CN203486280U - Photomask storage box structure - Google Patents
Photomask storage box structure Download PDFInfo
- Publication number
- CN203486280U CN203486280U CN201320472488.9U CN201320472488U CN203486280U CN 203486280 U CN203486280 U CN 203486280U CN 201320472488 U CN201320472488 U CN 201320472488U CN 203486280 U CN203486280 U CN 203486280U
- Authority
- CN
- China
- Prior art keywords
- light shield
- lid
- utility
- receiver structure
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000002093 peripheral effect Effects 0.000 claims abstract description 4
- 239000000463 material Substances 0.000 claims description 17
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 8
- 229920002530 polyetherether ketone Polymers 0.000 claims description 8
- 229920001721 polyimide Polymers 0.000 claims description 5
- 239000009719 polyimide resin Substances 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- -1 polytetrafluoroethylene Polymers 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 238000003825 pressing Methods 0.000 abstract description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000003068 static effect Effects 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 235000019589 hardness Nutrition 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 210000002966 serum Anatomy 0.000 description 1
Images
Landscapes
- Closures For Containers (AREA)
Abstract
The utility model relates to a light shield containing box structure, which consists of a body and a cover body, wherein the body and the cover body are oppositely covered to contain a light shield, a clamping piece for clamping the light shield is respectively arranged between each corner inside the body and the cover body, and the clamping pieces at the opposite corners of the body and the cover body are vertically arranged; the clamping and pressing piece is provided with a fixed seat at the corresponding position of the body and the cover body respectively, the fixed seat is provided with a pressing body, the pressing body is provided with a flange part corresponding to the upper surface and the lower surface of the photomask respectively, and the pressing body is provided with an arc convex part corresponding to the peripheral surface of the photomask respectively. The utility model provides a light shield receiver structure, the area of contact of the relative light shield of the reducible body of not only pressing, and press the body through its utensil elastic arc convex part design, can further effectively fix the light shield, avoid it to produce because of improper slip and scrape the damage, and can increase the characteristic of light shield receiver.
Description
Technical field
The utility model for taking in the container of light shield, refers to the light shield receiver structure that a kind of locating effect is good about a kind of especially.
Background technology
Electronic product is constantly towards compact, high frequency, the characteristic development such as high-effect, and wish meets the direction of this development, the chip that is used for the core semiconductor element of electronic product just needs microminiaturization and has high-effect, and want to make chip microminiaturization and tool high-effect, need to make the integrated circuit wire diameter miniaturization on chip, therefore existing integrated circuit wire diameter is developed to 90～45 nanometers by early stage 0.25 micron, and the success or failure of the miniaturization of integrated circuit wire diameter are mainly the yellow light lithography manufacturing technology in semiconductor fabrication on chip, and its vital part is light shield (Reticle).
Therefore, light shield is when preserving or transporting, for the light shield receiver of taking in, except effectively preventing particulate, need invade, to avoid outside light shield surface attachment dust, more need to prevent that light shield from sliding arbitrarily or the trickle action such as rocking in container, decapacitation reduces outside the generation of static, more can avoid scratch light shield surface, thereby have influence on whole yellow light lithography, make, so the location structure of light shield in light shield receiver is just very important.Moreover, in order to meet the actual demand of using, in light shield receiver, for the location structure contacting with light shield, there are the needs that use special material, as high hardness, wear-resisting polyetheretherketone (PEEK) or polyimide resin (VESPEL) or iron dragon (polytetrafluoroethylene, the material such as Teflon) not.
Yet, existing mask receiver is comprised of the upper and lower cover body that can relatively cover, and the inner face corner of upper and lower cover body forms L shaped strut member, for light shield, place and location, but its area of contact is large, and light shield cannot effective location, light shield easily undermines static because rocking to produce to scrape simultaneously, affects the quality of light shield.Industry exploitation is just like the light shield receiver of No. 097147258th, TaiWan, China patent application for this reason, its corner in upper cover body and lower cover is formed with most the strut members that configure in unsettled mode, these strut members are the sealing lamellar body that two ends are connected with the adjacent dual-side in upper and lower cover body inside face corner respectively, and form a breach of placing for light shield in the turning point of sealing lamellar body.Though these strut members can reduce the area of contact, its locating effect is still not good, cannot be positioned exactly in light shield receiver, so still cannot effectively promote light shield quality.
In other words, if light shield can be positioned in light shield receiver exactly, allowing light shield is unlikely to be rocked arbitrarily, believe that can overcome aforementioned generation scrapes and damage or the problem of static, but how to reach this object, is the considerable problem of industry.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of light shield receiver structure, and the area of contact that it can reduce between light shield receiver and light shield makes light shield more steady, reduces wear, to avoid light shield damage simultaneously; It can be effectively fixing light shield, prevent that light shield from moving or depositing in process at light shield receiver, scrapes damage because improper slip produces; When having characteristic demand, only need to change location structure and use special material, without making whole light shield receiver all use this special material, significantly to reduce the use amount of special material, thereby reduce manufacturing cost.
In order to reach above-mentioned purpose, the utility model provides a kind of light shield receiver structure, it is comprised of a body and a lid, this body is taken in a light shield with relative the covering of this lid, and between each corner, the inside of this body and this lid, have respectively one in order to clamp the both crimps of this light shield, this body is vertical configuration setting with the both crimps in the relative corner of this lid; And this both crimps is formed with respectively a permanent seat in the correspondence position of this body and this lid, on this permanent seat, have one and compress body, this compresses body and has one respectively to flange part that should the upper and lower surface of light shield, and this compresses body and has one respectively to arc protuberance that should light shield peripheral surface.
Preferably, wherein this body and this lid form by metal or plastic material.
Preferably, wherein the parking space of this body and this lid is respectively equipped with at least one catch between its surrounding inwall and bottom surface, and this catch has the block edge of this light shield edge surface relatively.
Preferably, wherein the end face of this permanent seat is formed with an insert opening, and this compresses body and has the inserting part with the corresponding build-in of this insert opening.
Preferably, wherein this compresses body and consists of polyetheretherketone, polyimide resin or polytetrafluoroethylene.
Light shield receiver structure provided by the utility model, it not only can reduce the area of contact that compresses the relative light shield of body, and compressing body designs by the elastomeric arc protuberance of its tool, can be further effectively fixing light shield, avoid it because improper slip produces, to scrape damage, moreover utilize separation type to compress the design of body, more can reduce the use amount of special material, significantly reduce the manufacturing cost of light shield receiver, and can increase the characteristic of light shield receiver.
Accompanying drawing explanation
Fig. 1 is the schematic appearance of the utility model light shield receiver structure, and it illustrates state and the relativeness thereof of each element;
Fig. 2 is the exploded enlarged diagram of the utility model light shield receiver structure;
Fig. 3 is the outward appearance reference view of the utility model light shield receiver structure when reality is used unlatching;
Fig. 4 is that reference view is amplified in the part of the utility model light shield receiver structure when reality is used unlatching;
Fig. 5 is the section reference view of the utility model light shield receiver structure when reality use covers;
Fig. 6 is that reference view is amplified in the part of the utility model light shield receiver structure when reality use covers.
[main element nomenclature]
10-body; 12-opening edge; 14-catch;
20-lid; 22-opening edge; 24-catch;
30-both crimps; 31-permanent seat; 32-insert opening; 35-compresses body; 36-inserting part; 37-flange part; 38-arc protuberance;
40-fastener;
50-light shield.
The specific embodiment
The utility model provides a kind of confession to take in, preserve and transport the light shield receiver structure for the manufacture of the light shield of semiconductor element, in the specific embodiment and member thereof of the illustrative the utility model light shield of the figure that encloses receiver, all about front and rear, left and right, top and bottom, top and bottom and level and vertical reference, only for being conveniently described, and unrestricted the utility model, also non-its member is limited to any position or direction in space.
And the formation of the utility model light shield receiver structure, please refer to Fig. 1, shown in Fig. 2 and Fig. 3, it is comprised of a body 10 and a lid 20, and lid 20 alternatives are relative covers or launch with this for this body 10, body 10 is provided with at least one fastener 40 with lid 20 in the knit line covering again, for body 10 and lid 20, in relative, cover rear selectivity button and pull, moreover body 10 is formed with one for the parking space (as shown in Figure 5) of taking in a light shield 50 with lid 20 in covering rear inside, body 10 has respectively a both crimps 30 with each corner of inner face of lid 20 again, for relatively pressing from both sides the corner of this light shield 50 of pulling, and this body 10 can be selected from metal or plastics with the material of lid 20, the utility model is with the ABS plastic (styrene of hard, the combined polymerization of acrylonitrile and butadiene serum forms) be main embodiment.
Detailed formation as for the utility model preferred embodiment, still please refer to shown in Fig. 1, Fig. 2 and Fig. 3, wherein body 10 and lid 20 in open end edge be formed with respectively one can relative inlay card opening edge 12, opening edge 22, this body 10 can produce closely sealed effect while covering with lid 20, between the inside surrounding inwall of body 10 and lid 20 and bottom surface, be respectively equipped with catch 14, catch 24 again, this catch 14, catch 24 enclosed spaces are slightly larger than the size of light shield 50, for light shield 50 Primary Location while inserting, and can increase the intensity of body 10 and lid 20.
Moreover, described both crimps 30 is formed with respectively a permanent seat 31 in this body 10 and each corner, inside of this lid 20, and body 10 forms vertical folder horn shape with the permanent seat 31 in lid 20 relative corners, on these permanent seats 31, have one again and compress body 35, and these compress body 35 and the seat 31 that is relatively fixed can be structure as a whole or isolating construction, and the body 35 that compresses of the present utility model be take isolating construction as main embodiment with permanent seat 31, its end face in permanent seat 31 is formed with an insert opening 32, and these compress body 35 and have the inserting part 36 relative with insert opening 32, this compresses body 35 can be selected from the material different from permanent seat 31, as high hardness, wear-resisting polyetheretherketone (PEEK) or polyimide resin (VESPEL) or iron is dragon (polytetrafluoroethylene not, the material such as Teflon), to prevent that compressing body 35 is subject to friction to form grit, and do not need to make permanent seat 31, even body 10 is all used aforementioned special material with lid 20, to save the use amount of special material, reach and prevent that friction from forming grit and the object reducing costs, these compress the flange part 37 that body 35 has outstanding permanent seat 31 upper surfaces again, for supporting or press respectively the upper and lower surface of this light shield 50, moreover these compress body 35 and have an arc protuberance 38 upwards being protruded out by side, for the peripheral surface of supporting respectively this light shield 50 of pulling, make body 10 and lid 20 these both crimps 30 compress body 35 can surround into one can sandwiched light shield 50 scope.
Therefore, when body 10 is relative with lid 20 while covering, on the permanent seat 31 of these both crimps 30, compress the upper and lower surface that body 35 can utilize flange part 37 bulging light shields 50, and these arc protuberances 38 that compress body 35 can synchronously press from both sides the edge surface of the light shield 50 of pulling, and can effectively prevent that light shield 50 from rocking arbitrarily or move, avoid producing the objectionable impuritiess such as dust and static, and form the light shield receiver structure that an area of contact is little and locating effect is good.
Via above-mentioned explanation, the utility model is when practice, as Fig. 3, Fig. 5 discloses, when user's wish is accommodated in light shield receiver by light shield 50, the lid 20 relative body 10 that makes progress is raised, and light shield 50 is placed on the flange part 37 that compresses body 35, and utilize the catch 14 of body 10 peripheries to produce preliminary position-limiting action, then the downward body 10 relatively of lid 20 is covered, make lid 20 can utilize its flange part that compresses body 35 37 to press the upper surface (as shown in Figure 6) in light shield 50, utilize body 10 to synchronize the pull edge surface (as shown in Figure 6) of light shield 50 of folder with the arc protuberance 38 that compresses body 35 of lid 20 simultaneously, make light shield 50 press from both sides completely between the body 10 and lid 20 that is limited to light shield receiver.
Cooperation is referring to Fig. 4, Fig. 6, due to body 10 with lid 20 after covering, light shield 50 with compress the flange part 37 of body 35 and arc protuberance 38 and be linear and contact, its area of contact is minimum, and can improve its locating clip effect of pulling, and effectively prevents rocking of light shield 50, so not only can not form dust because of friction, and can not produce static yet, significantly reduce the generation of objectionable impurities, improve the quality that light shield 50 is preserved.
Simultaneously, due to both crimps 30, compress body 35 and the separated structure of permanent seat 31, make to compress body 35 and can be selected from different materials from permanent seat 31, in the time of so need using special material when special demands, as compress body 35 and use not dragon (Teflon) etc. of high hardnesss, wear-resisting polyetheretherketone (PEEK) or polyimide resin (VESPEL) or iron, body 10 can be used general plastic material with lid 20, so can save the consumption of special material, and significantly reduces the cost of manufacturing.
The above, be only preferred embodiment of the present utility model, and not in order to limit scope of patent protection of the present utility model, the equivalence variation that other utilization the utility model patent spirit is done etc., all should in like manner belong to scope of patent protection of the present utility model.
Claims (5)
1. a light shield receiver structure, it is characterized in that, it is comprised of a body and a lid, this body is taken in a light shield with relative the covering of this lid, and between each corner, the inside of this body and this lid, have respectively one in order to clamp the both crimps of this light shield, this body is vertical configuration setting with the both crimps in the relative corner of this lid; And this both crimps is formed with respectively a permanent seat in the correspondence position of this body and this lid, on this permanent seat, have one and compress body, this compresses body and has one respectively to flange part that should the upper and lower surface of light shield, and this compresses body and has one respectively to arc protuberance that should light shield peripheral surface.
2. light shield receiver structure as claimed in claim 1, is characterized in that, this body and this lid form by metal or plastic material.
3. light shield receiver structure as claimed in claim 1, is characterized in that, the parking space of this body and this lid is respectively equipped with at least one catch between its surrounding inwall and bottom surface, and this catch has the block edge of this light shield edge surface relatively.
4. light shield receiver structure as claimed in claim 1, is characterized in that, the end face of this permanent seat is formed with an insert opening, and this compresses body and has the inserting part with the corresponding build-in of this insert opening.
5. the light shield receiver structure as described in claim 1 or 4, is characterized in that, this compresses body and consists of polyetheretherketone, polyimide resin or polytetrafluoroethylene.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320472488.9U CN203486280U (en) | 2013-08-05 | 2013-08-05 | Photomask storage box structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320472488.9U CN203486280U (en) | 2013-08-05 | 2013-08-05 | Photomask storage box structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203486280U true CN203486280U (en) | 2014-03-19 |
Family
ID=50257126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320472488.9U Expired - Fee Related CN203486280U (en) | 2013-08-05 | 2013-08-05 | Photomask storage box structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203486280U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111605892A (en) * | 2019-02-25 | 2020-09-01 | 家登精密工业股份有限公司 | Photomask box and its holder |
| CN111830781A (en) * | 2019-04-16 | 2020-10-27 | 家登精密工业股份有限公司 | Photomask box and its holder |
| CN112262079A (en) * | 2019-05-20 | 2021-01-22 | 株式会社德茜松 | Sanitary mask keeping body |
-
2013
- 2013-08-05 CN CN201320472488.9U patent/CN203486280U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111605892A (en) * | 2019-02-25 | 2020-09-01 | 家登精密工业股份有限公司 | Photomask box and its holder |
| CN111830781A (en) * | 2019-04-16 | 2020-10-27 | 家登精密工业股份有限公司 | Photomask box and its holder |
| CN111830781B (en) * | 2019-04-16 | 2023-10-13 | 家登精密工业股份有限公司 | Mask box and its clamping parts |
| CN112262079A (en) * | 2019-05-20 | 2021-01-22 | 株式会社德茜松 | Sanitary mask keeping body |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203486280U (en) | Photomask storage box structure | |
| CN205260819U (en) | Housing sealing structure | |
| CN203387819U (en) | Waterproof sealing type electronic product protection device | |
| KR101500035B1 (en) | Structure for sealing and transporting container for polarizing plate comprising the same | |
| CN205409431U (en) | Brick tea forming die and bear a structure thereof | |
| CN203473597U (en) | Packing structure | |
| CN205287559U (en) | Can collect weiqi dish of black and white weiqi by quick sort | |
| CN103987225A (en) | Waterproof and sealed electronics protection | |
| CN203576141U (en) | Adjustable quilt cover | |
| CN202193337U (en) | Airtight photomask construction | |
| CN204011928U (en) | connector electromagnetic compatibility EMC shell | |
| CN2779920Y (en) | Decorative button | |
| CN206900954U (en) | A kind of Novel paper-plastic assembly type cup lid | |
| CN206923237U (en) | Electronic equipment | |
| CN206479946U (en) | A kind of computer clamshell dustproof keyboard | |
| CN103277396B (en) | Sucker device | |
| CN213385573U (en) | Stable preservation box cover | |
| CN205624888U (en) | Trolley case | |
| CN208067889U (en) | Chip remover and machine tool | |
| CN205282211U (en) | Manganese -zinc ferrite magnetic core | |
| CN206520042U (en) | A kind of foam removes useless machine | |
| CN205248594U (en) | A mold processing for making plastic type commutator in plane | |
| CN204660379U (en) | A kind of built-in lock packing box | |
| CN209640756U (en) | A kind of magnetic tablet computer flip lid protective case | |
| JP2005282864A (en) | Sealing structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140319 Termination date: 20150805 |
|
| EXPY | Termination of patent right or utility model |