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CN203828901U - Spectrometer for frequency domain OCT system - Google Patents

Spectrometer for frequency domain OCT system Download PDF

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CN203828901U
CN203828901U CN201420058992.9U CN201420058992U CN203828901U CN 203828901 U CN203828901 U CN 203828901U CN 201420058992 U CN201420058992 U CN 201420058992U CN 203828901 U CN203828901 U CN 203828901U
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balzed grating
spectrogrph
photodetector
grating
light
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李中梁
王向朝
袁春晓
南楠
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

一种用于频域OCT系统的光谱仪,其结构包括单模光纤、消色差透镜、闪耀光栅、光电探测器和光谱仪底板,单模光纤、消色差透镜、闪耀光栅和光电探测器均固定在光谱仪底板上。OCT系统的干涉光输入至单模光纤,单模光纤的输出光经消色差透镜准直后照射至闪耀光栅上,衍射光栅的一级衍射光经同一消色差透镜聚焦后由光电探测器探测。本实用新型系统结构简单、紧凑,利用一个消色差透镜同时实现入射光的准直与衍射光栅一级衍射光的聚焦,有利于频域OCT系统的小型化。

A spectrometer for a frequency-domain OCT system, the structure of which includes a single-mode optical fiber, an achromatic lens, a blazed grating, a photodetector and a spectrometer base plate, and the single-mode optical fiber, an achromatic lens, a blazed grating and a photodetector are all fixed on the spectrometer bottom plate. The interference light of the OCT system is input to the single-mode fiber, and the output light of the single-mode fiber is collimated by an achromatic lens and irradiated onto the blazed grating. The first-order diffracted light of the diffraction grating is focused by the same achromatic lens and then detected by a photodetector. The system of the utility model has a simple and compact structure, and uses an achromatic lens to simultaneously realize the collimation of the incident light and the focusing of the first-order diffraction light of the diffraction grating, which is beneficial to the miniaturization of the frequency domain OCT system.

Description

用于频域OCT系统的光谱仪Spectrometers for Frequency-Domain OCT Systems

技术领域technical field

本实用新型涉及光谱仪,特别是一种用于频域OCT系统的光谱仪。The utility model relates to a spectrometer, in particular to a spectrometer used in a frequency domain OCT system.

背景技术Background technique

光学相干层析成像(Optical Coherence Tomography,OCT)是一种基于低相干光干涉术的非侵入高分辨层析成像技术,在活体生物组织成像、亚表面无损检测等领域已有广泛的应用。时域OCT是最早提出来的OCT技术,而之后发展起来的频域OCT,相对于时域OCT在成像速度和灵敏度方面有较大优势,是OCT技术的发展方向。频域OCT系统与时域OCT系统都是基于低相干光干涉原理,不同之处在于干涉信号的探测方式上:时域OCT在时间域探测干涉信号,而频域OCT则利用光谱仪代替时域OCT的点光电探测器,在频域探测干涉信号的光谱。在频域OCT系统中,参考臂和探测臂的干涉光信号准直后入射到光栅上,经光栅衍射后被一物镜聚焦在线阵光电探测器,得到信号的干涉谱;通过对干涉谱做逆傅立叶变换可以得到被测样品深度分辨的反射率信息。Optical coherence tomography (Optical Coherence Tomography, OCT) is a non-invasive high-resolution tomography technology based on low-coherence optical interferometry, which has been widely used in the fields of living biological tissue imaging and subsurface nondestructive testing. Time-domain OCT is the first OCT technology proposed, and the frequency-domain OCT developed later has greater advantages in imaging speed and sensitivity than time-domain OCT, and is the development direction of OCT technology. The frequency-domain OCT system and the time-domain OCT system are both based on the principle of low-coherence optical interference. The difference lies in the detection method of the interference signal: the time-domain OCT detects the interference signal in the time domain, while the frequency-domain OCT uses a spectrometer instead of the time-domain OCT. The point photodetector detects the spectrum of the interfering signal in the frequency domain. In the frequency-domain OCT system, the interference light signals of the reference arm and the detection arm are collimated and incident on the grating, and after being diffracted by the grating, they are focused by an objective lens on the line array photodetector to obtain the interference spectrum of the signal; by inverting the interference spectrum The Fourier transform can obtain the depth-resolved reflectivity information of the measured sample.

由于频域OCT技术利用光谱仪代替点光电探测器,相对于时域OCT技术减少了一维扫描,具有更高的成像速度。当前的超快频域OCT系统的成像速度比最快的时域OCT系统的成像速度要高出两个数量级。频域OCT技术使得实时三维组织成像真正成为了可能,这是其相对于时域OCT最重要的优势。Since the frequency-domain OCT technology uses a spectrometer instead of a point photodetector, it reduces one-dimensional scanning compared to the time-domain OCT technology, and has a higher imaging speed. The imaging speed of current ultrafast frequency-domain OCT systems is two orders of magnitude faster than that of the fastest time-domain OCT systems. Frequency-domain OCT technology makes real-time three-dimensional tissue imaging truly possible, which is its most important advantage over time-domain OCT.

频域OCT技术首先在眼科疾病的诊断中得到应用,随着系统性能的不断提高和各种功能性OCT技术的发展,频域OCT技术的应用也更加广泛,目前已被广泛应用于眼科、肠胃科、心血管、牙科和皮肤科疾病的检测。而各种临床应用也对频域OCT系统提出了越来越高的要求,其中就包括系统及其仪器化后的小型化与便携式,尤其在眼科等成熟的临床应用领域,希望OCT仪器能够小型化至便携的手持式。Frequency-domain OCT technology was first applied in the diagnosis of ophthalmic diseases. With the continuous improvement of system performance and the development of various functional OCT technologies, the application of frequency-domain OCT technology has become more extensive. It has been widely used in ophthalmology, gastrointestinal Medical, cardiovascular, dental and dermatological disease detection. Various clinical applications have also put forward higher and higher requirements for the frequency-domain OCT system, including the miniaturization and portability of the system and its instrumentation, especially in mature clinical application fields such as ophthalmology. It is hoped that the OCT instrument can be small into a portable handheld.

但在目前频域OCT系统的光谱仪中,OCT的干涉信号首先经过一个准直镜准直后入射至衍射光栅,经光栅衍射后的再由聚焦镜聚焦至CCD等线阵光电探测器上,实现干涉谱探测。在该种结构的光谱仪中,入射光束的准直与衍射光束的聚焦分别使用准直镜和聚焦镜实现,入射光束准直与衍射光束聚焦为分立的两个光路,光路较长,不利于小型化,不利于OCT仪器的紧凑与便携化。However, in the spectrometer of the current frequency-domain OCT system, the OCT interference signal is first collimated by a collimator and then incident on the diffraction grating. Interferometric detection. In the spectrometer with this structure, the collimation of the incident beam and the focusing of the diffracted beam are respectively realized by a collimating lens and a focusing lens. The collimation of the incident beam and the focusing of the diffracted beam are separated into two separate optical paths. It is not conducive to the compactness and portability of OCT instruments.

发明内容Contents of the invention

本实用新型的目的在于提供一种用于频域OCT系统的光谱仪,该光谱仪结构简单、紧凑,利用一个消色差透镜同时实现入射光的准直与衍射光栅衍射光的聚焦,有利于频域OCT系统的小型化与便携化。The purpose of this utility model is to provide a spectrometer for frequency-domain OCT system. The spectrometer has a simple and compact structure, and uses an achromatic lens to simultaneously realize the collimation of incident light and the focusing of diffracted light by a diffraction grating, which is beneficial to frequency-domain OCT. System miniaturization and portability.

本实用新型的技术解决方案如下:The technical solution of the utility model is as follows:

一种用于频域OCT系统的光谱仪,其结构包括单模光纤、消色差透镜、闪耀光栅、光电探测器和光谱仪底板;OCT系统的干涉光输入至单模光纤,单模光纤的输出光经消色差透镜准直后的准直光束照射至闪耀光栅上,闪耀光栅的一级衍射光经消色差透镜聚焦后的聚焦光束由光电探测器探测;所述的单模光纤、消色差透镜、闪耀光栅和光电探测器均固定在光谱仪底板上。A spectrometer for a frequency-domain OCT system, the structure of which includes a single-mode fiber, an achromatic lens, a blazed grating, a photodetector and a spectrometer base plate; the interference light of the OCT system is input to the single-mode fiber, and the output light of the single-mode fiber passes through The collimated light beam collimated by the achromatic lens is irradiated onto the blazed grating, and the first-order diffracted light of the blazed grating is detected by the photodetector after the first-order diffracted light of the blazed grating is focused by the achromatic lens; the single-mode optical fiber, the achromatic lens, the blazed Both the grating and the photodetector are fixed on the spectrometer base plate.

所述的单模光纤输出端口的输出端面位于消色差透镜的前焦点,且输出端口为PC或APC接头。The output end face of the single-mode fiber output port is located at the front focus of the achromatic lens, and the output port is a PC or APC connector.

所述的闪耀光栅的闪耀角度为γ度,且闪耀光栅的刻线方向平行于光谱仪底板所在平面与闪耀光栅所在平面的交线。The blaze angle of the blazed grating is γ degrees, and the direction of the scribed lines of the blazed grating is parallel to the intersection line between the plane where the spectrometer base plate is located and the plane where the blazed grating is located.

所述的闪耀光栅在底板上位置的确定如下:首先使光谱仪底板所在平面与闪耀光栅所在平面的夹角等于(90-γ)度,即闪耀光栅上入射光的入射角与衍射角相等;然后以在闪耀光栅的平面内经过闪耀光栅中心的与闪耀光栅的刻线方向垂直的直线为旋转轴旋转闪耀光栅θ角度,以使得一级衍射光与照射至闪耀光栅上的准直光束分开,其中θ小于5度。The determination of the position of the blazed grating on the base plate is as follows: first, the angle between the plane of the spectrometer base plate and the plane of the blazed grating is equal to (90-γ) degrees, that is, the incident angle of the incident light on the blazed grating is equal to the diffraction angle; then The blazed grating is rotated by an angle θ with a straight line passing through the center of the blazed grating in the plane of the blazed grating and perpendicular to the direction of the blazed grating’s lines as the rotation axis, so that the first-order diffracted light is separated from the collimated beam irradiated on the blazed grating, where θ is less than 5 degrees.

所述的光电探测器的光敏面位于闪耀光栅的一级衍射光经消色差透镜聚焦后的焦平面上。The photosensitive surface of the photodetector is located on the focal plane after the first-order diffracted light of the blazed grating is focused by the achromatic lens.

所述的光电探测器为线阵CCD、线阵CMOS线阵光电探测器件。The photodetector is a linear array CCD, a linear array CMOS linear array photodetection device.

本实用新型与在先技术相比,具有以下优点和积极效果:Compared with the prior art, the utility model has the following advantages and positive effects:

1、本实用新型利用一个消色差透镜同时实现入射光的准直与衍射光栅一级衍射光的聚焦,与OCT系统中常用的光谱仪结构相比,省去了一个用于光束聚焦的消色差透镜。1. The utility model uses an achromatic lens to simultaneously realize the collimation of the incident light and the focusing of the first-order diffracted light of the diffraction grating. Compared with the spectrometer structure commonly used in the OCT system, an achromatic lens for beam focusing is omitted .

2、本实用新型结构简单,可实现紧凑型光谱仪,有利于频域OCT系统的小型化。2. The utility model has a simple structure and can realize a compact spectrometer, which is beneficial to the miniaturization of the frequency domain OCT system.

附图说明Description of drawings

图1是本实用新型用于频域OCT系统的光谱仪的结构示意图。Fig. 1 is a structural schematic diagram of a spectrometer used in a frequency-domain OCT system according to the present invention.

图2是本实用新型用于频域OCT系统的光谱仪所在的OCT系统示意图。Fig. 2 is a schematic diagram of the OCT system where the spectrometer used in the frequency domain OCT system of the present invention is located.

具体实施方式Detailed ways

下面结合实施例和附图对本实用新型作进一步说明,但不应以此限制本实用新型的保护范围。Below in conjunction with embodiment and accompanying drawing, the utility model will be further described, but should not limit the protection scope of the utility model with this.

本实用新型用于频域OCT系统的光谱仪的结构示意图如图1所示。由图可见,本实用新型用于频域OCT系统的光谱仪,其结构包括单模光纤1、消色差透镜2、闪耀光栅3、光电探测器4和光谱仪底板5;OCT系统的干涉光输入至单模光纤1,单模光纤1的输出光6经消色差透镜2准直后的准直光束7照射至闪耀光栅3上,闪耀光栅3的一级衍射光8经消色差透镜2聚焦后的聚焦光束9由光电探测器4探测;单模光纤1、消色差透镜2、闪耀光栅3和光电探测器4均固定在光谱仪底板5上。The structural schematic diagram of the spectrometer used in the frequency domain OCT system of the present invention is shown in FIG. 1 . It can be seen from the figure that the utility model is used for the spectrometer of the frequency domain OCT system, and its structure includes a single-mode optical fiber 1, an achromatic lens 2, a blazed grating 3, a photodetector 4 and a spectrometer base plate 5; the interference light of the OCT system is input to the single Mode fiber 1, the output light 6 of single-mode fiber 1 is irradiated on the blazed grating 3 by the collimated beam 7 collimated by the achromat lens 2, and the first-order diffracted light 8 of the blazed grating 3 is focused by the achromat lens 2 The light beam 9 is detected by the photodetector 4; the single-mode optical fiber 1, the achromatic lens 2, the blazed grating 3 and the photodetector 4 are all fixed on the spectrometer base plate 5.

所述的单模光纤1输出端口的输出端面位于消色差透镜2的前焦点,且输出端口为PC或APC接头。The output end face of the output port of the single-mode optical fiber 1 is located at the front focus of the achromatic lens 2, and the output port is a PC or APC connector.

所述的闪耀光栅3的闪耀角度为γ度,且闪耀光栅3的刻线方向平行于光谱仪底板5所在平面与闪耀光栅3所在平面的交线。The blaze angle of the blazed grating 3 is γ degrees, and the direction of the scribe line of the blazed grating 3 is parallel to the intersection line between the plane where the spectrometer base plate 5 is located and the plane where the blazed grating 3 is located.

所述的闪耀光栅3在底板5上位置的确定如下:首先使光谱仪底板5所在平面与闪耀光栅3所在平面的夹角等于(90-γ)度,即闪耀光栅3上入射光的入射角与衍射角相等;然后以在闪耀光栅3的平面内经过闪耀光栅3中心的与闪耀光栅3的刻线方向垂直的直线为旋转轴旋转闪耀光栅3角度θ,以使得一级衍射光8与照射至闪耀光栅上的准直光束7分开,其中θ小于5度。The determination of the position of the blazed grating 3 on the base plate 5 is as follows: first, the angle between the plane where the spectrometer base plate 5 is located and the plane where the blazed grating 3 is located is equal to (90-γ) degrees, that is, the angle of incidence of the incident light on the blazed grating 3 and Diffraction angle is equal; Then take the straight line perpendicular to the line direction of blazed grating 3 through the center of blazed grating 3 in the plane of blazed grating 3 as rotation axis to rotate blazed grating 3 angle θ, so that the first-order diffracted light 8 is irradiated to The collimated beam 7 splits on the blazed grating where θ is less than 5 degrees.

所述的光电探测器4的光敏面位于闪耀光栅3的一级衍射光经消色差透镜2聚焦后的焦平面上。The photosensitive surface of the photodetector 4 is located on the focal plane where the first-order diffracted light of the blazed grating 3 is focused by the achromatic lens 2 .

所述的光电探测器4为线阵CCD、线阵CMOS线阵光电探测器件。The photodetector 4 is a linear array CCD, a linear array CMOS linear array photodetection device.

如图2所示的频域OCT系统,宽带光源11发出的光输入至光纤耦合器12的端口12a,光纤耦合器12输出的两路光分别输入至参考臂和样品臂:端口12b输出的光输入至参考臂,经偏振控制器13后输出至准直透镜14,经准直透镜14准直后由反射镜15反射,并返回至透镜14和偏振控制器13,再次由进入光纤耦合器12的端口12b;端口12c输出的光输入至样品臂,经透镜16准直后,由扫描振镜17反射至聚焦透镜18,光束聚焦后入射至样品19,由样品19反射的光束依次经过透镜18、扫描振镜17和透镜16,再次进入至光纤耦合器12的端口12c。由光纤耦合器12的端口12d输出的干涉信号输入至本实用新型的用于频域OCT系统的紧凑型光谱仪的单模光纤1中,光电探测器4输出的电信号由计算机20采集,经处理后得到样品19的层析结构图像。In the frequency domain OCT system shown in Figure 2, the light emitted by the broadband light source 11 is input to the port 12a of the fiber coupler 12, and the two paths of light output by the fiber coupler 12 are respectively input to the reference arm and the sample arm: the light output from the port 12b Input to the reference arm, output to the collimator lens 14 after the polarization controller 13, reflect by the mirror 15 after being collimated by the collimator lens 14, and return to the lens 14 and the polarization controller 13, and enter the fiber coupler 12 again Port 12b of port 12c; the light output from port 12c is input to the sample arm, after being collimated by the lens 16, it is reflected by the scanning galvanometer 17 to the focusing lens 18, and the beam is focused and incident on the sample 19, and the beam reflected by the sample 19 passes through the lens 18 in turn , the scanning galvanometer 17 and the lens 16, and enter the port 12c of the fiber coupler 12 again. The interference signal output by the port 12d of the fiber coupler 12 is input into the single-mode optical fiber 1 of the compact spectrometer used in the frequency domain OCT system of the present utility model, and the electrical signal output by the photodetector 4 is collected by the computer 20 and processed. Finally, the tomographic structure image of sample 19 was obtained.

宽带光源11的中心波长为830nm,带宽为±10nm;宽带光源发出的光经50/50光纤耦合器分别射入参考臂与样品臂。参考臂端光纤输出的光经准直后照射在参考镜上。样品臂光纤输出的光经准直后通过振镜,被物镜聚焦在样品上。振镜的转轴轴心位于物镜的前焦面形成近似远心光路,保证在扫描样品时不引入额外的相移。参考镜与样品返回的散射光重新被耦合进光纤,并通过光纤耦合器的输出端连接至本实用新型的用于频域OCT系统的紧凑型光谱仪的单模光纤。单模光纤输出端口为APC接头;消色差透镜的焦距为200mm,口径约为Ф50mm,单模光纤输出端口的输出端面位于消色差透镜的前焦点,即与消色差透镜中心距离为200mm;闪耀光栅的线数为1200线/mm,边长为50mm,在830nm波长处的闪耀角度为29.87°;确定闪耀光栅在底板上的位置:首先使光谱仪底板所在平面与闪耀光栅所在平面的夹角等于(90-29.87)=60.13度,此时闪耀光栅上入射光的入射角与衍射角相等,然后以在闪耀光栅的平面内经过闪耀光栅中心的与闪耀光栅的刻线方向垂直的直线为旋转轴旋转闪耀光栅角度1度,以使得衍射光束与入射光束分开;光电探测器为线阵CCD,像素数为1024,像素尺寸为14微米。在上述条件下,本实用新型的用于频域OCT系统的紧凑型光谱仪的光谱分辨率为0.05nm,满足系统要求。The central wavelength of the broadband light source 11 is 830nm, and the bandwidth is ±10nm; the light emitted by the broadband light source is respectively injected into the reference arm and the sample arm through a 50/50 fiber coupler. The light output from the optical fiber at the end of the reference arm is collimated and irradiated on the reference mirror. The light output from the fiber optic of the sample arm passes through the galvanometer after being collimated, and is focused on the sample by the objective lens. The axis of rotation of the galvanometer is located at the front focal plane of the objective lens to form an approximate telecentric optical path, ensuring that no additional phase shift is introduced when scanning the sample. The scattered light returned by the reference mirror and the sample is coupled into the optical fiber again, and is connected to the single-mode optical fiber of the compact spectrometer used in the frequency domain OCT system of the present invention through the output end of the optical fiber coupler. The single-mode fiber output port is an APC connector; the focal length of the achromatic lens is 200mm, and the diameter is about Ф50mm. The number of lines is 1200 lines/mm, the side length is 50mm, and the blazed angle at 830nm wavelength is 29.87°; determine the position of the blazed grating on the base plate: first make the angle between the plane of the spectrometer base plate and the plane of the blazed grating equal to ( 90-29.87)=60.13 degrees, at this time, the incident angle of the incident light on the blazed grating is equal to the diffraction angle, and then the rotation axis is rotated by a straight line passing through the center of the blazed grating in the plane of the blazed grating and perpendicular to the line direction of the blazed grating The angle of the blazed grating is 1 degree, so that the diffracted beam is separated from the incident beam; the photodetector is a linear array CCD, the number of pixels is 1024, and the pixel size is 14 microns. Under the above conditions, the spectral resolution of the compact spectrometer used in the frequency domain OCT system of the present invention is 0.05nm, which meets the system requirements.

Claims (6)

1. for the spectrogrph of frequency domain OCT system, its structure comprises single-mode fiber (1), achromat (2), balzed grating, (3), photodetector (4) and spectrogrph base plate (5); The interference light of OCT system inputs to single-mode fiber (1), it is upper that the collimated beam (7) of the output light (6) of this single-mode fiber (1) after achromat (2) collimation is radiated at described balzed grating, (3), and the focused beam (9) of the first-order diffraction light (8) of this balzed grating, (3) after achromat (2) focuses on surveyed by photodetector (4); Described single-mode fiber (1), achromat (2), balzed grating, (3) and photodetector (4) are all fixed on spectrogrph base plate (5).
2. spectrogrph according to claim 1, it is characterized in that the output end face of described single-mode fiber (1) output port is positioned at the front focus of achromat (2), and output port is PC or APC joint.
3. spectrogrph according to claim 1, it is characterized in that the flare angle of described balzed grating, (3) is γ degree, and the groove direction of balzed grating, (3) is parallel to the intersection of spectrogrph base plate (5) place plane and balzed grating, (3) place plane.
4. spectrogrph according to claim 1, it is characterized in that described balzed grating, (3) is as follows at determining of the upper position of base plate (5): first make the angle of spectrogrph base plate (5) place plane and balzed grating, (3) place plane equal (90-γ) degree, the angle of incidence of the upper incident illumination of balzed grating, (3) equates with the angle of diffraction; Then take in the plane of balzed grating, (3) is (3) θ angles of rotating shaft rotation balzed grating, through the vertical straight line of the groove direction with balzed grating, (3) at balzed grating, (3) center, first-order diffraction light (8) and the collimated beam (7) exposing on balzed grating, are separated, and wherein θ is less than 5 degree.
5. spectrogrph according to claim 1, on the focal plane of the first-order diffraction light that the photosurface that it is characterized in that described photodetector (4) is positioned at balzed grating, (3) after achromat (2) focuses on.
6. spectrogrph according to claim 1, is characterized in that described photodetector (4) is for line array CCD, linear array CMOS photodiode array part.
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103845039A (en) * 2014-02-07 2014-06-11 中国科学院上海光学精密机械研究所 Spectrograph for frequency domain OCT (Optical Coherence Tomography) system
CN111366268A (en) * 2020-04-21 2020-07-03 西安和其光电科技股份有限公司 Low-cost multichannel semiconductor absorption type temperature measurement system and sensing probe preparation process
CN114166347A (en) * 2021-12-07 2022-03-11 苏州东方克洛托光电技术有限公司 Medium-wave infrared hyperspectral spectral imaging unit
CN114235152A (en) * 2021-12-07 2022-03-25 苏州东方克洛托光电技术有限公司 Miniaturized imaging spectrometer light splitting optical path
CN114440772A (en) * 2022-01-28 2022-05-06 合肥工业大学 Blazed transmission grating spectrometer

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103845039A (en) * 2014-02-07 2014-06-11 中国科学院上海光学精密机械研究所 Spectrograph for frequency domain OCT (Optical Coherence Tomography) system
CN103845039B (en) * 2014-02-07 2015-09-16 中国科学院上海光学精密机械研究所 For the spectrogrph of frequency domain OCT system
CN111366268A (en) * 2020-04-21 2020-07-03 西安和其光电科技股份有限公司 Low-cost multichannel semiconductor absorption type temperature measurement system and sensing probe preparation process
CN114166347A (en) * 2021-12-07 2022-03-11 苏州东方克洛托光电技术有限公司 Medium-wave infrared hyperspectral spectral imaging unit
CN114235152A (en) * 2021-12-07 2022-03-25 苏州东方克洛托光电技术有限公司 Miniaturized imaging spectrometer light splitting optical path
CN114440772A (en) * 2022-01-28 2022-05-06 合肥工业大学 Blazed transmission grating spectrometer
CN114440772B (en) * 2022-01-28 2023-06-27 合肥工业大学 Blazed transmission grating type spectrometer

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