CN203229461U - Baking device - Google Patents

Abstract

The utility model provides a baking equipment, comprising: a baking chamber, on which a switch door for glass substrates to enter and exit; a hot air circulation system arranged in the baking chamber; the baking equipment also includes a A hot air recovery system that recovers the hot air overflowing from the opening and closing door of the baking chamber. The hot air recovery system is arranged at the opening and closing door of the baking chamber and communicates with the hot air circulation system in the baking chamber, so that The recovered hot air enters the hot air circulation system in the baking chamber for circulation. The baking equipment provided by the utility model, since a hot air recovery system is provided at the opening and closing door of the baking chamber, the hot air overflowing from the opening and closing door can be recovered and sent back to the hot air circulation system of the baking chamber for reuse, reducing heat energy loss.

Description

A kind of baking equipment

technical field

The utility model relates to the technical field of liquid crystal manufacturing, in particular to a baking device used in the manufacturing process of a liquid crystal panel.

Background technique

The last process of the color film (CF, Color Filter) imaging (Photo) process of thin film transistor liquid crystal display (TFT-LCD, Thin Film Transistor-Liquid Crystal Display) is baking (Oven), which is used to form the pattern (Pattern) The photoresist (PR, Photoresist) pattern is finally baked to achieve the purpose of curing stability. The baking process is to bake the glass substrate with hot air circulation in a closed environment to volatilize most of the solvents in the photoresist, and at the same time perform a high polymerization reaction on the photoresist at a high temperature of 220 ° C to form a stable high polymerization things.

As shown in Figure 1, the baking equipment used for baking glass substrates in the prior art includes a baking chamber 10 and a hot air circulation system in the baking chamber 10, and the hot air circulation system includes a hot air circulation air duct in the baking chamber 10 (not shown in the figure), a circulating fan 21 for sending circulating air to the hot air circulating air duct, a heater 22 for heating the circulating air in the hot air circulating air duct, and a heater 22 for filtering the circulating air entering the baking chamber 10 Filter (not shown in the figure) and heat exhaust pipe 24 etc., be provided with an automatic door 11 (AutoShutter) for robot (Robot) to send in or take out glass substrate on one side of baking room 10, in automatic door The outer periphery of 11 is provided with a robot protection (Robot Fence) frame 40, and this robot protection frame 40 is the non-enclosed frame, and its bottom is open, and the gap of side frame is not closed, and its top has a fan filter unit (FFU, Fan Filter Units, ) to blow down the wind at normal temperature, the robot protective frame 40 is mainly used to prevent the staff from being injured due to accidentally touching the high-temperature glass substrate or the robot when the robot takes out the glass substrate 50, and to prevent the hot air and volatiles from the baking equipment from being damaged. Diffusion. When baking the glass substrate, the automatic door opens, and the robot puts the glass substrate into the baking chamber through the automatic door; after the baking is completed, the automatic door opens, and the robot takes out the glass substrate. At this time, the hot air in the baking chamber will also flow out, causing Heat energy loss, heat energy loss will increase the workload of the heater and consume more energy; moreover, the volatiles taken away by the hot air will slowly accumulate in the area of the Robot Fence frame, resulting in various The number of particles increases, and these particles will contaminate the glass substrate and cause defects, which will affect the product yield.

At present, in the Color Filter Photo process, the high energy consumption of the heater in the Oven process is almost a common problem, but there is currently no good solution to this problem, and the regular cleaning of the Robot Fence frame area cannot be eradicated Defective glass substrates occur due to particle accumulation.

Utility model content

In order to solve the above-mentioned problem of large heat energy loss of the baking equipment in the prior art, the utility model provides a baking equipment, which has a simple structure and can reduce heat energy loss.

The technical scheme provided by the utility model is as follows:

A baking device, comprising:

A baking chamber, which is provided with a switch door for the glass substrate to enter and exit;

A hot air circulation system arranged in the baking chamber;

The baking equipment also includes a hot air recovery system for recovering the hot air overflowing from the opening and closing door of the baking chamber. The hot air recycling system is arranged at the opening and closing door of the baking chamber and is connected to The hot air circulation system is communicated with each other, so that the recovered hot air enters the hot air circulation system in the baking chamber for circulation.

Preferably, the hot air recovery system includes:

A closed frame surrounding the periphery of the opening and closing door of the baking chamber, the closed frame includes a top plate and an opening for the conveying mechanism for conveying glass substrates to pass through, the top plate is provided with hot air in the baking chamber A return air outlet communicating with the circulation system and a return air duct for connecting the return air outlet with the hot air circulation system.

Preferably, the hot air recovery system also includes:

A blowing mechanism for blowing the hot air flowing from the opening and closing door of the baking chamber to the return air outlet, and the blowing mechanism is arranged at the bottom of the closed frame.

Preferably, the closed frame has a quadrilateral structure with a rectangular bottom, and there are four blowing mechanisms, and the four blowing mechanisms are respectively arranged at four corners of the bottom of the closed frame.

Preferably, the hot air recovery system further includes: a first filter for filtering the air in the closed frame, and the first filter is arranged in the closed frame.

Preferably, the first filter is arranged at the blowing outlet of the blowing mechanism.

Preferably, the closed frame is made of heat insulating material.

Preferably, the hot air circulation system includes: a circulation fan for sending circulating air into the baking chamber; a heater for heating the circulating air; and a second filter for filtering the circulating air entering the baking chamber.

The beneficial effects brought by the utility model are as follows:

The baking equipment provided by the utility model, since a hot air recovery system is provided at the opening and closing door of the baking chamber, the hot air overflowing from the opening and closing door can be recovered and sent back to the hot air circulation system of the baking chamber for reuse, reducing heat energy loss.

Description of drawings

Fig. 1 represents the top view of the baking equipment in the prior art;

Fig. 2 represents the top view of the baking equipment provided by the utility model;

Fig. 3 shows the side elevation view of the hot air recovery system in the preferred embodiment of the utility model;

Fig. 4 represents the schematic diagram of the second embodiment of hot blast recovery system;

Fig. 5 shows a schematic diagram of a third embodiment of the hot air recovery system.

Detailed ways

The principles and features of the present utility model are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the utility model, and are not used to limit the scope of the utility model.

In the prior art, when the baking equipment used in the Oven process of the Color Filter Photo process is finished baking, when the door of the baking room is opened, the hot air in the baking room flows out, causing heat energy loss, which leads to the heater work consumption of the baking equipment. To solve the problem of large energy consumption, the utility model provides a baking equipment, which can reduce heat energy loss.

Please refer to Fig. 2 and Fig. 3, Fig. 2 is a top view of the baking equipment provided by the utility model, and Fig. 3 is a vertical sectional view of the hot air recovery system of the baking equipment provided by the utility model. The baking equipment provided by the utility model comprises:

A baking chamber 100, which is provided with a switch door 101 for the glass substrate 500 to enter and exit;

The hot air circulation system arranged in the baking chamber 100, the hot air circulation system includes: a circulation fan 201 for sending circulating air into the baking chamber 100, a heater 202 for heating the circulating air, and a a second filter (not shown) etc. that filters the circulating air entering the baking chamber 100; and,

The hot air recovery system 400 for recovering the hot air overflowing from the switch door 101 of the baking chamber 100, the hot wind recovery system 400 is arranged at the switch door 101 of the baking chamber 100, and is connected with the baking chamber The hot air circulation system in the baking chamber 100 is communicated, so that the recovered hot air enters the hot air circulation system in the baking chamber 100 for circulation.

In the above scheme, since a hot air recovery system 400 is provided at the opening and closing door 101 of the baking chamber 100, the hot air overflowing from the opening and closing door 101 can be recovered, and the heat recovery system communicates with the hot air circulation system in the baking chamber 100, so that the recovered The hot air is sent back to the hot air circulation system of the baking chamber 100, so that the recovered hot air is heated by the heater 202 together with the outside air, and then filtered through the filter. The glass substrate 500 is baked, thereby realizing reuse of heat energy, reducing heat energy loss, and reducing energy consumption of the heater 202 .

A preferred embodiment of the heat recovery system is specifically described below.

In this embodiment, preferably, the hot air recovery system 400 includes:

A closed frame 401 surrounding the periphery of the opening and closing door 101 of the baking chamber 100, the closed frame 401 includes a top plate 4011 and an opening (not shown in the figure) for a conveying mechanism (such as a robot) for conveying the glass substrate 500 to pass through shown), the top plate 4011 is provided with a return air outlet 402 communicating with the hot air circulation system in the baking chamber 100 and a return air duct 403 for communicating the return air outlet 402 with the hot air circulation system.

In the above scheme, by setting a closed frame 401 around the switch door 101 of the baking chamber 100, and setting the air return port 402 on the top of the closed frame 401, when the switch door 101 of the baking chamber 100 is opened, the air from the switch door The hot air overflowing from 101 enters the area limited by the closed frame 401. According to the chimney principle, this part of the hot air will go up and enter the return air outlet 402 on the top of the closed frame 401, and enter the baking chamber 100 through the return air duct 403. Recycling is carried out in the hot air circulation system inside, thereby realizing the reuse of heat energy, reducing heat energy loss, and reducing the energy consumption of the heater 202 of the hot air circulation system; and, when the hot air is recycled, the hot air will be mixed with volatiles enter the air return port 402 of the closed frame 401 together, thereby reducing the accumulation of particles in the area of the closed frame 401 and avoiding the occurrence of defective products of the glass substrate 500 .

It should be noted that, in the above solution, the closed frame 401 can be improved based on the robot protection frame on the baking equipment in the prior art, which can be modified by installing a sealed top plate on the top of the robot protection frame of the existing baking equipment , and the return air outlet 402 and the return air duct 403 are set on the top plate, so that the closed frame 401 can also prevent the staff from accidentally touching the high-temperature glass substrate 500 or the robot when the robot takes out the glass substrate 500 The effect of being damaged and preventing the diffusion of hot air and volatiles of the baking equipment, thus, through the above improvements, solves the problem that the glass substrate 500 is defective due to the large number of particles in the robot protection frame area in the prior art.

In addition, in order to further ensure that the hot air and volatiles overflowing from the opening and closing door 101 can enter the air return port 402 smoothly, in this embodiment, preferably, the hot air recovery system 400 further includes: The hot air flowing out from the opening and closing door 101 is blown to the blowing mechanism 404 of the air return port 402 , and the blowing mechanism 404 is arranged at the bottom of the closed frame 401 . In the above solution, the blowing mechanism 404 can smoothly blow the hot air and volatiles flowing from the opening and closing door 101 into the air return port 402 to ensure the hot air recovery effect and avoid accumulation of volatiles in the closed frame 401 .

In this embodiment, preferably, as shown in FIG. 3 , the closed frame 401 has a square structure, and its bottom is rectangular. There are four blowing mechanisms 404, and the four blowing mechanisms 404 are respectively arranged on the closed frame 401. the bottom four corners of the . Of course, it can be understood that, in practical applications, the shape of the closed frame 401 is not limited thereto, and the number and positions of the blowing mechanisms 404 can be reasonably adjusted according to actual needs.

In addition, the setting of the blowing mechanism 404 will bring the outside air into the closed frame 401. In order to ensure that the cleanliness of the circulating air in the baking chamber 100 meets the baking process conditions, in this embodiment, preferably, the hot air recovery system 400 It also includes: a first filter for filtering the air in the closed frame 401 , the first filter is arranged in the closed frame 401 .

In this embodiment, preferably, the first filter is arranged at the blowing outlet of the blowing mechanism 404 . The first filter can be integrated with the blowing mechanism 404 .

In addition, in order to prevent heat loss, in this embodiment, preferably, the closed frame 401 is made of heat insulating material. And, in order to prevent the leakage of volatiles, in this embodiment, preferably, the closed frame 401 should have good sealing performance, such as: the opening of the closed frame 401 and the switch between the closed frame 401 and the baking chamber 100 A good seal should be made around the door 101.

In addition, it should be noted that, in this embodiment, the return air duct 403 of the hot air recovery system 400 may communicate with the hot air return duct of the hot air circulation system in the baking chamber 100, or may communicate with the air inlet in front of the heater 202. The air outlets are connected, as long as the hot air recovered by the hot air recovery system 400 can enter the baking chamber 100 for circulation. In addition, it should be noted that, preferably, the hot air recovered by the hot air recovery system 400 is heated to a temperature of 220° C. by the heater 202 and then enters the baking chamber 100 for circulation.

In addition, it should be noted that the above embodiments provide the preferred assembly method of the hot air recovery system 400, and the hot air recovery system 400 can also adopt other methods, such as:

As shown in FIG. 4 , the second embodiment of the hot air recovery system 400 is shown. The hot air recovery system 400 includes a closed frame 401. Different from the above-mentioned preferred embodiment, in this embodiment, the blowing mechanism 404 and the first filter are arranged on the closed frame 401 opposite to the opening and closing door 101 of the baking chamber 100. side. When the opening and closing door 101 is opened, the blowing mechanism 404 blows the hot air and volatiles overflowing from the opening and closing door 101, thereby preventing the hot air and volatiles from overflowing from the opening and closing door 101, thereby reducing heat energy loss. But in the present embodiment, the structure of blowing mechanism 404 and the first filter is compared with the preferred embodiment provided by the utility model, and the structure of blowing mechanism 404 and the first filter is comparatively complicated, and hot blast is blown by blowing mechanism 404 Blowing directly into the opening and closing door 101 may result in poor temperature stability in the baking chamber 100 .

As shown in FIG. 5 , the third embodiment of the hot air recovery system 400 is shown. The hot air recovery system 400 includes a closed frame 401. The difference from the above preferred embodiment is that in this embodiment, the blowing mechanism 404 and the first filter are arranged on the top of the closed frame 401, and at the bottom of the baking chamber 100 A second return air outlet 105 is added, and the hot air overflowing from the opening and closing door 101 is blown to the second return air outlet 105 through the blowing mechanism 404, and then enters the hot air circulation system in the baking chamber 100 for recycling. However, with the above-mentioned structure, according to the chimney principle, the hot air overflowing from the opening and closing door 101 of the baking chamber 100 will go up. It will flow to every corner, and the closed frame 401 cannot be discharged, so it is difficult to avoid defective products.

In addition, it should be noted that the baking equipment provided by the utility model can be applied to the Oven process of the ColorFilter Photo process, and can also be applied to other processes in the manufacture of liquid crystal displays, and can also be applied to other areas that require baking. occasion.

The above is the preferred embodiment of the present utility model. It should be pointed out that for those of ordinary skill in the art, some improvements and modifications can also be made without departing from the principle of the present utility model. These improvements and modifications should also be considered It is the protection scope of the utility model.

Claims (8)

1. baking device comprises:

Baking chamber offers in the described baking chamber for the switch door for the glass substrate turnover;

Be arranged at the hot air circulating system in the described baking chamber; It is characterized in that,

Described baking device also comprises the hot blast recovery system that reclaims for the hot blast that the switch door from described baking chamber is overflowed, and described hot blast recovery system is arranged at the switch door place of described baking chamber, and communicates with hot air circulating system in the described baking chamber.

2. baking device according to claim 1 is characterized in that, described hot blast recovery system comprises:

The closed framework that one switch that is surrounded on described baking chamber encloses outdoors, the opening that described closed framework comprises top board and is used for passing through for the transfer mechanism of carrying glass substrate, described top board are provided with the return air inlet that communicates with hot air circulating system in the described baking chamber and the return airway that is used for being communicated with described return air inlet and described hot air circulating system.

3. baking device according to claim 2 is characterized in that, described hot blast recovery system also comprises:

The hot blast that is used for flowing out from the switch door of described baking chamber is advertised the blower mechanism to described return air inlet, and described blower mechanism is arranged at the bottom of described closed framework.

4. baking device according to claim 3 is characterized in that, described closed framework is the tetragonal body structure, and its bottom is rectangular, and described blower mechanism has four, and four described blower mechanisms are arranged at four angles of the bottom of described closed framework respectively.

5. baking device according to claim 3 is characterized in that, described hot blast recovery system also comprises: for first strainer that the air in the described closed framework is filtered, described first strainer is arranged in the described closed framework.

6. baking device according to claim 5 is characterized in that, described first strainer is arranged at the blowing mouth place of described blower mechanism.

7. baking device according to claim 2 is characterized in that, described closed framework adopts lagging material to make.

8. according to each described baking device of claim 1 to 7, it is characterized in that described hot air circulating system comprises: the recirculation blower that is used in described baking chamber, sending recirculated air; The well heater that is used for the heating cycle air; And, be used for filtering second strainer that enters the recirculated air in the baking chamber.

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