CN203616532U - Sub-wavelength plasmon polarization converter - Google Patents
Sub-wavelength plasmon polarization converter Download PDFInfo
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Abstract
Description
技术领域technical field
本实用新型涉及一种亚波长等离激元偏振转换器,该转换器由一对刻有亚波长小孔的金属偏振片构成,它可以将电磁波的线偏振方向旋转90度。该转换器还可用作单向传输器、亚波长开关或调制器。The utility model relates to a sub-wavelength plasmon polarization converter, which is composed of a pair of metal polarizers engraved with sub-wavelength small holes, which can rotate the linear polarization direction of electromagnetic waves by 90 degrees. The converter can also be used as a unidirectional transmitter, subwavelength switch or modulator.
背景技术Background technique
传统的偏振器及偏振转换器主要是基于自然材料的二向色性、双折射效应或光学活性等特性,由此可产生线偏振光或改变光波的偏振态。众所周知,利用二个线偏振片可产生线偏振光并可将光的偏振方向加以旋转。不过,根据马吕斯定律,光的透射效率将随着偏振片旋转角度θ的增大而减小。当θ=90°时,光的透射效率变为0。这意味着,光无法通过两个极化方向正交的偏振片,利用正交的偏振片也无法获得偏振方向90度的旋转。与此不同,利用波片的双折射和相位延迟效应,入射光波的偏振方向或偏振态可有效地加以控制。特别是,当入射偏振与半波片的光轴成45度夹角时,线偏振光的振动方向可旋转90度。此外,由于某些物质具有自然旋光性或法拉第效应,光波的偏振面随着传播距离逐渐发生旋转。因为旋转角度与通光距离成正比,故光的偏振方向可自由地进行调控。然而,由于较弱的双折射特性或较小的旋光系数,上述效应的实施需要较强的外加磁场或较大的通光距离(通光距离远远大于电磁波长)。这对微纳光子学元器件的开发和集成而言是一个十分不利的因素。Traditional polarizers and polarization converters are mainly based on the dichroism, birefringence effect or optical activity of natural materials, which can generate linearly polarized light or change the polarization state of light waves. It is well known that two linear polarizers can be used to generate linearly polarized light and to rotate the polarization direction of the light. However, according to Marius' law, the light transmission efficiency will decrease with the increase of the rotation angle θ of the polarizer. When θ=90°, the light transmission efficiency becomes 0. This means that light cannot pass through two polarizers with orthogonal polarization directions, nor can a 90-degree rotation of the polarization direction be obtained with orthogonal polarizers. In contrast, by using the birefringence and phase delay effects of the wave plate, the polarization direction or polarization state of the incident light wave can be effectively controlled. In particular, when the incident polarization forms an angle of 45 degrees with the optical axis of the half-wave plate, the vibration direction of linearly polarized light can be rotated by 90 degrees. In addition, due to the natural optical rotation or Faraday effect of certain substances, the polarization plane of light waves gradually rotates with the propagation distance. Because the rotation angle is proportional to the distance through which the light passes, the polarization direction of the light can be freely adjusted. However, due to weak birefringence or small optical rotation coefficient, the implementation of the above effects requires a strong external magnetic field or a large light transmission distance (the light transmission distance is much longer than the electromagnetic wavelength). This is a very unfavorable factor for the development and integration of micro-nano photonics components.
近来,微结构的表面等离激元材料(即金属材料)为开发亚波长的电磁波偏振器和转换器提供了新的途径。由于金属独特的介电响应,电磁场能够与金属表面自由电子振荡产生耦合,形成表面等离激元或局域等离激元共振。通过表面等离激元材料的微结构设计和研究,人们陆续发现了许多有趣的物理效应,如增强透射效应、光束准直效应、负折射效应等。在偏振特性上,一维金属狭缝光栅、二维椭圆形或矩形小孔阵列的透射具有强烈的偏振依赖性,可用以研制亚波长偏振器。基于增强透射效应,刻有亚波长小孔(如L或S形小孔阵列)的单层或双层金属膜也可用于偏振转换,如实现90度的偏振旋转。不过,这些偏振转换器通常具有较低的转换效率或较窄的工作带宽(或运用于特定的工作波长)。另一方面,基于亚波长金属开口环、金属棒等粒子,人们构造了复合的超构材料。这些材料可拥有各向异性(类似于波片)或光学活性(手性材料)等性能,从而为实现各偏振态的转换提供可能。然而,亚波长的超构材料通常具有制备复杂且损耗较大的缺点,这限制了其在短波长特别是可见和近红外波段的应用。Recently, microstructured surface plasmonic materials (i.e., metallic materials) have provided new avenues for the development of subwavelength electromagnetic wave polarizers and converters. Due to the unique dielectric response of metals, the electromagnetic field can couple with free electron oscillations on the metal surface to form surface plasmon or localized plasmon resonance. Through the microstructure design and research of surface plasmon materials, people have discovered many interesting physical effects, such as enhanced transmission effect, beam collimation effect, negative refraction effect, etc. In terms of polarization characteristics, the transmission of one-dimensional metal slit gratings and two-dimensional elliptical or rectangular aperture arrays has strong polarization dependence, which can be used to develop subwavelength polarizers. Based on the enhanced transmission effect, single-layer or double-layer metal films engraved with subwavelength small holes (such as L or S-shaped small hole arrays) can also be used for polarization conversion, such as realizing 90-degree polarization rotation. However, these polarization converters usually have low conversion efficiency or narrow operating bandwidth (or apply to specific operating wavelengths). On the other hand, based on particles such as subwavelength metal split rings and metal rods, people have constructed composite metamaterials. These materials can possess properties such as anisotropy (similar to a wave plate) or optical activity (chiral materials), which offer the possibility of switching between polarization states. However, subwavelength metamaterials usually have the disadvantages of complex preparation and high loss, which limits their application in short wavelengths, especially in the visible and near-infrared bands.
发明内容Contents of the invention
为了解决目前90度的偏振转换器所具有的效率低下、带宽较窄或制备复杂的缺点,本实用新型提供了一种亚波长偏振转换器,该转换器不仅结构简单,而且转换效率高、工作带宽大。In order to solve the shortcomings of low efficiency, narrow bandwidth or complicated preparation of the current 90-degree polarization converter, the utility model provides a sub-wavelength polarization converter. The bandwidth is large.
本实用新型解决其技术问题所采用的技术方案是:The technical scheme that the utility model solves its technical problem adopts is:
一种亚波长等离激元偏振转换器,包括入射偏振片和出射偏振片,入射偏振片和出射偏振片之间由介质或空气层间隔。其中,入射偏振片和出射偏振片均采用等离激元材料;所述入射偏振片和出射偏振片上刻有亚波长尺寸的小孔,入射偏振片上的每个小孔与出射偏振片上对应的小孔之间形成一夹角,且形成夹角的两个小孔的端点交叉。A sub-wavelength plasmon polarization converter includes an incident polarizer and an outgoing polarizer, and the incident polarizer and the outgoing polarizer are separated by a medium or an air layer. Wherein, both the incident polarizer and the outgoing polarizer use plasmonic materials; the incident polarizer and the outgoing polarizer are engraved with small holes of sub-wavelength size, and each small hole on the incident polarizer is connected to the corresponding small hole on the outgoing polarizer. An included angle is formed between the holes, and the ends of the two small holes forming the included angle intersect.
两个小孔形成的夹角为0~90度。The included angle formed by the two small holes is 0-90 degrees.
所述偏振片的形状为矩形或者圆形等;入射偏振片和出射偏振片上的小孔为矩形、椭圆形或梯形等,偏振片和小孔的形状不限。The shape of the polarizer is rectangular or circular; the small holes on the incident polarizer and the outgoing polarizer are rectangular, elliptical or trapezoidal, etc., and the shapes of the polarizer and the small holes are not limited.
入射偏振片和出射偏振片的间距为亚波长。入射偏振片和出射偏振片上的小孔为周期性排列或非周期性排列。The pitch between the entrance and exit polarizers is sub-wavelength. The small holes on the incident polarizer and the outgoing polarizer are arranged periodically or aperiodically.
本实用新型利用二个极化方向正交的表面等离激元偏振片之间的近场耦合效应实现线偏振90度的旋转。入射偏振片只允许一种偏振的电磁波耦合进入,而出射偏振片只允许与前者偏振方向正交的电磁波出射。这里,入射和出射金属偏振片均刻有矩形亚波长小孔;从通光方向看,二个偏振片的对应小孔之间成垂直L形交叉。这一配置可增强两个正交偏振态之间的耦合效应,进而提高透射/转换效率并扩大工作带宽。The utility model utilizes the near-field coupling effect between two surface plasmon polarizers with orthogonal polarization directions to realize the 90-degree rotation of linear polarization. The incident polarizer only allows electromagnetic waves of one polarization to be coupled in, while the outgoing polarizer only allows electromagnetic waves orthogonal to the former polarization direction to exit. Here, the incident and outgoing metal polarizers are engraved with rectangular sub-wavelength small holes; viewed from the direction of light transmission, the corresponding small holes of the two polarizers cross each other in a vertical L shape. This configuration enhances the coupling effect between the two orthogonal polarization states, thereby increasing the transmission/conversion efficiency and expanding the operating bandwidth.
本实用新型的科学价值在于揭示了一种异常的透射效应:电磁波能够通过两个极化方向正交的表面等离激元偏振片。这一效应突破了传统的马吕斯定律的限制。本实用新型的应用价值在于该转换器能够实现90度的偏振转化,且转换效率高、工作带宽大;而且除了马吕斯定律所禁止的正交方向,还可以将入射线偏振切换到任意偏振方向,实现“万向”的偏转转换。在红外波段,透射或转换效率可达52%,工作带宽可达12%。在微波段,透射效率可达100%,工作带宽可达15%。该偏振转换器的厚度为亚波长,其结构简单,易于制备和集成,可应用于光频、太赫兹或微波段。此外,该转换器还可用作单向传输器、亚波长开关和调制器。The scientific value of the utility model lies in revealing an abnormal transmission effect: electromagnetic waves can pass through two surface plasmon polarizers with orthogonal polarization directions. This effect breaks through the limitation of the traditional Marius' law. The application value of the utility model lies in that the converter can achieve 90-degree polarization conversion, and has high conversion efficiency and wide working bandwidth; besides the orthogonal direction prohibited by Marius' law, the polarization of incident rays can also be switched to any polarization Direction, to achieve "universal" deflection conversion. In the infrared band, the transmission or conversion efficiency can reach 52%, and the working bandwidth can reach 12%. In the microwave segment, the transmission efficiency can reach 100%, and the working bandwidth can reach 15%. The thickness of the polarization converter is sub-wavelength, its structure is simple, it is easy to prepare and integrate, and it can be applied to optical frequency, terahertz or microwave bands. Additionally, the converter can be used as a unidirectional transmitter, subwavelength switch, and modulator.
附图说明Description of drawings
图1(a)是本实用新型的结构示意图,(b)是两个小孔形成的单个元胞的侧面视图,(c)是单个元胞的正面视图。Figure 1 (a) is a schematic structural view of the utility model, (b) is a side view of a single cell formed by two small holes, and (c) is a front view of a single cell.
图2是利用聚焦离子束(FIB)系统在Au/SiN/Au上加工正交的出射(图a)和入射(图b)偏振片的局部扫描电镜(SEM)图片。Figure 2 is a partial scanning electron microscope (SEM) image of orthogonal outgoing (panel a) and incident (panel b) polarizers fabricated on Au/SiN/Au using a focused ion beam (FIB) system.
图3是实验测量(图a)和理论模拟(图b)的透射曲线。Figure 3 shows the transmission curves of experimental measurements (panel a) and theoretical simulations (panel b).
图4是模拟计算的入射偏振片(图a)和出射偏振片(图b)的电流分布。Figure 4 is the current distribution of the input polarizer (figure a) and the output polarizer (figure b) calculated by simulation.
图5(a)是不同孔阵周期的透射效率Txy曲线,(b)是不同SiN厚度时的透射效率Txy曲线。Figure 5(a) is the transmission efficiency Txy curve of different hole array periods, and (b) is the transmission efficiency Txy curve of different SiN thicknesses.
图6(a)和(b)分别是微波段加工的单个偏振片和正交配置的偏振转换器的实物图片,(c)是理论计算和实验测得的单个偏振片的透射曲线,(d)是理论计算和实验测得的偏振转换器的透射曲线。Figure 6(a) and (b) are the physical pictures of a single polarizer processed in the microwave section and the polarization converter in an orthogonal configuration, (c) is the transmission curve of a single polarizer measured by theoretical calculation and experiment, (d ) are the theoretically calculated and experimentally measured transmission curves of the polarization converter.
图7(a)是偏振转换器在不同间距下的理论和实验透射效率Txy曲线,(b)是偏振转换器在不同矩形小孔边长下的理论透射效率Txy曲线。Figure 7(a) is the theoretical and experimental transmission efficiency Txy curves of the polarization converter at different pitches, and (b) is the theoretical transmission efficiency Txy curve of the polarization converter at different rectangular hole side lengths.
图8(a)是30度倾斜角的出射偏振片的实物图,(b)是实验(上)和理论(下)的不同L型“交叉”夹角的透射曲线。Figure 8(a) is the physical picture of the output polarizer with a tilt angle of 30 degrees, and (b) is the transmission curve of different L-shaped "crossing" angles in experiment (top) and theory (bottom).
图9(a)是“万向”偏振转换器的入射或出射偏振片的结构示意图,(b)是局部小孔的设计示意图,(c)是“万向”偏振转换器的入射或出射偏振片的实物加工图片,(d)是实验测量的“万向”偏振转换器在不同旋转角度下的透射曲线。Figure 9(a) is a schematic diagram of the structure of the incident or exit polarizer of the "universal" polarization converter, (b) is a schematic design of a local small hole, and (c) is the incident or exit polarization of the "universal" polarization converter (d) is the transmission curve of the experimentally measured "universal" polarization converter at different rotation angles.
具体实施方式Detailed ways
图1给出了偏振转换器的结构示意图以及单个元胞的侧面、正面视图。该转换器由两个刻有亚波长矩形小孔的金属膜/片M构成,两者由电介质(或空气)层I间隔。金属膜上的矩形小孔阵列的周期皆为d,其余结构参数如图1所示。从通光方向看,两层矩形小孔之间成垂直L型“交叉”,即交叉夹角为90度。这里设定入射面小孔的长边沿着水平y方向,x偏振的电磁波垂直入射于金属表面。这一系统可保证只有电磁波的x偏振分量才能耦合进入,且只有y偏振分量才能出射。这样,如果出现透射的话,必然导致线偏振90度的旋转。下面结合附图以红外(图2-5)和微波段(图6-9)作为三个实施例对本实用新型作进一步说明。Figure 1 shows the schematic diagram of the structure of the polarization converter and the side and front views of a single cell. The converter consists of two metallic films/sheets M engraved with subwavelength rectangular apertures, separated by a dielectric (or air) layer I. The period of the rectangular hole array on the metal film is d, and the other structural parameters are shown in Fig. 1 . Viewed from the direction of light transmission, the two layers of rectangular holes form a vertical L-shaped "intersection", that is, the intersection angle is 90 degrees. Here, the long side of the small hole on the incident surface is set to be along the horizontal y direction, and the x-polarized electromagnetic wave is vertically incident on the metal surface. This system ensures that only the x-polarized component of the electromagnetic wave can be coupled in, and only the y-polarized component can exit. Thus, if transmission occurs, a 90-degree rotation of the linear polarization must result. The utility model will be further described below in conjunction with the accompanying drawings by taking the infrared (Fig. 2-5) and the microwave segment (Fig. 6-9) as three embodiments.
实施例1Example 1
作为第一个实施例,偏振转换器的工作频率位于光频段。该转换器由金膜/氮化硅/金膜三明治结构构成,金膜上分别制备有预先设计的微结构。在实验过程中,首先利用磁控溅射在悬空的50纳米厚的氮化硅薄膜两侧分别镀上100纳米厚的金膜,然后利用聚焦离子束(FIB)系统在两侧的金膜上分别制备亚波长小孔阵列。制备的小孔阵列的周期为600纳米,矩形小孔的长为400纳米、宽150纳米,整个阵列的尺寸为50微米*50微米。为了使得两侧的矩形小孔能够对准成L型“交叉”,在加工过程中样品的四个角落用FIB分别制作了四个贯穿的标记,用以辅助定位和加工。图2(a)和图2(b)分别为出射和入射偏振片的局部SEM图片。从图2(b)可以看出,两侧加工的矩形小孔相互对应,基本成L型垂直“交叉”。As a first embodiment, the working frequency of the polarization converter is in the optical frequency band. The converter is composed of a gold film/silicon nitride/gold film sandwich structure, and pre-designed microstructures are respectively prepared on the gold film. During the experiment, a 100-nm-thick gold film was coated on both sides of a suspended 50-nm-thick silicon nitride film by magnetron sputtering, and then a focused ion beam (FIB) system was used to coat the gold films on both sides. Subwavelength pinhole arrays were fabricated separately. The period of the prepared small hole array is 600 nanometers, the length of the rectangular small holes is 400 nanometers, and the width is 150 nanometers, and the size of the entire array is 50 micrometers*50 micrometers. In order to align the rectangular holes on both sides into an L-shaped "cross", four through-marks were made with FIB at the four corners of the sample during processing to assist in positioning and processing. Figure 2(a) and Figure 2(b) are partial SEM images of the outgoing and incoming polarizers, respectively. It can be seen from Figure 2(b) that the rectangular small holes processed on both sides correspond to each other, basically forming an L-shaped vertical "cross".
图3(a)给出了该偏振转换器的实验测量结果。图中实心和空心标记分别代表出射波为y和x偏振的透射效率。从测试结果可以看出,在整个测试波段内,出射光中并无有效的x偏振分量;这也反映了出射面矩形小孔的良好的偏振特性。然而出射的y偏振分量,即与入射偏振相垂直的分量,在800纳米、1000纳米和1340纳米附近分别取得透射效率的极大值。特别是在1000纳米附近,透射效率达到40%,半高宽或工作带宽约为80纳米(相对带宽为8%)。为了验证上述实验结果,图3(b)给出了基于时域有限差分(FDTD)方法模拟计算的该结构的透射谱。在计算过程中,氮化硅的折射率设为nI=2.0,金的介电常数采用了Drude模型:其中ωp=1.37×1016rad/s,γ=8.5×1013Hz。计算结果显示,理论和实验能够很好地吻合。这些结果一致表明,在特定波段,两个正交的表面等离激元偏振片不仅能产生有效的透射,而且还能使光的偏振方向旋转90度。Figure 3(a) presents the experimental measurement results of this polarization converter. The solid and hollow marks in the figure represent the transmission efficiencies of the outgoing waves with y and x polarizations, respectively. It can be seen from the test results that there is no effective x-polarized component in the outgoing light within the entire test wavelength band; this also reflects the good polarization characteristics of the rectangular hole on the outgoing surface. However, the outgoing y-polarized component, that is, the component perpendicular to the incident polarization, obtains the maximum value of the transmission efficiency around 800 nm, 1000 nm and 1340 nm, respectively. Especially around 1000nm, the transmission efficiency reaches 40%, and the FWHM or operating bandwidth is about 80nm (relative bandwidth is 8%). In order to verify the above experimental results, Fig. 3(b) shows the transmission spectrum of the structure simulated and calculated based on the finite difference time domain (FDTD) method. In the calculation process, the refractive index of silicon nitride is set to n I =2.0, and the dielectric constant of gold adopts the Drude model: Where ω p =1.37×10 16 rad/s, γ=8.5×10 13 Hz. The calculation results show that the theory and experiment can be in good agreement. These results consistently show that two orthogonal surface plasmon polarizers can not only produce efficient transmission but also rotate the polarization direction of light by 90 degrees at specific wavelength bands.
理论分析表明,这些透射峰的产生与两个金属膜间的内部表面等离极化激元(ISPP)的激发有关。ISPP的激发条件可近似表达为kISPP=Gmn,其中 (δ=22nm为金属的趋肤深度,m和n为两个整数)。因而ISPP的共振波长近似为据此,800纳米、1000纳米和1340纳米处的透射峰可分别归功于对应(2,1)、(2,0)、(1,1)倒格矢的ISPP激发[(1,0)倒格矢激发的透射峰位于测量波长范围之外]。由于1000纳米处的透射峰非常靠近矩形小孔的截止波长(矩形孔的截止波长为因而其透射效率也远高于其它的透射峰。但是,什么原因导致电磁偏振的转化呢?实际上,在双层穿孔金属膜内,ISPP的激发必将和矩形小孔的波导模产生耦合(波导模又和小孔周围的电子振荡相关联)。不仅如此,两层金属膜上的矩形小孔也会发生相互作用。这些互作用使得系统的共振波长偏离理想的ISPP共振,也使得系统的电磁偏振发生改变。为了简要说明这个问题,本实用新型用FDTD方法模拟了波长为1000纳米处的金属偏振片内部的电流分布图。图4(a)显示的是入射偏振片xy面内的电流分布(金属的一半厚度处)。在x偏振的入射电磁场和ISPP的共同作用下,入射端小孔内的电磁场或波导模获得增强。波导模的激发在小孔周围伴随着环绕电流并同时聚集正负电荷。这些环绕电流和聚集的正负电荷将和出射偏振片的矩形小孔产生耦合作用,即在出射小孔附近感应出新的正负电荷和环绕电流(图4(b))。后者在出射小孔内激发电磁场并产生y偏振的电磁辐射。Theoretical analysis shows that the generation of these transmission peaks is related to the excitation of internal surface plasmon polaritons (ISPPs) between the two metal films. The excitation condition of ISPP can be approximately expressed as k ISPP =G mn , where (δ=22nm is the skin depth of the metal, m and n are two integers). Therefore, the resonance wavelength of ISPP is approximately Accordingly, the transmission peaks at 800 nm, 1000 nm and 1340 nm can be attributed to the ISPP excitations corresponding to (2,1), (2,0), (1,1) reciprocal vectors [(1,0) inverse The transmission peak excited by the lattice vector lies outside the measured wavelength range]. Since the transmission peak at 1000 nm is very close to the cut-off wavelength of the rectangular hole (the cut-off wavelength of the rectangular hole is Therefore, its transmission efficiency is much higher than other transmission peaks. But what causes the transformation of electromagnetic polarization? In fact, in the double-layer perforated metal film, the excitation of ISPP must be coupled with the waveguide mode of the rectangular hole (the waveguide mode is associated with the electronic oscillation around the hole). Not only that, but the small rectangular holes in the two metal films also interact. These interactions make the resonance wavelength of the system deviate from the ideal ISPP resonance, and also change the electromagnetic polarization of the system. In order to illustrate this problem briefly, the utility model uses the FDTD method to simulate the current distribution diagram inside the metal polarizer at a wavelength of 1000 nanometers. Figure 4(a) shows the current distribution in the xy plane of the incident polarizer (at half the thickness of the metal). Under the joint action of x-polarized incident electromagnetic field and ISPP, the electromagnetic field or waveguide mode in the small hole at the incident end is enhanced. The excitation of the waveguide mode is accompanied by a surrounding current around the hole and simultaneously accumulates positive and negative charges. These surrounding currents and accumulated positive and negative charges will have a coupling effect with the rectangular aperture of the exit polarizer, that is, new positive and negative charges and surrounding currents will be induced near the exit aperture (Figure 4(b)). The latter excites an electromagnetic field in the exit aperture and produces y-polarized electromagnetic radiation.
上述分析表明增强透射和偏振转换效应起源于ISPP共振增强的近场耦合效应。这一效应将依赖于晶格周期d和两个偏振片之间的间距h(也就是氮化硅层的厚度)。图5(a)给出了不同周期下的模拟透射谱Txy(d=550,600,650纳米;h=50纳米)。随着周期的增加,透射峰发生明显的红移;红移的幅度与ISPP共振预言的结果基本相当。图5(b)给出了理论计算的不同间距h下主峰的透射效率曲线(Txy)。当h=30纳米时,透射峰位于1080纳米,透射效率为12.5%。随着间距的增加,ISPP共振波长将逐渐减小,透射峰蓝移(不过,当h>>δ时,这一变化趋势将变缓并趋于消失)。与此同时,由于蓝移的透射峰逐渐靠近截止波长,透射效率增大。在截止波长附近,ISPP模和入射、出射偏振片的波导模发生强烈的耦合作用,导致透射峰发生劈裂。分裂的两个透射峰随着h的增大逐渐分离,并在h=80纳米时透射效率达到最大值。模拟显示,双峰的产生与双孔作用形成的对称和反对称模式有关。也就是说,入射小孔在图4(a)的电荷和电流分布下,出射小孔可产生如图4(b)的分布模式或和图4(b)完全相反的电荷电流模式。透射峰的分裂效应可用以构造宽带的偏振转换器。比如,当h=80纳米时,透射或转换效率达到52%,半高宽可达122纳米,相对带宽约为12%。不过,随着h的进一步增大,两层小孔之间的耦合作用得以消弱,双峰的透射效率将显著降低。The above analysis indicates that the enhanced transmission and polarization conversion effects originate from the near-field coupling effect enhanced by the ISPP resonance. This effect will depend on the lattice period d and the spacing h between the two polarizers (ie the thickness of the silicon nitride layer). Fig. 5(a) shows the simulated transmission spectra T xy (d=550, 600, 650 nm; h=50 nm) under different periods. With the increase of the period, the transmission peak has a significant red shift; the magnitude of the red shift is basically the same as the result predicted by the ISPP resonance. Figure 5(b) shows the theoretically calculated transmission efficiency curves (T xy ) of the main peak at different distances h. When h=30nm, the transmission peak is located at 1080nm, and the transmission efficiency is 12.5%. As the spacing increases, the ISPP resonance wavelength will gradually decrease, and the transmission peak will shift blue (however, when h>>δ, this change trend will slow down and tend to disappear). At the same time, the transmission efficiency increases due to the blue-shifted transmission peak gradually approaching the cut-off wavelength. Near the cut-off wavelength, the ISPP mode and the waveguide mode of the incident and exit polarizers have a strong coupling effect, resulting in the splitting of the transmission peak. The two split transmission peaks gradually separate with the increase of h, and the transmission efficiency reaches the maximum when h=80nm. The simulations revealed that the generation of doublets is associated with symmetric and antisymmetric modes of diporosity formation. That is to say, under the charge and current distribution of the incident pinhole in Figure 4(a), the exit pinhole can produce the distribution pattern as shown in Figure 4(b) or the completely opposite charge and current pattern as shown in Figure 4(b). The splitting effect of the transmission peak can be used to construct broadband polarization converters. For example, when h=80nm, the transmission or conversion efficiency reaches 52%, the full width at half maximum can reach 122nm, and the relative bandwidth is about 12%. However, with the further increase of h, the coupling effect between the two layers of small holes is weakened, and the transmission efficiency of the doublet will be significantly reduced.
实施例2Example 2
作为第二个实施例,偏振转换器的工作频率位于微波段。图6(a)和图6(b)分别为利用水切割(水刀)加工而成的单个偏振片和偏振转换器的实物图片。穿孔金属平板由铝材构成,其厚度为t=1.5毫米,孔阵的周期为d=60毫米,矩形孔的边长为l=40毫米、宽w=10毫米。整个样品的边长为660毫米,共包含11*11个矩形小孔。转换器的两个金属平板由空气层间隔,小孔成L型垂直“交叉”,且平板间距可自由调节。图6(c)给出了实验测量的单个偏振片的透射谱(圆和方块)。实验在入射偏振x方向上探测到2个透射峰(Txx,方块):主峰位于3.53GHz,次峰位于5.92GHz。主峰的透射效率达到98%;如果对小孔的面积占空比进行归一化,则归一化透射效率将达到880%。这一效应正是穿孔金属膜的增强透射效应。另外,实验测量了与入射偏振正交的y偏振方向的透射效率(Txy,圆)。在整个测试波段2-7GHz范围内,该偏振的效率小至可忽略不计。这表明,在测试的微波波段内(尤其在透射峰附近),该偏振片具有良好的偏振特性。测试结果和FDTD计算(见实线和虚线)能够较好的吻合。图6(d)给出了偏振转换器在两个偏振片间距为h=10毫米时的实验和理论透射效率曲线。实验发现,在入射偏振为x方向的情况下,x偏振的出射信号在整个测试波段内几乎为0(Txx,方块)。与此相反,y偏振的出射信号在3.6GHz和6.0GHz附近出现两个透射极大(Txy,圆)。在3.6GHz,透射峰的效率达到了98%。这表明,在微波段入射电磁波也能有效透过该类型的偏振转换器:不仅电磁波的偏振方向旋转了90度,而且透射或转化效率接近100%。值得注意的是,实验和理论发现上述效应的工作带宽(半高宽)约为400MHz,相对带宽达到11%。这与光频段的结果基本相当。在微波段,虽然金属表面真实的SPP模并不存在,但通常认为金属表面结构的调制可产生“伪”表面等离激元(spoof SPP)模。后者将起着类似SPP的作用并产生增强透射。可以理解,上述偏振转换效应的出现与“伪”表面等离激元共振以及双层小孔间的近场耦合效应密切相关。As a second embodiment, the working frequency of the polarization converter is in the microwave range. Figure 6(a) and Figure 6(b) are physical pictures of a single polarizer and a polarization converter processed by water cutting (water jet), respectively. The perforated metal plate is made of aluminum, its thickness is t=1.5 mm, the period of the hole array is d=60 mm, the side length of the rectangular hole is l=40 mm, and the width w=10 mm. The side length of the entire sample is 660 mm, and contains 11*11 rectangular holes in total. The two metal plates of the converter are separated by an air layer, and the small holes form an L-shaped vertical "cross", and the distance between the plates can be adjusted freely. Figure 6(c) presents the experimentally measured transmission spectra (circles and squares) of a single polarizer. Two transmission peaks (T xx , squares) were detected in the incident polarization x direction: the main peak is at 3.53GHz, and the second peak is at 5.92GHz. The transmission efficiency of the main peak reaches 98%; if the area duty cycle of the small holes is normalized, the normalized transmission efficiency reaches 880%. This effect is precisely the enhanced transmission effect of the perforated metal film. Additionally, the transmission efficiency (T xy , circle) for the y-polarization direction orthogonal to the incident polarization was measured experimentally. The efficiency of this polarization is negligibly small over the entire test band 2-7GHz. This shows that the polarizer has good polarization characteristics in the tested microwave band (especially near the transmission peak). The test results and FDTD calculations (see solid and dashed lines) are in good agreement. Figure 6(d) shows the experimental and theoretical transmission efficiency curves of the polarization converter when the distance between two polarizers is h = 10 mm. Experiments have found that when the incident polarization is in the x direction, the outgoing signal with x polarization is almost 0 (T xx , square) in the entire test band. On the contrary, there are two transmission maxima (T xy , circle) around 3.6GHz and 6.0GHz for the y-polarized outgoing signal. At 3.6GHz, the efficiency of the transmission peak reaches 98%. This shows that incident electromagnetic waves in the microwave segment can also effectively pass through this type of polarization converter: not only the polarization direction of electromagnetic waves is rotated by 90 degrees, but also the transmission or conversion efficiency is close to 100%. It is worth noting that the operating bandwidth (full width at half maximum) of the above-mentioned effects is found to be about 400MHz through experiments and theory, and the relative bandwidth reaches 11%. This is roughly comparable to the results in the optical band. In the microwave segment, although the real SPP mode on the metal surface does not exist, it is generally believed that the modulation of the metal surface structure can generate a "pseudo" surface plasmon polariton (spoof SPP) mode. The latter will act like an SPP and result in enhanced transmission. It can be understood that the occurrence of the above-mentioned polarization conversion effect is closely related to the "pseudo" surface plasmon resonance and the near-field coupling effect between double-layer pinholes.
微波段的偏振转换效应可以利用结构参数的改变自由调控。一方面,近场耦合效应强烈依赖于两个正交偏振片之间的距离。当两个偏振片之间的距离增大时,这一耦合效应必将减弱。图7(a)描绘了实验测量和理论计算的不同偏振片间距下的透射谱(这里只给出y分量的透射效率Txy,Txx可忽略)。容易看到,理论(实线)和实验(实心标记)吻合良好。随着偏振片间距的增大(h=10-30毫米),透射峰的位置仅仅发生微小的红移(显示出耦合模能量的减小),但是透射效率显著降低。当h=30毫米时,透射效率已不足2%。这表明,当偏振片距离较大时,电磁波的透射被隔断;而当距离较小且允许近场耦合时,马吕斯定律的限制将被打破。这一现象可用以构造亚波长调制器或开关,即通过控制偏振片的距离来调节微波透射效率或实现微波的通与断。另外发现,当h小于10毫米时,透射峰发生劈裂。这同样与强烈作用所导致的对称和反对称模式有关。这一效应也可用于开发宽带的微波偏振转换器。比如,当h=5毫米时,所得的半高宽可达540MHz,相对半高宽约为15%。另一方面,通过调节结构参数可以调控该效应的工作频率,使得它能够在不同的频率需求下运作。一个方法是根据频率需求按比例缩减系统的尺寸,或者单纯地改变小孔的大小。图7(b)给出了理论计算的三个不同小孔长度(l=40,35,30毫米,h=10毫米;其它参数不变)下的透射谱(Txy)。结果显示,随着小孔边长(和截止波长)的减小,透射峰从3.6GHz移到3.9和4.2GHz,且透射峰处的偏振转换效率都接近100%。The polarization conversion effect in the microwave segment can be freely regulated by changing the structural parameters. On the one hand, the near-field coupling effect strongly depends on the distance between two crossed polarizers. This coupling effect must decrease as the distance between the two polarizers increases. Figure 7(a) depicts the experimentally measured and theoretically calculated transmission spectra at different polarizer spacings (here only the transmission efficiency T xy of the y component is given, and T xx is negligible). It is easy to see that theory (solid line) and experiment (solid markers) agree well. As the polarizer spacing increases (h = 10–30 mm), the position of the transmission peak is only slightly red-shifted (showing a decrease in coupled mode energy), but the transmission efficiency decreases significantly. When h=30 mm, the transmission efficiency is less than 2%. This shows that when the polarizer distance is large, the transmission of electromagnetic waves is cut off; and when the distance is small and near-field coupling is allowed, the limitation of Marius' law will be broken. This phenomenon can be used to construct subwavelength modulators or switches, that is, to adjust microwave transmission efficiency or realize microwave on and off by controlling the distance of polarizers. It was also found that when h is smaller than 10 mm, the transmission peak is split. This is also related to the symmetric and antisymmetric modes that result from strong interactions. This effect can also be used to develop broadband microwave polarization converters. For example, when h=5 mm, the obtained half maximum width can reach 540MHz, and the relative half maximum width is about 15%. On the other hand, the operating frequency of the effect can be adjusted by adjusting the structural parameters, so that it can operate under different frequency requirements. One approach is to scale down the size of the system based on frequency requirements, or simply change the size of the aperture. Figure 7(b) shows the theoretically calculated transmission spectra (T xy ) under three different hole lengths (l=40, 35, 30 mm, h=10 mm; other parameters remain unchanged). The results show that the transmission peak moves from 3.6 GHz to 3.9 and 4.2 GHz with the decrease of the side length of the small hole (and the cut-off wavelength), and the polarization conversion efficiency at the transmission peak is close to 100%.
实施例3Example 3
基于上述结果,本实用新型进而提出一个“万向”偏振转换器的设计方法。该转换器可以将入射线偏振切换到任意偏振方向,包括马吕斯定律所禁止的正交方向。为实现这一目的,这里提出两种方案。第一种方案作为过渡方案,它使用图6(a)中的偏振片作为入射偏振片,而出射偏振方向通过不同的出射偏振片加以控制。出射偏振片仍由金属铝板构成,上面刻有周期性的倾斜矩形小孔(矩形小孔的长边与水平方向的夹角θ可根据需要设定;入射和出射偏振片的对应矩形小孔形成∠形“交叉”)。作为例子,图8(a)给出θ=30度时的出射偏振片的实物图片。图8(b)给出了实验测量(上)和理论计算(下)的不同倾斜角度θ下的透射谱(输出电场分量与出射小孔长边垂直)。可以看到,在3.6GHz附近,转换器能够产生有效的输出。当θ=0度时,透射效率的最大值为55%;当θ=30、45、60和90度时,透射或转换效率的峰值大于90%甚至于接近100%。除0度以外,一般的相对工作带宽介于10%和17%之间。Based on the above results, the utility model further proposes a design method of a "universal" polarization converter. The converter can switch the polarization of the incoming line to any polarization direction, including orthogonal directions prohibited by Malius' law. To achieve this goal, two schemes are proposed here. The first scheme is used as a transitional scheme, which uses the polarizer in Fig. 6(a) as the input polarizer, while the output polarization direction is controlled by different output polarizers. The output polarizer is still made of metal aluminum plate, engraved with periodic oblique rectangular holes (the angle θ between the long side of the rectangular hole and the horizontal direction can be set according to needs; the corresponding rectangular holes of the incident and outgoing polarizers form ∠-shaped "cross"). As an example, Figure 8(a) shows a real picture of the exit polarizer when θ = 30 degrees. Fig. 8(b) shows the experimentally measured (top) and theoretically calculated (bottom) transmission spectra at different tilt angles θ (the output electric field component is perpendicular to the long side of the exit hole). It can be seen that around 3.6GHz, the converter is able to produce a valid output. When θ = 0 degrees, the maximum transmission efficiency is 55%; when θ = 30, 45, 60 and 90 degrees, the peak transmission or conversion efficiency is greater than 90% or even close to 100%. Typical relative operating bandwidths are between 10% and 17%, except at 0 degrees.
第二种方案采用一个单个的偏振转换器实现上述所有功能,从而实现“万向”偏振转换。该“万向”偏振转换器由两个相同的圆形偏振片构成,其中入射偏振片固定,出射偏振片可绕着中心轴自由旋转。图9(a)给出了入射或出射偏振片的结构设计图。每个偏振片在半径为d、2d、3d和4d的同心圆周上“均匀”地刻有亚波长矩形小孔,且所有的矩形小孔平行排列。这里,“均匀”是指利用径向直线将圆周均匀分割,在径向直线与圆周的交点处刻出矩形小孔:该交点距离小孔的上、下和左侧分别为w/2[见图9(b)]。为避免近邻的小孔相互交叠,在半径为d的圆周上小孔具有准8重旋转对称性;在半径为2d的圆周上,小孔具有准12重旋转对称性;在半径为3d和4d的圆周上,小孔具有准24重旋转对称性。这样,通过旋转出射偏振片以一定的角度(比如15、30、45、60、75、90度等),两个偏振片的对应矩形小孔之间能够形成相同夹角的∠或L形“交叉”。因而,基于近场耦合效应,入射偏振可向其它方向切换。图9(c)给出了实验制备的偏振片的实物图片。这里,整个样品的直径为600毫米,同心圆周的间距为d=60毫米,小孔的尺寸、铝板的厚度与先前相同。图9(d)为实验测量的不同旋转角度(0、30、45、60、90度)下的透射谱(输出电场分量与出射小孔长边垂直)。由图可见,在不同的旋转角度下,该转换器都能够在3.5GHz附近产生有效的透射(与周期结构相比,由于缺少周期性,其透射效率得到一定程度的消弱)。这些结果也表明,通过旋转出射偏振片,该转换器可将微波的偏振方向加以旋转(包括90度),且转换效率能够维持在较高的水平。与之相比,两个传统偏振片的透射或转换效率随着旋转角度的增大而减小,且在极化方向正交时光的透射被切断。此外应该指出,在其它的旋转角度时,虽然两个偏振片的矩形小孔之间偏离∠或L形“交叉”,但近场耦合效应仍能产生有效的偏振转换。可见,“万向”偏振转换器为线偏振方向的调控提供了有力的工具。The second approach uses a single polarization converter to perform all of the above functions, thereby achieving "gimbal" polarization conversion. This "gimbal" polarization converter consists of two identical circular polarizers, where the input polarizer is fixed and the output polarizer is free to rotate about a central axis. Figure 9(a) shows the structural design of the incident or exit polarizer. Each polarizer is "uniformly" engraved with sub-wavelength rectangular holes on concentric circles with radii d, 2d, 3d and 4d, and all the rectangular holes are arranged in parallel. Here, "uniform" means that the circumference is evenly divided by a radial straight line, and a rectangular small hole is carved at the intersection of the radial straight line and the circumference: the distance between the intersection point and the upper, lower and left sides of the small hole is w/2 respectively [see Figure 9(b)]. In order to avoid adjacent small holes overlapping each other, the small holes have quasi-8-fold rotational symmetry on a circle with a radius of d; on a circle with a radius of 2d, small holes have a quasi-12-fold rotational symmetry; on a circle with a radius of 3d and On the circumference of 4d, the small hole has quasi 24-fold rotational symmetry. In this way, by rotating the outgoing polarizer at a certain angle (such as 15, 30, 45, 60, 75, 90 degrees, etc.), the corresponding rectangular holes of the two polarizers can form a ∠ or L shape with the same angle" cross". Thus, the incident polarization can be switched to other directions based on the near-field coupling effect. Figure 9(c) shows the actual picture of the polarizer prepared in the experiment. Here, the diameter of the entire sample is 600 mm, the distance between the concentric circles is d=60 mm, the size of the small holes, and the thickness of the aluminum plate are the same as before. Figure 9(d) is the transmission spectrum measured experimentally at different rotation angles (0, 30, 45, 60, 90 degrees) (the output electric field component is perpendicular to the long side of the exit hole). It can be seen from the figure that under different rotation angles, the converter can produce effective transmission around 3.5 GHz (compared with the periodic structure, the transmission efficiency is weakened to a certain extent due to the lack of periodicity). These results also show that by rotating the output polarizer, the converter can rotate the polarization direction of microwaves (including 90 degrees), and the conversion efficiency can be maintained at a high level. In contrast, the transmission or conversion efficiency of two conventional polarizers decreases with increasing rotation angle, and the transmission of light is cut off when the polarization directions are orthogonal. In addition, it should be pointed out that at other rotation angles, although the rectangular holes of the two polarizers deviate from the ∠ or L-shaped "crossing", the near-field coupling effect can still produce effective polarization conversion. It can be seen that the "universal" polarization converter provides a powerful tool for adjusting the direction of linear polarization.
在实际应用中,材料结构参数可以根据需要进行适当调整或改变。比如,金属的厚度、孔阵的周期、矩形小孔的大小以及电介质的折射率等,都可以自由调控。两个偏振片的矩形小孔还可以由相同的尺寸变为不同的尺寸,以改善带宽。而且,矩形小孔还可以利用椭圆形或梯形等狭长形小孔来代替。此外,除了光频和微波段,本实用新型可以自然地推广到太赫兹波段。这些改变都不违背本实用新型的精神。值得注意的是,除了偏振转换器、亚波长调制器或开关,本实用新型还可用作单向传输器。即x偏振的电磁波能够沿着z向有效地传播,而同一偏振的反向传播被严格禁止。这些有可能在构造新型微波器件上获得潜在的应用。In practical applications, material structure parameters can be properly adjusted or changed as required. For example, the thickness of the metal, the period of the hole array, the size of the rectangular hole, and the refractive index of the dielectric can all be adjusted freely. The rectangular apertures of the two polarizers can also be changed from the same size to different sizes to improve the bandwidth. Moreover, the rectangular small hole can also be replaced by narrow and long small holes such as ellipse or trapezoid. In addition, in addition to the optical frequency and microwave bands, the utility model can be naturally extended to the terahertz band. These changes do not violate the spirit of the present utility model. It is worth noting that in addition to polarization converters, sub-wavelength modulators or switches, the present invention can also be used as a unidirectional transmitter. That is, the x-polarized electromagnetic wave can effectively propagate along the z direction, while the reverse propagation of the same polarization is strictly prohibited. These have potential applications in the construction of novel microwave devices.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103645565A (en) * | 2013-12-10 | 2014-03-19 | 南京工业大学 | Sub-wavelength plasmon polarization converter |
| CN104914496A (en) * | 2015-06-19 | 2015-09-16 | 安徽大学 | Broadband polarization rotator |
| CN106099387A (en) * | 2016-06-08 | 2016-11-09 | 安徽枫慧金属股份有限公司 | Three frequencies tunable Graphene polarization converters of work |
| CN110609347A (en) * | 2018-06-14 | 2019-12-24 | 中国科学院物理研究所 | A preparation method for forming a polarization rotator by nano-kirigami |
| CN113504686A (en) * | 2021-06-04 | 2021-10-15 | 华南师范大学 | Sub-wavelength focusing liquid crystal lens and high-resolution preparation method thereof |
| CN114740562A (en) * | 2022-05-11 | 2022-07-12 | 曲阜师范大学 | T-shaped optical diode capable of realizing dual-band polarization conversion |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103645565A (en) * | 2013-12-10 | 2014-03-19 | 南京工业大学 | Sub-wavelength plasmon polarization converter |
| CN103645565B (en) * | 2013-12-10 | 2015-11-11 | 南京工业大学 | Sub-wavelength plasmon polarization converter |
| CN104914496A (en) * | 2015-06-19 | 2015-09-16 | 安徽大学 | Broadband polarization rotator |
| CN106099387A (en) * | 2016-06-08 | 2016-11-09 | 安徽枫慧金属股份有限公司 | Three frequencies tunable Graphene polarization converters of work |
| CN106099387B (en) * | 2016-06-08 | 2018-06-01 | 安徽枫慧金属股份有限公司 | The graphene polarization converter that three frequencies work is tunable |
| CN110609347A (en) * | 2018-06-14 | 2019-12-24 | 中国科学院物理研究所 | A preparation method for forming a polarization rotator by nano-kirigami |
| CN110609347B (en) * | 2018-06-14 | 2020-07-24 | 中国科学院物理研究所 | A kind of preparation method of polarization rotator formed by nano-kirigami |
| CN113504686A (en) * | 2021-06-04 | 2021-10-15 | 华南师范大学 | Sub-wavelength focusing liquid crystal lens and high-resolution preparation method thereof |
| CN114740562A (en) * | 2022-05-11 | 2022-07-12 | 曲阜师范大学 | T-shaped optical diode capable of realizing dual-band polarization conversion |
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