CN203324133U - Quartz crystal microbalance sensor based on copper-based three-layer metal film - Google Patents
Quartz crystal microbalance sensor based on copper-based three-layer metal film Download PDFInfo
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- CN203324133U CN203324133U CN2013203937873U CN201320393787U CN203324133U CN 203324133 U CN203324133 U CN 203324133U CN 2013203937873 U CN2013203937873 U CN 2013203937873U CN 201320393787 U CN201320393787 U CN 201320393787U CN 203324133 U CN203324133 U CN 203324133U
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- 238000003380 quartz crystal microbalance Methods 0.000 title claims abstract description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 239000010949 copper Substances 0.000 title claims abstract description 24
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 22
- 239000002184 metal Substances 0.000 title claims abstract description 22
- 239000013078 crystal Substances 0.000 claims abstract description 22
- 239000010453 quartz Substances 0.000 claims abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000010936 titanium Substances 0.000 claims description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 12
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 239000010931 gold Substances 0.000 description 16
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 15
- 229910052737 gold Inorganic materials 0.000 description 15
- 239000007772 electrode material Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000000809 air pollutant Substances 0.000 description 1
- 231100001243 air pollutant Toxicity 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000288 alkali metal carbonate Inorganic materials 0.000 description 1
- 150000008041 alkali metal carbonates Chemical class 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
本实用新型提供了一种铜基三层金属膜石英晶体微天平传感器，该传感器包括一个石英晶体片(1)，所述石英晶体片(1)基底是镀铜膜层(2)，所述镀铜膜层(2)表面是镀钛膜层(3)，所述镀钛膜层(3)表面是镀金膜层(4)，形成一种基于铜基三层金属膜的石英晶体微天平传感器。本实用新型的效果和益处在于所述铜基三层金属膜石英晶体微天平传感器具有制作简单、成本低廉、灵敏度高、抗腐蚀性和稳定性好等优点。
The utility model provides a copper-based three-layer metal film quartz crystal microbalance sensor, the sensor includes a quartz crystal piece (1), the base of the quartz crystal piece (1) is a copper-plated film layer (2), the The surface of the copper-plated film layer (2) is a titanium-plated film layer (3), and the surface of the titanium-plated film layer (3) is a gold-plated film layer (4), forming a quartz crystal microbalance based on a copper-based three-layer metal film sensor. The effect and benefit of the utility model are that the copper-based three-layer metal film quartz crystal microbalance sensor has the advantages of simple manufacture, low cost, high sensitivity, good corrosion resistance and stability, and the like.
Description
技术领域 technical field
本实用新型属于传感检测技术领域，涉及一种基于铜基三层金属膜的石英晶体微天平传感器。 The utility model belongs to the technical field of sensing and detection, and relates to a quartz crystal microbalance sensor based on a copper-based three-layer metal film.
背景技术 Background technique
石英晶体微天平（Quartz crystal microbalance, QCM）是一种新型传感测量技术，它是利用石英晶体谐振频率的变化与晶体电极表面沉积的物质质量之间成正比例关系，可检测电极表面ng甚至pg级的质量变化及溶液的粘度、密度、阻抗、介电常数等参数的变化，因具有灵敏度高、响应快速、操作简便和价格低廉的特点而广泛应用于大气污染物、生物分子等物质的检测。 Quartz crystal microbalance (Quartz crystal microbalance, QCM) is a new type of sensing measurement technology, which uses the proportional relationship between the change of the resonance frequency of the quartz crystal and the mass of the material deposited on the surface of the crystal electrode, and can detect ng or even pg on the surface of the electrode. Because of its high sensitivity, fast response, easy operation and low price, it is widely used in the detection of air pollutants, biomolecules and other substances. .
石英晶体微天平传感器的核心部件是石英晶体片上金属电极的安装使用，目前较通用的电极材料为金（Au），金性质稳定但价格昂贵，使其应用受到限制；然而，金属钛（Ti）价格比金便宜，且不与稀硫酸、盐酸、碱金属氢氧化物、碱金属碳酸盐等发生反应，具有良好的耐酸、耐碱性能，是一种潜在的良好电极材料。因此用钛替代金，即在石英晶体片上加镀金属铜层后镀上钛层，再镀上金层，加镀的铜层能增强电极材料与石英晶体片之间的附着力，且具有稳定性。由于镀上金属铜和钛，能有效降低镀金层的厚度，减少金的使用量，从而降低整个石英晶体微天平传感器的制作成本，使应用拓宽。 The core component of the quartz crystal microbalance sensor is the installation and use of metal electrodes on the quartz crystal chip. At present, the more common electrode material is gold (Au). Gold is stable but expensive, which limits its application; however, metal titanium (Ti) The price is cheaper than gold, and it does not react with dilute sulfuric acid, hydrochloric acid, alkali metal hydroxide, alkali metal carbonate, etc. It has good acid and alkali resistance, and is a potential good electrode material. Therefore, titanium is used instead of gold, that is, a titanium layer is plated on the quartz crystal plate, and then a gold layer is plated. The copper layer plated can enhance the adhesion between the electrode material and the quartz crystal plate, and has a stable sex. Because the metal copper and titanium are plated, the thickness of the gold-plated layer can be effectively reduced, and the amount of gold used can be reduced, thereby reducing the manufacturing cost of the whole quartz crystal microbalance sensor and widening the application.
发明内容 Contents of the invention
本实用新型的目的在于提供一种铜基三层金属膜石英晶体微天平传感器，在石英晶体片和金之间加镀金属铜和钛，减少金的使用量，可降低传感器的成本。 The purpose of the utility model is to provide a copper-based three-layer metal-film quartz crystal microbalance sensor, in which metal copper and titanium are plated between the quartz crystal plate and gold, so as to reduce the usage of gold and reduce the cost of the sensor.
为解决上述问题，本实用新型采用如下技术方案： In order to solve the above problems, the utility model adopts the following technical solutions:
一种铜基三层金属膜石英晶体微天平传感器，该传感器包括一个石英晶体片，所述石英晶体片基底是镀铜膜层，所述镀铜膜层表面是镀钛膜层，所述镀钛膜层表面是镀金膜层，从而形成一种基于铜基三层金属膜的石英晶体微天平传感器。 A copper-based three-layer metal film quartz crystal microbalance sensor, the sensor includes a quartz crystal plate, the base of the quartz crystal plate is a copper-plated film layer, the surface of the copper-plated film layer is a titanium-plated film layer, the plated The surface of the titanium film layer is a gold-plated film layer, thereby forming a quartz crystal microbalance sensor based on a copper-based three-layer metal film.
值得注意的是，采用真空镀膜和掩膜版技术，容易控制金属镀膜厚度和大小。本实用新型所述的铜基三层金属膜石英晶体微天平传感器，镀铜膜层厚度为1 ~ 50 nm，镀钛膜层厚度为20 ~ 200 nm，镀金膜层厚度为20 ~ 200 nm，石英晶体片为AT切型石英晶体，其基频为4 ~ 50 MHz。并且由于膜层材料是金属铜、钛和金，加镀的铜层能增强电极材料与石英晶体片之间的附着力，使整个膜层强度和稳定性能好，频率稳定度高。此外，在控制电极材料厚度的情况下，在石英晶体片和金之间加镀金属铜和钛，有效地降低了镀金层的厚度，减少了金的使用量，从而降低了整个石英晶体微天平传感器的生产成本。 It is worth noting that it is easy to control the thickness and size of the metal coating by using vacuum coating and mask technology. In the copper-based three-layer metal film quartz crystal microbalance sensor described in the utility model, the thickness of the copper-plated film is 1-50 nm, the thickness of the titanium-plated film is 20-200 nm, and the thickness of the gold-plated film is 20-200 nm. The quartz crystal sheet is an AT-cut quartz crystal with a fundamental frequency of 4 ~ 50 MHz. And because the material of the film layer is metal copper, titanium and gold, the plated copper layer can enhance the adhesion between the electrode material and the quartz crystal sheet, so that the strength and stability of the entire film layer are good, and the frequency stability is high. In addition, in the case of controlling the thickness of the electrode material, metal copper and titanium are plated between the quartz crystal plate and gold, which effectively reduces the thickness of the gold plating layer and reduces the amount of gold used, thereby reducing the cost of the entire quartz crystal microbalance. The production cost of the sensor.
本实用新型的有益效果是，所述铜基三层金属膜石英晶体微天平传感器具有制作简单、成本低廉、灵敏度高、抗腐蚀性和稳定性好等优点。 The beneficial effect of the utility model is that the copper-based three-layer metal film quartz crystal microbalance sensor has the advantages of simple manufacture, low cost, high sensitivity, good corrosion resistance and stability, and the like.
附图说明 Description of drawings
图1是铜基三层金属膜石英晶体微天平传感器的剖面示意图。 Figure 1 is a schematic cross-sectional view of a copper-based three-layer metal film quartz crystal microbalance sensor.
图1中，1. 石英晶体片，2. 镀铜膜层，3. 镀钛膜层，4. 镀金膜层。 In Fig. 1, 1. Quartz crystal sheet, 2. Copper-plated film layer, 3. Titanium-plated film layer, 4. Gold-plated film layer.
具体实施方式 Detailed ways
下面结合附图对本实用新型发明作进一步的说明： Below in conjunction with accompanying drawing, the utility model invention is further described:
如图1所示，一种铜基三层金属膜石英晶体微天平传感器，该传感器包括一个AT切型、基频为8.0 MHz的石英晶体片1，利用真空镀膜技术在所述石英晶体片1基底表面镀20 nm厚度的铜膜层2，在所述镀铜膜层2表面镀130 nm厚度的钛膜层3，在所述镀钛膜层3表面镀50 nm厚度的金膜层4，从而形成一种基于铜基三层金属膜的石英晶体微天平传感器。
As shown in Figure 1, a copper-based three-layer metal film quartz crystal microbalance sensor, the sensor includes an AT-cut type, a
由于膜层材料是金属铜、钛和金，强度和抗腐蚀性能好，化学性质稳定，频率稳定度高，并大大减少了金的使用量而降低了整个石英晶体微天平传感器的生产成本，可广泛应用。 Because the material of the film layer is metal copper, titanium and gold, the strength and corrosion resistance are good, the chemical properties are stable, the frequency stability is high, and the use of gold is greatly reduced to reduce the production cost of the entire quartz crystal microbalance sensor, which can be used widely used.
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| CN2013203937873U CN203324133U (en) | 2013-07-04 | 2013-07-04 | Quartz crystal microbalance sensor based on copper-based three-layer metal film |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677767A (en) * | 2015-03-04 | 2015-06-03 | 浙江大学 | QCM (quartz crystal microbalance) based polypyrrole/ titanium dioxide frequency type film gas sensitive sensor and preparation method thereof |
| CN114351094A (en) * | 2021-12-20 | 2022-04-15 | 唐山万士和电子有限公司 | Production method of micro-balance quartz wafer with plating-enhanced graphite layer |
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2013
- 2013-07-04 CN CN2013203937873U patent/CN203324133U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104677767A (en) * | 2015-03-04 | 2015-06-03 | 浙江大学 | QCM (quartz crystal microbalance) based polypyrrole/ titanium dioxide frequency type film gas sensitive sensor and preparation method thereof |
| CN104677767B (en) * | 2015-03-04 | 2017-10-31 | 浙江大学 | Polypyrrole/titanium dioxide frequency type film QCM gas sensors and preparation method thereof |
| CN114351094A (en) * | 2021-12-20 | 2022-04-15 | 唐山万士和电子有限公司 | Production method of micro-balance quartz wafer with plating-enhanced graphite layer |
| CN114351094B (en) * | 2021-12-20 | 2023-08-04 | 唐山万士和电子有限公司 | Production method of plating graphite layer microbalance quartz wafer |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131204 Termination date: 20140704 |
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| EXPY | Termination of patent right or utility model |