CN203400617U - Chemical filter - Google Patents
Chemical filter Download PDFInfo
- Publication number
- CN203400617U CN203400617U CN201320021630.8U CN201320021630U CN203400617U CN 203400617 U CN203400617 U CN 203400617U CN 201320021630 U CN201320021630 U CN 201320021630U CN 203400617 U CN203400617 U CN 203400617U
- Authority
- CN
- China
- Prior art keywords
- filter
- chemical
- chemical filter
- active carbon
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 title claims abstract description 49
- 238000009434 installation Methods 0.000 claims abstract description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 30
- 229910052799 carbon Inorganic materials 0.000 description 30
- 239000000463 material Substances 0.000 description 15
- 229910044991 metal oxide Inorganic materials 0.000 description 13
- 150000004706 metal oxides Chemical class 0.000 description 13
- 239000011148 porous material Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000000505 pernicious effect Effects 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004134 energy conservation Methods 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 239000003456 ion exchange resin Substances 0.000 description 1
- 229920003303 ion-exchange polymer Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
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- Separation Of Gases By Adsorption (AREA)
Abstract
The utility model relates to a chemical filer. The filter is provided with an installation framework for connecting a filter with a facility system, wherein an air outlet of the installation framework is an air inlet of the facility system; the filter is thick in middle and thin in edge. The design of the chemical filter disclosed by the utility model uses equal life as the principle, so that the thickness at certain part of the chemical filter is coordinated with air speed of the chemical filter, and a ratio of the thickness to the air speed at each part is close to a constant, and therefore, a purpose of an equal-life design is achieved. On the other hand, quantity of air passing the chemical filter under certain pressure is improved in general, so that practical significance is provided for saving energy.
Description
Technical field
The utility model relates to air filter unit, relates in particular to a kind of for removing by filter the chemical filter of airborne chemical substance.
Background technology
Chemical filter is indispensable in the making production process of at present high-performance flat-panel monitor and semiconducter IC, the object that chemical filter is installed be remove in production environment to producing disadvantageous chemical atmosphere.
Semiconductor manufacturing process and sophisticated product or electronic product manufacturing process etc. generally carry out in the clean room of having got rid of polluter, and therefore, the pollution level in this clean room is the key factor directly related with the productive rate of manufactured product out.
And, due to nearest semiconductor device Highgrade integration, for the manufacture of the wafer bore of such semiconductor device, also increasing, therefore, in order to prevent the bad of above-mentioned wafer and to improve productive rate, must cut off the reason material Cl for example that causes substandard product
2, HCl, NO
x, SO
x, H
2the NH existing in the sour gas such as S, gas phase
3, the alkaline gas such as NMP, trimethylamine and volatility organic metal compound (VOCs) be present in air with graininess, and flow in clean room.
Here, in order to overcome the problems referred to above point, can adopt for removing the whole bag of tricks of the polluters such as above-mentioned sour gas, alkaline gas and volatility organic metal compound, but as representational method, can enumerate when pollutant concentration is low to moderate the low concentration of ppb, can adopt the chemical filter being arranged in clean room, remove the method for polluter.
On the other hand, in order to remove the polluters such as the sour gas that contains in pernicious gas and alkaline gas, when main use active carbon and add while carrying active carbon, existence is because of collision and wear away the secondary pollution problem that produces dust, compare with the chemical bond of active carbon and object gas, take physical bond as main adsorption reaction, there is the weak shortcoming of above-mentioned active carbon and gas adhesion, therefore, in the time of in high concentrations of gas flow into the chemical filter of filling active carbon, because of the concentration difference in inflow gas and active carbon pore, gas is attracted in active carbon pore, when low concentration or general air stream fashionable, gas concentration in active carbon pore is higher than the gas concentration that flows into air, therefore the gas of absorption is drawn out of in active carbon pore, therefore, the problem that the concentration of the air internal contamination thing by chemical filter increases produces.
Above-mentioned add that to carry that an active carbon means be in active carbon, to add to carry KOH, a KMnO here,
4, H
3pO
4etc. the material of acidity and alkaline chemical, or add a year Fe (NO
3)
2, Cu (NO
3)
2, Mn (NO
3) etc. after slaine, in more than 300 ℃ temperature, calcine, to adding in active carbon pore, carry a Fe
2o
3, CuO, MnO
2deng the made material of metallic compound.For example, after 10g KOH is dissolved in distilled water, this solution is contacted with active carbon, above-mentioned solution is absorbed in active carbon pore, the above-mentioned active carbon that has absorbed solution is dry, make distilled water evaporation, only KOH remains in active carbon pore whereby, makes to add to carry active carbon.Active carbon is carried in adding of making like this, and concrete the adding of KOH10% that mean carried active carbon.
It is that acid-base material or slaine are added and be loaded onto after active carbon by physical chemistry in conjunction with the material of removing pernicious gas that adding like this carried active carbon, when adding year amount of substance over certain level, because reducing absorption property, active carbon specific area reduces simultaneously, it is limited can adding the amount that is loaded onto the polluter in above-mentioned active carbon, add the chemical bond of loading matter induction pernicious gas, but the physical bond of active carbon itself is better than chemical bond, although therefore the removal of high concentration pernicious gas is shown to effect, but when harmful gas concentration can not be brought into play sufficient performance during in low concentration.
Particularly, adding the situation of carrying active carbon of adding of having carried soda acid, by Acid-Base neutralization reaction, remove pernicious gas, but by above-mentioned Acid-Base neutralization reaction, due to H
+and OH
-ion has activity, therefore must contain a certain amount of moisture.Therefore, when being constantly supplied to, adds while carrying active carbon the air being dried, produce the moisture evaporation in above-mentioned active carbon, add the problem that the activity of active carbon reduces rapidly of carrying, in addition add between the active component that carried and polluter and react by acid-base neutralization, at pore and the Surface Creation salt of active carbon, therefore produce the reaction time, more increase, the performance of filter more reduces, the problem that the pressure loss more increases etc.
In order to overcome tired this, add a reduction of carrying the absorption property that active carbon produces, tired abrasion produce the problems such as dust and the pressure loss, and someone proposes to adopt the new chemical filter of the ion exchange resin of small-particle shape and NACF etc. recently.
The form a social stratum filter that has adopted metal oxide is disclosed in the korean patent application description that is 2004-007440 at application number.Adopted the filter of above-mentioned metal oxide, the suspension wet type powderject of containing metal oxide to supporting mass, after suspension is adhered to, solvent is gasified, by follow-up sintering circuit, metal oxide is attached on supporting mass, owing to adopting pernicious gas to remove active good metal oxide, therefore can expect to remove the rising of efficiency.
Yet, the filter that by wet type powderject mode, above-mentioned metal oxide is attached on supporting mass and manufactures, less at air quantity, to be applied under the condition that physical impact on filter is little be effective, but when the manufacture for semiconductor and precision electronic device, under the condition of large capacity air quantity, vibration and physical impact that imports clean room, being accompanied by passage of time, there is the problem departing from the powder that produces metal oxide.In addition, while adhering on supporting mass, when the amount of metal oxide surpasses when a certain amount of, the disengaging aggravation of metal oxide, the pressure loss sharply increases, therefore can be attached to the extremely difficult control of the amount of the metal oxide on supporting mass, compare with the mode of direct forming metal oxide powder, make metal oxide be attached to the mode on supporting mass, owing to adsorbing, the amount of metal oxide of pernicious gas is few, therefore there is the short shortcoming of filter life.
Chemical filter itself is a consumptive material, when the chemical atmosphere of its absorption reaches certain value, just can not remain valid and absorb.On the other hand, the filter material of chemical filter is expensive.So be necessary to design a kind of chemical filter that can at utmost bring into play filter material efficiency, reduce the cost of producing and using chemical filter.
The design of chemical filter uiform section thickness, makes the life-span of chemical filter each several part inconsistent, thereby causes waste of material in the market.
Summary of the invention
The purpose of this utility model is just for deficiency of the prior art, relates to a kind of chemical filter of at utmost bringing into play filtering material efficiency, reduces production and the use cost of chemical filter.
For achieving the above object, the utility model provides following technical scheme:
, this filter has installation frame, and in order to connect filter and factory's business system, the air outlet of installation frame is the air inlet of factory's business system, and the interior thickness of described filter is thick, and edge thickness is thin.
Wherein, the Thickness Design of described filter is coordinated mutually with the wind speed by this place, guarantees that the thickness of described filter and the ratio by this place's wind speed are a constant.
Chemical filter is all generally to install additional before existing factory business system, and the installing frame in upper figure is for connecting the attaching parts of chemical filter and factory's business system, and its air outlet is the air inlet of factory's business system.
Different from existing chemical filter, principle of the present utility model is as follows:
Owing to reducing the use of filter material under the early stage guaranteeing ventilation, have important meaning, the utility model has changed the design of chemical filter uiform section thickness in the market: core air velocity is large, and corresponding thickness is also thicker; Air velocity little corresponding thickness in marginal portion is also thin.
Chemical filter itself is a consumptive material, and when the chemical substance of its absorption reaches capacity it, its life-span has also just expired.The life-span of chemical filter is the wind speed that passes through depending on thereon in general, and wind speed is larger, and the time reaching capacity is shorter.
Design of the present utility model be take equivalent life as principle, and the thickness in chemical filter somewhere and its wind speed are coordinated mutually, make thickness everywhere and wind speed ratio approach a constant, thereby reach the object of equivalent life design.
Another benefit of the present utility model is in general, and under certain pressure, its air quantity passing through is improved, and this also has a real meaning to energy-conservation.
Beneficial effect:
1, save the use of filter material;
2, energy-conservation in running.
Accompanying drawing explanation
Fig. 1 is chemical filter schematic diagram;
Wherein, 1 is air inlet; 2 is air outlet; 3 is installation frame; 4 is chemical filter.
The specific embodiment
, this filter has installation frame, and in order to connect filter and factory's business system, the air outlet of installation frame is the air inlet of factory's business system, and the interior thickness of described filter is thick, and edge thickness is thin.
Wherein, the Thickness Design of described filter is coordinated mutually with the wind speed by this place, guarantees that the thickness of described filter and the ratio by this place's wind speed are a constant.
Chemical filter is all generally to install additional before existing factory business system, and the installing frame in upper figure is for connecting the attaching parts of chemical filter and factory's business system, and its air outlet is the air inlet of factory's business system.
Different from existing chemical filter, principle of the present utility model is as follows:
Owing to reducing the use of filter material under the early stage guaranteeing ventilation, have important meaning, the utility model has changed the design of chemical filter uiform section thickness in the market: core air velocity is large, and corresponding thickness is also thicker; Air velocity little corresponding thickness in marginal portion is also thin.
Chemical filter itself is a consumptive material, and when the chemical substance of its absorption reaches capacity it, its life-span has also just expired.The life-span of chemical filter is the wind speed that passes through depending on thereon in general, and wind speed is larger, and the time reaching capacity is shorter.
Design of the present utility model be take equivalent life as principle, and the thickness in chemical filter somewhere and its wind speed are coordinated mutually, make thickness everywhere and wind speed ratio approach a constant, thereby reach the object of equivalent life design.
Another benefit of the present utility model is in general, and under certain pressure, its air quantity passing through is improved, and this also has a real meaning to energy-conservation.
Finally it should be noted that: obviously, above-described embodiment is only for the application's example is clearly described, and the not restriction to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without also giving all embodiments.And the apparent variation of being amplified out thus or change are still among the protection domain in the application's type.
Claims (1)
1. a chemical filter, is characterized in that: this filter has installation frame, and in order to connect filter and factory's business system, the air outlet of installation frame is the air inlet of factory's business system, and the interior thickness of described filter is thick, and edge thickness is thin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320021630.8U CN203400617U (en) | 2013-01-16 | 2013-01-16 | Chemical filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320021630.8U CN203400617U (en) | 2013-01-16 | 2013-01-16 | Chemical filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203400617U true CN203400617U (en) | 2014-01-22 |
Family
ID=49936560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320021630.8U Expired - Lifetime CN203400617U (en) | 2013-01-16 | 2013-01-16 | Chemical filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203400617U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107081016A (en) * | 2017-05-31 | 2017-08-22 | 四川建源节能科技有限公司 | A kind of filter membrane |
| CN107137985A (en) * | 2017-05-31 | 2017-09-08 | 四川建源节能科技有限公司 | A kind of filter |
| WO2019181158A1 (en) * | 2018-03-19 | 2019-09-26 | 株式会社村田製作所 | Filtration filter and filtration device |
-
2013
- 2013-01-16 CN CN201320021630.8U patent/CN203400617U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107081016A (en) * | 2017-05-31 | 2017-08-22 | 四川建源节能科技有限公司 | A kind of filter membrane |
| CN107137985A (en) * | 2017-05-31 | 2017-09-08 | 四川建源节能科技有限公司 | A kind of filter |
| WO2019181158A1 (en) * | 2018-03-19 | 2019-09-26 | 株式会社村田製作所 | Filtration filter and filtration device |
| US12440785B2 (en) | 2018-03-19 | 2025-10-14 | Murata Manufacturing Co., Ltd. | Filtration filter and filtration device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140122 |
|
| CX01 | Expiry of patent term | ||
| DD01 | Delivery of document by public notice |
Addressee: Shiyuan Technology Engineering Co.,Ltd. patent The person in charge Document name: Notice of Termination of Patent Rights |
|
| DD01 | Delivery of document by public notice |