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CN203406801U - Rotary Ultrasonic Motor Driven by Single Electric Signal - Google Patents

Rotary Ultrasonic Motor Driven by Single Electric Signal Download PDF

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CN203406801U
CN203406801U CN201320520871.7U CN201320520871U CN203406801U CN 203406801 U CN203406801 U CN 203406801U CN 201320520871 U CN201320520871 U CN 201320520871U CN 203406801 U CN203406801 U CN 203406801U
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ultrasonic motor
elliptical vibration
rotary ultrasonic
piezoelectric ceramic
electric signal
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殷振
李华
李艳
曹自洋
陈玉荣
任坤
刘义生
吴永芝
刘娇
吕自强
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Suzhou University of Science and Technology
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Abstract

The utility model discloses a single electric signal driving rotary ultrasonic motor. The single electric signal driving rotary ultrasonic motor comprises a mandrel, and a back cover plate, piezoelectric ceramic pieces, electrode slices, an elliptical vibration mode converter, a friction disc, a bearing, a spring and a nut which are sleeved on the mandrel orderly. The mandrel, the back cover plate, the piezoelectric ceramic pieces, the electrode slices and the elliptical vibration mode converter form a stator part of the ultrasonic motor, the friction disc and the bearing form a rotor part of the ultrasonic motor, and the spring and the nut form a positive pressure pre-tightening force adjusting mechanism of the rotor part and the stator part of the ultrasonic motor. The single electric signal driving rotary ultrasonic motor of the utility model realizes the elliptical orbit motion of the mass points on the end faces of the driving teeth of the stator by utilizing the specially designed elliptical vibration mode converter and by the longitudinal vibration of the set of piezoelectric ceramic pieces, and drives the rotor to rotate. The single electric signal driving rotary ultrasonic motor of the utility model has the advantages of being simple in structure, low in cost and small in control difficulty, being easy to manufacture, miniaturize and integrate, etc., and is wide in application prospect.

Description

单电信号驱动旋转超声电机Rotary Ultrasonic Motor Driven by Single Electric Signal

技术领域 technical field

本实用新型涉及利用压电陶瓷逆压电效应的超声电机领域,尤其是涉及一种单电信号驱动旋转超声电机。 The utility model relates to the field of ultrasonic motors utilizing the inverse piezoelectric effect of piezoelectric ceramics, in particular to a rotary ultrasonic motor driven by a single electric signal.

背景技术 Background technique

旋转超声电机是20世纪80年代迅速发展和应用的一种新型微电机,是利用压电材料的逆压电效应实现电能-机械能转换的机电耦合装置,通过定子和转子之间的摩擦作用,把弹性体的微幅振动转换成转子的宏观旋转运动,直接推动负载。目前已有的旋转型超声电机中,普遍存在驱动力矩小,轴向体积大、定转子的内外径接触区磨损差别大、工作可靠性低等问题。 The rotary ultrasonic motor is a new type of micro-motor developed and applied rapidly in the 1980s. It is an electromechanical coupling device that uses the inverse piezoelectric effect of piezoelectric materials to convert electrical energy to mechanical energy. Through the friction between the stator and the rotor, the The micro-vibration of the elastomer is converted into the macro-rotational motion of the rotor, which directly pushes the load. In the existing rotary ultrasonic motors, there are generally problems such as small driving torque, large axial volume, large wear difference between the inner and outer diameter contact areas of the stator and rotor, and low working reliability.

单电信号驱动模态转换型超声电机也是超声电机的一种,它是利用一组压电陶瓷元件的驱动,通过特殊结构的模态转换器使定子产生具有两种振动模态分量的复杂振动。如果这两个振动模态之间存在一定的相位差且频率相近,定子和转子接触界面上定子的端面质点就会产生椭圆轨迹振动,从而通过定子和转子之间的摩擦获得转子的运动和扭矩。 The mode conversion ultrasonic motor driven by a single electric signal is also a kind of ultrasonic motor. It is driven by a group of piezoelectric ceramic elements, and the stator generates complex vibration with two vibration modal components through a mode converter with a special structure. . If there is a certain phase difference between the two vibration modes and the frequency is similar, the end surface particle of the stator on the contact interface between the stator and the rotor will generate an elliptical trajectory vibration, thereby obtaining the motion and torque of the rotor through the friction between the stator and the rotor .

在公开号为CN101860259A,发明名称为《单电信号激励旋转超声电机》的专利文献中,公开了一种利用利用窗形错位模态转换器将夹心式振子产生纵向振动转换为驱动齿质点椭圆振动,进而驱动转子转动的超声电机,该发明控制驱动系统简单,装配容易,但是其窗形错位模态转换器制造难度较大,生产成本较高,制约了其在工业生产中的推广和应用。 In the patent document with the publication number CN101860259A and the invention name "Single Electric Signal Excited Rotary Ultrasonic Motor", a method is disclosed that uses a window-shaped dislocation mode converter to convert the longitudinal vibration generated by the sandwich vibrator into the elliptical vibration of the driving tooth point. , and then drive the ultrasonic motor to rotate the rotor. The control and drive system of the invention is simple and easy to assemble, but the manufacturing of the window-shaped dislocation mode converter is difficult and the production cost is high, which restricts its promotion and application in industrial production.

在公开号为CN101030740A,发明名称为《单相驱动的弯曲旋转超声电机》的专利文献中,公开了一种机体的结构呈锥状的单相驱动驻波旋转超声电机,该电机依靠六片沿轴向叠合在一起的压电陶瓷片激发定子的振动,六片压电陶瓷片依靠压紧螺母及压轴套固定在中轴上。该电机虽然具有输出力矩较大等优点,但其结构复杂,且在压电陶瓷片的压紧过程中因压紧螺母的螺旋运动(旋转力)极易造成压电陶瓷片之间错位,难以保证相邻压电陶瓷片之间错位60度的技术要求;此外,该电机定子与转子之间不带任何定位装置,这使得定子与转子两者之间的接触位置精度受到影响,进而影响电机转矩和速度的稳定性;此类旋转超声电动机存在结构复杂,制造安装较困难,成本较高、电机转矩和速度的稳定性差等问题。 In the patent document with the publication number CN101030740A and the invention name "Single-phase Driven Bending Rotary Ultrasonic Motor", a single-phase drive standing wave rotating ultrasonic motor with a tapered body structure is disclosed. The axially stacked piezoelectric ceramic sheets excite the vibration of the stator, and the six piezoelectric ceramic sheets are fixed on the central shaft by means of compression nuts and pressure shaft sleeves. Although the motor has the advantages of large output torque, etc., its structure is complicated, and the screw movement (rotation force) of the compression nut during the compression process of the piezoelectric ceramic sheets is very easy to cause misalignment between the piezoelectric ceramic sheets, which is difficult to achieve. The technical requirement to ensure a 60-degree misalignment between adjacent piezoelectric ceramic sheets; in addition, there is no positioning device between the stator and the rotor of the motor, which affects the accuracy of the contact position between the stator and the rotor, thereby affecting the motor. Stability of torque and speed; This type of rotating ultrasonic motor has problems such as complex structure, difficult manufacturing and installation, high cost, and poor stability of motor torque and speed.

发明内容 Contents of the invention

为克服现有技术中存在的不足,本实用新型的目的在于提供一种新型的单电信号驱动旋转超声电机。 In order to overcome the deficiencies in the prior art, the purpose of this utility model is to provide a new single electric signal driven rotary ultrasonic motor.

单电信号驱动旋转超声电机,其特征在于:包括心轴和依次套设在心轴上的后盖板、压电陶瓷片、电极片、椭圆振动模态转换器、摩擦盘、轴承、弹簧和螺母;所述心轴、后盖板、压电陶瓷片、电极片、椭圆振动模态转换器构成所述超声电机的定子部分,心轴和椭圆振动模态转换器通过螺纹联接后将后盖板、压电陶瓷片、电极片和椭圆振动模态转换器压紧固定,构成了超声电机的能量转换部分,将超声电源输出的超声电能转换为定子部分的超声振动能量。 The rotary ultrasonic motor driven by a single electric signal is characterized in that it includes a mandrel and a rear cover plate sequentially sleeved on the mandrel, a piezoelectric ceramic sheet, an electrode sheet, an elliptical vibration mode converter, a friction disc, a bearing, a spring and a nut ; The mandrel, the back cover, the piezoelectric ceramic sheet, the electrode sheet, and the elliptical vibration mode converter constitute the stator part of the ultrasonic motor, and the mandrel and the elliptical vibration mode converter are threaded to connect the back cover , piezoelectric ceramic sheet, electrode sheet and elliptical vibration mode converter are compressed and fixed to form the energy conversion part of the ultrasonic motor, which converts the ultrasonic electric energy output by the ultrasonic power supply into the ultrasonic vibration energy of the stator part.

所述的椭圆振动模态转换器为一体化结构,包括下端的圆柱体部分和上端的驱动齿部分,所述驱动齿部分在圆周方向均布设置在圆柱体部分的上端,每个驱动齿沿径向方向为斜楔形结构,该斜楔形原整体结构沿径向方向的投影为长方形,沿超声电机轴线方向其一侧被切割掉一部分后形成斜楔形结构,即形成斜楔形的两个侧面中,未被切割的一侧面沿径向的投影平行于超声电机轴线,被切割过的另一侧面沿径向的投影与超声电机轴线成3-40度夹角,所述的驱动齿数量为3-12个。 The elliptical vibration mode converter is an integrated structure, including a cylindrical part at the lower end and a driving tooth part at the upper end, and the driving tooth parts are uniformly arranged on the upper end of the cylindrical part in the circumferential direction, and each driving tooth is The radial direction is an oblique wedge structure. The projection of the original overall structure of the oblique wedge along the radial direction is a rectangle. One side is cut off along the axial direction of the ultrasonic motor to form an oblique wedge structure, that is, the two sides of the oblique wedge are formed. , the radial projection of the uncut side is parallel to the axis of the ultrasonic motor, the radial projection of the other cut side is at an angle of 3-40 degrees to the axis of the ultrasonic motor, and the number of driving teeth is 3 -12 pcs.

使驱动齿形成斜楔形结构的目的是为了改变椭圆振动模态转换器的振动模态,使其纵向振动模态频率和弯曲振动模态频率接近或相等,由于斜楔形结构的存在,超声电机的能量转换部分产生的纵向超声振动在传递到斜楔形驱动齿末端后,在斜楔形结构驱动齿末端分解为一部分纵向振动分量和一部分弯曲振动分量,且两振动分量具有一定的相位差,进而在斜楔形结构驱动齿的末端复合形成椭圆振动轨迹,即转换为椭圆振动模态转换器驱动齿末端沿超声电机圆周切向的纵弯复合超声椭圆振动。 The purpose of making the drive tooth form a wedge-shaped structure is to change the vibration mode of the elliptical vibration mode converter, so that the modal frequency of the longitudinal vibration and the mode frequency of the bending vibration are close to or equal. Due to the existence of the wedge-shaped structure, the ultrasonic motor After the longitudinal ultrasonic vibration generated by the energy conversion part is transmitted to the end of the wedge-shaped drive tooth, it is decomposed into a part of the longitudinal vibration component and a part of the bending vibration component at the end of the wedge-shaped drive tooth, and the two vibration components have a certain phase difference. The wedge-shaped structure drives the end of the tooth to compound to form an elliptical vibration track, which is converted into the longitudinal-bending composite ultrasonic elliptical vibration of the end of the elliptical vibration mode converter driving the tooth along the tangential direction of the ultrasonic motor circle.

所述摩擦盘和轴承构成超声电机的转子部分;所述弹簧和螺母构成超声电机转子部分和定子部分的正压预紧力调整机构。 The friction disc and the bearing constitute the rotor part of the ultrasonic motor; the spring and the nut constitute the positive pressure pretightening force adjustment mechanism of the rotor part and the stator part of the ultrasonic motor.

更进一步,所述椭圆振动模态转换器驱动齿末端粘接有A摩擦材料。 Furthermore, the end of the driving tooth of the elliptical vibration mode converter is bonded with A friction material.

更进一步,所述摩擦盘上与驱动齿相接触的端面粘接有B摩擦材料。 Furthermore, the end surface of the friction disc that is in contact with the driving teeth is bonded with B friction material.

更进一步,所述后盖板和所述心轴可以制造成分体式结构或一体化结构。 Furthermore, the rear cover plate and the mandrel can be made into a separate structure or an integrated structure.

本实用新型定子采用夹心式换能器结构,通过特殊设计的椭圆振动模态转化器,利用一组压电陶瓷的纵向振动模式实现了定子驱动齿端面质点的椭圆轨迹运动,驱动转子旋转,具有结构简单,功率容量大,制造容易,装配难度低等优点;另外本实用新型只需要一组控制电路及其驱动电源,控制驱动系统简单,制造容易,控制难度小,可靠性高;同时本实用新型具有体积小、重量轻、易于微型化、集成化、成本低、低速大扭矩、噪声小、响应快、定位精度高、无电磁干扰和环境适应性强等优点,应用前景广阔。 The stator of the utility model adopts a sandwich transducer structure, and through a specially designed elliptical vibration mode converter, a group of longitudinal vibration modes of piezoelectric ceramics are used to realize the elliptical track movement of the particle end surface of the stator driving teeth, and drive the rotor to rotate, with The utility model has the advantages of simple structure, large power capacity, easy manufacture and low assembly difficulty; in addition, the utility model only needs a set of control circuit and its drive power supply, the control drive system is simple, easy to manufacture, less difficult to control, and high in reliability; at the same time, the utility model The new type has the advantages of small size, light weight, easy miniaturization, integration, low cost, high torque at low speed, low noise, fast response, high positioning accuracy, no electromagnetic interference and strong environmental adaptability, etc., and has broad application prospects.

附图说明 Description of drawings

图1是本实用新型的结构示意图。 Fig. 1 is the structural representation of the utility model.

图2是本实用新型的零部件三维分解示意图。 Fig. 2 is a three-dimensional exploded view of parts of the utility model.

图3是本实用新型的椭圆振动模态转换器三维结构示意图。 Fig. 3 is a schematic diagram of the three-dimensional structure of the elliptical vibration mode converter of the present invention.

图4是本实用新型的应用实例示意图。 Fig. 4 is a schematic diagram of an application example of the utility model.

图中标号说明:1.心轴,2.后盖板,3.压电陶瓷片,4.电极片,5.椭圆振动模态转换器,6.A摩擦材料,7. B摩擦材料,8.摩擦盘,9.轴承,10.弹簧,11.螺母,12.超声电源 Explanation of symbols in the figure: 1. Mandrel, 2. Back cover, 3. Piezoelectric ceramic sheet, 4. Electrode sheet, 5. Elliptical vibration mode converter, 6. A friction material, 7. B friction material, 8 .Friction disc, 9. Bearing, 10. Spring, 11. Nut, 12. Ultrasonic power supply

具体实施方式 Detailed ways

结合图1、2、3、4所示,本实用新型的单电信号驱动旋转超声电机,包括心轴1和依次套设在心轴1上的后盖板2、压电陶瓷片3、电极片4、椭圆振动模态转换器5、摩擦盘8、轴承9、弹簧10和螺母11;所述心轴1、后盖板2、压电陶瓷片3、电极片4、椭圆振动模态转换器5构成所述超声电机的定子部分,通过心轴1上的外螺纹和椭圆振动模态转换器5的内螺纹进行联接,把后盖板2、压电陶瓷片3、电极片4和椭圆振动模态转换器5压紧固定,构成了超声电机的能量转换部分,可将超声电源12输出的超声电能转换为超声电机的超声振动能量,所述后盖板2和所述心轴1制造成分体式结构。 As shown in Figures 1, 2, 3, and 4, the single electric signal-driven rotary ultrasonic motor of the present invention includes a mandrel 1 and a back cover 2, a piezoelectric ceramic sheet 3, and an electrode sheet that are sequentially sleeved on the mandrel 1 4. Elliptical vibration mode converter 5, friction disc 8, bearing 9, spring 10 and nut 11; said mandrel 1, rear cover plate 2, piezoelectric ceramic sheet 3, electrode sheet 4, elliptical vibration mode converter 5 constitutes the stator part of the ultrasonic motor, which is connected through the external thread on the mandrel 1 and the internal thread of the elliptical vibration mode converter 5, and the rear cover plate 2, the piezoelectric ceramic sheet 3, the electrode sheet 4 and the elliptical vibration mode converter 5 are connected. The mode converter 5 is compressed and fixed, and constitutes the energy conversion part of the ultrasonic motor, which can convert the ultrasonic electric energy output by the ultrasonic power supply 12 into the ultrasonic vibration energy of the ultrasonic motor. The manufacturing components of the rear cover 2 and the mandrel 1 asana structure.

椭圆振动模态转换器5为一体化结构,包括下端的圆柱体部分和上端的驱动齿部分,驱动齿部分在圆周方向均布设置在圆柱体部分的上端,每个驱动齿沿径向方向为斜楔形结构,该斜楔形原整体结构沿径向方向的投影为长方形,沿超声电机轴线方向其一侧被切割掉一部分后形成斜楔形结构,即形成斜楔形的两个侧面中,未被切割的一侧面沿径向的投影平行于超声电机轴线,被切割过的另一侧面沿径向的投影与超声电机轴线成24度夹角,驱动齿小端宽度为1.5mm,高度为7.5mm,所述的驱动齿数量为6个,驱动齿末端粘接有A摩擦材料6。 The elliptical vibration mode converter 5 is an integrated structure, including a cylindrical part at the lower end and a driving tooth part at the upper end, and the driving tooth part is evenly arranged on the upper end of the cylindrical part in the circumferential direction, and each driving tooth is along the radial direction. Oblique wedge-shaped structure, the projection of the original oblique wedge-shaped overall structure along the radial direction is a rectangle, and a part of one side is cut off along the axial direction of the ultrasonic motor to form an oblique wedge-shaped structure, that is, the two sides of the oblique wedge shape are not cut The radial projection of one side is parallel to the axis of the ultrasonic motor, and the radial projection of the other cut side forms an angle of 24 degrees with the axis of the ultrasonic motor. The width of the small end of the drive tooth is 1.5mm, and the height is 7.5mm. The number of said driving teeth is 6, and the end of the driving teeth is bonded with A friction material 6 .

摩擦盘8和轴承9构成超声电机的转子部分,摩擦盘8和轴承9通过过渡配合连接一起后套设在心轴1上,摩擦盘8上与驱动齿相接触的端面粘接有B摩擦材料7;所述弹簧10和螺母11构成超声电机转子部分和定子部分的正压预紧力调整机构,通过调节螺母11在心轴1上的位置可以改变弹簧10的压缩量,从而调节电机转子对电机定子的预压力,预压力设定为6N。 The friction disc 8 and the bearing 9 constitute the rotor part of the ultrasonic motor. The friction disc 8 and the bearing 9 are connected together by a transition fit and then sleeved on the mandrel 1. The end surface of the friction disc 8 in contact with the driving teeth is bonded with B friction material 7 The spring 10 and the nut 11 constitute the positive pressure preload adjustment mechanism of the ultrasonic motor rotor part and the stator part, and the compression amount of the spring 10 can be changed by adjusting the position of the nut 11 on the mandrel 1, thereby adjusting the motor rotor to the motor stator The pre-pressure is set to 6N.

单电信号驱动旋转超声电机外径10mm,长度55mm,所用压电陶瓷为PZT-8,尺寸为Ф10×Ф5×2mm,固有频率为99.6KHz,阻抗为76欧姆,动态电阻为21欧姆,超声电源12输出电压范围为0-400V,电流范围为0-4A,输出频率为99.6±0.01KHz,且超声电源12在指定频率范围内具有自动频率跟踪功能。 The external diameter of the rotary ultrasonic motor driven by a single electric signal is 10mm, the length is 55mm, the piezoelectric ceramic used is PZT-8, the size is Ф10×Ф5×2mm , the natural frequency is 99.6KHz, the impedance is 76 ohms, the dynamic resistance is 21 ohms, the ultrasonic power supply 12 The output voltage range is 0-400V, the current range is 0-4A, the output frequency is 99.6±0.01KHz, and the ultrasonic power supply 12 has an automatic frequency tracking function within the specified frequency range.

结合图4所示,运行时,单电信号驱动旋转超声电机的电极片4接入超声电源12输出的电信号后,由于压电陶瓷片3的逆压电效应,压电陶瓷片3将会产生纵向超声振动,即将超声电源12输出的电能转换为超声振动能量,并驱动整个定子进行纵向超声振动,当超声振动能量从定子传递到椭圆振动模态转换器5驱动齿末端后,转换为具有一定相位差的纵向振动和弯曲振动复合的纵弯复合超声椭圆振动,即转换为椭圆振动模态转换器5驱动齿末端沿超声电机圆周切向的纵弯复合超声椭圆振动,驱动齿末端和摩擦盘8相接触,进而驱动转子进行旋转运动,超声电机连续运行30分钟后,超声电源12输出电压为100V,电流为0.26A,转子旋转速度为486r/min,运行状态良好。 As shown in FIG. 4 , during operation, after the electrode sheet 4 of the rotating ultrasonic motor driven by a single electric signal is connected to the electrical signal output by the ultrasonic power supply 12, due to the inverse piezoelectric effect of the piezoelectric ceramic sheet 3, the piezoelectric ceramic sheet 3 will Generate longitudinal ultrasonic vibration, that is, convert the electric energy output by the ultrasonic power supply 12 into ultrasonic vibration energy, and drive the entire stator to perform longitudinal ultrasonic vibration. When the ultrasonic vibration energy is transmitted from the stator to the end of the elliptical vibration mode converter 5, it is converted into a Longitudinal vibration with a certain phase difference and bending vibration compound longitudinal-bending composite ultrasonic elliptical vibration, which is converted into elliptical vibration mode converter 5 drives the longitudinal-bending composite ultrasonic elliptical vibration of the end of the drive tooth along the tangential direction of the ultrasonic motor circumference, drives the end of the tooth and friction The discs 8 are in contact with each other, and then drive the rotor to rotate. After the ultrasonic motor runs continuously for 30 minutes, the output voltage of the ultrasonic power supply 12 is 100V, the current is 0.26A, and the rotation speed of the rotor is 486r/min, and the operation is in good condition.

Claims (5)

1. single-electrical signal drives rotary ultrasonic motor, it is characterized in that: comprise axle and be set in successively back shroud, piezoelectric ceramic piece, electrode slice, elliptical vibration MODAL TRANSFORMATION OF A device, frictional disk, bearing, spring and the nut in axle, described axle, back shroud, piezoelectric ceramic piece, electrode slice, elliptical vibration MODAL TRANSFORMATION OF A device form the stationary part of described ultrasound electric machine, and axle and elliptical vibration MODAL TRANSFORMATION OF A device are fixed back shroud, piezoelectric ceramic piece, electrode slice and elliptical vibration MODAL TRANSFORMATION OF A device after by thread connection, described frictional disk and bearing form the rotor portion of ultrasound electric machine, described spring and nut form the malleation prefastening force adjustment mechanism of ultrasound electric machine rotor portion and stationary part, described elliptical vibration MODAL TRANSFORMATION OF A device is integrated, comprise the barrel portion of lower end and the driving gear part of upper end, described driving gear part is in the uniform upper end that is arranged on barrel portion of circumferencial direction, each driving gear is radially inclined wedge-shaped structure, the former overall structure of this inclined wedge-shaped radially be projected as rectangle, after being cut a part, ultrasound electric machine axis direction one side forms inclined wedge-shaped structure, form in two sides of inclined wedge-shaped, the projection radially of a cut side is not parallel to ultrasound electric machine axis, the another side being cut projection radially becomes 3-40 degree angle with ultrasound electric machine axis.
2. single-electrical signal according to claim 1 drives rotary ultrasonic motor, it is characterized in that: on described elliptical vibration MODAL TRANSFORMATION OF A device, the quantity of driving gear is 3-12.
3. single-electrical signal according to claim 1 drives rotary ultrasonic motor, it is characterized in that: described back shroud and described axle are made into split-type structural or integral structure.
4. according to the single-electrical signal described in claim 1 or 2 or 3, drive rotary ultrasonic motor, it is characterized in that: described elliptical vibration MODAL TRANSFORMATION OF A device driving gear end is bonded with A friction material.
5. according to the single-electrical signal described in claim 1 or 2 or 3, drive rotary ultrasonic motor, it is characterized in that: the end face contacting with driving gear on described frictional disk is bonded with B friction material.
CN201320520871.7U 2013-08-26 2013-08-26 Rotary Ultrasonic Motor Driven by Single Electric Signal Expired - Fee Related CN203406801U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103414375A (en) * 2013-08-26 2013-11-27 苏州科技学院 Rotary Ultrasonic Motor Driven by Single Electric Signal
CN104410326A (en) * 2014-12-09 2015-03-11 苏州科技学院 Single electric signal driven bilateral rotating ultrasonic motor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103414375A (en) * 2013-08-26 2013-11-27 苏州科技学院 Rotary Ultrasonic Motor Driven by Single Electric Signal
CN103414375B (en) * 2013-08-26 2016-01-20 苏州科技学院 Single-electrical signal drives rotary ultrasonic motor
CN104410326A (en) * 2014-12-09 2015-03-11 苏州科技学院 Single electric signal driven bilateral rotating ultrasonic motor

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