CN203337570U - Detecting system - Google Patents

Abstract

The embodiment of the utility model provides a detection system, including an image acquisition device, a data processing device, and a substrate carrying device. Image information and preset substrate specification standard data to detect whether the substrate is defective, because when detecting the substrate based on the two-dimensional image information acquired by the image acquisition device and the preset substrate specification standard data, it can be based on various specifications Standard data is used for detection, so missing detection is not easy to occur, and the detection accuracy is also high, which can effectively improve the accuracy of substrate defect detection.

Description

Detection Systems

technical field

The utility model relates to the field of display technology, in particular to a detection system.

Background technique

The liquid crystal display panel includes a color filter substrate and an array substrate, and the color filter substrate and the array substrate are both processed with glass substrates as the most basic raw materials through different processes. The manufacturing process of the array substrate usually needs to perform several processes of film formation, exposure, etching and stripping in cycles to form multi-pattern layers. Since the thickness of the glass on the glass substrate is relatively thin, usually 0.3-0.7mm, the edge of the glass is easily broken or broken during the production process. Once the glass is broken or broken, it will have a serious impact on products and equipment.

Usually, the substrate defect detection methods for array base stations or color filter substrates mainly include vacuum adsorption alarms and setting cameras on the edges of the substrate running direction to record whether the edges are defective. The vacuum adsorption alarm is to perform vacuum adsorption on the substrate and detect the vacuum degree after adsorption. If the preset vacuum degree cannot be reached, it is determined that the base station is damaged and an alarm is issued. However, this method is susceptible to fluctuations in vacuum supply pressure, flatness of the platen, and slight deformation of the substrate, so it is prone to false alarms or missed inspections; if a camera is installed on the edge of the substrate’s running direction to record whether the edge is defective, only the substrate can be detected Defects on the edge of the traveling direction, but defects on the edge of the substrate perpendicular to the traveling direction cannot be detected. Therefore, the current substrate defect detection method cannot effectively detect the defect of the base station, and the detection accuracy is low.

Contents of the invention

The embodiment of the utility model provides a detection system to improve the accuracy of substrate defect detection.

A detection system comprising:

An image acquisition device for acquiring two-dimensional image information of the substrate;

A data processing device for detecting whether the substrate is defective based on the two-dimensional image information and preset substrate specification data is connected to the image acquisition device.

The embodiment of the utility model provides a detection system, including an image acquisition device and a data processing device. The two-dimensional image information of the substrate is obtained by the image acquisition device, and then the data processing device is based on the two-dimensional image information obtained by the image acquisition device and the pre-set Based on the specified substrate specification standard data to detect whether the substrate is defective, because when the substrate is detected according to the two-dimensional image information obtained by the image acquisition device and the pre-set substrate specification standard data, it can be detected according to the specification standard data in multiple aspects, Therefore, missing detection is less likely to occur, and the detection accuracy is relatively high, which can effectively improve the detection accuracy of the substrate defect.

Description of drawings

Fig. 1 is one of the structural representations of the detection system provided by the embodiment of the utility model;

Fig. 2 is a schematic structural diagram of an image acquisition device provided by an embodiment of the present invention;

Fig. 3 is the second structural diagram of the detection system provided by the embodiment of the utility model;

Fig. 4 is one of the structural schematic diagrams of the substrate carrying equipment provided by the embodiment of the present invention;

Fig. 5 is the second schematic diagram of the structure of the substrate carrying device provided by the embodiment of the present invention;

Fig. 6 is a schematic structural diagram of a data processing device provided by an embodiment of the present invention;

Fig. 7 is a schematic structural diagram of a preferred detection system provided by the embodiment of the present invention.

Detailed ways

The embodiment of the utility model provides a detection system, including an image acquisition device, a data processing device, and a substrate carrying device. Image information and preset substrate specification standard data are used to detect whether the substrate is defective. Since the substrate is detected according to the two-dimensional image information acquired by the image acquisition device and the preset substrate specification standard data, it can be based on various specifications. Standard data is used for detection, so missing detection is not easy to occur, and the detection accuracy is also high, which can effectively improve the accuracy of substrate defect detection.

As shown in Figure 1, the embodiment of the present invention provides a detection system, including:

An image acquisition device 101 for acquiring two-dimensional image information of the substrate;

The data processing device 102 for detecting whether the substrate is defective based on the two-dimensional image information and the preset substrate specification standard data is connected to the image acquisition device 101 .

The two-dimensional image information of the substrate is obtained by the image acquisition device 101, and then the data processing device 102 detects whether the substrate is defective according to the two-dimensional image information obtained by the image acquisition device 101 and the preset substrate specification standard data. Since the substrate can be detected according to the two-dimensional image information scanned by the image acquisition device 101 and the preset standard data of the substrate specification, it can be detected according to various specifications such as shape and area, so it is not easy to miss detection, and the detection accuracy Also higher.

Wherein, the substrate may be a display substrate, a base substrate, and other various substrates with or without device graphics formed in the manufacturing process of the display device, and the display type is not limited, for example, it may be a liquid crystal display, an electroluminescent display, etc.;

The image acquisition device can be any type of existing equipment with two-dimensional image acquisition function. In the embodiment of the utility model, a charge coupled device (Charge Coupled Device, CCD) scanning device is taken as an example for illustration.

Specifically, as shown in FIG. 2, the image acquisition device 101 includes:

The CCD201, the CDD drive circuit 202 connected to the CCD201 and the lens 203 connected to the CCD201, wherein the lens 203 is used to increase the scanning width of the CCD201.

In practical applications, the magnification or reduction factor of the lens 203 can be determined according to the width of the substrate in the direction of the pixel, so that the width of the substrate in the direction of the pixel is within the scanning width of the CCD 201 .

Among them, CCD201 can be specifically:

Linear array CCD201; or

Area array CCD201.

Preferably, as shown in FIG. 3 , the detection system provided by the embodiment of the present invention further includes: a substrate carrying device 103 for carrying the substrate, located below the image acquisition device 101 ;

Specifically, when the CCD201 is a linear array CCD201, since the linear array CCD201 can read out each pixel data row by row, the substrate carrying device 103 can be a transfer type substrate carrying device 103 as shown in FIG. Below the lens 203, when the substrate is placed on the conveying substrate carrying device 103, the servo motor of the conveying substrate carrying device 103 can drive the conveyor belt on the conveying substrate carrying device 103 to move in a certain direction at a fixed speed, thereby driving The substrate moves at the same speed, so that the linear array CCD 201 can scan the data of each pixel at the position where the substrate is carried in the substrate carrying device 103 line by line to obtain two-dimensional image information of the surface.

When the CCD201 is an area array CCD201, since the area array CCD201 can directly scan to obtain the two-dimensional image information of the position of the substrate carrying device 103, the substrate carrying device 103 can be a panel-type substrate carrying device 103 as shown in Figure 5, set under the lens 203.

Of course, those skilled in the art can adopt other feasible ways to set up the image acquisition device 101 and the substrate carrying device 103 , and only two preferred setting ways are provided here, which will not be described one by one.

In practical applications, as shown in FIG. 6, the data processing device 102 includes:

The digital-to-analog conversion card 601 for determining the two-dimensional grayscale data of the substrate according to the two-dimensional image information of the surface is connected to the image acquisition device 101;

The processor 602 for detecting whether the substrate is defective according to the two-dimensional grayscale data and the preset substrate specification standard data is connected with the digital-to-analog conversion card 601 .

The processor 602 may specifically be: a computer (personal computer, PC); or a field programmable gate array (field programmable gata array, FPGA); or a complex programmable logic device (complex programmable logic device, CPLD).

There are many ways for the processor 602 to detect the substrate placed on the substrate carrying device 103 according to the two-dimensional image information obtained by the CCD 201 and the preset substrate specification standard data. The two-dimensional image information scanned by the CCD201 is detected to improve the detection accuracy of the substrate. The embodiment of the present invention provides two preferred implementation modes.

The first embodiment is to determine the area of the substrate according to the two-dimensional image information, then the preset substrate specification standard data is the preset substrate area data, then the two-dimensional image information of the substrate is obtained, and the substrate carrying equipment can be obtained through the CCD201 In 103, the two-dimensional image information of the position of the substrate is carried, and then the electrical signal reflecting the two-dimensional image information is converted into a digital signal through the digital-to-analog conversion card 601 to form the two-dimensional grayscale data of the surface, and the substrate can be obtained. two-dimensional grayscale data, the processor 602 can determine the pixel corresponding to the grayscale data of the corresponding substrate in the two-dimensional grayscale data according to the preset threshold value, wherein the preset threshold value can be based on the substrate and the substrate carrying device 103 The grayscale of the surface carrying the substrate determines the threshold that can distinguish the substrate from the substrate carrying device 103. For example, when the grayscale value of the substrate is 5 and the grayscale value of the substrate carrying device 103 is 0, the threshold can be set as 4, when the processor 602 determines the pixel corresponding to the grayscale data of the corresponding substrate in the two-dimensional grayscale data, the pixel whose grayscale value is greater than 4 can be determined as the pixel corresponding to the substrate, preferably, the corresponding The pixel point of the substrate is marked as 1, and the pixel point corresponding to the substrate carrying device 103 is marked as 0, so as to identify the distribution of the substrate in the scanned two-dimensional image information, and obtain a two-dimensional 0,1 value distribution point array.

可以确定基板的实际面积，其中a_ij为二维的0,1值分布点阵第i行中第j个像元的0,1值，C为确定的常数值，则将确定的面积值与预先设定的基板面积数据进行比较，若确定的面积值小于预先设定的基板面积数据，则可以确定基板存在缺损。Since the acquired two-dimensional image information is enlarged or reduced by the lens 203, a constant value must be determined according to the enlargement or reduction coefficient of the lens 203 and the area of each pixel in the two-dimensional image information, then by the formula

The actual area of the substrate can be determined, where a _ij is the 0,1 value of the jth pixel in the i-th row of the two-dimensional 0,1 value distribution lattice, and C is a determined constant value, then the determined area value and Compared with the preset substrate area data, if the determined area value is smaller than the preset substrate area data, it can be determined that there is a defect in the substrate.

The second embodiment is to determine the outline of the substrate according to the two-dimensional image information, and the preset substrate specification standard data is the preset substrate outline data. In practical applications, it can be obtained by the same method as the first embodiment. A two-dimensional lattice of 0,1 value distribution.

Then determine the outline of the substrate according to the two-dimensional grayscale dot matrix, and compare it with the preset outline data of the substrate to determine whether the substrate is defective.

As shown in Figure 7, the embodiment of the present invention provides a specific detection system, including:

Linear array CCD201, CCD201 driving circuit connected to linear array CCD201, lens 203 connected to linear array CCD201, transmission type substrate carrying equipment 103 connected to linear array CCD201 and located below lens 203, digital-analog connected to linear array CCD201 A conversion card 601, and a processor 602 connected to the digital-to-analog conversion card 601.

Among them, the digital-to-analog conversion card 601 is used to determine the two-dimensional data matrix according to the two-dimensional image information scanned by the linear array CCD201, and the processor 602 is used to determine the two-dimensional data matrix according to the two-dimensional data matrix and the preset substrate area data and the preset substrate outline. The data detects whether the substrate is defective.

The embodiment of the utility model provides a detection system, including an image acquisition device 101, a data processing device 102, and a substrate carrying device 103. The two-dimensional image information acquired by the equipment and the preset substrate specification standard data are used to detect whether the substrate is defective. Since the substrate is detected according to the two-dimensional image information acquired by the image acquisition device 101 and the preset substrate specification standard data, it can The detection is carried out according to the specification standard data in many aspects, so it is not easy to miss detection, and the detection accuracy is also high, which can effectively improve the accuracy of substrate defect detection.

Obviously, those skilled in the art can make various changes and modifications to the utility model without departing from the spirit and scope of the utility model. In this way, if these modifications and variations of the utility model fall within the scope of the claims of the utility model and equivalent technologies thereof, the utility model is also intended to include these modifications and variations.

Claims (9)

1. a detection system, is characterized in that, comprising:

For obtaining the image capture device of two-dimensional image information of substrate;

For according to described two-dimensional image information and the whether damaged data processing equipment of the described substrate of predefined substrate specification standards Data Detection, with described image capture device, be connected.

2. the system as claimed in claim 1, is characterized in that, also comprises:

For the substrate bearing equipment of bearing substrate, be positioned at the below of described image capture device.

3. the system as claimed in claim 1, is characterized in that, described image capture device is specially:

Charge coupled cell CCD scanning device.

4. system as described as claim 1 or 3, is characterized in that, described image capture device comprises:

CCD, the CDD driving circuit be connected with described CCD and be connected to the lens for the sweep length that increases described CCD on described CCD.

5. system as claimed in claim 4, is characterized in that, described CCD is specially:

Line array CCD; Perhaps

Area array CCD.

6. system as claimed in claim 5, is characterized in that, described CCD is line array CCD, and described system also comprises:

For the transfer type substrate load bearing equipment of bearing substrate, be positioned at the below of described lens.

7. system as claimed in claim 5, is characterized in that, described CCD is area array CCD, and described system also comprises:

For the panel type substrate bearing equipment of bearing substrate, be positioned at the below of described lens.

8. the system as claimed in claim 1, is characterized in that, described data processing equipment comprises:

Be connected the digital-to-analog conversion card of the two dimensional gray data of described substrate with described image capture device for determining according to described two-dimensional image information;

For according to described two dimensional gray data and the whether damaged processor of the described substrate of predefined substrate specification standards Data Detection, with described digital-to-analog conversion card, be connected.

9. system as claimed in claim 8, is characterized in that, described processor is specially: computer PC; Perhaps

On-site programmable gate array FPGA; Perhaps

Complex programmable logic device (CPLD).

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