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CN203365711U - Micro lens and micro lens array structure - Google Patents

Micro lens and micro lens array structure Download PDF

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CN203365711U
CN203365711U CN 201320502192 CN201320502192U CN203365711U CN 203365711 U CN203365711 U CN 203365711U CN 201320502192 CN201320502192 CN 201320502192 CN 201320502192 U CN201320502192 U CN 201320502192U CN 203365711 U CN203365711 U CN 203365711U
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microlens
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lenticule
pixels
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夏军
杨鑫
李清蓉
王保平
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Southeast University
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Abstract

本实用新型公开了一种微透镜和微透镜阵列结构,一种亚像素微透镜液体透镜阵列结构,以红绿蓝亚像素为视点对微透镜子图的重排,通过重新排列亚像素进行透镜制备;本实用新型的微透镜阵列结构中单个透镜为矩形,行与行之间可以错开。透镜物理结构包括一个底层基板,基板上层筑有腔体结构,腔体中有凝固液体。每一个腔体结构侧壁的上表面有疏水区域;该疏水区域具有与液体互相排斥的物理性质,以保证腔体中的液体不会滑落到侧壁之上。此结构易于实现,并且造价低廉,具有很强的实用性。

Figure 201320502192

The utility model discloses a microlens and a microlens array structure, a sub-pixel microlens liquid lens array structure, which uses red, green and blue sub-pixels as viewpoints to rearrange the sub-pictures of the micro-lens, and performs lensing by rearranging the sub-pixels. Preparation: In the microlens array structure of the present utility model, a single lens is rectangular, and rows can be staggered. The physical structure of the lens includes a bottom substrate, a cavity structure is built on the substrate, and solidified liquid is in the cavity. The upper surface of the side wall of each cavity structure has a hydrophobic area; the hydrophobic area has the physical property of repelling each other with the liquid, so as to ensure that the liquid in the cavity will not slide down on the side wall. This structure is easy to realize, and the cost is low, and has strong practicability.

Figure 201320502192

Description

一种微透镜和微透镜阵列结构A kind of microlens and microlens array structure

技术领域technical field

本实用新型涉及亚像素微透镜液体透镜阵列结构,尤其涉及一种以红绿蓝亚像素为视点对微透镜子图进行重排后的亚像素微透镜液体透镜阵列结构。The utility model relates to a subpixel microlens liquid lens array structure, in particular to a subpixel microlens liquid lens array structure after rearranging microlens subimages with red, green and blue subpixels as viewpoints.

背景技术Background technique

集成成像技术日益成熟,但当前集成成像显示仍旧存在一些关键技术问题:在获取过程中,制备大尺寸、均匀焦距,串扰大是制约集成成像立体显示一个关键技术。在重现过程中,微透镜阵列重建的真三维图像存在景深范围小、视角窄、分辨率低等问题。Integrated imaging technology is becoming more and more mature, but there are still some key technical problems in the current integrated imaging display: in the acquisition process, the preparation of large size, uniform focal length, and large crosstalk is a key technology that restricts integrated imaging stereoscopic display. In the reconstruction process, the true 3D image reconstructed by the microlens array has problems such as small depth of field, narrow viewing angle, and low resolution.

现有成像技术普遍采用RGB色彩模式,RGB即是代表红、绿、蓝三个通道的颜色,(以下简称RGB),这个标准几乎包括了人类视力所能感知的所有颜色,是目前运用最广的颜色系统之一。通常将RGB三色构成一个完整的像素,单个的R,G,B分别为一个亚像素,三个不同的亚像素构成一个视场。根据立体视觉原理,观察者的左右眼分别看到同一场景的两幅视差图像,就可以感受立体效果,只要观察者在不同的观看位置看到这幅视差图像中的两幅就可以感知到立体效果,且随着水平移动时看到物体的不同侧面。目前三维成像技术往往采用多视点技术来获得更好的立体效果,并采用传统的以像素作为视点的微透镜阵列,将三个相邻的亚像素构成一个视场,但这种阵列结构容易产生图像区分不完全的情况,从而造成串扰,且分辨率较低。Existing imaging technologies generally adopt the RGB color mode. RGB is the color representing the three channels of red, green, and blue (hereinafter referred to as RGB). This standard includes almost all colors that can be perceived by human eyesight. One of the color systems. Usually the RGB three colors constitute a complete pixel, a single R, G, and B are each a sub-pixel, and three different sub-pixels form a field of view. According to the principle of stereo vision, the left and right eyes of the observer see two parallax images of the same scene, and they can experience the stereo effect. As long as the observer sees two of the parallax images in different viewing positions, they can perceive the stereo effect. effect and see different sides of objects as you move horizontally. At present, three-dimensional imaging technology often adopts multi-viewpoint technology to obtain better stereoscopic effects, and uses traditional microlens arrays with pixels as viewpoints to form a field of view with three adjacent sub-pixels, but this array structure is prone to Incomplete image differentiation, resulting in crosstalk, and lower resolution.

实用新型内容Utility model content

为了克服现有技术中存在的不足,本实用新型提供一种微透镜、微透镜阵列结构及其制作工艺,以红绿蓝亚像素为视点对微透镜子图的重排,降低图像串扰,提高分辨率,从而达到优良的显示效果。In order to overcome the deficiencies in the prior art, the utility model provides a microlens, a microlens array structure and its manufacturing process, which rearranges the microlens sub-images with the red, green and blue sub-pixels as the viewpoint, reduces image crosstalk, and improves Resolution, so as to achieve excellent display effect.

为实现上述目的,本实用新型采取如下技术方案:In order to achieve the above object, the utility model takes the following technical solutions:

一种亚像素微透镜液体透镜阵列结构,每个微透镜至少设有一个亚像素,每个视场在单个微透镜中只取一个亚像素,相邻的三个微透镜构成一个视场所需红绿蓝三色亚像素。A subpixel microlens liquid lens array structure, each microlens is provided with at least one subpixel, and each field of view only takes one subpixel in a single microlens, and three adjacent microlenses form a field of view. Red, green and blue sub-pixels.

本实用新型将传统的以像素作为视点的微透镜阵列改进以为亚像素为视点微透镜阵列。结合亚像素原理,假设点亮一个视点,改进后的合成的像素来自不同微透镜的RGB三个亚像素,像素宽度的是传统微透镜像素的三分之一。而改进后的视点之间的距离也为传统的视点距离的三分之一。由此可见改进后的微透镜阵列的多视点技术所形成的新像素点点距更小,从而使图像更加细腻,区分更加明显,有效地降低了串扰,提高分辨率。The utility model improves the traditional micro-lens array with pixels as viewpoints into a micro-lens array with sub-pixels as viewpoints. Combining the principle of sub-pixels, assuming that one viewpoint is lit, the improved synthetic pixels come from RGB three sub-pixels of different microlenses, and the pixel width is one-third of that of traditional microlens pixels. The distance between the improved viewpoints is also one-third of the traditional viewpoint distance. It can be seen that the new pixel pitch formed by the improved multi-view technology of the microlens array is smaller, so that the image is more delicate, the distinction is more obvious, the crosstalk is effectively reduced, and the resolution is improved.

本实用新型每个重排RGB组合的亚像素来自三个不同的单体微透镜,因此每个重排的RGB组合可以以任意亚像素开始排列,如RGB、GBR等。并且亚像素微透镜液体透镜阵列结构中每个重排RGB组合的亚像素可组成任意形状,如三角式、斜三角式、对角线式。The sub-pixels of each rearranged RGB combination in the utility model come from three different single microlenses, so each rearranged RGB combination can be arranged with any sub-pixel, such as RGB, GBR, etc. In addition, in the sub-pixel microlens liquid lens array structure, each rearranged RGB combined sub-pixel can form any shape, such as triangular, oblique triangular, or diagonal.

更进一步的,垂直方向上每个微透镜内部的RGB三色亚像素分别与相邻微透镜内部的RGB三色亚像素对齐;水平方向上每个微透镜内部的亚像素与相邻微透镜内部的亚像素对齐,且每行亚像素中RGB三色亚像素交替排列。Furthermore, the RGB three-color sub-pixels in each microlens are aligned with the RGB three-color sub-pixels in the adjacent microlens in the vertical direction; the sub-pixels in each microlens in the horizontal direction are aligned with the adjacent microlens The sub-pixels are aligned, and the RGB three-color sub-pixels are arranged alternately in each row of sub-pixels.

更进一步的,RGB三色亚像素在微透镜中偏移量相等,如均为单个透镜中的第四个像素。Further, the RGB three-color sub-pixels are equally offset in the microlens, such as the fourth pixel in a single lens.

更进一步的,RGB三色亚像素在微透镜中偏移角度相等。Furthermore, the RGB three-color sub-pixels are offset at equal angles in the microlens.

本实用新型还提出一种亚像素微透镜液体透镜阵列结构的微透镜,该微透镜为矩形,包括底层基板,所述底层基板上筑有腔体结构,所述腔体结构中设有凝固液体;所述腔体结构侧壁的上表面设有疏水区域。The utility model also proposes a microlens with a sub-pixel microlens liquid lens array structure. The microlens is rectangular and includes a bottom substrate. A cavity structure is built on the bottom substrate, and a solidified liquid is arranged in the cavity structure. ; The upper surface of the side wall of the cavity structure is provided with a hydrophobic area.

微透镜液体透镜阵列结构中微透镜行与行之间可以错开,也可以重合,且每个微透镜矩形长宽比任意,如微透镜高长度是宽一半、微透镜高长度近似宽大小、微透镜高长度比宽大。In the microlens liquid lens array structure, the rows of microlenses can be staggered or overlapped, and the rectangular aspect ratio of each microlens is arbitrary, such as the height and length of the microlens is half the width, the height and length of the microlens is approximately the The lens is taller than wider.

本实用新型还提出一种亚像素微透镜液体透镜阵列结构的工艺流程,其特征在于:The utility model also proposes a process flow of a sub-pixel microlens liquid lens array structure, which is characterized in that:

(1)压膜,采用1.5mm厚度的光学玻璃作为玻璃基板,清洁玻璃基板并将其裁成所需的尺寸规格,然后在玻璃基板上用压膜机压上20微米蓝膜;(1) Lamination, using optical glass with a thickness of 1.5mm as the glass substrate, cleaning the glass substrate and cutting it into the required size specifications, and then pressing a 20 micron blue film on the glass substrate with a laminating machine;

(2)掩模刻蚀,在压膜后的玻璃基板上放置形状定制的胶片,并将玻璃和胶片进行紫外曝光;然后将曝光后的玻璃基板放入显影机中进行显影,显影液将固化好的地方保留,未经光照固化的洗掉形成腔体结构;最后烘干;(2) Mask etching, place a custom-shaped film on the laminated glass substrate, and expose the glass and film to ultraviolet light; then put the exposed glass substrate into a developing machine for development, and the developer will be cured Keep the good parts, wash off without light curing to form a cavity structure; finally dry;

(3)涂疏水层,在掩模刻蚀后仍旧固化的蓝膜上涂上一层特氟龙溶液作为疏水层;(3) Apply a hydrophobic layer, and apply a layer of Teflon solution on the blue film that is still cured after mask etching as a hydrophobic layer;

(4)涂胶,在掩模刻蚀后未固化形成腔体结构中涂上NOA73溶液;(4) Coating, coating NOA73 solution in the uncured cavity structure formed after mask etching;

(5)紫外固化,采用紫外光固化,使液体透镜转变成固体聚合物透镜。(5) UV curing, using UV curing to transform the liquid lens into a solid polymer lens.

有益效果:(1)本实用新型的亚像素微透镜液体透镜阵列结构以RGB亚像素为视点对微透镜子图的重排,并且RGB亚像素来自三个不同的微透镜,降低了串扰,使显示的分辨率大大提高;(2)本实用新型通过凝固液体的方法,减少了重力、气温等元素对透镜质量的影响;(3)本实用新型整体结构简单,造价低廉,特性稳定;(4)本实用新型疏水区域具有与液体互相排斥的物理性质,保证腔体结构中的液体不会滑落到腔体结构侧壁之上,提高了亚像素微透镜液体透镜阵列结构稳定性;(5)本实用新型为研究亚像素形成的多视点技术对集成成像串扰的影响铺垫基础,并通过测量传统以像素为视点的微透镜阵列的亮度空间分布,进而分析和评估亚像素微透镜阵列和传统微透镜阵列串扰情况。Beneficial effects: (1) The sub-pixel microlens liquid lens array structure of the utility model rearranges the sub-images of the microlens with RGB sub-pixels as the viewpoint, and the RGB sub-pixels come from three different microlenses, which reduces crosstalk and enables The display resolution is greatly improved; (2) The utility model reduces the influence of gravity, air temperature and other elements on the quality of the lens through the method of solidifying the liquid; (3) The utility model has a simple overall structure, low cost and stable characteristics; (4 ) The hydrophobic region of the utility model has the physical property of mutual repulsion with the liquid, which ensures that the liquid in the cavity structure will not slide down to the side wall of the cavity structure, and improves the structural stability of the sub-pixel microlens liquid lens array; (5) The utility model paves the way for the study of the influence of the multi-viewpoint technology formed by sub-pixels on the crosstalk of integrated imaging, and by measuring the brightness spatial distribution of the traditional micro-lens array with pixels as the viewpoint, it further analyzes and evaluates the sub-pixel micro-lens array and the traditional micro-lens array. Lens array crosstalk situation.

附图说明Description of drawings

图1为本实用新型亚像素微透镜液体透镜阵列结构的单个微透镜剖面示意图。FIG. 1 is a schematic cross-sectional view of a single microlens of the sub-pixel microlens liquid lens array structure of the present invention.

图2为本实用新型亚像素微透镜液体透镜阵列结构的俯视示意图。FIG. 2 is a schematic top view of the sub-pixel microlens liquid lens array structure of the present invention.

图3为本实用新型微透镜高长度是宽一半尺寸示意图。Fig. 3 is a schematic diagram of the microlens of the present invention, where the height and length are half the width.

图4为本实用新型微透镜高长度近似宽大小尺寸示意图。Fig. 4 is a schematic diagram showing the approximate width and height of the microlens of the utility model.

图5为本实用新型微透镜高长度比宽大尺寸示意图。Fig. 5 is a schematic diagram of the height-to-width ratio of the microlens of the present invention.

图6为本实用新型三角式亚像素排列示意图。FIG. 6 is a schematic diagram of a triangular sub-pixel arrangement of the present invention.

图7为本实用新型斜三角式亚像素排列示意图。FIG. 7 is a schematic diagram of an oblique triangle sub-pixel arrangement of the present invention.

图8为本实用新型对角线式排列示意图。Fig. 8 is a schematic diagram of a diagonal arrangement of the utility model.

图9为本实用新型提供的微透镜的新像素。Fig. 9 is a new pixel of the microlens provided by the present invention.

图10为传统微透镜的像素。Figure 10 is a pixel of a conventional microlens.

图11为本实用新型亚像素微透镜液体透镜阵列结构的剖面示意图。FIG. 11 is a schematic cross-sectional view of the sub-pixel microlens liquid lens array structure of the present invention.

具体实施方式Detailed ways

下面结合附图对本实用新型作更进一步的说明。Below in conjunction with accompanying drawing, the utility model is described further.

如图1所示,本实用新型提出的亚像素微透镜液体透镜阵列结构的微透镜的物理结构剖面图,包括底层基板(1),所述底层基板(1)上筑有腔体结构(2),所述腔体结构(2)中设有凝固液体(3);所述腔体结构(2)侧壁的上表面设有疏水区域(4)。如图2所示,该微透镜为矩形,并且微透镜矩形长宽比任意,如微透镜高长度是宽一半、微透镜高长度近似宽大小、微透镜高长度比宽大。As shown in Figure 1, the physical structure cross-sectional view of the microlens of the sub-pixel microlens liquid lens array structure proposed by the utility model includes the bottom substrate (1), and the cavity structure (2) is built on the bottom substrate (1). ), the cavity structure (2) is provided with a coagulation liquid (3); the upper surface of the side wall of the cavity structure (2) is provided with a hydrophobic region (4). As shown in FIG. 2 , the microlens is rectangular, and the rectangular aspect ratio of the microlens is arbitrary, such as the height and length of the microlens is half of the width, the height and length of the microlens are approximately the same as the width, and the height and length of the microlens are larger than the width.

本实用新型提供了一种亚像素微透镜液体透镜阵列结构,如图2所示,每个视场在单个微透镜中只有一个亚像素,相邻的三个微透镜构成一个视场的RGB三色亚像素。每个重排RGB组合的亚像素来自三个不同的单体微透镜,因此每个重排的RGB组合可以以任意像素开始排列,如RGB、GBR等。并且亚像素微透镜液体透镜阵列结构中每个重排RGB组合的亚像素可组成任意形状,如三角式(如图3)、斜三角式(如图4)、对角线式(如图5)。图中的黑框表示一个微透镜,由于透镜成像的光学作用,假设16视点透镜的4视点被点亮(颜色填充),即每个微透镜的相应的第4个视点被点亮。并且,RGB三色亚像素在微透镜中偏移量和偏移角度相等,如均为单体透镜中的第四个像素。该亚像素微透镜液体透镜阵列结构中行与行之间可以错开,但是在垂直方向上每个单体透镜内部的RGB亚像素与单体透镜间的RGB亚像素均一直对齐。The utility model provides a sub-pixel microlens liquid lens array structure, as shown in Figure 2, each field of view has only one sub-pixel in a single microlens, and three adjacent microlenses form a RGB triplet of a field of view. color subpixels. The sub-pixels of each rearranged RGB combination come from three different single microlenses, so each rearranged RGB combination can start with any pixel arrangement, such as RGB, GBR, etc. And the sub-pixels of each rearranged RGB combination in the sub-pixel microlens liquid lens array structure can form any shape, such as triangular (as shown in Figure 3), oblique triangular (as shown in Figure 4), diagonal (as shown in Figure 5 ). The black box in the figure represents a microlens. Due to the optical effect of lens imaging, it is assumed that 4 viewpoints of the 16-viewpoint lens are lit (color filled), that is, the corresponding 4th viewpoint of each microlens is lit. Moreover, the offset amount and offset angle of the RGB three-color sub-pixels in the microlens are equal, such as the fourth pixel in the single lens. In the sub-pixel microlens liquid lens array structure, the rows can be staggered, but the RGB sub-pixels inside each single lens are always aligned with the RGB sub-pixels between the single lenses in the vertical direction.

如图10所示,传统微透镜像素均是直线排列,从1到12,RGB亚像素交替排列,如图9所示,本实用新型提供的微透镜采用三角等不同结构进行像素重排。As shown in Figure 10, the traditional microlens pixels are arranged in a straight line, from 1 to 12, RGB sub-pixels are arranged alternately, as shown in Figure 9, the microlens provided by the utility model adopts different structures such as triangles to rearrange pixels.

观察图9,假设点亮4视点,改进后的合成的像素来自不同微透镜的红绿蓝三个子像素,像素宽度的是传统微透镜像素(图10)的三分之一。而改进后的视点之间的距离也为传统的视点距离的三分之一。由此可见改进后的微透镜阵列的多视点技术所形成的新像素点点距更小,相邻视点峰值间距L更小。Looking at Figure 9, assuming that 4 viewpoints are lit, the improved composite pixels come from the three sub-pixels of red, green and blue of different microlenses, and the pixel width is one-third of that of the traditional microlens pixels (Figure 10). The distance between the improved viewpoints is also one-third of the traditional viewpoint distance. It can be seen that the new pixel pitch formed by the improved multi-viewpoint technology of the microlens array is smaller, and the peak distance L between adjacent viewpoints is smaller.

通过分析不同视点的红绿蓝光的亮度分布,由于显示屏的亚像素点是按照红绿蓝亚像素顺序依次排列的,因此三光峰值的分布有所偏移,从而造成白光的单像素亮度D比较大。而改进后的红绿蓝三像素在同一个视点空间内显示,经过透镜作用,红绿蓝光峰值保持一致。考虑到传统微透镜阵列里红绿蓝光的不一致性和点距更大因素,改进后合成的白光的峰值光强增大,单像素亮度宽度D减小,相邻曲线的峰值间距L减小为原来的三分之一越为1°。由于双目瞳距为7cm左右,因此在观看改进后的微透镜阵列时,左右眼所在在视点区相差很远,则左右眼相互干扰的亮度也减少。与传统的微透镜阵列相比,串扰相应的也减少。By analyzing the brightness distribution of red, green, and blue light from different viewpoints, since the sub-pixels of the display screen are arranged in sequence according to the order of red, green, and blue sub-pixels, the distribution of the three light peaks is shifted, resulting in the comparison of single-pixel brightness D of white light. big. The improved red, green, and blue three-pixels are displayed in the same viewing space, and the peaks of red, green, and blue light are consistent through the lens effect. Considering the inconsistency of red, green, and blue light in the traditional microlens array and the larger point distance, the peak intensity of the white light synthesized after the improvement is increased, the single pixel brightness width D is reduced, and the peak distance L of adjacent curves is reduced to The original third is 1°. Since the interpupillary distance of the binoculars is about 7cm, when watching the improved microlens array, the left and right eyes are located far away in the viewing point area, and the brightness of the mutual interference between the left and right eyes is also reduced. Crosstalk is correspondingly reduced compared to conventional microlens arrays.

根据子像素排列的设计和理论分析,不同的子像素重排会导致显示莫尔条纹效应不同,莫尔条纹最小,串扰最小,分辨率越高,显示效果越好。According to the design and theoretical analysis of the sub-pixel arrangement, different sub-pixel rearrangements will result in different moiré fringe effects. The moiré fringe is the smallest, the crosstalk is the smallest, and the higher the resolution, the better the display effect.

微透镜阵列是在三维立体显示中广泛应用的光学器件。微透镜阵列运用在集成成像获取阶段和重现阶段中,它的尺寸、形状、焦距等参数对于图像显示质量有重要的影响。因此制备符合要求的微透镜阵列对集成成像的研究十分关键。本实用新型制作过程主要有五个步骤,在制作流程中,每一个步骤都需要较高精确度,这样制作出来的微透镜阵列才能拥有很好的均匀性和一致的光学特性。实施方法如下所述:Microlens array is an optical device widely used in three-dimensional stereoscopic display. The microlens array is used in the acquisition stage and reproduction stage of integrated imaging, and its size, shape, focal length and other parameters have an important impact on the image display quality. Therefore, the preparation of a microlens array that meets the requirements is very critical for the research of integrated imaging. The manufacturing process of the utility model mainly has five steps. In the manufacturing process, each step requires high precision, so that the manufactured microlens array can have good uniformity and consistent optical characteristics. The method of implementation is as follows:

(一)压膜(1) Lamination

微透镜阵列一般是在玻璃基板上进行制作的,首先是清洁玻璃基板并将其裁成所需的尺寸规格。然后在玻璃基板上用压膜机压上光致刻蚀剂。Microlens arrays are generally fabricated on glass substrates, first by cleaning the glass substrates and cutting them into required dimensions. Then, the photoresist is pressed on the glass substrate with a lamination machine.

该底层基板(1)要求具有一定硬度、耐热、抗腐蚀、良好的透明性,本实例中采用1.5mm厚度的光学玻璃。The underlying substrate (1) is required to have certain hardness, heat resistance, corrosion resistance, and good transparency. In this example, optical glass with a thickness of 1.5 mm is used.

该腔体结构(2)要求有良好的粘合性和均匀性,能一次成型做出各种不同结构,厚度在微米级别,并且起到支撑液体的作用。本实例中采用20微米蓝膜。The cavity structure (2) requires good adhesion and uniformity, and can be formed into various structures at one time, with a thickness of micron level, and plays a role of supporting liquid. A 20 micron blue film was used in this example.

(二)掩模刻蚀(2) Mask etching

在压膜的玻璃基板上放置形状定制的胶片。将玻璃和胶片一起进行紫外曝光,紫外光照到的地方将被固化。将曝光好的玻璃放入显影机中进行显影,显影液将固化好的地方保留,未经光照固化的将被洗掉。经过烘干之后留下来的就是所需的形状。A custom-shaped film is placed on a laminated glass substrate. The glass and film are exposed to UV light, and the areas where the UV light hits will be cured. Put the exposed glass into a developing machine for development, the developer will keep the cured part, and the uncured part will be washed away. What remains after drying is the desired shape.

该掩膜图案中单个透镜为矩形,阵列排布每行可以错开,如图2所示为一例。A single lens in the mask pattern is rectangular, and each row of the array arrangement can be staggered, as shown in FIG. 2 as an example.

该掩膜图案中单个透镜的长宽比任意,如微透镜高长度是宽一半(图3)、微透镜高长度近似宽大小(图4)、微透镜高长度比宽大(图5)。The aspect ratio of a single lens in the mask pattern is arbitrary, such as the height and length of the microlens is half the width (Figure 3), the height and length of the microlens is approximately the size of the width (Figure 4), and the height and length of the microlens is larger than the width (Figure 5).

该掩膜图案中亚像素排列可以设计成任意结构,如三角式(图6)、斜三角式(图7)、对角线式(图8)。The arrangement of sub-pixels in the mask pattern can be designed in any structure, such as triangular (Fig. 6), oblique triangular (Fig. 7), and diagonal (Fig. 8).

(三)涂疏水层(3) Apply a hydrophobic layer

在刻蚀后仍旧固化的蓝膜上涂上一层疏水层,疏水层可以阻止液体沾到蓝膜上从而分离相邻液体透镜。A layer of hydrophobic layer is coated on the blue film that is still cured after etching, and the hydrophobic layer can prevent the liquid from sticking to the blue film to separate adjacent liquid lenses.

该疏水区域(4)由透明材质制成。该疏水区域覆盖腔体结构(2)的上表面。该疏水区域具有与液体互相排斥的物理性质,以保证腔体中的液体不会滑落到侧壁之上,如图11所示。本实例中利用特氟龙溶液。The hydrophobic area (4) is made of transparent material. The hydrophobic area covers the upper surface of the cavity structure (2). The hydrophobic region has the physical property of mutual repulsion with the liquid, so as to ensure that the liquid in the cavity will not slide down to the side wall, as shown in FIG. 11 . In this example a Teflon solution was utilized.

(四)涂胶(4) Glue

涂胶是整个制备过程中最重要的一环。涂胶的相关参数关系到液体透镜的接触角和形状,从而影响透镜的焦距。Gluing is the most important part of the whole preparation process. The relevant parameters of glue coating are related to the contact angle and shape of the liquid lens, thus affecting the focal length of the lens.

该凝固液体(3)要求是透明溶液,不易挥发,没有毒性并且容易被固化。本实例中采用NOA73溶液。The coagulation liquid (3) is required to be a transparent solution, not volatile, non-toxic and easy to solidify. NOA73 solution was used in this example.

(五)紫外固化(5) UV curing

涂胶后的液体透镜不稳定,需要再进行一次紫外光固化,从而使液体透镜转变成固体聚合物透镜。The glue-coated liquid lens is unstable and needs to be cured again by UV light to transform the liquid lens into a solid polymer lens.

最后,综合单个透镜的尺寸及亚像素排列可以得到各种尺寸和结构的亚像素微透镜液体透镜阵列,如三角式-微透镜高长度是宽一半(图6)、斜三角式-微透镜高长度是宽一半(图7)、对角线式-微透镜高长度是宽一半(图8)、三角式-微透镜高长度近似宽大小、斜三角式-微透镜高长度比宽大、对角线式-微透镜高长度与宽相等。Finally, combining the size of a single lens and the arrangement of sub-pixels, we can obtain sub-pixel microlens liquid lens arrays of various sizes and structures, such as triangular-microlens height and length are half the width (Figure 6), oblique triangle-microlens height The length is half of the width (Figure 7), Diagonal - the height and length of the microlens are half the width (Figure 8), Triangular - the height and length of the microlens is approximately the same as the width, Oblique triangle - the height and length of the microlens are larger than the width, diagonal Line - The microlens is as tall as it is wide.

以上所述仅是本实用新型的优选实施方式,应当指出:对于本技术领域的普通技术人员来说,在不脱离本实用新型原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本实用新型的保护范围。The above is only a preferred embodiment of the utility model, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the utility model, some improvements and modifications can also be made. Retouching should also be regarded as the scope of protection of the present utility model.

Claims (5)

1. a sub-pix lenticule liquid lens array structure, it is characterized in that: each lenticule at least is provided with a sub-pix, and three adjacent lenticules form a required redgreenblue sub-pix in visual field.
2. a kind of sub-pix lenticule liquid lens array structure according to claim 1, it is characterized in that: on longitudinal direction, the redgreenblue sub-pix of each lenticule inside aligns with the redgreenblue sub-pix of contiguous microlens inside respectively; The sub-pix of each lenticule inside aligns with the sub-pix of contiguous microlens inside in a lateral direction, and redgreenblue sub-pix alternative arrangement in every row sub-pix.
3. a kind of sub-pix lenticule liquid lens array structure according to claim 1 is characterized in that: described redgreenblue sub-pix side-play amount in lenticule equates.
4. a kind of sub-pix lenticule liquid lens array structure according to claim 1 is characterized in that: described redgreenblue sub-pix deviation angle in lenticule equates.
5. the lenticule in the described sub-pix lenticule of claim 1 a liquid lens array structure, it is characterized in that: this lenticule is rectangle, comprise bottom substrate (1), build a cavity body structure (2) on described bottom substrate (1), be provided with solidifying liq (3) in described cavity body structure (2); The upper surface of described cavity body structure (2) sidewall is provided with hydrophobic region (4).
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103399368A (en) * 2013-08-15 2013-11-20 东南大学 Microlens, microlens array structure and manufacturing process thereof
CN108231811A (en) * 2018-01-23 2018-06-29 中国电子科技集团公司第四十四研究所 The microlens array of optical crosstalk between polarization imaging device pixel can be reduced
CN110520284A (en) * 2017-02-27 2019-11-29 弗劳恩霍夫应用研究促进协会 The method for manufacturing optical micro lens array
CN112863326A (en) * 2019-11-12 2021-05-28 Oppo广东移动通信有限公司 Transparent screen, manufacturing method of transparent screen and mobile terminal
US11362124B2 (en) 2020-01-30 2022-06-14 Omnivision Technologies, Inc. Image sensors with quantum efficiency enhanced by inverted pyramids
US11393861B2 (en) 2020-01-30 2022-07-19 Omnivision Technologies, Inc. Flare-suppressing image sensor
US11469264B2 (en) 2020-01-30 2022-10-11 Omnivision Technologies, Inc. Flare-blocking image sensor
US11862651B2 (en) 2020-01-30 2024-01-02 Omnivision Technologies, Inc. Light-trapping image sensors

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103399368A (en) * 2013-08-15 2013-11-20 东南大学 Microlens, microlens array structure and manufacturing process thereof
CN103399368B (en) * 2013-08-15 2015-06-17 东南大学 Microlens, microlens array structure and manufacturing process thereof
CN110520284A (en) * 2017-02-27 2019-11-29 弗劳恩霍夫应用研究促进协会 The method for manufacturing optical micro lens array
CN110520284B (en) * 2017-02-27 2021-11-05 弗劳恩霍夫应用研究促进协会 Method for fabricating an optical microlens array
US12092843B2 (en) 2017-02-27 2024-09-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for manufacturing an optical microlens array
CN108231811A (en) * 2018-01-23 2018-06-29 中国电子科技集团公司第四十四研究所 The microlens array of optical crosstalk between polarization imaging device pixel can be reduced
CN112863326A (en) * 2019-11-12 2021-05-28 Oppo广东移动通信有限公司 Transparent screen, manufacturing method of transparent screen and mobile terminal
US11362124B2 (en) 2020-01-30 2022-06-14 Omnivision Technologies, Inc. Image sensors with quantum efficiency enhanced by inverted pyramids
US11393861B2 (en) 2020-01-30 2022-07-19 Omnivision Technologies, Inc. Flare-suppressing image sensor
US11469264B2 (en) 2020-01-30 2022-10-11 Omnivision Technologies, Inc. Flare-blocking image sensor
US11862651B2 (en) 2020-01-30 2024-01-02 Omnivision Technologies, Inc. Light-trapping image sensors
US12136637B2 (en) 2020-01-30 2024-11-05 Omnivision Technologies, Inc. Flare-blocking image sensor

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