CN203477777U - Vibration isolation mechanism for leveling platform - Google Patents

Abstract

The utility model provides a shock-isolation mechanism for platform leveling, the platform (10) is arranged in a cabinet (2) of semiconductor equipment, wherein the shock-isolation mechanism is installed in the cabinet (2) on the frame (9), and includes a plurality of shock-isolation units (1) supporting the platform (10), each of the shock-isolation units (1) includes a connecting plate (6), which supports the platform (10 ); the mounting base, on which the connecting plate (6) can be adjusted in height; and the vibration isolation element (8), which is arranged between the mounting base and the frame (9). The utility model advantageously separates "adjusting the level of the platform" and "adjusting the cabinet body with feet", can better realize different functions, and can realize vibration isolation between the platform and the frame, with good effect.

Description

Vibration isolation mechanism for platform leveling

technical field

The utility model relates to the leveling of semiconductor equipment cabinets, in particular to a shock-isolation mechanism used for platform leveling in the cabinet.

Background technique

In the process of leveling (adjusting the level) of large-scale semiconductor equipment, on the one hand, it is necessary to adjust the cabinet body of the entire cabinet of semiconductor equipment to be vertical to the ground. Parallel, this is usually achieved by adjusting the various feet of the cabinet. On the other hand, the platform in the cabinet also needs to be leveled, and it is not feasible to adjust the level of the platform by adjusting the feet. This is because the left and right weights of the platform are different, which in turn causes the compression of the vibration isolator under the platform to be different. In addition to the processing error, the platform and the cabinet are usually not in a vertical relationship. Therefore, if the cabinet is adjusted to be perpendicular to the ground, then the platform must not be horizontal, and if the platform is adjusted to be horizontal, then the cabinet must not be perpendicular to the ground. Therefore, these two adjustments need to be separated independently.

Utility model content

Therefore, the purpose of the utility model is to provide a shock isolation mechanism for leveling the platform, which separates the vertical adjustment of the cabinet from the horizontal adjustment of the platform, and effectively isolates the vibration of the platform from the cabinet.

The above object can be achieved through the following technical solutions: provide a vibration isolation mechanism for platform leveling, the platform is set in the cabinet of semiconductor equipment, wherein the vibration isolation mechanism is installed on the frame in the cabinet , and includes a plurality of shock-isolation units supporting the platform, each of the shock-isolation units includes: a connecting plate, which supports the platform; a mounting seat, and the connecting plate is installed on the mounting seat in a height-adjustable manner and a vibration isolation element disposed between the mount and the frame.

According to one embodiment, the mounting seat includes a connecting rod seat and a connecting rod extending vertically upward from the connecting rod seat.

Further, one end of the connecting plate is provided with a through hole, the connecting rod passes through the through hole and locks the connecting plate on the connecting rod through a locking element, and the other end of the connecting plate One end supports the bottom of the platform.

According to a preferred embodiment, the connecting plate is configured in a Z-shape, including a pair of horizontal parts extending in parallel in opposite directions and a vertical part connecting the pair of horizontal parts, wherein the pair of horizontal parts are respectively connected to The connecting rod connects and supports the bottom of the platform, and the vertical part abuts against the side of the platform.

Advantageously, the connecting plate is fixedly connected to the platform through fastening elements. The fixed connection here can be realized by any means known to those skilled in the art, for example, the fastening element can include screws, glue and the like.

Advantageously, the connecting rod is provided with external threads, and the locking element is a nut sleeved on the connecting rod.

Further, the nuts may include adjustment nuts located below the connecting plate and lock nuts located above the connecting plate.

Optionally, the shock-absorbing element is rubber.

Through the overview of the technical solution of the utility model, it is not difficult to see that the shock isolation mechanism of the utility model has at least the following beneficial effects:

1. The "level adjustment platform" and the "foot adjustment cabinet" are advantageously separated to better realize different functions;

2. By turning the adjusting nut, the level of the platform can be adjusted. After the adjustment, it can be locked with the locking nut, which is easy to operate;

3. Vibration isolation between the platform and the frame can be realized, and the effect is good.

Description of drawings

More features and advantages of the present utility model will be better understood through the further detailed description of specific embodiments in conjunction with the accompanying drawings. In the attached picture:

Fig. 1 is a schematic diagram of a semiconductor equipment cabinet, showing a shock isolation mechanism according to an embodiment of the present invention;

Fig. 2 is an enlarged view of the vibration isolation mechanism in Fig. 1 .

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them.

First refer to Fig. 1, which shows a semiconductor equipment cabinet. During the horizontal and vertical adjustment of the cabinet, the cabinet body 2 can be adjusted to be vertical to the ground through the feet 3 at the bottom of the cabinet, and then the The shock isolation mechanism on the frame 9 in the body 2 adjusts the platform 10 in the cabinet body 2 to keep level with the ground. Wherein, advantageously, the shock-isolation mechanism includes a plurality of shock-isolation units 1 arranged along the periphery of the platform 10, only one is shown as an example in the figure, for example, two shock-isolation units 1 can be arranged on the opposite two sides of the platform 10. seismic unit 1, or four seismic isolation units 1 may be provided at the four corners of the platform 10. In this way, the vertical adjustment of the cabinet body 2 is separated from the horizontal adjustment of the platform 10, and the two do not affect each other, thereby advantageously ensuring the accuracy and reliability of the adjustment. In addition, the shock-isolation unit 1 can isolate the vibration of the platform 10 from the frame 9, which has a good vibration-isolation effect.

Referring specifically to FIG. 2 , it shows an exemplary structure of the seismic isolation unit 1 . According to this embodiment, the vibration isolation unit 1 of the vibration isolation mechanism used for platform leveling includes a connecting plate 6 supporting the platform 10, a mounting base for adjusting and fixing the connecting plate 6, and a mounting base arranged on the mounting base and the frame. 9 between the shock-absorbing elements 8 . In this embodiment, the mounting base includes a connecting rod seat 41 and a connecting rod 42 extending vertically upward from the connecting rod seat 41, and a through hole 61 is provided on one end of the connecting plate 6, and the connecting rod 42 can The connecting plate 6 passes through the through hole 6 and can be locked on the connecting rod 42 by a locking element, and the other end of the connecting plate 6 supports the bottom of the platform 10 .

The connecting plate 6 can be configured in any suitable shape, as long as it can stably support the platform 10 , such as flat plate shape, L shape and so on. According to a preferred embodiment, as shown in FIG. 2 , the connecting plate 6 can be configured as a Z-shape that fits more closely with the surface of the platform, including a pair of horizontal portions extending in parallel in opposite directions, that is, the first horizontal portion part 62 and a second horizontal part 63, and a vertical part 64 connecting the pair of horizontal parts, wherein the first horizontal part 62 is connected with the connecting rod 42, and the second horizontal part 63 supports the bottom of the platform 10, The vertical portion 64 abuts against the side of the platform 10 . In order to further stably support the platform 10 , the connecting plate 6 and the platform 10 can also be fixedly connected by eg screws, glue and the like.

In the embodiment shown in FIG. 2 , the connecting rod 42 may also be provided with an external thread, and the locking element is a nut sleeved on the connecting rod 42, including an adjusting nut 7 and an adjusting nut located below the connecting plate 6. The lock nut 5 located above the connecting plate 6.

Due to the above arrangement, the weight of the platform 10 is almost completely applied on the connecting plate 6, and then applied on the adjusting nut 7 below the connecting plate 6, and the adjusting nut 7 is threadedly connected with the connecting rod seat 4, so that the weight of the platform 10 is further applied On the connecting rod seat 4. A vibration-isolation element 8 is arranged below the connecting rod base 4 , and the vibration-isolation element 8 is installed on the frame 9 . In this way, the vibration isolation element 8 can effectively isolate the vibration of the platform 10 from the frame 9, and the vibration generated by the platform 10 is transmitted to the vibration isolation element 8 through the connecting rod seat 4, and is absorbed by the vibration isolation element 8, so that the vibration will not be transmitted to The frame 9 avoids adverse effects on the frame 9 and related components. The shock-absorbing element 8 may be made of any suitable material, such as rubber.

It is optimal to arrange a shock-isolation unit 1 at the four corners of the platform 10 respectively. The height of the platform 10 can be adjusted by using a device such as a wrench to turn the four adjustment nuts 7, so that the adjustment platform 10 is kept horizontal relative to the ground. After the platform 10 is adjusted to a proper position, each locking nut 5 is tightened, and the level adjustment of the platform 10 can be completed.

The technical content and technical characteristics of the present utility model have been disclosed as above, but it can be understood that under the creative idea of the present utility model, those skilled in the art can make various changes and improvements to the above-mentioned mechanism without making creative work. , but all belong to the protection scope of the present utility model. The description of the above embodiments is illustrative rather than restrictive, and the protection scope of the present utility model is determined by the claims.

Claims (8)

1. for the shock insulation mechanism of platform erection, described platform (10) is arranged in the rack (2) of semiconductor equipment, it is characterized in that, described shock insulation mechanism is installed on the framework (9) in described rack (2), and comprise a plurality of shock insulations unit (1) that supports described platform (10), described in each, shock insulation unit (1) comprising:

Connecting plate (6), it supports described platform (10);

Fitting seat is installed on described fitting seat described connecting plate (6) adjusting height;

Isolated component (8), it is arranged between described fitting seat and described framework (9).

2. shock insulation according to claim 1 mechanism, is characterized in that, described fitting seat comprises and connects pole socket (41) and from described connection pole socket (41) extended connecting rod (42) vertically upward.

3. shock insulation according to claim 2 mechanism, it is characterized in that, one end of described connecting plate (6) is provided with through hole (61), described connecting rod (42) is locked at described connecting rod (42) above through described through hole (61) and by locking element by described connecting plate (6), and the other end of described connecting plate (6) supports the bottom of described platform (10).

4. shock insulation according to claim 3 mechanism, it is characterized in that, described connecting plate (6) is constructed to Z-shaped, comprise a pair of horizontal part (62 extending in parallel in opposite direction, 63) be connected described a pair of horizontal part (62,63) vertical portion (64), wherein said a pair of horizontal part (62,63) bottom that is connected and supports described platform (10) with described connecting rod (42) respectively, the side of platform (10) described in the butt of described vertical portion (64).

5. shock insulation according to claim 4 mechanism, is characterized in that, described connecting plate (6) is fixedly connected with described platform (10) by fastener.

6. shock insulation according to claim 3 mechanism, is characterized in that, described connecting rod (42) is provided with outside thread, and described locking element is for being socketed on the nut (5,7) on described connecting rod (42).

7. shock insulation according to claim 6 mechanism, is characterized in that, described nut (5,7) comprises and is positioned at the adjusting nut (7) of described connecting plate (6) below and is positioned at the locking nut (5) above described connecting plate (6).

8. shock insulation according to claim 1 mechanism, is characterized in that, described isolated component (8) is rubber.

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