CN203179557U - Precise positioning one-dimensional platform - Google Patents
Precise positioning one-dimensional platform Download PDFInfo
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- CN203179557U CN203179557U CN 201320098140 CN201320098140U CN203179557U CN 203179557 U CN203179557 U CN 203179557U CN 201320098140 CN201320098140 CN 201320098140 CN 201320098140 U CN201320098140 U CN 201320098140U CN 203179557 U CN203179557 U CN 203179557U
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- 230000033001 locomotion Effects 0.000 claims abstract description 59
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- 238000005516 engineering process Methods 0.000 description 2
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Abstract
本实用新型提出了一种精密定位一维平台，包括运动机构、与所述运动机构连接的定位平台，所述运动机构包括电机、设置于所述电机上的连接架和设置于所述连接架上的压电驱动器，所述定位平台与所述压电驱动器连接。本实用新型在音圈电机实现高加速、高速和长行程的同时，通过压电驱动器补偿音圈电机的误差，同时通过缓冲减振台来消除音圈电机的在运动过程中的振动，最终实现高加速、高速、长行程和超精密定位的一维运动。
The utility model provides a precise positioning one-dimensional platform, which includes a motion mechanism and a positioning platform connected with the motion mechanism. The motion mechanism includes a motor, a connecting frame arranged on the motor, and a The piezoelectric driver on the positioning platform is connected with the piezoelectric driver. When the voice coil motor achieves high acceleration, high speed and long stroke, the utility model compensates the error of the voice coil motor through the piezoelectric driver, and at the same time eliminates the vibration of the voice coil motor during the movement through the buffer and damping table, and finally realizes 1D motion with high acceleration, high speed, long stroke and ultra-precise positioning.
Description
Technical field
The utility model relates to a kind of platform, relates in particular to a kind of precision positioning one-dimensional platform.
Background technology
Positioning system plays critical effect in various accurate mechanical equipments.Along with the continuous development of precision engineerings such as microelectronics manufacturing, various ultraprecise processing, the large-stroke nanometer locating platform plays more and more vital role in modern science and technology, particularly be one of the research focus in precision engineering field in recent years always.Particularly in photoetching, in the microelectronics such as bonding, equipment need be done the flatness and reciprocator setting movement, and this motion is the accurate setting movement of carrying out under high speed frequent start-stop state of platform.Satisfying under the condition of predetermined accuracy, also will improve its speed and acceleration as much as possible, shortening machining time, reducing the running time, effectively boosting productivity.The one dimension locating platform is the reciprocal pinpoint key foundation that realizes the plane.
At present the domestic ultraprecise location of long stroke mainly is to wait to finish by ball-screw and piezoelectric actuator or linear electric motors and piezoelectric actuator.These location be difficult to realize simultaneously high acceleration, at a high speed, long stroke and ultraprecise locate.This application for modern field of microelectronic fabrication has certain limitation.
The utility model content
At the problems referred to above, the purpose of this utility model is to provide a kind of precision positioning one-dimensional platform, and this precision positioning one-dimensional platform has solved prior art and can't realize simultaneously highly accelerating, at a high speed and the precision positioning problem of long stroke.
The technical solution of the utility model is achieved in that
A kind of precision positioning one-dimensional platform, it is characterized in that: comprise base, be arranged at motion and locating platform on the described base, described motion comprises motor, be arranged at the link on the described motor and be arranged at piezoelectric actuator on the described link, and described locating platform is connected with described piezoelectric actuator.
Preferably, described motor is voice coil motor.
Preferably, described piezoelectric actuator is piezoelectric ceramic actuator.
Preferably, also comprise the buffer shock-absorbing platform that is connected up and down with described motion, described buffer shock-absorbing platform comprises upper bed-plate, the lower bottom base that is connected with described upper bed-plate.
Further, described upper bed-plate is provided with slide block, and described upper bed-plate middle part is provided with the buffer shock-absorbing block.
Further, described lower bottom base is provided with the guide rail that matches with described slide block, and described lower bottom base middle part is provided with snubber assembly and holds the mounting hole of described buffer shock-absorbing block.
Further, described snubber assembly comprise guide rod, the guide rod block that is connected with described guide rod one end, the guide rod lock that is connected with the described guide rod other end, the elastic component that is set in described guide rod outside.
Further, described elastic component is spring.
Preferably, described locating platform comprises the platform link that is connected with described piezoelectric actuator, the location-plate, the platform base that is arranged at described location-plate bottom that are connected with described platform link, the motion measurement grating chi that is arranged at described platform base both sides.
Preferably, described base is the marble base.
The beneficial effect that the utility model produces is: the utility model is by coupling together the formation motion to voice coil motor and piezoelectric actuator by link, motion and locating platform are fastenedly connected, and motion and buffer shock-absorbing platform are fastenedly connected, when voice coil motor is realized high acceleration, high speed and long stroke, error by piezoelectric actuator compensation voice coil motor, eliminate the vibration in motion process of voice coil motor simultaneously by the buffer shock-absorbing platform, final realize highly accelerating, at a high speed, the motion in one dimension of locating of long stroke and ultraprecise.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of an embodiment of a kind of precision positioning one-dimensional platform of the utility model;
Fig. 2 is the structure for amplifying synoptic diagram of an embodiment motion of a kind of precision positioning one-dimensional platform of the utility model;
Fig. 3 is the structure for amplifying synoptic diagram of an embodiment vibration-damped table of a kind of precision positioning one-dimensional platform of the utility model;
Fig. 4 is the structure for amplifying synoptic diagram of an embodiment upper bed-plate of a kind of precision positioning one-dimensional platform of the utility model;
Fig. 5 is the structure for amplifying synoptic diagram of an embodiment lower bottom base of a kind of precision positioning one-dimensional platform of the utility model;
Fig. 6 is the structure for amplifying synoptic diagram of an embodiment locating platform of a kind of precision positioning one-dimensional platform of the utility model;
Among the figure: 1 motion; 11 voice coil motors; 12 links; 13 piezoelectric actuators; 2 locating platforms; 21 platform links; 22 location-plates; 23 first motion measurement grating chis; 24 second motion measurement grating chis; 25 platform bases; 3 buffer shock-absorbing platforms; 31 upper bed-plates; 311 slide blocks; 312 buffer shock-absorbing blocks; 32 lower bottom bases; 321 guide rails; 322 mounting holes; 323 guide rods; 324 guide rod blocks; 325 guide rods lock; 326 springs; 327 spring stop pieces; 4 marble bases.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
According to Fig. 1～preferred embodiment shown in Figure 6, a kind of precision positioning one-dimensional platform, the buffer shock-absorbing platform 3 that comprises motion 1, the locating platform 2 that is connected with motion 1, is connected up and down with motion 1, the marble base 4 that is connected with locating platform 2 with buffer shock-absorbing platform 3, motion 1 comprises motor, be arranged at the link 12 on the motor and be arranged at piezoelectric actuator 13 on the link 12, and locating platform 2 is connected with piezoelectric actuator 13.In the utility model, the preferred marble base 4 of base, but be not limited to marble base 4, the base of materials such as grouan is all within protection domain of the present utility model.
The preferred voice coil motor 11 of motor in the present embodiment; advantages such as it has at a high speed at long stroke motion, high acceleration; but it is not limited to voice coil motor; direct current generator with exchange the 4V motor all within the utility model protection domain; piezoelectric actuator 13 preferred piezoelectric ceramic actuators; piezoelectric actuator 13 strokes are in nanometer (nm) rank, and it can be implemented in the fine setting on the locating platform 2 for the nano-scale motion.
The effect that proposes buffer shock-absorbing platform 3 in the utility model is the vibration that causes when eliminating owing to voice coil motor 11 motions; buffer shock-absorbing platform 3 comprises upper bed-plate 31; the lower bottom base 32 that is connected with upper bed-plate 31; upper bed-plate 31 is provided with slide block 311; upper bed-plate 31 middle parts are provided with buffer shock-absorbing block 312; in the present embodiment; upper bed-plate 31 transversely is symmetrically arranged with two groups of slide blocks 311; every group of slide block comprises two first slide blocks; the quantity of first slide block can be 1; 3; 4 or other quantity; all within protection domain of the present utility model, still the advantage of two first slide blocks is conveniently to install and be beneficial to the balance of guide rail.
The course of work of buffer shock-absorbing platform 3 is that motion 1 motion drives 3 motions of buffer shock-absorbing platform, guide rail 321 on the lower bottom base 32 is along slide block movement, spring 326 is stretched or compressed simultaneously, when arriving the ultimate range of spring 326 stretchings or compression, beginning is motion round about, thereby can eliminate the vibration that brings because of motion 1 motion.
Locating platform 2 comprises the platform link 21 that is connected with motion 1, the location-plate 22 that is connected with platform link 21, be arranged at the platform base 25 of location-plate 22 bottoms, be arranged at the motion measurement grating chi of platform base 25 both sides, location-plate 22 is connected by positioning guide rail (not shown) with platform base 25, positioning guide rail makes location-plate 22 do rectilinear motion at platform base, in the present embodiment, motion measurement grating chi has macroscopic motion to measure grating chi 23 and microscopic motion is measured grating chi 24, location-plate 22 resulting position signallings fed back when grand moving motion measurement grating chi 23 recorded voice coil motor 11 drivings, thereby realized high the acceleration, at a high speed, the function of long stroke and micron-sized precision location; Location-plate 22 resulting position signallings fed back when fine motion motion measurement grating chi 24 recorded piezoelectric actuator 13 drivings, compensated the error that voice coil motor 12 produces, thereby compensated the nanometer positioning of whole one-dimensional platform.
The course of work of the present utility model is: motion 1 motion drives location-plate 22 motions, and motion measurement grating chi feeds back by the position signalling of 22 pairs of motions 1 of location-plate, thereby realizes the precision positioning campaign of whole one-dimensional platform.
The utility model forms motion 1 by voice coil motor 11 is coupled together by link 12 with piezoelectric actuator 13, motion 1 and locating platform 2 are fastenedly connected, and motion 1 is fastenedly connected with buffer shock-absorbing platform 3, when voice coil motor 11 is realized high acceleration, high speed and long stroke, error by piezoelectric actuator 13 compensation voice coil motors 11, eliminate the vibration of voice coil motor 11 in motion process by buffer shock-absorbing platform 3 simultaneously, final realize highly accelerating, at a high speed, the motion in one dimension of locating of long stroke and ultraprecise.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (10)
1. precision positioning one-dimensional platform, it is characterized in that: comprise base, be arranged at motion and locating platform on the described base, described motion comprises motor, be arranged at the link on the described motor and be arranged at piezoelectric actuator on the described link, and described locating platform is connected with described piezoelectric actuator.
2. precision positioning one-dimensional platform as claimed in claim 1, it is characterized in that: described motor is voice coil motor.
3. precision positioning one-dimensional platform as claimed in claim 1, it is characterized in that: described piezoelectric actuator is piezoelectric ceramic actuator.
4. precision positioning one-dimensional platform as claimed in claim 1, it is characterized in that: also comprise the buffer shock-absorbing platform that is connected up and down with described motion, described buffer shock-absorbing platform comprises upper bed-plate, the lower bottom base that is connected with described upper bed-plate.
5. precision positioning one-dimensional platform as claimed in claim 4, it is characterized in that: described upper bed-plate is provided with slide block, and described upper bed-plate middle part is provided with the buffer shock-absorbing block.
6. precision positioning one-dimensional platform as claimed in claim 5, it is characterized in that: described lower bottom base is provided with the guide rail that matches with described slide block, and described lower bottom base middle part is provided with snubber assembly and holds the mounting hole of described buffer shock-absorbing block.
7. precision positioning one-dimensional platform as claimed in claim 6 is characterized in that: described snubber assembly comprises guide rod, the guide rod block that is connected with described guide rod one end, the guide rod lock that is connected with the described guide rod other end, the elastic component that is set in described guide rod outside.
8. precision positioning one-dimensional platform as claimed in claim 7, it is characterized in that: described elastic component is spring.
9. precision positioning one-dimensional platform as claimed in claim 1 is characterized in that: described locating platform comprises the platform link that is connected with described piezoelectric actuator, the location-plate, the platform base that is arranged at described location-plate bottom that are connected with described platform link, the motion measurement grating chi that is arranged at described platform base both sides.
10. precision positioning one-dimensional platform as claimed in claim 1, it is characterized in that: described base is the marble base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320098140 CN203179557U (en) | 2013-03-04 | 2013-03-04 | Precise positioning one-dimensional platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320098140 CN203179557U (en) | 2013-03-04 | 2013-03-04 | Precise positioning one-dimensional platform |
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| CN203179557U true CN203179557U (en) | 2013-09-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201320098140 Expired - Fee Related CN203179557U (en) | 2013-03-04 | 2013-03-04 | Precise positioning one-dimensional platform |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103219049A (en) * | 2013-03-04 | 2013-07-24 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN106217331A (en) * | 2016-09-29 | 2016-12-14 | 广东工业大学 | A kind of precision movement platform and moving end positioning module thereof |
| WO2017031800A1 (en) * | 2015-08-26 | 2017-03-02 | 苏州大学张家港工业技术研究院 | One-dimensional precision positioning platform having large range of motion |
| CN113791493A (en) * | 2021-06-03 | 2021-12-14 | 北京航空航天大学 | A fast mirror based on macro-micro two-stage composite action |
-
2013
- 2013-03-04 CN CN 201320098140 patent/CN203179557U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103219049A (en) * | 2013-03-04 | 2013-07-24 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| CN103219049B (en) * | 2013-03-04 | 2015-04-29 | 东莞华中科技大学制造工程研究院 | Precise positioning one-dimensional platform |
| WO2017031800A1 (en) * | 2015-08-26 | 2017-03-02 | 苏州大学张家港工业技术研究院 | One-dimensional precision positioning platform having large range of motion |
| US10483877B2 (en) | 2015-08-26 | 2019-11-19 | Soochow University | One-dimensional large-stroke precise positioning platform |
| CN106217331A (en) * | 2016-09-29 | 2016-12-14 | 广东工业大学 | A kind of precision movement platform and moving end positioning module thereof |
| CN113791493A (en) * | 2021-06-03 | 2021-12-14 | 北京航空航天大学 | A fast mirror based on macro-micro two-stage composite action |
| CN113791493B (en) * | 2021-06-03 | 2022-09-20 | 北京航空航天大学 | A fast mirror based on macro-micro two-stage composite action |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 523000 No. 1 science and technology nine road, high tech Industrial Development Zone, Songshan Lake, Dongguan, Guangdong Patentee after: GUANGDONG HUST INDUSTRIAL TECHNOLOGY Research Institute Address before: 523808 No. 1 science and technology nine road, Songshan Lake Science and Technology Industrial Park, Dongguan, Guangdong Patentee before: DG-HUST Manufacturing Engineering Institute |
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| CP03 | Change of name, title or address | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130904 |
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| CF01 | Termination of patent right due to non-payment of annual fee |