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CN203299499U - Array substrate and display device - Google Patents

Array substrate and display device Download PDF

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Publication number
CN203299499U
CN203299499U CN2013203642345U CN201320364234U CN203299499U CN 203299499 U CN203299499 U CN 203299499U CN 2013203642345 U CN2013203642345 U CN 2013203642345U CN 201320364234 U CN201320364234 U CN 201320364234U CN 203299499 U CN203299499 U CN 203299499U
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black matrix
thin film
film transistor
public electrode
electrode
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牛菁
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BOE Technology Group Co Ltd
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Abstract

The utility model discloses an array substrate and a display device. The array substrate comprises a thin film transistor arranged on a substrate and an electrode structure arranged on the thin film transistor. The electrode structure comprises a pixel electrode and a public electrode which are insulated from each other. The array substrate further comprises a black matrix arranged above the thin film transistor, and an orthographic projection of the black matrix on the substrate covers the thin film transistor. The black matrix is electrically connected with the public electrode and used for providing public electrode signals for the public electrode. Due to the fact that a function that the black matrix reuses a public electrode line is adopted, the black matrix is electrically connected with the public electrode and provides the public electrode signals for the public electrode. Compared with the prior art of arranging the public electrode line in the same layer as the grid electrode independently, occupation of each sub pixel unit opening area can be reduced, and opening rate of the array substrate is improved. Due to the fact that the black matrix used as the public electrode line is arranged above the thin film transistor, film layers penetrated by a via hole required when the black matrix is connected with the public electrode can be reduced, and the difficulty of a manufacturing process is reduced.

Description

一种阵列基板及显示装置A kind of array substrate and display device

技术领域technical field

本实用新型涉及显示技术领域,尤其涉及一种阵列基板及显示装置。The utility model relates to the field of display technology, in particular to an array substrate and a display device.

背景技术Background technique

液晶显示面板主要由阵列基板,对向基板,以及位于该两基板之间的液晶分子组成;其中,阵列基板上设置有呈矩阵排列的亚像素单元,每个亚像素单元都设置有薄膜晶体管(TFT)以及与薄膜晶体管相连的像素电极,对向基板上设置有公共电极和与各亚像素单元一一对应的彩色滤光片。液晶显示面板在对盒时需要将对向基板上的各彩色滤光片与阵列基板上的各亚像素单元进行对位,在对位时容易出现对位误差,为了避免对位误差的产生,出现了将彩色滤光片直接设置在阵列基板上的结构(COA,CF on Array)。The liquid crystal display panel is mainly composed of an array substrate, an opposite substrate, and liquid crystal molecules located between the two substrates; wherein, the array substrate is provided with sub-pixel units arranged in a matrix, and each sub-pixel unit is provided with a thin film transistor ( TFT) and the pixel electrodes connected to the thin film transistors, and the common electrodes and color filters corresponding to each sub-pixel unit are arranged on the opposite substrate. When aligning the liquid crystal display panel, it is necessary to align the color filters on the opposite substrate with the sub-pixel units on the array substrate. During the alignment, alignment errors are prone to occur. In order to avoid the occurrence of alignment errors, There is a structure (COA, CF on Array) in which the color filter is directly placed on the array substrate.

目前,现有的COA结构大多是将彩色滤光片直接简单的叠加在阵列基板上,以高级超维场开关(ADS,Advanced Super Dimension Switch)模式的COA结构为例,如图1所示,其阵列基板上的结构包括:依次设置在衬底基板101上的栅极102和公共电极线103,栅绝缘层104,有源层105,源极106和漏极107,第一绝缘层108,黑矩阵109,彩色滤光片110,像素电极111,第二绝缘层112,以及公共电极113。其中,公共电极113通过贯穿栅极绝缘层104、第一绝缘层108、彩色滤光片110以及第二绝缘层112的过孔a与公共电极线103电性相连。At present, most of the existing COA structures are directly and simply superimposed color filters on the array substrate. Take the COA structure of Advanced Super Dimension Switch (ADS, Advanced Super Dimension Switch) mode as an example, as shown in Figure 1. The structure on the array substrate includes: a gate 102 and a common electrode line 103 sequentially arranged on the base substrate 101, a gate insulating layer 104, an active layer 105, a source 106 and a drain 107, a first insulating layer 108, Black matrix 109 , color filter 110 , pixel electrode 111 , second insulating layer 112 , and common electrode 113 . Wherein, the common electrode 113 is electrically connected to the common electrode line 103 through the via hole a penetrating through the gate insulating layer 104 , the first insulating layer 108 , the color filter 110 and the second insulating layer 112 .

上述结构的阵列基板在制备时需要使用10道掩膜板(Mask)进行构图,需要使用Mask进行构图的步骤具体为:制备栅极102和公共电极线103的图形,有源层105、源极106和漏极107的图形,栅极绝缘层104和第一绝缘层108的图形,黑矩阵109的图形,彩色滤光片110的图形,像素电极111的图形,第二绝缘层112的图形,公共电极113的图形,其中,由于彩色滤光片110一般是由三原色(红,绿,蓝)交叉排列的单色滤光片组成的,因此需要分别使用3道Mask构图进行构图。The array substrate with the above structure needs to use 10 mask plates (Mask) for patterning during preparation, and the steps for patterning using Mask are as follows: preparing the pattern of gate 102 and common electrode line 103, the active layer 105, the source electrode 106 and the drain electrode 107, the gate insulating layer 104 and the first insulating layer 108, the black matrix 109, the color filter 110, the pixel electrode 111, the second insulating layer 112, The pattern of the common electrode 113, in which, since the color filter 110 is generally composed of three primary colors (red, green, blue) cross-arranged monochromatic filters, it is necessary to use three mask patterns for composition.

在上述结构中,不透光的公共电极线103与栅极102同层设置,一方面会占用各亚像素单元的开口区域,影响了开口率,另一方面,公共电极113需要通过较深的过孔a与公共电极线103电性相连,由于该过孔a贯穿的栅极绝缘层104、第一绝缘层108、彩色滤光片110以及第二绝缘层112的材料不尽相同,在制备过程需要多次构图才能形成,这也增加了整体制备工艺的难度。In the above structure, the opaque common electrode line 103 and the gate 102 are arranged on the same layer. On the one hand, it will occupy the opening area of each sub-pixel unit, which affects the aperture ratio. On the other hand, the common electrode 113 needs to pass through the deeper The via hole a is electrically connected to the common electrode line 103. Since the materials of the gate insulating layer 104, the first insulating layer 108, the color filter 110 and the second insulating layer 112 penetrated by the via hole a are different, in the preparation The process requires multiple patterning to form, which also increases the difficulty of the overall preparation process.

综上所述,现有COA结构的ADS模式阵列基板存在制备工艺难度较大,开口率较低的问题。To sum up, the existing ADS mode array substrate with COA structure has the problems of relatively difficult preparation process and low aperture ratio.

实用新型内容Utility model content

本实用新型实施例提供一种阵列基板及显示装置,可以提高COA结构的开口率且可以降低制备难度。The embodiment of the utility model provides an array substrate and a display device, which can increase the aperture ratio of the COA structure and reduce the difficulty of preparation.

本实用新型实施例提供了一种阵列基板,包括衬底基板,位于所述衬底基板上的薄膜晶体管薄膜晶体管,以及位于所述薄膜晶体管上的电极结构,所述电极结构包括相互绝缘的像素电极和公共电极,还包括:An embodiment of the present invention provides an array substrate, including a base substrate, a thin film transistor located on the base substrate, and an electrode structure located on the thin film transistor, and the electrode structure includes mutually insulated pixels electrode and common electrode, also includes:

位于所述薄膜晶体管上方且在所述衬底基板上的正投影覆盖所述薄膜晶体管的黑矩阵;A black matrix located above the thin film transistor and covering the thin film transistor in an orthographic projection on the base substrate;

所述黑矩阵与所述公共电极电性相连,用于向所述公共电极提供公共电极信号。The black matrix is electrically connected to the common electrode for providing common electrode signals to the common electrode.

本实用新型实施例提供的一种显示装置,包括本实用新型实施例提供的上述阵列基板。A display device provided by an embodiment of the present invention includes the above-mentioned array substrate provided by an embodiment of the present invention.

本实用新型实施例的有益效果包括:The beneficial effects of the utility model embodiment include:

本实用新型实施例提供的一种阵列基板及显示装置,该阵列基板包括位于衬底基板上的薄膜晶体管薄膜晶体管,以及位于薄膜晶体管上的电极结构,电极结构包括相互绝缘的像素电极和公共电极,还包括:位于薄膜晶体管上方且在衬底基板上的正投影覆盖薄膜晶体管的黑矩阵;黑矩阵与公共电极电性相连,用于向公共电极提供公共电极信号。由于采用黑矩阵复用公共电极线的功能,与公共电极电性相连向其提供公共电极信号,相对于现有技术中单独设置与栅极同层的公共电极线,可以减少各亚像素单元开口区域的占用,提高阵列基板的开口率。并且,由于将作为公共电极线的黑矩阵设置在薄膜晶体管的上方,还可以减少黑矩阵与公共电极连接时所需过孔所贯穿的膜层,也降低了制备工艺的难度。An array substrate and a display device provided by an embodiment of the present invention, the array substrate includes a thin film transistor thin film transistor located on the base substrate, and an electrode structure located on the thin film transistor, the electrode structure includes mutually insulated pixel electrodes and common electrodes , further comprising: a black matrix located above the thin film transistor and covering the thin film transistor in an orthographic projection on the base substrate; the black matrix is electrically connected to the common electrode, and is used to provide a common electrode signal to the common electrode. Due to the use of the black matrix to multiplex the function of the common electrode line, it is electrically connected to the common electrode to provide a common electrode signal, compared with the prior art where the common electrode line on the same layer as the gate is separately provided, the opening of each sub-pixel unit can be reduced Occupancy of the area increases the aperture ratio of the array substrate. Moreover, since the black matrix used as the common electrode line is arranged above the thin film transistor, the film layers through which the black matrix needs to be connected to the common electrode can be reduced, and the difficulty of the manufacturing process is also reduced.

附图说明Description of drawings

图1为现有COA结构的ADS模式阵列基板的结构示意图;Fig. 1 is the structural representation of the ADS mode array substrate of existing COA structure;

图2a至图2c分别为本实用新型实施例提供的阵列基板的结构示意意图;2a to 2c are schematic structural views of the array substrate provided by the embodiment of the present invention;

图3为本实用新型实施例提供的阵列基板的制备方法的流程图;FIG. 3 is a flow chart of a method for preparing an array substrate provided by an embodiment of the present invention;

图4a至图4f为本实用新型实施例提供的制备方法中通过一次构图工艺形成公共电极和黑矩阵的图形的各步骤的结构示意图。4a to 4f are structural schematic diagrams of each step of forming the pattern of the common electrode and the black matrix through a patterning process in the preparation method provided by the embodiment of the present invention.

具体实施方式Detailed ways

下面结合附图,对本实用新型实施例提供的阵列基板及显示装置的具体实施方式进行详细地说明。The specific implementation manners of the array substrate and the display device provided by the embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

附图中各层薄膜厚度和形状不反映阵列基板的真实比例,目的只是示意说明本实用新型内容。The thickness and shape of each layer of film in the drawings do not reflect the true proportion of the array substrate, but are only intended to schematically illustrate the content of the present invention.

本实用新型实施例提供了一种阵列基板,如图2a至图2c所示,包括衬底基板201,位于衬底基板201上的薄膜晶体管薄膜晶体管202,以及位于薄膜晶体管202上的电极结构203,该电极结构203包括相互绝缘的像素电极2031和公共电极2032,还包括:The embodiment of the present invention provides an array substrate, as shown in FIG. 2a to FIG. 2c, including a base substrate 201, a thin film transistor thin film transistor 202 located on the base substrate 201, and an electrode structure 203 located on the thin film transistor 202 , the electrode structure 203 includes a pixel electrode 2031 and a common electrode 2032 insulated from each other, and further includes:

位于薄膜晶体管202上方且在衬底基板201上的正投影覆盖薄膜晶体管202的黑矩阵204;The black matrix 204 located above the thin film transistor 202 and on the base substrate 201 covers the black matrix 202 of the thin film transistor 202;

黑矩阵204与公共电极2032电性相连,用于向公共电极2032提供公共电极信号。The black matrix 204 is electrically connected to the common electrode 2032 for providing a common electrode signal to the common electrode 2032 .

具体地,本实用新型实施例提供的上述阵列基板可以适用于能够实现宽视角的平面内开关(IPS,In-Plane Switch)和高级超维场开关(ADS,AdvancedSuper Dimension Switch)型等液晶显示屏,在此不做限定。以下描述都是以应用于ADS型液晶显示面板为例进行说明。Specifically, the above-mentioned array substrate provided by the embodiments of the present utility model can be applied to liquid crystal displays such as In-Plane Switch (IPS, In-Plane Switch) and Advanced Super Dimension Switch (ADS, Advanced Super Dimension Switch) that can realize wide viewing angles. , is not limited here. The following descriptions are all taken as an example for an ADS type liquid crystal display panel.

本实用新型实施例提供的上述阵列基板中,黑矩阵与公共电极电性相连,且用于向公共电极提供公共电极信号。由于采用黑矩阵复用公共电极线的功能,与公共电极电性相连向其提供公共电极信号,相对于现有技术中单独设置与栅极同层的公共电极线,可以减少各亚像素单元开口区域的占用,提高阵列基板的开口率。并且,由于将作为公共电极线的黑矩阵设置在薄膜晶体管的上方,还可以减少黑矩阵与公共电极连接时所需过孔所贯穿的膜层,也降低了制备工艺的难度。In the above-mentioned array substrate provided by the embodiment of the present invention, the black matrix is electrically connected to the common electrode, and is used to provide the common electrode signal to the common electrode. Due to the use of the black matrix to multiplex the function of the common electrode line, it is electrically connected to the common electrode to provide a common electrode signal, compared with the prior art where the common electrode line on the same layer as the gate is separately provided, the opening of each sub-pixel unit can be reduced Occupancy of the area increases the aperture ratio of the array substrate. Moreover, since the black matrix used as the common electrode line is arranged above the thin film transistor, the film layers through which the black matrix needs to be connected to the common electrode can be reduced, and the difficulty of the manufacturing process is also reduced.

在具体实施时,本实用新型实施例提供的上述阵列基板中的薄膜晶体管可以采用底栅型结构,如图2a至图2c所示,由依次设置在衬底基板201上的栅极2021、栅极绝缘层2022、有源层2023、源极2024和漏极2025组成,当然在具体实施时阵列基板中的薄膜晶体管202也可以采用其他结构,在此不做限定。In specific implementation, the thin-film transistors in the above-mentioned array substrate provided by the embodiment of the present invention can adopt a bottom-gate structure, as shown in FIG. 2a to FIG. Insulating layer 2022, active layer 2023, source 2024, and drain 2025. Of course, the thin film transistor 202 in the array substrate may also adopt other structures in actual implementation, which is not limited here.

下面以底栅型结构的薄膜晶体管为例对本实用新型实施例提供的上述阵列基板进行说明。The above-mentioned array substrate provided by the embodiment of the present invention will be described below by taking a thin-film transistor with a bottom-gate structure as an example.

较佳地,在本实用新型实施例提供的上述阵列基板中,如图2a至图2c所示,可以将作为公共电极线的黑矩阵204设置为与公共电极2032直接电性相连,即在黑矩阵204与公共电极2032之间不设置其他膜层,相对于现有技术中公共电极线与栅极同层设置,公共电极需要通过贯穿多个膜层的过孔与公共电极线相连,可以避免过孔的设置,降低了制备工艺的难度。Preferably, in the above-mentioned array substrate provided by the embodiment of the present utility model, as shown in FIG. 2a to FIG. No other film layers are set between the matrix 204 and the common electrode 2032. Compared with the common electrode line and the grid in the same layer in the prior art, the common electrode needs to be connected to the common electrode line through the via holes penetrating multiple film layers, which can avoid The arrangement of via holes reduces the difficulty of the manufacturing process.

在具体实施时,在本实用新型实施例提供的上述阵列基板中,如图2a至图2c所示,直接与公共电极2032电性相连的黑矩阵204可以直接设置在公共电极2032的膜层之上,当然也可以将黑矩阵204直接设置在公共电极2032的膜层以下,在此不作限定。In specific implementation, in the above array substrate provided by the embodiment of the present invention, as shown in Figure 2a to Figure 2c, the black matrix 204 directly electrically connected to the common electrode 2032 can be directly arranged between the film layers of the common electrode 2032 Of course, the black matrix 204 can also be directly disposed under the film layer of the common electrode 2032 , which is not limited here.

较佳地,如图2a至图2c所示,在本实用新型实施例提供的上述阵列基板中,采用黑矩阵204直接位于所述公共电极2032之上的结构时,可以将公共电极2032和黑矩阵204通过一次构图工艺制成,即采用一块灰色调掩膜板或半色调掩膜板同时制备两个膜层的图形,这样相对于现有技术需要采用10道Mask进行构图,可以减少Mask的使用次数,从而提高产品的制造效率,降低生产成本。Preferably, as shown in FIG. 2a to FIG. 2c, in the array substrate provided by the embodiment of the present invention, when the structure in which the black matrix 204 is directly located on the common electrode 2032 is adopted, the common electrode 2032 and the black The matrix 204 is made by a single patterning process, that is, a gray tone mask or a halftone mask is used to prepare the graphics of the two film layers at the same time, so that compared with the prior art, 10 Masks are required for patterning, which can reduce the number of Masks. The number of times of use, thereby improving the manufacturing efficiency of the product and reducing the production cost.

具体地,在本实用新型实施例提供的上述阵列基板中,为了保证黑矩阵既具有对薄膜晶体管进行遮光保护的不透光性,又具有传递公共电极信号的导电性,可以采用金属材料或不透明的有机导电材料作为黑矩阵的材料。Specifically, in the above-mentioned array substrate provided by the embodiment of the present invention, in order to ensure that the black matrix not only has the opacity to protect the thin film transistor from light, but also has the conductivity to transmit the common electrode signal, metal materials or opaque The organic conductive material is used as the material of the black matrix.

具体地,在本实用新型实施例提供的上述阵列基板中,如图2a所示,可以和现有技术一样,在薄膜晶体管202上设置对源极2024和漏极2025起绝缘保护作用的第一绝缘层206,并在第一绝缘层206上设置彩色滤光片205,该彩色滤光片205一般由三原色(红,绿,蓝)交叉排列的单色滤光片组成。并在像素电极2031与公共电极2032之间设置第二绝缘层207。Specifically, in the above-mentioned array substrate provided by the embodiment of the present utility model, as shown in FIG. An insulating layer 206, and a color filter 205 is arranged on the first insulating layer 206. The color filter 205 is generally composed of three primary colors (red, green, blue) cross-arranged monochromatic filters. And a second insulating layer 207 is provided between the pixel electrode 2031 and the common electrode 2032 .

进一步地,在本实用新型实施例提供的上述阵列基板中,如图2b所示,还可以在薄膜晶体管202与电极结构203之间省去图2a所示结构中的第一绝缘层206,将彩色滤光片205复用绝缘层的作用,即在薄膜晶体管202与电极结构203之间直接设置作为绝缘层的彩色滤光片205,同样,该彩色滤光片205一般由三原色(红,绿,蓝)交叉排列的单色滤光片组成。相对于如图2a所示的结构,利用彩色滤光片复用绝缘层的功能,可以省去在源极漏极与像素电极之间另外设置绝缘层,这样,在制备时可以减少一道Mask进行构图,进一步提高产品的的制造效率,降低生产成本。Further, in the above-mentioned array substrate provided by the embodiment of the present invention, as shown in FIG. 2b, the first insulating layer 206 in the structure shown in FIG. 2a can also be omitted between the thin film transistor 202 and the electrode structure 203, and the The color filter 205 multiplexes the function of the insulating layer, that is, the color filter 205 as an insulating layer is directly arranged between the thin film transistor 202 and the electrode structure 203. Similarly, the color filter 205 is generally composed of three primary colors (red, green, etc.) , blue) composed of cross-arranged monochromatic filters. Compared with the structure shown in Figure 2a, using the function of multiplexing the insulating layer of the color filter can save an additional insulating layer between the source drain and the pixel electrode, so that a Mask can be reduced during preparation. Composition, to further improve the manufacturing efficiency of products and reduce production costs.

或者,进一步地,在本实用新型实施例提供的上述阵列基板中,如图2c所示,还可以在像素电极2031与公共电极2032之间采用彩色滤光片205代替图2a所示结构中的第二绝缘层207,彩色滤光片205复用绝缘层的作用,即在像素电极2031与公共电极2032之间设置作为绝缘层的彩色滤光片205,同样,该彩色滤光片205一般由三原色(红,绿,蓝)交叉排列的单色滤光片组成。相对于如图2a所示的结构,在像素电极与公共电极之间利用彩色滤光片复用绝缘层的功能,省去另外设置的绝缘层,这样,在制备时可以减少一道Mask进行构图,进一步提高产品的的制造效率,降低生产成本。Or, further, in the above-mentioned array substrate provided by the embodiment of the present utility model, as shown in FIG. 2c, a color filter 205 can also be used between the pixel electrode 2031 and the common electrode 2032 instead of the color filter 205 in the structure shown in FIG. 2a. The second insulating layer 207, the color filter 205 is used as an insulating layer, that is, the color filter 205 as an insulating layer is arranged between the pixel electrode 2031 and the common electrode 2032. Similarly, the color filter 205 is generally composed of It consists of three primary colors (red, green, blue) cross-arranged monochromatic filters. Compared with the structure shown in Figure 2a, the color filter is used to reuse the function of the insulating layer between the pixel electrode and the common electrode, and an additional insulating layer is omitted. In this way, one mask can be reduced for patterning during preparation. Further improve the manufacturing efficiency of the product and reduce the production cost.

基于同一实用新型构思,本实用新型实施例还提供了一种显示装置,包括本实用新型实施例提供的上述阵列基板,该显示装置可以为:手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等任何具有显示功能的产品或部件。该显示装置的实施可以参见上述阵列基板的实施例,重复之处不再赘述。Based on the same concept of the utility model, the embodiment of the utility model also provides a display device, including the above-mentioned array substrate provided by the embodiment of the utility model, the display device can be: a mobile phone, a tablet computer, a TV, a monitor, a notebook computer, Any product or component with display function, such as digital photo frame and navigator. For the implementation of the display device, reference may be made to the above-mentioned embodiments of the array substrate, and repeated descriptions will not be repeated.

基于同一实用新型构思,本实用新型实施例还提供了一种阵列基板的制备方法,具体包括以下步骤:Based on the same concept of the utility model, the embodiment of the utility model also provides a method for preparing an array substrate, which specifically includes the following steps:

在衬底基板上形成薄膜晶体管的步骤;A step of forming a thin film transistor on a base substrate;

形成电极结构的步骤;该电极结构包括互绝缘的像素电极和公共电极;A step of forming an electrode structure; the electrode structure includes mutually insulated pixel electrodes and common electrodes;

形成黑矩阵的步骤;该黑矩阵在衬底基板上的正投影覆盖薄膜晶体管;且黑矩阵与公共电极直接电性相连,用于向公共电极提供公共电极信号。The step of forming a black matrix; the orthographic projection of the black matrix on the base substrate covers the thin film transistor; and the black matrix is directly electrically connected with the common electrode, and is used to provide the common electrode signal to the common electrode.

具体地,在具体实施时,黑矩阵可以位于公共电极的上方,即先形成公共电极之后再形成黑矩阵,当然公共电极也可以位于黑矩阵的上方,即先形成黑矩阵之后再形成公共电极,在此不做限定。Specifically, during specific implementation, the black matrix can be located above the common electrode, that is, the common electrode is formed first and then the black matrix is formed, and of course the common electrode can also be located above the black matrix, that is, the common electrode is formed after the black matrix is formed first, It is not limited here.

具体地,当黑矩位于公共电极上方时,本实用新型实施例提供的阵列基板的制备方法,如图3所示,具体可以包括以下步骤:Specifically, when the black moment is located above the common electrode, the method for preparing the array substrate provided by the embodiment of the present invention, as shown in FIG. 3 , may specifically include the following steps:

步骤S101、在衬底基板上形成薄膜晶体管;Step S101, forming a thin film transistor on a base substrate;

步骤S102、在薄膜晶体管上形成像素电极;Step S102, forming a pixel electrode on the thin film transistor;

步骤S103、在像素电极上形成与像素电极绝缘的公共电极;Step S103, forming a common electrode insulated from the pixel electrode on the pixel electrode;

步骤S104、在公共电极上形成黑矩阵;该黑矩阵在衬底基板上的正投影覆盖薄膜晶体管;且黑矩阵与公共电极直接电性相连,用于向公共电极提供公共电极信号。Step S104, forming a black matrix on the common electrode; the orthographic projection of the black matrix on the base substrate covers the thin film transistor; and the black matrix is directly electrically connected to the common electrode for providing common electrode signals to the common electrode.

在具体实施时,上述步骤S103在像素电极上形成与像素电极相互绝缘的公共电极和步骤S104在公共电极上形成黑矩阵,可以采用一道Mask实现,即可以通过一次构图工艺形成公共电极和黑矩阵的图形,这样相对于现有技术能够减少Mask的使用次数,提高产品的的制造效率,降低生产成本。In specific implementation, the above step S103 forms a common electrode insulated from the pixel electrode on the pixel electrode and step S104 forms a black matrix on the common electrode, which can be realized by using a Mask, that is, the common electrode and the black matrix can be formed through a single patterning process Compared with the existing technology, the number of times of using the Mask can be reduced, the manufacturing efficiency of the product can be improved, and the production cost can be reduced.

具体地,通过一次构图工艺形成公共电极和黑矩阵的图形,可以通过下述方式实现:Specifically, forming the common electrode and black matrix patterns through a patterning process can be achieved in the following manner:

首先,依次形成公共电极2032的薄膜和黑矩阵204的薄膜,如图4a所示;First, the film of the common electrode 2032 and the film of the black matrix 204 are sequentially formed, as shown in FIG. 4a;

然后,在黑矩阵的薄膜上涂覆光刻胶208,使用掩膜板对光刻胶208曝光显影,如图4b所示,得到光刻胶完全去除区域a、光刻胶部分保留区域b以及光刻胶完全保留区域c;在具体实施时,掩模板可以为半色调掩模板或灰色调掩模板;Then, coat a photoresist 208 on the film of the black matrix, and use a mask to expose and develop the photoresist 208, as shown in FIG. The photoresist completely reserves the region c; in specific implementation, the mask can be a halftone mask or a gray tone mask;

其中,光刻胶部分保留区域b对应于形成公共电极2032的图形区域,光刻胶完全保留区域c对应于形成黑矩阵204的图形区域;Wherein, the photoresist partially reserved area b corresponds to the pattern area where the common electrode 2032 is formed, and the photoresist completely reserved area c corresponds to the pattern area where the black matrix 204 is formed;

最后,对光刻胶完全去除区域a、光刻胶部分保留区域b以及光刻胶完全保留区域c进行刻蚀,形成公共电极2032和黑矩阵204的图形。Finally, the photoresist completely removed region a, the photoresist partially retained region b and the photoresist completely retained region c are etched to form the patterns of the common electrode 2032 and the black matrix 204 .

其中,对光刻胶完全去除区域a、光刻胶部分保留区域b以及光刻胶完全保留区域c进行刻蚀,形成公共电极2032和黑矩阵204的图形的过程,具体通过以下方式实现:Wherein, the photoresist completely removed region a, the photoresist partially reserved region b and the photoresist completely reserved region c are etched to form the pattern of the common electrode 2032 and the black matrix 204, specifically through the following methods:

首先,采用刻蚀工艺去掉光刻胶完全去除区域a的公共电极2032的薄膜和黑矩阵204的薄膜,得到公共电极2032的图形,如图4c所示;First, the thin film of the common electrode 2032 and the thin film of the black matrix 204 in the photoresist completely removed region a are removed by an etching process to obtain the pattern of the common electrode 2032, as shown in FIG. 4c;

然后,灰化光刻胶208,去除掉光刻胶部分保留区域b的光刻胶208,如图4d所示;Then, ashing the photoresist 208 to remove the photoresist 208 in the photoresist part reserved region b, as shown in FIG. 4d;

接着,采用刻蚀工艺去掉光刻胶部分保留区域b的黑矩阵204的薄膜,如图4e所示;Next, use an etching process to remove the film of the black matrix 204 in the partially reserved region b of the photoresist, as shown in FIG. 4e;

最后,剥离光刻胶完全保留区域c的光刻胶208,得到黑矩阵204的图形,如图4f所示。Finally, the photoresist 208 in the region c where the photoresist is completely reserved is peeled off to obtain the pattern of the black matrix 204, as shown in FIG. 4f.

较佳地,在具体实施时,为了保证黑矩阵既具有对薄膜晶体管进行遮光保护的不透光性,又具有传递公共电极信号的导电性,可以采用金属材料或不透明的有机导电材料作为黑矩阵的材料。Preferably, in actual implementation, in order to ensure that the black matrix has both opacity for light-shielding protection of the thin film transistor and conductivity for transmitting common electrode signals, a metal material or an opaque organic conductive material can be used as the black matrix s material.

进一步地,在薄膜晶体管上形成像素电极的步骤S102之前,在薄膜晶体管上先形成作为绝缘层的彩色滤光片,且该彩色滤光片一般由三原色(红,绿,蓝)交叉排列的单色滤光片组成。相对于现有结构的制备方法,利用彩色滤光片复用绝缘层的功能,可以省去在源极漏极与像素电极之间另外设置绝缘层,这样,在制备时可以减少一道Mask进行构图,进一步提高产品的的制造效率,降低生产成本。Further, before the step S102 of forming the pixel electrode on the thin film transistor, a color filter as an insulating layer is first formed on the thin film transistor, and the color filter is generally composed of a single cross-arrangement of three primary colors (red, green, blue). Composition of color filters. Compared with the preparation method of the existing structure, the use of the function of multiplexing the insulating layer of the color filter can save an additional insulating layer between the source drain and the pixel electrode, so that one mask can be reduced for patterning during preparation , to further improve the manufacturing efficiency of the product and reduce the production cost.

或者,进一步地,在像素电极上形成与像素电极绝缘的公共电极的步骤S103之前,在像素电极上先形成作为绝缘层的彩色滤光片,且该彩色滤光片一般由三原色(红,绿,蓝)交叉排列的单色滤光片组成。相对于现有结构的制备方法,利用彩色滤光片复用绝缘层的功能,可以省去在像素电极与公共电极之间另外设置绝缘层,这样,在制备时可以减少一道Mask进行构图,进一步提高产品的的制造效率,降低生产成本。Or, further, before the step S103 of forming a common electrode insulated from the pixel electrode on the pixel electrode, a color filter as an insulating layer is first formed on the pixel electrode, and the color filter is generally composed of three primary colors (red, green , blue) composed of cross-arranged monochromatic filters. Compared with the preparation method of the existing structure, the use of the function of the color filter to reuse the insulating layer can save an additional insulating layer between the pixel electrode and the common electrode, so that one mask can be reduced for patterning during preparation, and further Improve product manufacturing efficiency and reduce production costs.

本实用新型实施例提供的一种阵列基板及显示装置,该阵列基板包括位于衬底基板上的薄膜晶体管薄膜晶体管,以及位于薄膜晶体管上的电极结构,电极结构包括相互绝缘的像素电极和公共电极,还包括:位于薄膜晶体管上方且在衬底基板上的正投影覆盖薄膜晶体管的黑矩阵;黑矩阵与公共电极电性相连,用于向公共电极提供公共电极信号。由于采用黑矩阵复用公共电极线的功能,与公共电极电性相连向其提供公共电极信号,相对于现有技术中单独设置与栅极同层的公共电极线,可以减少各亚像素单元开口区域的占用,提高阵列基板的开口率。并且,由于将作为公共电极线的黑矩阵设置在薄膜晶体管的上方,还可以减少黑矩阵与公共电极连接时所需过孔所贯穿的膜层,也降低了制备工艺的难度。An array substrate and a display device provided by an embodiment of the present invention, the array substrate includes a thin film transistor thin film transistor located on the base substrate, and an electrode structure located on the thin film transistor, the electrode structure includes mutually insulated pixel electrodes and common electrodes , further comprising: a black matrix located above the thin film transistor and covering the thin film transistor in an orthographic projection on the base substrate; the black matrix is electrically connected to the common electrode, and is used to provide a common electrode signal to the common electrode. Due to the use of the black matrix to multiplex the function of the common electrode line, it is electrically connected to the common electrode to provide a common electrode signal, compared with the prior art where the common electrode line on the same layer as the gate is separately provided, the opening of each sub-pixel unit can be reduced Occupancy of the area increases the aperture ratio of the array substrate. Moreover, since the black matrix used as the common electrode line is arranged above the thin film transistor, the film layers through which the black matrix needs to be connected to the common electrode can be reduced, and the difficulty of the manufacturing process is also reduced.

显然,本领域的技术人员可以对本实用新型进行各种改动和变型而不脱离本实用新型的精神和范围。这样,倘若本实用新型的这些修改和变型属于本实用新型权利要求及其等同技术的范围之内,则本实用新型也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the utility model without departing from the spirit and scope of the utility model. In this way, if these modifications and variations of the utility model fall within the scope of the claims of the utility model and equivalent technologies thereof, the utility model is also intended to include these modifications and variations.

Claims (7)

1. an array base palte, comprise underlay substrate, is positioned at the thin film transistor (TFT) on described underlay substrate, and be positioned at the electrode structure on described thin film transistor (TFT), and described electrode structure comprises pixel electrode and the public electrode of mutually insulated, it is characterized in that, also comprises:
Be positioned at the black matrix that described thin film transistor (TFT) top and the orthogonal projection on described underlay substrate cover described thin film transistor (TFT);
Described black matrix and described public electrode are electrical connected, and being used for provides common electrode signal to described public electrode.
2. array base palte as claimed in claim 1, is characterized in that, described black matrix and described public electrode directly are electrical connected.
3. array base palte as claimed in claim 2, is characterized in that, described black matrix is located immediately on described public electrode.
4., as the described array base palte of claim 1-3 any one, it is characterized in that, described black matrix is metal material or opaque organic conductive material.
5. array base palte as claimed in claim 1, is characterized in that, also comprises: between described thin film transistor (TFT) and described electrode unit and as the colored filter of insulation course.
6. array base palte as claimed in claim 1, is characterized in that, also comprises; Between described pixel electrode and described public electrode and as the colored filter of insulation course.
7. a display device, is characterized in that, comprises as the described array base palte of claim 1-6 any one.
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103353699A (en) * 2013-06-24 2013-10-16 京东方科技集团股份有限公司 Array substrate, preparation method thereof and display device
CN104460147A (en) * 2014-11-20 2015-03-25 深圳市华星光电技术有限公司 Thin film transistor array substrate, manufacturing method and display device
CN107817624A (en) * 2016-09-12 2018-03-20 三星显示有限公司 Display device
US10338444B2 (en) 2015-06-19 2019-07-02 Boe Technology Group Co., Ltd. Array substrate with conductive black matrix, manufacturing method thereof and display device
WO2020113599A1 (en) * 2018-12-03 2020-06-11 惠科股份有限公司 Active switch and manufacturing method thereof, and display device
CN113376904A (en) * 2020-03-10 2021-09-10 成都京东方光电科技有限公司 Single-color liquid crystal display panel and double-layer liquid crystal display device
CN114578590A (en) * 2020-11-30 2022-06-03 合肥京东方显示技术有限公司 Array substrate and broken line repairing method thereof

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103353699A (en) * 2013-06-24 2013-10-16 京东方科技集团股份有限公司 Array substrate, preparation method thereof and display device
WO2014206015A1 (en) * 2013-06-24 2014-12-31 京东方科技集团股份有限公司 Array substrate, preparation method thereof, and display apparatus
US9589834B2 (en) 2013-06-24 2017-03-07 Boe Technology Group Co., Ltd. Array substrate and manufacturing method thereof, and display device
CN104460147A (en) * 2014-11-20 2015-03-25 深圳市华星光电技术有限公司 Thin film transistor array substrate, manufacturing method and display device
WO2016078170A1 (en) * 2014-11-20 2016-05-26 深圳市华星光电技术有限公司 Thin-film transistor array substrate, manufacturing method, and display device
CN104460147B (en) * 2014-11-20 2018-01-09 深圳市华星光电技术有限公司 Thin-film transistor array base-plate, manufacture method and display device
US10338444B2 (en) 2015-06-19 2019-07-02 Boe Technology Group Co., Ltd. Array substrate with conductive black matrix, manufacturing method thereof and display device
CN107817624A (en) * 2016-09-12 2018-03-20 三星显示有限公司 Display device
WO2020113599A1 (en) * 2018-12-03 2020-06-11 惠科股份有限公司 Active switch and manufacturing method thereof, and display device
CN113376904A (en) * 2020-03-10 2021-09-10 成都京东方光电科技有限公司 Single-color liquid crystal display panel and double-layer liquid crystal display device
CN114578590A (en) * 2020-11-30 2022-06-03 合肥京东方显示技术有限公司 Array substrate and broken line repairing method thereof

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