)系统抗失调特性好,光斑大小变化、光束偏移、焦点偏移不会对环形能量分布的光场产生影响;(5) The system has good anti-misalignment characteristics, and the change of the spot size, the beam shift, and the focus shift will not affect the light field of the annular energy distribution;
(6)用于激光增材制造或激光表面处理时,改变光斑的拓扑荷数,实现光斑宽度的可调,并且不影响其光场分布的均匀性,能够获得均匀性效果一致的作用效果。(6) When used in laser additive manufacturing or laser surface treatment, the topological charge of the light spot can be changed to realize the adjustment of the width of the light spot without affecting the uniformity of the light field distribution, and the effect of the uniformity effect can be obtained.
综上,利用本实用新型的光学系统,激光光束通过准直单元后被准直为平行光,然后通过相位调制得到环形光束,最后通过聚焦单元,聚焦成高能量的环形光斑,可以用于激光切割、打标、熔覆、微型加工等多个领域。本实用新型可以通过螺旋相位板产生环形光斑,在激光加工技术上具有重大意义,并且可以自主调节螺旋相位板的数量,实现环形聚焦光斑的拓扑荷数可变,在加工不同材料时可根据自己的需求灵活调整;能够有效解决目前由于高斯光束中心能量过高,边缘能量不足带来的激光厚板切割断面不平整,加工出现烧蚀等负面问题,且光斑大小可调,使用方法灵活,能量利用率高,适用于激光高功率加工。In summary, using the optical system of the present invention, the laser beam is collimated into parallel light after passing through the collimating unit, and then a ring beam is obtained through phase modulation, and finally, the focusing unit is used to focus into a high-energy annular spot, which can be used for laser light. Cutting, marking, cladding, micro-processing and other fields. The utility model can generate an annular light spot through a spiral phase plate, which is of great significance in laser processing technology, and can independently adjust the number of spiral phase plates to realize the variable topological charge of the annular focusing spot, and can process different materials according to its own needs. Flexible adjustment to the needs of the laser beam; it can effectively solve the current negative problems such as uneven laser plate cutting section and ablation caused by the high center energy of the Gaussian beam and insufficient edge energy, and the spot size can be adjusted. High utilization rate, suitable for high-power laser processing.
附图说明Description of drawings
图1是本实用新型实施例1中的可变环形光斑光学系统示意图。FIG. 1 is a schematic diagram of a variable annular light spot optical system in
图2是本实用新型的可变环形光斑光学系统中的螺旋相位板的结构示意图。2 is a schematic structural diagram of a spiral phase plate in the variable annular spot optical system of the present invention.
图3是本实用新型实施例1的经过准直后的高斯光束示意图。3 is a schematic diagram of a collimated Gaussian beam according to
图4是本实用新型实施例1的相位调制单元中一块拓扑荷数为1的螺旋相位板的相位图。4 is a phase diagram of a helical phase plate with a topological charge of 1 in the phase modulation unit according to
图5是本实用新型实施例1的相位调制单元中一块拓扑荷数为2的螺旋相位板的相位图。5 is a phase diagram of a helical phase plate with a topological charge of 2 in the phase modulation unit according to
图6是本实用新型实施例1中光束未经过任何一块螺旋相位板时,仅通过准直聚焦单元得到的聚焦光斑。6 is a focused spot obtained only by a collimating focusing unit when the light beam does not pass through any spiral phase plate in
图7是本实用新型实施例1中经过一块拓扑荷数为1的螺旋相位板后聚焦面上的截面光场分布图。7 is a cross-sectional light field distribution diagram on the focal plane after passing through a helical phase plate with a topological charge number of 1 in
图8是本实用新型实施例1中经过拓扑荷数分别为1和1的两块螺旋相位板后,聚焦面上的截面光场分布图。FIG. 8 is a cross-sectional light field distribution diagram on the focusing plane after passing through two spiral phase plates with
图9是本实用新型实施例1中经过拓扑荷数分别为1、1和2的三块螺旋相位板后,聚焦面上的截面光场分布图。9 is a cross-sectional light field distribution diagram on the focusing plane after passing through three helical phase plates with topological charge numbers of 1, 1 and 2 respectively in
图10是本实用新型实施例2中的可变环形光斑光学系统示意图。10 is a schematic diagram of a variable annular light spot optical system in
图1、图2、图10中各附图标记的含义如下:1为入射激光,2为准直单元,3为切换转轴,4为螺旋相位板,5为聚焦单元,6为聚焦面,7为扫描振镜,8为与扫描振镜7相连的电机,9为另一块扫描振镜,10为与扫描振镜9相连的电机。1, 2 and 10 have the following meanings: 1 is the incident laser, 2 is the collimation unit, 3 is the switching shaft, 4 is the helical phase plate, 5 is the focusing unit, 6 is the focusing surface, 7 It is a scanning galvanometer, 8 is a motor connected with the
具体实施方式Detailed ways
为了使本实用新型的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本实用新型进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本实用新型,并不用于限定本实用新型。此外,下面所描述的本实用新型各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the purpose, technical solutions and advantages of the present utility model more clearly understood, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as there is no conflict with each other.
实施例1:Example 1:
本实用新型的第一种实施例提供的可变环形光斑光学系统示意图如图1所示,整个系统分为准直单元、相位调制单元和聚焦单元。激光光束通过准直单元的透镜组准直为平行光,然后从相位调制单元中螺旋相位板的平面端入射,出射变为环形光束,其拓扑荷数等于螺旋相位板的拓扑荷数。最后通过聚焦单元中的透镜组聚焦得到环形能量分布的光斑。The schematic diagram of the variable annular spot optical system provided by the first embodiment of the present invention is shown in FIG. 1 , and the whole system is divided into a collimation unit, a phase modulation unit and a focusing unit. The laser beam is collimated into parallel light by the lens group of the collimating unit, and then incident from the plane end of the spiral phase plate in the phase modulation unit, and the outgoing beam becomes a ring beam with a topological charge equal to that of the spiral phase plate. Finally, the light spot with annular energy distribution is obtained by focusing the lens group in the focusing unit.
如图2所示为本实用新型的可变环形光斑光学系统中的螺旋相位板的结构示意图,螺旋相位板是现有技术中的一种光学元件,现有技术中为了便于加工,将螺旋相位板制成台阶状,而根据螺旋相位板的拓扑荷数、材料折射率可以直接参考现有技术计算出螺旋相位板的台阶增加的厚度(如,吴明波,《涡旋光束拓扑荷数测量研究》等);螺旋相位板的厚度一般为微米量级,可以忽略不计,因此相位板对光强的影响可以忽略。Figure 2 is a schematic diagram of the structure of the spiral phase plate in the variable annular spot optical system of the present invention. The spiral phase plate is an optical element in the prior art. In the prior art, in order to facilitate processing, the spiral phase plate is The plate is made into steps, and according to the topological charge of the spiral phase plate and the refractive index of the material, the thickness of the steps of the spiral phase plate can be calculated directly with reference to the prior art (for example, Wu Mingbo, "Study on the Measurement of the Topological Charge of the Vortex Beam" etc.); the thickness of the spiral phase plate is generally in the order of microns, which can be ignored, so the influence of the phase plate on the light intensity can be ignored.
如图3所示为本实用新型的第一种实施例的经过准直后的高斯光束示意图,高斯光束轴线与准直镜、聚焦镜的轴线在一条直线上。FIG. 3 is a schematic diagram of the collimated Gaussian beam according to the first embodiment of the present invention, and the axis of the Gaussian beam is on a straight line with the axes of the collimating mirror and the focusing mirror.
如图1所示,本实用新型通过将若干个螺旋相位板固定在一根旋转轴上,可以通过旋转自主地调节插入光路系统中相位板的个数,也就是说,光路中的螺旋相位板可以根据实际需求灵活切换,例如:As shown in FIG. 1, the present utility model can adjust the number of phase plates inserted into the optical path system by rotating independently by fixing several spiral phase plates on a rotating shaft, that is, the spiral phase plates in the optical path It can be flexibly switched according to actual needs, for example:
如图4所示为本实用新型的第一种实施例的相位调制单元中一块拓扑荷数为1的螺旋相位板的相位模拟图,光束经过该相位板后会附加上相应的相位因子。Figure 4 is a phase simulation diagram of a spiral phase plate with a topological charge of 1 in the phase modulation unit of the first embodiment of the present invention, and a corresponding phase factor will be added to the light beam after passing through the phase plate.
如图5所示为本实用新型的第一种实施例的相位调制单元中一块拓扑荷数为2的螺旋相位板的相位模拟图,光束经过该相位板后会附加上相应的相位因子。Figure 5 is a phase simulation diagram of a spiral phase plate with a topological charge of 2 in the phase modulation unit of the first embodiment of the present invention, and a corresponding phase factor will be added to the light beam after passing through the phase plate.
如图6所示为本实用新型的第一种实施例,光束未经过任何一块螺旋相位板时,仅通过准直聚焦单元得到的聚焦光斑,可以看到聚焦光斑的光场分布为高斯分布,光斑半径约为0.1mm。As shown in FIG. 6, the first embodiment of the present invention is shown. When the light beam does not pass through any spiral phase plate, only through the focusing spot obtained by the collimating focusing unit, it can be seen that the light field distribution of the focusing spot is a Gaussian distribution, The spot radius is about 0.1mm.
如图7所示为本实用新型的第一种实施例,经过一块拓扑荷数为1(此时n=1;当然,n也可以预先设定为等于其他整数,包括正整数和负整数)的螺旋相位板后,聚焦面6所在位置的截面光场分布图。可见经过螺旋相位板的相位调制,得到中心能量低,边缘能量高的环形能量分布的聚焦光斑,其拓扑荷数为1,相位改变量2π,光斑半径约为0.2mm。As shown in FIG. 7, the first embodiment of the present utility model is shown. The number of topological loads after a block is 1 (n=1 at this time; of course, n can also be preset to be equal to other integers, including positive integers and negative integers) The cross-sectional light field distribution diagram of the position of the focusing
如图8所示为本实用新型的第一种实施例,经过拓扑荷数分别为1和1的两块螺旋相位板后,聚焦面6所在位置的截面光场分布图。通过螺旋相位板的拓扑荷数的叠加,可以使环形光斑的拓扑荷数相应地叠加,最终得到的环形光斑的拓扑荷数为2(等于1加1,拓扑荷数满足叠加原理),相位改变量4π,光斑半径约为0.35mm。Figure 8 shows the first embodiment of the present invention, after passing through two helical phase plates with topological charges of 1 and 1, respectively, the cross-sectional light field distribution diagram of the position of the focusing
如图9所示为本实用新型的第一种实施例,经过拓扑荷数分别为1、1和2的三块螺旋相位板后,聚焦面6所在位置的截面光场分布图。得到的环形光斑拓扑荷数为4(等于1加1加2,拓扑荷数满足叠加原理),相位改变量8π,光斑半径约为0.5mm。两个相同拓扑荷数的环形光束可以进行叠加,得到两倍拓扑荷数的环形光束,本实用新型相位调制单元中的若干个螺旋相位板的拓扑荷数应遵循这个规律。Figure 9 shows the first embodiment of the present utility model, after passing through three spiral phase plates with topological charges of 1, 1 and 2 respectively, the cross-sectional light field distribution diagram of the position where the focusing
实施例2:Example 2:
本实用新型的第二种实施例提供的可变环形光斑系统的示意图如图10所示,激光光束通过准直单元和相位调制单元后,再通过两个扫描振镜,最后通过聚焦物镜,其原理同实施例1相同,通过两块振镜扫描,可以改变焦点位置,进行打标。The schematic diagram of the variable annular spot system provided by the second embodiment of the present invention is shown in Figure 10. After the laser beam passes through the collimation unit and the phase modulation unit, it passes through two scanning galvanometers, and finally passes through the focusing objective lens. The principle is the same as that of
实施例2的光路,聚焦面上的光场能量分布都与实施例1相一致,由于用螺旋相位板产生的环形光斑其稳定性较高,在偏离焦点位置依然可以保持环形分布的特点,在振镜扫描高速移动打标的过程中,可以较好地保持以环形能量输出,相比实施例1在竖直空间上的应用,实施例2主要是在水平空间上的应用。In the optical path of Example 2, the energy distribution of the light field on the focusing surface is consistent with that of Example 1. Due to the high stability of the annular light spot generated by the spiral phase plate, the characteristic of the annular distribution can still be maintained at the position deviated from the focal point. In the process of high-speed moving marking by scanning the galvanometer, the output of annular energy can be better maintained. Compared with the application in the vertical space of the first embodiment, the second embodiment is mainly applied in the horizontal space.
总体而言,本实用新型中可变环形光斑的光学系统,可得到光强损耗低,光斑大小可调,中心能量低,边缘能量高的环形能量分布光斑,可用于激光切割、打标、熔覆等多个激光加工领域。有效解决目前由于高斯光束中心能量过高,边缘能量不足带来的激光厚板切割断面不平整,加工出现烧蚀等负面问题,且光斑大小可调,使用方法灵活,能量利用率高,适用于激光高功率加工。In general, the optical system of the variable annular spot in the present invention can obtain an annular energy distribution spot with low light intensity loss, adjustable spot size, low center energy, and high edge energy, which can be used for laser cutting, marking, melting, etc. Covering and other laser processing fields. Effectively solve the current negative problems such as uneven laser plate cutting section and ablation caused by the high center energy of the Gaussian beam and insufficient edge energy. Laser high power processing.
对于螺旋相位板的平面端面和台阶端面,当它们位于光路内的状态时,激光入射方向需要保持一致,例如,第一个螺旋相位板激光可以从台阶面入射,后续的所有的螺旋相位板都要和第一个螺旋相位板的放置方向保持一致,使激光均由对应螺旋相位板的台阶端面入射。For the plane end face and the stepped end face of the helical phase plate, when they are located in the optical path, the laser incidence direction needs to be consistent. For example, the first helical phase plate laser can be incident from the stepped face, and all subsequent helical phase plates are It should be consistent with the placement direction of the first spiral phase plate, so that the laser is incident from the stepped end face of the corresponding spiral phase plate.
上述实施例是以本实用新型最优技术方案——可变环形光斑的光学系统进行详细介绍的,当然,围绕本实用新型最为核心的利用螺旋相位板这种常规光学元件产生环形聚焦光斑这一理念,本实用新型也可以实现固定环形光斑的光学系统,该固定环形光斑的光学系统同样包括依次沿光路设置的准直单元、相位调制单元和聚焦单元,并且准直单元和聚焦单元可完全参考可变环形光斑的光学系统,只有相位调制单元需要调整,此时相位调制单元将不设置旋转轴,而是将数量预先设定的螺旋相位板固定设置在光路内(即,使数量预先设定的螺旋相位板它们可以始终位于光路内)。这些螺旋相位板至少为一个螺旋相位板,当然也可以是多个螺旋相位板。The above-mentioned embodiments are described in detail based on the optical system of the optimal technical solution of the present invention, the variable annular spot. concept, the present invention can also realize the optical system of fixed annular light spot, the optical system of fixed annular light spot also includes collimation unit, phase modulation unit and focusing unit arranged along the optical path in sequence, and the collimating unit and focusing unit can be completely referenced In the optical system of the variable annular spot, only the phase modulation unit needs to be adjusted. At this time, the phase modulation unit will not set the rotation axis, but fixedly set the number of preset spiral phase plates in the optical path (that is, make the number preset of the helical phase plates they can always be in the optical path). These helical phase plates are at least one helical phase plate, and certainly can also be a plurality of helical phase plates.
另外,本实用新型光学系统中的准直单元、聚焦单元使用组合的透镜组,减小像差。每个螺旋相位板的拓扑荷数可预先设置,包括位于旋转轴上的各个螺旋相位板,以图1为例,图1所示的5个螺旋相位板,它们的拓扑荷数l分别为n、n、2n、4n、8n,其中n等于1;对于任意一个拓扑荷数为l螺旋相位板,绕光轴一周的相位改变为2π×l。螺旋相位板参考现有技术,可根据螺旋相位板的材料折射率及其拓扑荷数,计算出螺旋相位板的厚度,平均到每一级台阶,算出每一级台阶高度,进行相应的制作加工,自行制备得到螺旋相位板,加工精度越高越好,每一级台阶高度一般为微米量级;当然,也可以购买获得。本实用新型光学系统中的准直单元与聚焦单元可以为一般常规的准直聚焦透镜。In addition, the collimating unit and the focusing unit in the optical system of the present invention use a combined lens group to reduce aberrations. The topological charge number of each helical phase plate can be preset, including each helical phase plate located on the rotating shaft. Taking Fig. 1 as an example, the topological charges l of the five helical phase plates shown in Fig. 1 are n respectively. , n, 2n, 4n, 8n, where n is equal to 1; for any spiral phase plate with a topological charge of l, the phase change around the optical axis is 2π×l. Referring to the prior art, the spiral phase plate can calculate the thickness of the spiral phase plate according to the material refractive index and topological charge of the spiral phase plate, average it to each step, calculate the height of each step, and carry out the corresponding production and processing. , self-prepared spiral phase plate, the higher the machining accuracy, the better, the height of each step is generally in the order of microns; of course, it can also be purchased. The collimating unit and the focusing unit in the optical system of the present invention can be a general conventional collimating focusing lens.
本领域的技术人员容易理解,以上所述仅为本实用新型的较佳实施例而已,并不用以限制本实用新型,凡在本实用新型的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本实用新型的保护范围之内。Those skilled in the art can easily understand that the above are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and replacements made within the spirit and principles of the present invention Improvements, etc., should be included within the protection scope of the present invention.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111338089A (en) * | 2020-01-16 | 2020-06-26 | 华中科技大学 | Optical system with annular light spots |
| CN112505914A (en) * | 2020-12-10 | 2021-03-16 | 武汉先河激光技术有限公司 | Vortex light beam generation system and method and phase modulation combination device |
| CN112540457A (en) * | 2020-12-10 | 2021-03-23 | 武汉先河激光技术有限公司 | Vortex light beam generation device, system and method with adjustable topological number |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111338089A (en) * | 2020-01-16 | 2020-06-26 | 华中科技大学 | Optical system with annular light spots |
| CN111338089B (en) * | 2020-01-16 | 2025-03-07 | 华中科技大学 | An optical system with annular light spot |
| CN112505914A (en) * | 2020-12-10 | 2021-03-16 | 武汉先河激光技术有限公司 | Vortex light beam generation system and method and phase modulation combination device |
| CN112540457A (en) * | 2020-12-10 | 2021-03-23 | 武汉先河激光技术有限公司 | Vortex light beam generation device, system and method with adjustable topological number |
| CN112540457B (en) * | 2020-12-10 | 2021-10-15 | 武汉先河激光技术有限公司 | Vortex light beam generation device, system and method with adjustable topological number |
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