CN211905076U - A Simultaneous Detection System for Inductively Coupled Plasma Atomic Mass Spectrometry and Spectroscopy - Google Patents
A Simultaneous Detection System for Inductively Coupled Plasma Atomic Mass Spectrometry and Spectroscopy Download PDFInfo
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Abstract
本实用新型公开一种电感耦合等离子体原子质谱和光谱的同时检测系统,包括电感耦合等离子体源、质谱检测系统和光谱检测系统;光谱检测系统由空心阴极灯、光谱检测器和光谱检测控制模块构成;在电感耦合等离子体轴向方向采集原子质谱信号,径向方向采集原子发射和吸收光谱信号。本实用新型共用一个电感耦合等离子体源,在同一离子源/激发源/原子化器中集成了原子质谱、原子发射光谱和原子吸收光谱检测,能够一次进样,同时测定原子质谱、原子发射和原子吸收光谱,因此减少样品和试剂消耗量,节约分析时间,降低仪器成本和使用与维护成本。
The utility model discloses a simultaneous detection system for inductively coupled plasma atomic mass spectrometry and spectrum, comprising an inductively coupled plasma source, a mass spectrum detection system and a spectrum detection system; the spectrum detection system consists of a hollow cathode lamp, a spectrum detector and a spectrum detection control module Composition: Atomic mass spectrum signals are collected in the axial direction of the inductively coupled plasma, and atomic emission and absorption spectrum signals are collected in the radial direction. The utility model shares one inductively coupled plasma source, and integrates the detection of atomic mass spectrometry, atomic emission spectrum and atomic absorption spectrum in the same ion source/excitation source/atomicizer, and can inject samples at one time, and simultaneously measure atomic mass spectrometry, atomic emission and atomic absorption spectrum. Atomic absorption spectroscopy, thus reducing sample and reagent consumption, saving analysis time, reducing instrument costs and operating and maintenance costs.
Description
技术领域technical field
本实用新型涉及等离子体技术与原子质谱和光谱分析技术领域,具体为一种电感耦合等离子体原子质谱和光谱的同时检测系统。The utility model relates to the technical field of plasma technology and atomic mass spectrometry and spectrum analysis, in particular to a simultaneous detection system of inductively coupled plasma atomic mass spectrometry and spectrum.
背景技术Background technique
电感耦合等离子体Inductively Coupled Plasma,ICP是目前商用最成熟且最受关注的等离子体技术之一。其电子密度和温度高、气体动力学温度高、激发和电离能力强,几乎能将所有元素原子化和激发,以及将绝大多数元素电离,因此被广泛应用于原子质谱和光谱分析仪器领域中,用作原子质谱的离子源、原子光谱的原子化器/激发源。其中尤以电感耦合等离子体用作离子源的原子质谱仪和作为激发源的原子发射光谱仪最为成功,它们均已在各领域的样品分析检测、科研和生产工作中获得了广泛的应用。Inductively Coupled Plasma, ICP is one of the most mature and most concerned plasma technologies currently in commercial use. Its high electron density and temperature, high gas dynamic temperature, strong excitation and ionization ability, can atomize and excite almost all elements, and ionize most elements, so it is widely used in the field of atomic mass spectrometry and spectral analysis instruments. , used as ion source for atomic mass spectrometry, atomizer/excitation source for atomic mass spectrometry. Among them, the atomic mass spectrometer using inductively coupled plasma as the ion source and the atomic emission spectrometer as the excitation source are the most successful, and they have been widely used in sample analysis and detection, scientific research and production in various fields.
电感耦合等离子体原子质谱法Inductively Coupled Plasma-MassSpectrometry,ICP-MS已经广泛应用于食品、生物、环境等领域的痕量元素分析。它是将待测元素进行蒸发、原子化、离子化,然后通过不同质荷比m/z对不同元素离子进行分离和筛选,最后进行检测的方法。传统商品化四极杆ICP-MS一般由样品引入系统、离子源、质量分析器和检测器构成,样品引入系统多为气动雾化器,离子源为ICP,质量分析器为四极杆,检测器为电子倍增器。它能够对微量元素和同位素进行精确定量,可以在较宽的线性范围下对多种元素进行同时检测,具有宽的动态范围和非常优越的检出限。但是,原子质谱分析中始终存在同位素质谱干扰和非质谱干扰。目前仅有一些较为先进的技术能够改善质谱的分析性能、提高分辨率、减少干扰以及获得更宽的线性动态范围。其中,比较常见的技术有碰撞/反应池、串联分析器和高分辨率技术如磁质谱。但是,这些技术的高成本限制了它们的广泛应用。此外,为了让高灵敏质谱分析获得更为精准的结果,通常需要高纯度的试剂或者试剂纯化系统与之配套使用,这通常使得这些设备更复杂,测试花费的时间和成本更多。Inductively Coupled Plasma-Mass Spectrometry Inductively Coupled Plasma-Mass Spectrometry, ICP-MS has been widely used in the analysis of trace elements in food, biology, environment and other fields. It is a method of vaporizing, atomizing, and ionizing the element to be tested, and then separating and screening different element ions through different mass-to-charge ratios m/z, and finally detecting. Traditional commercial quadrupole ICP-MS is generally composed of sample introduction system, ion source, mass analyzer and detector. The sample introduction system is mostly pneumatic nebulizer, the ion source is ICP, the mass analyzer is a quadrupole, and the detection The device is an electron multiplier. It can accurately quantify trace elements and isotopes, and can detect multiple elements simultaneously in a wide linear range, with a wide dynamic range and very superior detection limits. However, isotopic mass spectrometry and non-mass spectrometry interferences always exist in atomic mass spectrometry. Only some of the more advanced techniques can improve the analytical performance of mass spectrometry, increase resolution, reduce interference, and obtain a wider linear dynamic range. Among them, the more common techniques are collision/reaction cells, tandem analyzers, and high-resolution techniques such as magnetic mass spectrometry. However, the high cost of these technologies limits their widespread application. In addition, in order to obtain more accurate results of high-sensitivity mass spectrometry, high-purity reagents or reagent purification systems are usually required to be used together, which usually makes these devices more complicated, and the testing takes more time and cost.
电感耦合等离子体原子发射光谱法Inductively Coupled Plasma-OpticalEmission Spectrometry,ICP-OES通常比电感耦合等离子体原子质谱法的灵敏度低。然而,因其仪器成本、运行和维护成本相对较低,也适合于各种样品的多元素同时分析,因而常规分析中的应用范围十分广泛。但是,在原子发射光谱系统中,很多元素都存在相近的原子发射线,光谱重叠干扰通常不可避免。在ICP激发源中,不仅存在原子发射线,离子发射线和分子发射带往往也会产生较大的光谱重叠干扰。对于分子发射光谱,因其发射峰较宽,与很多元素的原子发射线都有较大的重叠,使得某些原子发射线不能用作元素定性和定量分析的分析线。另一方面,对于光谱检测器而言,始终存在物理上光谱分辨率极限的限制问题;因此,在ICP-OES系统中,也不可能完全地分辨元素的原子发射光谱谱线。Inductively Coupled Plasma-Optical Emission Spectrometry Inductively Coupled Plasma-Optical Emission Spectrometry, ICP-OES is generally less sensitive than Inductively Coupled Plasma Atomic Emission Spectrometry. However, because of its relatively low instrument cost, operation and maintenance costs, and its suitability for multi-element simultaneous analysis of various samples, it has a wide range of applications in routine analysis. However, in atomic emission spectroscopy systems, many elements have similar atomic emission lines, and spectral overlap interference is usually unavoidable. In the ICP excitation source, there are not only atomic emission lines, but also ion emission lines and molecular emission bands that often produce large spectral overlap interferences. For molecular emission spectrum, because of its broad emission peaks, it has a large overlap with the atomic emission lines of many elements, so that some atomic emission lines cannot be used as analytical lines for qualitative and quantitative analysis of elements. On the other hand, for spectroscopic detectors, there is always the limitation of the physical spectral resolution limit; therefore, in ICP-OES systems, it is also impossible to completely resolve the atomic emission spectral lines of elements.
电感耦合等离子体原子吸收光谱法Inductively Coupled Plasma-AtomicAbsorption Spectrometry,ICP-AAS是早期在ICP-OES光谱研究中发展起来的一种方法。它与原子发射光谱法的最大差异在于除了原子化器之外,还需要一个额外的吸收光源,通常为锐线光源。由于锐线光源的使用,可以有效地避免原子发射光谱分析中的大量谱线干扰问题;同时,它的灵敏度通常优于ICP发射光谱。但对于某些分子结合力较强的元素,在ICP工作于较低功率条件下自由原子无法得到释放,而在较高功率条件下又容易产生激发和电离,较难检测其在ICP中的原子吸收信号,从而限制了ICP-AAS可检测和应用的元素范围。虽然已有研究ICP-AAS的报道,但独立的商品化仪器仍较为罕见。Inductively Coupled Plasma-Atomic Absorption Spectrometry, ICP-AAS is an early method developed in ICP-OES spectroscopy. The biggest difference between it and atomic emission spectroscopy is that in addition to the atomizer, an additional absorption light source, usually a sharp-line light source, is required. Due to the use of a sharp-line light source, a large number of spectral line interference problems in atomic emission spectrometry can be effectively avoided; at the same time, its sensitivity is usually better than that of ICP emission spectroscopy. However, for some elements with strong molecular binding force, free atoms cannot be released when the ICP works at a lower power, and excitation and ionization are easy to occur at a higher power, making it difficult to detect the atoms in the ICP. absorbs the signal, thereby limiting the range of elements that can be detected and applied by ICP-AAS. Although studies of ICP-AAS have been reported, stand-alone commercial instruments are still rare.
目前,基于ICP的仪器包括ICP-MS和ICP-OES均是一般实验室中价格较为昂贵的分析设备,不仅仪器本身的成本高,后期使用过程中的耗材和维护成本也较高,它们现阶段均还不能作为常规分析仪器配备到大部分的分析和科研实验室,同时配备多种ICP仪器就更加困难。但是在实际生产和科研过程中,单一的设备往往又不能完全解决所遇到的复杂问题。而从仪器的结构上来看,ICP光谱仪器包括ICP-OES、ICP-AAS和ICP质谱仪器ICP-MS具有相似的部分,都采用ICP源来实现离子化、原子化或光谱激发;差异之处在于光路和检测部分,同时三者的测量原理不相同,测量可以互不干扰,因此具有潜在的同时检测的可行性。此外,在ICP源中,分析元素的原子所处的状态比较复杂,可能处于原子基态和原子激发态,也可能处于离子基态和离子激发态。如果存在基态的自由原子A,则有相应的原子吸收光谱信号AAS产生;如果存在激发态的原子A*,则有原子发射光谱信号AES/OES产生;如果存在电离形成的离子A+,则有原子质谱信号MS,同时还有离子吸收信号;如果存在激发态的离子A+*,则有相应的离子发射光谱信号产生。多种粒子可能单一存在,也可能组合存在于ICP源中;如果组合存在,相对应的多种信号则会同时产生。At present, ICP-based instruments including ICP-MS and ICP-OES are relatively expensive analytical equipment in general laboratories. Not only the cost of the instrument itself is high, but also the cost of consumables and maintenance in the later use process. All of them cannot be equipped as conventional analytical instruments in most analytical and scientific research laboratories, and it is even more difficult to equip multiple ICP instruments at the same time. However, in the actual production and scientific research process, a single device often cannot completely solve the complex problems encountered. From the perspective of the structure of the instrument, ICP spectrometers including ICP-OES, ICP-AAS and ICP mass spectrometer ICP-MS have similar parts, and all use ICP sources to achieve ionization, atomization or spectral excitation; the difference lies in The optical path and the detection part, and the measurement principles of the three are different at the same time, and the measurement can not interfere with each other, so it has the possibility of potential simultaneous detection. In addition, in the ICP source, the atoms of the analyzed elements are in a complex state, which may be in the atomic ground state and atomic excited state, or may be in the ionic ground state and ion excited state. If there is a free atom A in the ground state, the corresponding atomic absorption spectrum signal AAS is generated; if there is an atom A* in the excited state, there is an atomic emission spectrum signal AES/OES; If there is an ionized ion A + , there is The atomic mass spectrometry signal MS, and the ion absorption signal; if there is an excited state ion A + *, the corresponding ion emission spectrum signal is generated. Multiple particles may exist singly or in combination in the ICP source; if they exist in combination, corresponding multiple signals will be generated simultaneously.
综上,如果能将ICP-MS、ICP-OES、ICP-AAS集成在一起,并实现原子质谱、原子光谱包括原子发射光谱和原子吸收光谱同时检测,便可以在一台仪器上同时获得ICP-MS、ICP-OES和ICP-AAS三种功能,充分发挥三者优势互补的优势;更能形成新型的分析仪器,获得单一仪器不具备的新功能。在一次进样的条件下,实现原子质谱、原子发射光谱和原子吸收光谱的同时测量,提高仪器的综合分析性能,包括:减少样品和试剂消耗量,节约分析时间,降低仪器成本和使用与维护成本;扩展仪器的工作曲线线性范围以及可直接分析的样品元素和浓度范围,多种检测方法相互配合消除单一方法的质谱干扰或者光谱干扰,三种检测方法测量结果相互比对可验证分析结果的准确性,并可拓展ICP-MS、ICP-OES和ICP-AAS的应用范围。To sum up, if ICP-MS, ICP-OES, and ICP-AAS can be integrated together, and the simultaneous detection of atomic mass spectrometry, atomic spectroscopy including atomic emission spectroscopy and atomic absorption spectroscopy can be realized, ICP- The three functions of MS, ICP-OES and ICP-AAS give full play to the complementary advantages of the three; it can also form a new type of analytical instrument and obtain new functions that a single instrument does not have. Under the condition of one sample injection, the simultaneous measurement of atomic mass spectrometry, atomic emission spectrum and atomic absorption spectrum can be realized, and the comprehensive analysis performance of the instrument can be improved, including: reducing the consumption of samples and reagents, saving analysis time, reducing instrument cost and use and maintenance Cost; expand the linear range of the instrument’s working curve and the range of sample elements and concentrations that can be directly analyzed. Multiple detection methods cooperate with each other to eliminate the mass spectral interference or spectral interference of a single method. The measurement results of the three detection methods can be compared with each other to verify the analysis results. Accuracy and expand the application range of ICP-MS, ICP-OES and ICP-AAS.
实用新型内容Utility model content
针对上述问题,本实用新型的目的在于提供一种基于共享一个电感耦合等离子体源的原子质谱、原子发射光谱和原子吸收光谱同时检测的系统,提升单一ICP-MS、ICP-OES和ICP-AAS的综合分析性能,增加新功能和应用潜力,并扩展原子质谱和光谱类分析仪器的应用范围。技术方案如下:In view of the above-mentioned problems, the purpose of this utility model is to provide a system for simultaneous detection of atomic mass spectrometry, atomic emission spectroscopy and atomic absorption spectroscopy based on sharing an inductively coupled plasma source, improving a single ICP-MS, ICP-OES and ICP-AAS The comprehensive analytical performance of the system increases new functions and application potential, and expands the application scope of atomic mass spectrometry and spectroscopy-based analytical instruments. The technical solution is as follows:
一种电感耦合等离子体原子质谱和光谱的同时检测系统,包括电感耦合等离子体源、质谱检测系统和光谱检测系统;A simultaneous detection system for inductively coupled plasma atomic mass spectrometry and spectroscopy, comprising an inductively coupled plasma source, a mass spectrometry detection system and a spectrum detection system;
电感耦合等离子体源包括等离子体炬管和电感耦合等离子体;等离子体炬管连接在样品引入系统后,并在炬管末端产生电感耦合等离子体;The inductively coupled plasma source includes a plasma torch and an inductively coupled plasma; the plasma torch is connected to the sample introduction system, and the inductively coupled plasma is generated at the end of the torch;
所述质谱检测系统包括质谱检测单元,其设置在电感耦合等离子体源的轴向方向,接收电感耦合等离子体中被电离的离子,并得到原子质谱信号响应;The mass spectrometry detection system includes a mass spectrometry detection unit, which is arranged in the axial direction of the inductively coupled plasma source, receives ionized ions in the inductively coupled plasma, and obtains an atomic mass spectrometry signal response;
所述光谱检测系统包括空心阴极灯、光谱检测器和光谱检测控制模块;The spectral detection system includes a hollow cathode lamp, a spectral detector and a spectral detection control module;
电感耦合等离子体中被激发的原子由激发态返回低能级态并同时辐射出其特征波长的光线,并由光谱检测器接收,在径向位置得到原子发射光谱信号响应;The excited atoms in the inductively coupled plasma return to the low-energy state from the excited state, and at the same time radiate light of its characteristic wavelength, which is received by the spectral detector, and the atomic emission spectral signal response is obtained at the radial position;
电感耦合等离子体中被原子化的原子对空心阴极灯光源的入射光进行吸收,被吸收减弱的入射光再由光谱检测器接收,在径向位置得到原子吸收光谱信号响应;The atomized atoms in the inductively coupled plasma absorb the incident light of the hollow cathode lamp light source, and the incident light whose absorption is weakened is then received by the spectrum detector, and the atomic absorption spectrum signal response is obtained at the radial position;
光谱检测控制模块同时连接光谱检测器和空心阴极灯,控制光谱检测和光源调制,实现原子发射光谱和原子吸收光谱的同时检测。The spectral detection control module connects the spectral detector and the hollow cathode lamp at the same time, controls the spectral detection and the modulation of the light source, and realizes the simultaneous detection of the atomic emission spectrum and the atomic absorption spectrum.
进一步的,还包括聚焦透镜和聚焦调节单元;聚焦透镜在发射光谱检测时对电感耦合等离子体中辐射出的光线进行聚焦,在吸收光谱检测对空心阴极灯光源进行聚焦;聚焦调节单元用于调节聚焦透镜所聚焦光线的焦点位置。Further, it also includes a focusing lens and a focusing adjustment unit; the focusing lens focuses the light radiated from the inductively coupled plasma during emission spectrum detection, and focuses the hollow cathode lamp light source during absorption spectrum detection; the focusing adjustment unit is used to adjust The focal position of the light focused by the focusing lens.
本实用新型的有益效果是:The beneficial effects of the present utility model are:
1)三种互相独立、互不干扰的检测方法相结合的原位同时检测,三种分析结果相互补充,可以扩展仪器的工作曲线线性范围以及可直接分析的样品元素和浓度范围,实现低、中、高浓度范围内的样品分析。ICP-MS的高灵敏度能够满足分析科学中不断提出的高灵敏度需求,ICP-OES及ICP-AAS测定则能够满足常规的痕量分析,可以根据不同元素和浓度样品选择更适合的检测方法,可以高效地获得更准确可靠的测量结果;1) In situ simultaneous detection combined with three independent and non-interfering detection methods, the three analysis results complement each other, which can expand the linear range of the instrument’s working curve and the range of sample elements and concentrations that can be directly analyzed. Analysis of samples in the mid to high concentration range. The high sensitivity of ICP-MS can meet the high sensitivity requirements constantly put forward in analytical science, while ICP-OES and ICP-AAS determination can meet the routine trace analysis. More suitable detection methods can be selected according to different elements and concentration samples. Efficiently obtain more accurate and reliable measurement results;
2)多种检测方法相互配合消除单一方法的质谱干扰或者光谱干扰;可以根据不同样品基质干扰选择更适合的检测方法,获得更准确可靠的测量结果;2) Multiple detection methods cooperate with each other to eliminate the mass spectral interference or spectral interference of a single method; more suitable detection methods can be selected according to the interference of different sample matrices to obtain more accurate and reliable measurement results;
3)多种检测方法测量结果相互自比对可验证分析结果的准确性;通过一台仪器、一次进样即可实现结果自比对和校准,提高数据结果的时间和空间一致性,克服某些分析无标准参考物质的困难;3) The accuracy of the analysis results can be verified by the mutual self-comparison of the measurement results of various detection methods; the self-comparison and calibration of the results can be realized by one instrument and one injection, which improves the time and space consistency of the data results and overcomes certain problems. some difficulties in the analysis of non-standard reference materials;
4)通过一次进样完成原子质谱、原子发射光谱和原子吸收光谱的同时检测,可以有效减少样品和试剂消耗量,节约分析时间,降低仪器成本和使用与维护成本;4) Simultaneous detection of atomic mass spectrometry, atomic emission spectrometry and atomic absorption spectrometry is accomplished through one injection, which can effectively reduce the consumption of samples and reagents, save analysis time, and reduce instrument costs and use and maintenance costs;
5)通过原子质谱、原子发射光谱和吸收光谱的多原理同时测量,可望形成新型的分析仪器,拓展仪器的应用范围,比如为一些反应机理的研究提供更多的信息量,为等离子体的研究提供新的工具等。5) Through the simultaneous measurement of multiple principles of atomic mass spectrometry, atomic emission spectroscopy and absorption spectroscopy, it is expected to form a new type of analytical instrument and expand the application range of the instrument, such as providing more information for the study of some reaction mechanisms, and for plasma analysis. Research provides new tools and more.
附图说明Description of drawings
图1为本实用新型电感耦合等离子体原子质谱、原子发射光谱和吸收光谱的同时检测系统的装置结构示意图;Fig. 1 is the device structure schematic diagram of the simultaneous detection system of inductively coupled plasma atomic mass spectrometry, atomic emission spectrum and absorption spectrum of the present invention;
图中:1.样品,2.进样管路,3.雾化系统,4.等离子体炬管,5.电感耦合等离子体,6.质谱检测单元,7.空心阴极灯,8.聚焦透镜,9.聚焦调节单元,10.光谱检测器,11.光谱检测控制模块。In the figure: 1. Sample, 2. Injection pipeline, 3. Nebulization system, 4. Plasma torch, 5. Inductively coupled plasma, 6. Mass detection unit, 7. Hollow cathode lamp, 8. Focusing lens , 9. Focus adjustment unit, 10. Spectral detector, 11. Spectral detection control module.
图2为本实用新型电感耦合等离子体原子质谱、原子发射和吸收光谱同时测定Cd元素的发射和吸收光谱信号。其中,横坐标代表光谱信号波长,纵坐标代表信号强度。Fig. 2 is the present utility model inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectrum to simultaneously measure the emission and absorption spectrum signals of Cd element. Among them, the abscissa represents the spectral signal wavelength, and the ordinate represents the signal intensity.
图3为本实用新型电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,在一次进样过程中测定Cd元素的质谱、发射和吸收光谱信号随着射频功率变化的信号强度变化图。3 is a graph showing the change of the signal intensity of the inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectroscopy of the present invention, and measuring the mass spectrum, emission and absorption spectral signals of Cd elements with the change of radio frequency power in one sample injection process.
图4为本实用新型电感耦合等离子体原子质谱、原子发射和吸收光谱同时测定Cd的原子发射光谱信号时序图。其中横坐标代表时间,纵坐标代表信号强度,每一个点表示一次测量结果,6000多次的采样结果的相对标准偏差小于3%。FIG. 4 is a timing chart of the atomic emission spectrum signal of the inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectrum of the present invention for simultaneous determination of Cd. The abscissa represents the time, the ordinate represents the signal strength, each point represents a measurement result, and the relative standard deviation of more than 6,000 sampling results is less than 3%.
图5为本实用新型电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,在一次进样条件下,Mn元素获得更宽线性范围的标准曲线。Figure 5 shows the simultaneous detection of inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectrometry of the present invention. Under the condition of one sample injection, Mn element obtains a standard curve with a wider linear range.
图6为本实用新型电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,消除单一质谱法干扰。FIG. 6 shows the simultaneous detection of inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectroscopy of the present invention to eliminate the interference of single mass spectrometry.
图7为本实用新型电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,消除单一原子发射光谱法干扰。FIG. 7 shows the simultaneous detection of inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectroscopy of the present invention to eliminate the interference of single atomic emission spectroscopy.
图8为本实用新型电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,在一次进样条件下,同时检测高浓度和低浓度的不同元素所得的标准曲线。Fig. 8 is the standard curve obtained by the simultaneous detection of inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectrometry of the present invention, and the simultaneous detection of different elements of high concentration and low concentration under the condition of one sample injection.
具体实施方式Detailed ways
下面结合附图和具体实施例对本实用新型做进一步详细说明。本实用新型结合电感耦合等离子体原子质谱、电感耦合等离子体原子发射光谱和原子吸收光谱的原理和仪器结构的相似处,共用一个电感耦合等离子体源,作为离子源、激发源、原子化器,通过不同的信号采集位置和时序调控获得不同的物理量信号,实现在同一离子源、激发源、原子化器中原子质谱、原子发射光谱和吸收光谱的同时检测。样品分析物在电感耦合等离子体离子源/激发源/原子化器中被蒸发、解离、原子化、电离与激发,被电离的离子在轴向被传输进入质谱检测器中得到原子质谱信号响应;被激发的原子由激发态返回低能级态并同时辐射出其特征波长的光线,从而在径向位置得到原子发射光谱信号响应;被原子化的原子对空心阴极灯光源的入射光产生吸收,亦在径向位置得到原子吸收光谱信号响应。The present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The utility model combines the principles of inductively coupled plasma atomic mass spectrometry, inductively coupled plasma atomic emission spectrometry and atomic absorption spectrometry and the similarities of the instrument structure, and shares an inductively coupled plasma source as an ion source, an excitation source and an atomizer. Different physical quantity signals are obtained through different signal acquisition positions and timing control, and the simultaneous detection of atomic mass spectrometry, atomic emission spectrum and absorption spectrum in the same ion source, excitation source and atomizer is realized. The sample analyte is evaporated, dissociated, atomized, ionized and excited in the inductively coupled plasma ion source/excitation source/atomicizer, and the ionized ions are axially transmitted into the mass spectrometer to obtain the atomic mass spectrometry signal response ; The excited atoms return to the low-energy state from the excited state and radiate light of its characteristic wavelength at the same time, so as to obtain the atomic emission spectrum signal response at the radial position; the atomized atoms absorb the incident light of the hollow cathode light source, AAS signal responses were also obtained at radial positions.
光谱检测系统的原子发射和原子吸收共用一套光路系统,通过时序控制模块调控原子发射光谱和原子吸收光谱的同时检测。在电感耦合等离子体轴向方向采集原子质谱信号,径向方向采集原子发射光谱和原子吸收光谱信号,互不干扰。The atomic emission and atomic absorption of the spectrum detection system share a set of optical system, and the simultaneous detection of the atomic emission spectrum and the atomic absorption spectrum is regulated by the timing control module. The atomic mass spectrometry signal is collected in the axial direction of the inductively coupled plasma, and the atomic emission spectrum and atomic absorption spectrum signals are collected in the radial direction without interfering with each other.
如图1所示,本实用新型的电感耦合等离子体原子质谱、发射和吸收光谱同时检测,包括进样部分、电感耦合等离子体、质谱检测系统和光谱检测系统组成。其中进样部分包括样品1、进样管路2和雾化系统3。As shown in Figure 1, the inductively coupled plasma atomic mass spectrometry, emission and absorption spectra of the present utility model are simultaneously detected, including a sample injection part, an inductively coupled plasma, a mass spectrometry detection system and a spectral detection system. The injection part includes
电感耦合等离子体源包括等离子体炬管4和电感耦合等离子体5;等离子体炬管4连接在样品引入系统后,并在炬管末端产生电感耦合等离子体5。The inductively coupled plasma source includes a
所述质谱检测系统包括质谱检测单元6,其设置在电感耦合等离子体源的轴向方向,接收电感耦合等离子体5中被电离的离子,并得到原子质谱信号响应。The mass spectrometry detection system includes a mass
所述光谱检测系统包括空心阴极灯7、光谱检测器10和光谱检测控制模块11;电感耦合等离子体5中被激发的原子由激发态返回低能级态并同时辐射出其特征波长的光线,并由光谱检测器10接收,在径向位置得到原子发射光谱信号响应;电感耦合等离子体5中被原子化的原子对空心阴极灯7光源的入射光进行吸收,被吸收减弱的入射光再由光谱检测器10接收,在径向位置得到原子吸收光谱信号响应;光谱检测控制模块11同时连接光谱检测器10和空心阴极灯7,控制光谱检测和光源调制,实现原子发射光谱和原子吸收光谱的同时检测。The spectral detection system includes a
本实用新型的电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,在一次进样条件下,获得原子质谱、原子发射和吸收光谱信号的具体流程如下:The inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectrum of the utility model are simultaneously detected, and under the condition of one sample injection, the specific process of obtaining the atomic mass spectrometry, atomic emission and absorption spectrum signals is as follows:
1)将进样管插入样品溶液中,样品溶液雾化后形成气溶胶并引入氩气流中,进入电感耦合等离子体中心区;1) Insert the sample injection tube into the sample solution, the sample solution is atomized to form an aerosol and introduced into the argon flow, and enter the central area of the inductively coupled plasma;
2)在电感耦合等离子体中,样品元素被去溶剂化、气化解离、原子化、激发和电离等;2) In the inductively coupled plasma, the sample elements are desolvated, vaporized, dissociated, atomized, excited and ionized;
3)被电离的待测元素原子经过不同的压力区域后进入质谱检测器。同时,等离子体中处于激发态的元素原子回到低能级态释放出特征发射谱线,进入光谱检测器;处于基态的元素原子吸收空心阴极灯的特征入射光,被吸收减弱的特征光进入同一光谱检测器;光谱检测部分通过光谱检测调控系统进行光源调制和光谱检测的同步工作,实现对原子发射和吸收光谱的同时检测。3) The ionized atoms of the element to be tested enter the mass spectrometer detector after passing through different pressure regions. At the same time, the element atoms in the excited state in the plasma return to the low-energy state to release characteristic emission lines and enter the spectral detector; the element atoms in the ground state absorb the characteristic incident light of the hollow cathode lamp, and the characteristic light whose absorption is weakened enters the same Spectral detector: The spectral detection part performs the synchronous work of light source modulation and spectral detection through the spectral detection control system, and realizes the simultaneous detection of atomic emission and absorption spectra.
4)质谱信号和光谱信号被同步采集;质谱法通过质荷比对元素进行定性定量,光谱法通过激发态和基态原子的特征发射和吸收光谱信号对元素进行定性定量;并做进一步需要的后续数据处理。4) The mass spectrometry signal and the spectral signal are collected synchronously; the mass spectrometry method qualitatively and quantifies the element through the mass-to-charge ratio, and the spectrometry method qualitatively and quantifies the element by the characteristic emission and absorption spectral signals of the excited state and ground state atoms; and do further follow-up required. data processing.
表1为本实用新型采用电感耦合等离子体原子质谱和发射光谱同时检测已验证的部分元素。Table 1 shows some elements that have been verified by the utility model using inductively coupled plasma atomic mass spectrometry and emission spectrometry to detect at the same time.
表1已检测发射谱线元素(括号内为元素在周期表中所在族)Table 1 Detected emission line elements (in parentheses are the groups of elements in the periodic table)
实施例1:本实施实例电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,通过一次进样同时对Cd元素的三种信号进行采集。如图3所示,在调节射频功率的情况下,获得ICP射频功率对三种信号的强度影响。通过研究三者之间的相互影响和相对关系,可为分析元素原子在电感耦合等离子体中的转化过程理论研究提供新的检测工具。Example 1: In this example, inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectroscopy are simultaneously detected, and three signals of Cd element are simultaneously collected through one sample injection. As shown in Figure 3, in the case of adjusting the RF power, the effects of the ICP RF power on the strength of the three signals are obtained. By studying the mutual influence and relative relationship among the three, a new detection tool can be provided for the theoretical study of the transformation process of element atoms in inductively coupled plasma.
实施例2:本实施例电感耦合等离子体原子质谱、发射和吸收光谱同时检测,在一次进样的条件下,且无需对样品溶液进行预富集或者稀释,Mn元素获得更宽线性范围的工作曲线。含有不同浓度Mn元素的样品溶液直接通入电感耦合等离子体中,通过本实用新型的原子质谱、原子发射和吸收光谱同时检测,仅一次进样,在低、中、高浓度下实现测定。如图5所示,在测定Mn的过程中,浓度在1-2000μg L-1时,可以很容易地通过质谱检测进行测定,并获得1μg L-1到2mg L-1的线性范围;通过原子发射光谱测定,系统的线性范围将进一步向上扩展到50mg L-1甚至更高的范围,这取决于用于发射光谱信号检测器单元的信号响应动态范围。二者相结合后,可以获得范围更宽的元素定量工作曲线。无论样品中Mn元素的浓度范围是在μg L-1级别还是mg L-1级别,也只需要一次进样即可完成浓度测量。应当指出,本实施例的线性范围不能更宽的主要原因是实施例采用的CCD检测器饱和,采用动态范围更宽的检测器可以进一步扩大线性范围。Example 2: In this example, inductively coupled plasma atomic mass spectrometry, emission and absorption spectroscopy are simultaneously detected. Under the condition of one sample injection, and the sample solution does not need to be pre-enriched or diluted, the Mn element can obtain a wider linear range of work. curve. The sample solutions containing different concentrations of Mn elements are directly passed into the inductively coupled plasma, and are simultaneously detected by the atomic mass spectrometry, atomic emission and absorption spectroscopy of the utility model. As shown in Fig. 5, in the process of measuring Mn, when the concentration is 1-2000 μg L -1 , it can be easily determined by mass spectrometry detection, and a linear range of 1 μg L -1 to 2 mg L -1 can be obtained; by atomic For emission spectrometry, the linear range of the system will extend further up to 50 mg L -1 or even higher, depending on the dynamic range of the signal response of the detector unit used for the emission spectroscopic signal. By combining the two, a wider range of elemental quantification working curves can be obtained. No matter the concentration range of Mn element in the sample is in μg L -1 level or mg L -1 level, only one injection is needed to complete the concentration measurement. It should be pointed out that the main reason why the linear range of this embodiment cannot be wider is that the CCD detector used in the embodiment is saturated, and the use of a detector with a wider dynamic range can further expand the linear range.
实施例3:本实施例电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,通过原子发射光谱检测消除原子质谱检测的干扰。如图6所示,在用质谱法测试Fe元素时,Cr、Ca、Ni的存在都会对Fe的质谱信号产生干扰54Cr对54Fe、40CaOH对57Fe、58Ni对58Fe,而光谱信号则可以避免这一干扰。Embodiment 3: In this embodiment, inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectroscopy are simultaneously detected, and the interference of atomic mass spectrometry detection is eliminated by atomic emission spectrometry detection. As shown in Figure 6, when Fe elements are tested by mass spectrometry, the presence of Cr , Ca , and Ni will interfere with the mass spectrum signal of Fe . The signal can avoid this interference.
实施例4:本实施例电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,通过原子质谱检测消除原子发射光谱检测的干扰。如图7所示,在用光谱法测试Cu元素时,当样品含有Zn或者P元素时,则会对Cu的发射光谱产生影响,而质谱法则可以避免这种情况的产生。Embodiment 4: In this embodiment, inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectroscopy are simultaneously detected, and the interference of atomic emission spectroscopy detection is eliminated by atomic mass spectrometry detection. As shown in Figure 7, when the Cu element is measured by spectrometry, when the sample contains Zn or P element, it will affect the emission spectrum of Cu, and mass spectrometry can avoid this situation.
实施例5:本实施例电感耦合等离子体原子质谱、原子发射和吸收光谱同时检测,一次进样Cd、Ni、Mn和Zn的混合溶液时,利用质谱法获得的低浓度μg L-1水平Cd和Ni元素的工作曲线,利用发射光谱法获得的高浓度mg L-1水平Mn和Zn元素的工作曲线。在多种元素同时测量时,无需对样品进行稀释或者预富集,可以根据待测元素的浓度范围直接选择不同的测定方法。因此,该方法有利于分析极少样品量的珍贵试样。Example 5: Simultaneous detection of inductively coupled plasma atomic mass spectrometry, atomic emission and absorption spectrometry in this example, when the mixed solution of Cd, Ni, Mn and Zn was injected once, the low concentration μg L -1 level of Cd obtained by mass spectrometry and the working curves of Ni elements, and the working curves of Mn and Zn elements at high concentration mg L -1 levels obtained by emission spectroscopy. When multiple elements are measured at the same time, there is no need to dilute or pre-enrich the sample, and different determination methods can be directly selected according to the concentration range of the element to be measured. Therefore, this method is advantageous for analyzing precious samples with very small sample volumes.
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| CN116990287A (en) * | 2023-08-14 | 2023-11-03 | 元素聚焦(青岛)科技有限公司 | Solid sample spectrum-mass spectrum imaging system and method |
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| CN116990287A (en) * | 2023-08-14 | 2023-11-03 | 元素聚焦(青岛)科技有限公司 | Solid sample spectrum-mass spectrum imaging system and method |
| CN116990287B (en) * | 2023-08-14 | 2024-05-03 | 元素聚焦(青岛)科技有限公司 | Solid sample spectrum-mass spectrum imaging system and method |
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