CN203281546U - Silicon wafer bubble washing device - Google Patents
Silicon wafer bubble washing device Download PDFInfo
- Publication number
- CN203281546U CN203281546U CN2013203126924U CN201320312692U CN203281546U CN 203281546 U CN203281546 U CN 203281546U CN 2013203126924 U CN2013203126924 U CN 2013203126924U CN 201320312692 U CN201320312692 U CN 201320312692U CN 203281546 U CN203281546 U CN 203281546U
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- breather pipe
- tube connector
- cleaning device
- air pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 21
- 239000010703 silicon Substances 0.000 title claims abstract description 21
- 238000005406 washing Methods 0.000 title 1
- 238000004140 cleaning Methods 0.000 claims abstract description 28
- 230000005587 bubbling Effects 0.000 claims abstract description 14
- 238000007789 sealing Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 238000009423 ventilation Methods 0.000 abstract 6
- 206010052428 Wound Diseases 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002000 scavenging effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
本实用新型提供一种硅片鼓泡清洗装置，包括清洗槽、托盘、通气管、连接管、止回阀和气泵，所述清洗槽的内壁设有环形凸起，所述托盘安装在所述环形凸起上，所述通气管安装在所述清洗槽的底部，所述通气管绕成螺旋形，所述通气管的表面开设有通气孔，所述通气管的一端密封且另一端连接所述连接管，所述连接管连接所述气泵，所述止回阀串接在所述连接管上。本实用新型硅片鼓泡清洗装置，清洗效果好且效率高，减少了清洗时间，节约了水的使用量，且在清洗过程中能防止杂质进入。
The utility model provides a silicon wafer bubbling cleaning device, which comprises a cleaning tank, a tray, a ventilation pipe, a connecting pipe, a check valve and an air pump. The inner wall of the cleaning tank is provided with an annular protrusion, and the tray is installed on the On the annular protrusion, the ventilation pipe is installed at the bottom of the cleaning tank, the ventilation pipe is wound into a spiral shape, and a ventilation hole is opened on the surface of the ventilation pipe, one end of the ventilation pipe is sealed and the other end is connected to the The connecting pipe is connected to the air pump, and the check valve is connected in series on the connecting pipe. The silicon wafer bubbling cleaning device of the utility model has good cleaning effect and high efficiency, reduces cleaning time, saves water consumption, and can prevent impurities from entering during the cleaning process.
Description
Technical field
The utility model relates to a kind of silicon chip cleaning device, particularly a kind of silicon wafer bubbling cleaning device.
Background technology
In silicon substrate manufacture of solar cells process, need to use the matrix material of silicon chip as battery,, in order to increase the absorption to solar energy, need to carry out matte to silicon chip surface and process, thereby namely utilize Acidic Liquid or alkalies to corrode and form matte silicon chip surface.After matte forms, also need silicon chip surface is cleaned, traditional cleaning device cleaning performance is poor, and easily impurity is brought into.
The utility model content
The technical problem that (one) will solve
The technical problems to be solved in the utility model is to provide the good and difficult silicon wafer bubbling cleaning device that impurity is brought into of a kind of cleaning performance.
(2) technical scheme
for solving the problems of the technologies described above, the utility model provides a kind of silicon wafer bubbling cleaning device, comprise rinse bath 1, pallet 2, breather pipe 5, tube connector 7, check-valves 8 and air pump 10, the inwall of described rinse bath 1 is provided with annular protrusion 3, described pallet 2 is arranged on described annular protrusion 3, described breather pipe 5 is arranged on the bottom of described rinse bath 1, described breather pipe 5 spirally-wounds, the surface of described breather pipe 5 offers passage 6, one end sealing and the other end of described breather pipe 5 connect described tube connector 7, described tube connector 7 connects described air pump 10, described check-valves 8 is serially connected on described tube connector 7.
Further, also comprise filter 9, described filter 9 is serially connected on described tube connector 7, and described filter 9 is between described air pump 10 and described check-valves 8.
Further, the diameter of described passage 6 is more than or equal to 2mm and less than or equal to 3mm.
(3) beneficial effect
The utility model silicon wafer bubbling cleaning device, cleaning performance is good and efficiency is high, has reduced scavenging period, has saved the use amount of water, and can prevent that in cleaning process impurity from entering.
Description of drawings
Fig. 1 is the structural representation of the utility model silicon wafer bubbling cleaning device;
Fig. 2 is the structural representation of the breather pipe of the utility model silicon wafer bubbling cleaning device.
The specific embodiment
consult Fig. 1～Fig. 2, the utility model provides a kind of silicon wafer bubbling cleaning device, comprise rinse bath 1, pallet 2, breather pipe 5, tube connector 7, check-valves 8 and air pump 10, inwall at rinse bath 1 is provided with annular protrusion 3, pallet 2 is arranged on annular protrusion 3, breather pipe 5 is arranged on the bottom of rinse bath 1, these breather pipe 5 spirally-wounds, offer passage 6 on the surface of breather pipe 5, in the present embodiment, the diameter of this passage 6 is more than or equal to 2mm and less than or equal to 3mm, 2.5mm preferably, one end sealing and the other end of breather pipe 5 connect tube connector 7, tube connector 7 connects air pump 10, check-valves 8 is serially connected on tube connector 7, in order to prevent that impurity from entering, also comprise filter 9 in the present embodiment, this filter 9 is serially connected on tube connector 7, and between air pump 10 and check-valves 8.
The utility model silicon wafer bubbling cleaning device, cleaning performance is good and efficiency is high, has reduced scavenging period, has saved the use amount of water, and can prevent that in cleaning process impurity from entering.
The above is only preferred embodiment of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (3)
1. silicon wafer bubbling cleaning device, it is characterized in that: comprise rinse bath (1), pallet (2), breather pipe (5), tube connector (7), check-valves (8) and air pump (10), the inwall of described rinse bath (1) is provided with annular protrusion (3), described pallet (2) is arranged on described annular protrusion (3), described breather pipe (5) is arranged on the bottom of described rinse bath (1), described breather pipe (5) spirally-wound, the surface of described breather pipe (5) offers passage (6), one end sealing and the other end of described breather pipe (5) connect described tube connector (7), described tube connector (7) connects described air pump (10), described check-valves (8) is serially connected on described tube connector (7).
2. silicon wafer bubbling cleaning device as claimed in claim 1, it is characterized in that: also comprise filter (9), described filter (9) is serially connected on described tube connector (7), and described filter (9) is positioned between described air pump (10) and described check-valves (8).
3. silicon wafer bubbling cleaning device as claimed in claim 1, it is characterized in that: the diameter of described passage (6) is more than or equal to 2mm and less than or equal to 3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203126924U CN203281546U (en) | 2013-05-31 | 2013-05-31 | Silicon wafer bubble washing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013203126924U CN203281546U (en) | 2013-05-31 | 2013-05-31 | Silicon wafer bubble washing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203281546U true CN203281546U (en) | 2013-11-13 |
Family
ID=49537920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013203126924U Expired - Fee Related CN203281546U (en) | 2013-05-31 | 2013-05-31 | Silicon wafer bubble washing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203281546U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103878141A (en) * | 2014-03-24 | 2014-06-25 | 安徽安芯电子科技有限公司 | Semiconductor wafer washing device |
| CN105195476A (en) * | 2015-09-09 | 2015-12-30 | 瓮福达州化工有限责任公司 | Phase separation tank cleaning device and method |
| CN107470260A (en) * | 2017-09-27 | 2017-12-15 | 界首市皖俊轴承有限公司 | A kind of bearing soaking and washing device based on bearing mnanufacture |
| CN107838111A (en) * | 2016-09-21 | 2018-03-27 | 苏州润桐专利运营有限公司 | Bubble rinsing device for engine cylinder head |
| CN108246704A (en) * | 2018-03-13 | 2018-07-06 | 成都菲斯普科技有限公司 | A kind of medical vessels cleaning and sterilizing equipment |
| CN110773505A (en) * | 2019-10-31 | 2020-02-11 | 西安奕斯伟硅片技术有限公司 | A silicon wafer cleaning device and method |
-
2013
- 2013-05-31 CN CN2013203126924U patent/CN203281546U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103878141A (en) * | 2014-03-24 | 2014-06-25 | 安徽安芯电子科技有限公司 | Semiconductor wafer washing device |
| CN105195476A (en) * | 2015-09-09 | 2015-12-30 | 瓮福达州化工有限责任公司 | Phase separation tank cleaning device and method |
| CN105195476B (en) * | 2015-09-09 | 2018-08-14 | 瓮福达州化工有限责任公司 | A kind of split-phase tub cleaning method |
| CN107838111A (en) * | 2016-09-21 | 2018-03-27 | 苏州润桐专利运营有限公司 | Bubble rinsing device for engine cylinder head |
| CN107470260A (en) * | 2017-09-27 | 2017-12-15 | 界首市皖俊轴承有限公司 | A kind of bearing soaking and washing device based on bearing mnanufacture |
| CN108246704A (en) * | 2018-03-13 | 2018-07-06 | 成都菲斯普科技有限公司 | A kind of medical vessels cleaning and sterilizing equipment |
| CN110773505A (en) * | 2019-10-31 | 2020-02-11 | 西安奕斯伟硅片技术有限公司 | A silicon wafer cleaning device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131113 Termination date: 20170531 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |