CN203867834U - Cavity-valve integrated piezoelectric pump - Google Patents

Abstract

The utility model relates to a cavity valve integrated piezoelectric pump, which uses a piezoelectric vibrator as a driving element, and is characterized in that it also includes an integrated cavity valve component, wherein the piezoelectric vibrator is installed on one side of the integrated cavity valve component , a cavity sinking groove is arranged on the integral cavity valve part corresponding to the piezoelectric vibrator, after the piezoelectric vibrator is installed, it forms a sealed cavity with the cavity sinking groove, that is, a pump cavity, and a diversion groove is arranged at the bottom of the cavity sinking groove , the inlet and outlet of the cavity are arranged at the bottom of the diversion groove; the inlet valve opening is arranged at the inlet, and the outlet valve opening is arranged at the outlet; the piezoelectric vibrator undergoes reciprocating bending deformation under the action of alternating voltage, causing the volume of the pump chamber Changes: When the volume of the pump chamber increases, the pressure decreases, the inlet valve opening opens, the outlet valve opening closes, the fluid flows into the chamber from the inlet, and when the volume of the pump chamber decreases, the outlet valve opens and the fluid flows out from the outlet to form pumping capacity. It has the advantage of simple assembly.

Description

A cavity-valve integrated piezoelectric pump

technical field

The utility model belongs to the field of fluid delivery, in particular to a cavity-valve integrated piezoelectric pump device.

Background technique

Piezoelectric pump is a micro-sized volumetric pump driven by piezoelectric vibrators. It has the advantages of simple structure for mass production, small size for miniaturization, digital control and long life. It is widely used in instrumentation, testing equipment and mechanical electronics. It has broad application prospects. Existing piezoelectric pumps include several typical forms of sheet bending direct drive, stack push diaphragm drive and resonance amplification drive. The above types of pumps include valve pumps and valveless pumps according to the types of valves. The output performance of the pump is obviously stronger than that of the valveless pump. Due to the small change in the cavity volume of the piezoelectric pump, the cut-off requirements for the check valve are higher than those of the traditional electromagnetic or piston type. The assembly accuracy has become a bottleneck problem restricting the further miniaturization of valved piezoelectric pumps.

Contents of the invention

In order to solve the inconvenience of large-scale production caused by complex valve assembly and high assembly precision requirements in the process of miniaturization of piezoelectric pumps, a cavity-valve integrated piezoelectric pump is proposed, which consists of two parts, namely The piezoelectric vibrator and the integrated cavity valve component, wherein the valve and the cavity are the same component, without assembly process, have the characteristics of simple assembly and low assembly accuracy requirements in the miniaturization process, and are suitable for large-scale industrial production.

In order to achieve the above object, the utility model adopts the following technical solutions:

The utility model is a cavity-valve integrated piezoelectric pump, which includes a piezoelectric vibrator and an integrated cavity valve component, and is characterized in that the valve and the cavity are the same component, wherein:

The piezoelectric vibrator is installed on one side of the integrated cavity valve part, and forms a sealed cavity with the integrated cavity valve component. Under the action of alternating voltage, the piezoelectric vibrator undergoes reciprocating bending deformation, forming an increase in the volume of the sealed cavity and decrease;

The integrated cavity valve part is made of rubber material or rubber and plastic material, and a cavity groove is arranged at the corresponding position of the piezoelectric vibrator. After the piezoelectric vibrator is installed, it forms a sealed cavity with the cavity groove, that is, the pump cavity. A diversion groove is arranged at the bottom, and the inlet and outlet of the cavity are arranged at the bottom of the diversion groove. The diversion groove is used to reduce the flow resistance from the inlet to the outlet; the inlet is a column with an inlet counterbore inside body structure, arranged at one end of the diversion tank, the bottom surface of the inlet cylinder structure is located between the bottom surface of the cavity and the bottom surface of the diversion tank, an inlet valve opening is arranged between the bottom surface of the inlet sinking tank and the bottom surface of the diversion tank, the inlet The plane where the valve opening is located and the bottom surface of the inlet cylinder form an inlet cantilever beam structure. When the internal pressure of the cavity decreases, the inlet cantilever beam is bent and deformed, the inlet valve opening is opened, and fluid can flow into the pump chamber from the inlet valve opening; the outlet is A cylinder structure with an outlet counterbore inside, the open end of the cylinder structure is arranged on the bottom surface of the diversion groove, the unopened side of the outlet cylinder structure is located outside the pump body, and the bottom surface of the outlet counterbore is located Between the outer surface of the pump body and the bottom surface of the outlet cylinder, the end of the unopened side has a radial contraction area. An outlet valve opening is arranged between the bottom of the sinking tank, and an outlet cantilever beam structure is formed between the outlet valve opening and the bottom surface of the outlet cylinder. When the internal pressure of the cavity increases, the outlet cantilever beam is bent and deformed, and the outlet valve opening is opened, and the fluid can flow from the outlet The valve opens to flow out of the pump chamber.

When working, the piezoelectric vibrator undergoes reciprocating bending deformation under the action of alternating voltage, and the volume of the cavity increases and decreases with the movement of the piezoelectric vibrator. When the volume of the cavity increases, the internal pressure of the cavity decreases, the opening of the inlet valve opens, the opening of the outlet valve closes, and the fluid flows into the cavity from the inlet through the opening of the inlet valve; when the volume of the cavity decreases, the internal pressure of the cavity increases, and the opening of the inlet valve closes , the outlet valve opening is opened, and the fluid flows out from the outlet through the outlet valve opening to form a pumping capacity.

Description of drawings

Fig. 1 is a schematic diagram of a cavity-valve integrated piezoelectric pump of the present invention.

Fig. 2 is a structural schematic diagram of a cavity-valve integrated piezoelectric pump of the present invention.

Fig. 3 is a schematic diagram of the structure of the integrated cavity part used in the embodiment of the present invention.

Detailed ways

Referring to Fig. 1, the cavity valve integrated piezoelectric pump of the present invention is composed of a piezoelectric vibrator 1 and an integrated cavity valve component 2, wherein:

The piezoelectric vibrator 1 is installed on one side of the integrated cavity valve part 2; the integrated cavity valve part 2 is made of a rubber material or rubber and plastic materials, and the vibrator installation groove is arranged on the integrated cavity valve part 21. The piezoelectric vibrator 1 is installed in the vibrator installation groove 21, and a cavity sinker 22 is arranged in the center of the vibrator installation groove 21. After the piezoelectric vibrator 1 is installed, the cavity sinker 22 forms a sealed cavity, that is, a pump cavity. A diversion groove 23 is arranged at the bottom of the cavity sinker 22, and the inlet 24 and outlet 25 of the cavity are arranged at the bottom of the diversion groove 23; the inlet 24 is a cylindrical structure with an inlet sink hole 241 inside, arranged in the At one end of the launder 23, the bottom surface 242 of the inlet cylinder structure is located between the bottom surface of the cavity sinker 22 and the bottom surface of the diversion groove 23, and an inlet valve opening 243 is arranged between the bottom surface of the inlet sink hole 241 and the bottom surface of the diversion groove 23; The outlet 25 is a cylindrical structure with an outlet counterbore 251 inside, the open end of the cylindrical structure is arranged on the bottom surface of the diversion groove 23, and the unopened side of the outlet cylindrical structure is located outside the pump body , the bottom surface of the outlet counterbore 251 is located between the outer surface 26 of the pump body and the bottom surface 252 of the outlet cylinder, the end of the unopened side has a radial contraction area 253, and the starting section 254 of the contraction area is located between the bottom surface of the outlet counterbore 251 and the bottom surface 252 of the outlet cylinder. An outlet valve opening 255 is arranged between the outside bottom surface 26 of the pump body, between the constriction area start section 254 and the bottom surface of the outlet sink 251 .

Claims (2)

1. the valve integrated formula piezoelectric pump in chamber, as driving original paper, characterized by further comprising integral type chamber valve member (2) by piezoelectric vibrator (1), wherein:

Described piezoelectric vibrator (1) is arranged on a side of integral type chamber valve member (2), at described integral type chamber valve member (2), upper and piezoelectric vibrator (1) corresponding position is arranged a cavity deep gouge (22), piezoelectric vibrator 1 is installed afterwards and cavity deep gouge (22) formation seal chamber is pump chamber, a guiding gutter (23) is arranged in cavity deep gouge (22) bottom, is furnished with entrance (24) and the outlet (25) of cavity in the bottom of described guiding gutter (23), described entrance (24) is the column structure of an inside with entrance counterbore (241), be arranged in one end of guiding gutter (23), described entrance (24) column structure bottom surface (242) is positioned between cavity deep gouge (22) bottom surface and guiding gutter (23) bottom surface, between entrance counterbore (241) bottom surface and guiding gutter (23) bottom surface, is furnished with an inlet valve opening (243), described outlet (25) is the column structure of an inside with outlet counterbore (251), opening end is arranged on the bottom surface of guiding gutter (23), described outlet counterbore (251) bottom surface is positioned between pump housing outer surface (26) and outlet cylinder bottom surface (252), outlet (25) column structure not opening one side end has radial contraction region (253), constriction zone starts cross section (254) and is positioned between outlet counterbore (251) bottom surface and pump housing outside bottom surface (26), start to be furnished with outlet valve opening (255) between cross section (254) and outlet counterbore (251) bottom surface at constriction zone.

2. the valve integrated formula piezoelectric pump in chamber according to claim 1, it is characterized in that: described piezoelectric vibrator can be the single-chip piezoelectric vibrator of a slice Thin Piezoelectric sheet material and the bonding formation of elastic base plate, can be also the twin lamella piezoelectric vibrator of two Thin Piezoelectric sheet material and the bonding formation of elastic base plate.