CN203080059U - Vacuum coating workpiece rotary table - Google Patents
Vacuum coating workpiece rotary table Download PDFInfo
- Publication number
- CN203080059U CN203080059U CN 201220624729 CN201220624729U CN203080059U CN 203080059 U CN203080059 U CN 203080059U CN 201220624729 CN201220624729 CN 201220624729 CN 201220624729 U CN201220624729 U CN 201220624729U CN 203080059 U CN203080059 U CN 203080059U
- Authority
- CN
- China
- Prior art keywords
- rotating shaft
- vacuum plating
- stage microscope
- workpiece turntable
- plating workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract description 4
- 238000007747 plating Methods 0.000 claims description 32
- 230000005540 biological transmission Effects 0.000 claims description 23
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 description 9
- 239000010959 steel Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 238000007781 pre-processing Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010040007 Sense of oppression Diseases 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a vacuum coating workpiece rotary table which comprises an objective table, wherein the objective table comprises a rotary table and a planetary gear, and the rotary table is pivoted with a sun wheel in the planetary gear through balls. According to the vacuum coating workpiece rotary table, the rotary table is pivoted with the planetary gear through the balls, thus the objective table has the advantages of being simple in structure and being light and thin.
Description
Technical field
The utility model relates to the vacuum plating field, particularly a kind of vacuum plating workpiece turntable.
Background technology
Depend primarily on wear resistance and hardness the work-ing life of workpiece, and technique for vacuum coating is to improve the wear resistance of workpiece and the usual way of hardness.In the vacuum plating process, vacuum plating workpiece turntable plays an important role.
Existing vacuum plating workpiece turntable generally includes motor, transmission pedestal, vacuum chamber and Stage microscope, and motor rotates by the driving rotating shaft that transmission belt drives in the transmission pedestal, drives rotating shaft and drives the Stage microscope rotation.
There is following problem in existing vacuum plating workpiece turntable: the first, the thickness of Stage microscope is bigger, because Stage microscope comprises rotating disk and sun and planet gear, sun gear in rotating disk and the sun and planet gear is articulated by bearing, and the size of existing bearing is generally bigger, so the thickness of Stage microscope can't further dwindle; The second, easily high temperature deformation, because Stage microscope also comprises the bearing housing and the axis of rotation, the axis of rotation and bearing housing directly are articulated, easy Yin Gaowen during work and being out of shape causes the axis of rotation and planetary satellite gear stuck; Three, the transmission pedestal is difficult to dismounting with Stage microscope and separates, because transmission pedestal and Stage microscope need be locked to keep continuing energising by bolt.Therefore when separating Stage microscope and transmission pedestal, need this bolt under the prior unloading, use is very inconvenient; Four, the loading and unloading inconvenience of Stage microscope during loading and unloading, need accurately rotate to the fixed position with the axis of rotation, with under Stage microscope fit on or the unloading, has a difficult problem of accurately locating then.
The utility model content
The technical problems to be solved in the utility model is in order to overcome the bigger defective of thickness that there is Stage microscope in vacuum plating workpiece turntable of the prior art, a kind of vacuum plating workpiece turntable to be provided, and its Stage microscope has the advantage of thin thickness.
The utility model solves above-mentioned technical problem by following technical proposals:
A kind of vacuum plating workpiece turntable, it comprises a Stage microscope, and its characteristics are that this Stage microscope comprises a rotating disk and a planet gear, and the sun gear in this rotating disk and this sun and planet gear is articulated by ball.
Preferable, this Stage microscope also comprises a plurality of bearing housings, each bearing housing is articulated by the ball and an axis of rotation.
Preferable, this Stage microscope also comprises a central rotating shaft, and this vacuum plating workpiece turntable comprises that also one has the transmission pedestal that drives rotating shaft, and this drives rotating shaft and is electrically connected with this central rotating shaft by a metal clips.
Preferable, this transmission pedestal also comprises a base sleeve, and this driving rotating shaft and this base sleeve are articulated, and this driving rotating shaft is provided with a check-out console, this base sleeve is provided with a detector switch, and this detector switch and this check-out console are used to detect the rotation number of turns of this driving rotating shaft with respect to this base sleeve.
Preferable, the sun gear in this central rotating shaft and this sun and planet gear is articulated by a ceramic bearing.
Preferable, this vacuum plating workpiece turntable also comprises a vacuum chamber, is provided with two tracks in this vacuum chamber, and this Stage microscope is provided with two row guide wheels, and those guide wheels are used for rolling along those track cunnings and move.
Positive progressive effect of the present utility model is:
The utility model provides a kind of vacuum plating workpiece turntable.By using ball directly this rotating disk and this sun and planet gear to be articulated, this Stage microscope has simple in structure and frivolous advantage.
Description of drawings
Fig. 1 is the stereographic map of the vacuum plating workpiece turntable of the utility model preferred embodiment.
Fig. 2 is the sectional view of the vacuum plating workpiece turntable of the utility model preferred embodiment.
Fig. 3 is the part sectioned view of the vacuum plating workpiece turntable of the utility model preferred embodiment.
Fig. 4 is the partial schematic diagram of the vacuum plating workpiece turntable of the utility model preferred embodiment.
Description of reference numerals:
Motor: 1 transmission belt: 2
Transmission pedestal: 3 vacuum chambers: 4
Stage microscope: 5 metal clips: 6
Base sleeve: 31 drive rotating shaft: 32
Check-out console: 33 detector switches: 34
Track: 41 limiting plates: 42
Central rotating shaft: 51 ceramic bearings: 52
Rotating disk: 53 high temperature steel balls: 54
Sun gear: 55 satellite gears: 56
The axis of rotation: 57 bearing housings: 58
High temperature steel ball: 59 buckle projections: 320
Graphite annulus: 510 supporting plates: 511
Insulcrete: 512 guide wheels: 513
Buckle slot 514
Embodiment
Lift a preferred embodiment below, and come the clearer the utility model that intactly illustrates in conjunction with the accompanying drawings.
As shown in Figure 1, the vacuum plating workpiece turntable of present embodiment comprises motor 1, transmission pedestal 3, vacuum chamber 4 and Stage microscope 5.This transmission pedestal 3 comprises base sleeve 31 and drives rotating shaft 32 that this driving rotating shaft 32 is articulated with this base sleeve 31.This Stage microscope 5 is provided with five axis of rotation 57.
During work, motor 1 rotates by the driving rotating shaft 32 that transmission belt 2 drives in the transmission pedestal 3, drives the axis of rotation 57 rotations in the rotating shaft 32 drive Stage microscopes 5.All be hung with the preprocessing workpiece on those axis of rotation 57, vacuum chamber 4 is airtight and surround Stage microscope 5, has the positive ion emissive source in the vacuum chamber 4, the positive ion emissive source is constantly launched the high temperature positive ion, because the preprocessing workpiece all has negative voltage, positive ion, is realized vacuum plating and is improved the wear resistance of workpiece and the purpose of hardness in the surface of preprocessing workpiece in the effect deposit of electrical forces.
Shown in Fig. 2-3, be provided with two tracks 41 in the vacuum chamber 4, this Stage microscope 5 is provided with two row guide wheels 513, and those guide wheels 513 are used for moving along those tracks 41 sliding rolling.As shown in Figure 4, this driving rotating shaft 32 is provided with a check-out console 33, and this base sleeve 31 is provided with a detector switch 34, and this detector switch 34 and this check-out console 33 are used to detect the rotation number of turns of this driving rotating shaft 32 with respect to this base sleeve 31.Fig. 1-2 does not draw check-out console 33 and detector switch 34.During installation, check-out console 33 and detector switch 34 are aimed at (zero-bit), as shown in Figure 3, guide wheel 513 is used to engage in internal strife at track 41, promote this Stage microscope 5 and make those guide wheels 513 can realize installing along those track 41 sliding rolling.Uninstall process and installation process are just the opposite, do not repeat them here.The purpose of zero set is make to drive rotating shaft 32 vertical two buckle projections 320 can successfully be absorbed in the buckle slot 514 of central rotating shaft 51 when mounted on the one hand, is on the other hand to make that driving rotating shaft 32 vertical two buckle projections can be successfully when unloading break away from from the buckle slot of central rotating shaft 51.
By check-out console 33 and detector switch 34 are set, Stage microscope 5 is easy to accurate location when loading and unloading, and the technical problem of location difficulty has obtained solving preferably.
Shown in Fig. 2-3, Stage microscope 5 comprises rotating disk 53 and sun and planet gear, and the sun gear 55 in this rotating disk 53 and this sun and planet gear is articulated by high temperature steel ball 54.
In the prior art, rotating disk and sun gear are articulated by bearing.As everyone knows, bearing generally is made up of inner ring sleeve, steel ball layer and outer ring set.Present embodiment directly is articulated this rotating disk 53 and sun gear 55 by using high temperature steel ball 54, promptly only utilizes the core component steel ball in the bearing, abandons its inner ring sleeve and outer ring set, can be so that Stage microscope 5 simplifies the structure and be lightening.
Shown in Fig. 2-3, this Stage microscope 5 also comprises five bearing housings 58, and each bearing housing 58 is articulated by the high temperature steel ball 59 and an axis of rotation 57.
In the prior art, the axis of rotation and bearing housing directly are articulated, and easy Yin Gaowen during work and being out of shape causes the axis of rotation and planetary satellite gear stuck.By between the axis of rotation 57 and bearing housing 58, increasing high temperature steel ball 59, even the vacuum plating workpiece turntable of present embodiment is operated under 600 ℃ the situation, the axis of rotation 57 still can retainer shaft to invariant position, each parts cooperation and rotation smoothly.During actual fabrication, can also use common ball to replace the high temperature steel ball, for example, copper pearl or plain ball.
Shown in Fig. 2-3, this drives rotating shaft 32 and is electrically connected with this central rotating shaft 51 by a metal clips 6.
In the prior art, because transmission pedestal and Stage microscope need be locked to keep continuing energising by bolt.Therefore when separating Stage microscope and transmission pedestal, need this bolt under the prior unloading, use is very inconvenient.In the vacuum plating workpiece turntable of present embodiment, this drives rotating shaft 32 and is electrically connected with this central rotating shaft 51 by a metal clips 6.Metal clips drives between rotating shaft 32 and this central rotating shaft 51 can supporting under the pressure of this constantly under the effect of self elastic force, keep both lasting energisings.When separating Stage microscope and transmission pedestal, this metal clips is in the extension relaxed state, and when Stage microscope and transmission pedestal were installed, this metal clips was in the contraction oppression state, therefore has to keep continuing energising and advantage easy to use.
Shown in Fig. 2-3, in the vacuum plating workpiece turntable of present embodiment, rotating shaft 51 and sun gear 55 are articulated by a ceramic bearing 52 automatically.In the prior art, rotating shaft 51 and sun gear 55 are articulated by a metal bearing 52 automatically.The shutdown temperature of vacuum plating workpiece turntable and working temperature are respectively 20 ℃ and 550 ℃; difference variation is comparatively violent; ceramic bearing is compared with metal bearing, has more superior temperature resistance difference deformation performance and wear resisting property, so the vacuum plating workpiece turntable of present embodiment is selected ceramic bearing.
During use, shown in Fig. 2-4, motor 1 rotates by the driving rotating shaft 32 that transmission belt 2 drives in the transmission pedestal 3, drive rotating shaft 32 and drive central rotating shaft 51 rotations, based on using ceramic bearing 52, the spin friction of central rotating shaft 51 is very little, central rotating shaft 51 drives rotating disk 53 and rotates, rotating disk 53 with transmission of torque to the axis of rotation 57, the axis of rotation 57 drives satellite gear 56 around sun gear 55 rotations, in the process of rotation, the Graphite Powder 99 in the graphite annulus 510 can lubricate the crack between the axis of rotation 57 and the bearing housing 58.The negative polarity end of power supply is electrically connected with metal clips 6, and electric field is passed to five axis of rotation 57 by central rotating shaft 51 and rotating disk 53, makes that the preprocessing workpiece on those axis of rotation 57 has negative voltage, so that the positive ion in the absorption vacuum chamber 4.
Sun gear 55 is fixed on the supporting plate 511 by insulcrete 512, so the voltage on the sun gear 55 can not conduct on the sun gear 55.In addition, also be provided with limiting plate 42 in the vacuum chamber 4, limiting plate 42 can be limited in guide wheel 513 to slide on the track and roll motion.
Though more than described embodiment of the present utility model, it will be understood by those of skill in the art that these only illustrate, protection domain of the present utility model is limited by appended claims.Those skilled in the art can make numerous variations or modification to these embodiments under the prerequisite that does not deviate from principle of the present utility model and essence, but these changes and modification all fall into protection domain of the present utility model.
Claims (6)
1. vacuum plating workpiece turntable, it comprises a Stage microscope, it is characterized in that, and this Stage microscope comprises a rotating disk and a planet gear, and the sun gear in this rotating disk and this sun and planet gear is articulated by ball.
2. vacuum plating workpiece turntable as claimed in claim 1 is characterized in that this Stage microscope also comprises a plurality of bearing housings, and each bearing housing is articulated by the ball and an axis of rotation.
3. vacuum plating workpiece turntable as claimed in claim 2, it is characterized in that, this Stage microscope also comprises a central rotating shaft, and this vacuum plating workpiece turntable comprises that also one has the transmission pedestal that drives rotating shaft, and this drives rotating shaft and is electrically connected with this central rotating shaft by a metal clips.
4. vacuum plating workpiece turntable as claimed in claim 3, it is characterized in that, this transmission pedestal also comprises a base sleeve, this driving rotating shaft and this base sleeve are articulated, this driving rotating shaft is provided with a check-out console, this base sleeve is provided with a detector switch, and this detector switch and this check-out console are used to detect the rotation number of turns of this driving rotating shaft with respect to this base sleeve.
5. vacuum plating workpiece turntable as claimed in claim 3 is characterized in that, the sun gear in this central rotating shaft and this sun and planet gear is articulated by a ceramic bearing.
6. as any described vacuum plating workpiece turntable among the claim 1-5, it is characterized in that this vacuum plating workpiece turntable also comprises a vacuum chamber, is provided with two tracks in this vacuum chamber, this Stage microscope is provided with two row guide wheels, and those guide wheels are used for rolling along those track cunnings and move.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220624729 CN203080059U (en) | 2012-11-22 | 2012-11-22 | Vacuum coating workpiece rotary table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220624729 CN203080059U (en) | 2012-11-22 | 2012-11-22 | Vacuum coating workpiece rotary table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203080059U true CN203080059U (en) | 2013-07-24 |
Family
ID=48825917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220624729 Expired - Fee Related CN203080059U (en) | 2012-11-22 | 2012-11-22 | Vacuum coating workpiece rotary table |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203080059U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103834926A (en) * | 2012-11-22 | 2014-06-04 | 上海法德机械设备有限公司 | Vacuum filming workpiece rotation table |
| RU2606363C2 (en) * | 2015-05-27 | 2017-01-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) | Carousel-type unit for multi-layered coatings magnetron sputtering and method of equal thickness nano-coating magnetron sputtering |
-
2012
- 2012-11-22 CN CN 201220624729 patent/CN203080059U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103834926A (en) * | 2012-11-22 | 2014-06-04 | 上海法德机械设备有限公司 | Vacuum filming workpiece rotation table |
| RU2606363C2 (en) * | 2015-05-27 | 2017-01-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) | Carousel-type unit for multi-layered coatings magnetron sputtering and method of equal thickness nano-coating magnetron sputtering |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201582376U (en) | Unidirectional belt wheel of electric generator of automobile | |
| CN103834926A (en) | Vacuum filming workpiece rotation table | |
| CN203080059U (en) | Vacuum coating workpiece rotary table | |
| CN209223219U (en) | A kind of Pneumatic clamping chuck | |
| CN208179504U (en) | A kind of bearing marking positioning device | |
| EP2875885B1 (en) | Novel drill chuck | |
| CN201214239Y (en) | Support with rotary rotor | |
| US7843097B2 (en) | Power transmission apparatus | |
| CN205329156U (en) | Ball is disk strutting arrangement for ion plating | |
| CN203390671U (en) | Plane polishing and grinding device for electrolytic copper foil cathode roller | |
| CN202451829U (en) | Direct-acting seal structure | |
| CN105965423A (en) | Jig for double-side mounting or dismounting of screws | |
| CN103161910A (en) | Eccentric synchronous transmission device | |
| CN202391545U (en) | Three-speed electromagnetic fan clutch | |
| CN203401424U (en) | Assembly follower fixture with rotary disk | |
| CN116728185A (en) | Surface grinding device for precision bearing machining | |
| CN205982365U (en) | Low -pressure measurement case | |
| CN211103307U (en) | Steel wire oxide skin treatment device | |
| CN202804391U (en) | Thread rolling device | |
| CN104647163A (en) | Gemstone chamfering machine | |
| CN203488931U (en) | Bearing detecting machine support | |
| CN202894478U (en) | Tensioning apparatus for underwater diamond rope saw | |
| CN205503746U (en) | Novel disjunctor bearing | |
| CN201970188U (en) | Rotating disc for rust removal machine | |
| CN105673681A (en) | Novel connected bearing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130724 Termination date: 20161122 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |