CN203079700U - Automatic liquid adding device - Google Patents
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- 239000007788 liquid Substances 0.000 title claims abstract description 116
- 238000003860 storage Methods 0.000 claims abstract description 40
- 230000001681 protective effect Effects 0.000 claims abstract description 29
- 239000002994 raw material Substances 0.000 claims abstract description 6
- 238000005096 rolling process Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 abstract description 40
- 238000004140 cleaning Methods 0.000 abstract description 29
- 239000002210 silicon-based material Substances 0.000 abstract description 16
- 238000002360 preparation method Methods 0.000 abstract description 12
- 239000002253 acid Substances 0.000 abstract description 7
- 239000012535 impurity Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 9
- 239000003513 alkali Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
Description
技术领域technical field
本实用新型涉及多晶硅生产技术领域,特别是涉及一种自动加液装置。The utility model relates to the technical field of polysilicon production, in particular to an automatic liquid adding device.
背景技术Background technique
在太阳能级多晶硅生产过程中,由于硅表面经过氧化等处理,有一层非晶体物质,称之为杂质,此外硅料在运输存储过程中粘污,甚至有些污染物会渗透到硅料表层,因此在使用这些硅料前必须对它进行表面清洗,将其表面杂质和污染物除去,硅料清洗不净直接影响太阳能电池的光电转换效率,因此完全有必要进行硅料清洗。In the production process of solar-grade polysilicon, due to oxidation and other treatments on the silicon surface, there is a layer of amorphous substances called impurities. In addition, the silicon material sticks to dirt during transportation and storage, and even some pollutants will penetrate into the surface of the silicon material. Therefore, Before using these silicon materials, the surface must be cleaned to remove impurities and pollutants on the surface. Improper cleaning of the silicon materials will directly affect the photoelectric conversion efficiency of solar cells, so it is absolutely necessary to clean the silicon materials.
硅料清洗的过程是化学反应的一个过程,因此需要精确掌握化学品的浓度,以确保硅料清洗后的质量。化学品采购之前浓度达不到清洗硅料的工艺要求,所以在清洗硅料之前需要人为的配制化学品。配制化学品的过程又是一个高危险的工作。The process of silicon material cleaning is a process of chemical reaction, so it is necessary to accurately control the concentration of chemicals to ensure the quality of silicon material after cleaning. The concentration of chemicals before purchasing cannot meet the process requirements for cleaning silicon materials, so it is necessary to artificially prepare chemicals before cleaning silicon materials. The process of compounding chemicals is another high-risk job.
根据目前的工艺水平,配制化学品的过程是:According to the current state of the art, the process of formulating chemicals is:
A、采购来的大桶封装化学品;A. Purchased vats of packaged chemicals;
B、分装为若干小桶化学品;B. Divided into several small barrels of chemicals;
C、称量出所需化学品;C. Weigh out the required chemicals;
D、人为手动倒入清洗设备内。D. Manually pour into the cleaning equipment.
在这个化学品的配制过程中,化学品多次暴露在空气中,对化学品的质量、浓度等指标产生了一定影响。在此配制过程中完全是人为手动操作,不仅操作上不方便而且造成了很大程度上的安全隐患。During the preparation process of this chemical, the chemical was exposed to the air many times, which had a certain impact on the quality, concentration and other indicators of the chemical. In this preparation process, it is completely manual operation, which is not only inconvenient in operation but also causes a large degree of potential safety hazard.
根据目前的技术水平配制化学品的过程中化学品完全暴露在空气中,而化学品的化学性质本身也不稳定,会有挥发、反应等情况发生,这就造成了浓度配比的变化或改变,影响硅料清洗的质量;在配制化学品的过程中由于是人为手动倒入化学品槽中,对于加入化学品的量的控制很不精确;在配制化学品的过程中由于不能对化学品进行封闭,在很大程度上造成了安全隐患。According to the current technical level, the chemicals are completely exposed to the air during the process of preparing chemicals, and the chemical properties of the chemicals themselves are not stable, and there will be volatilization and reactions, which will cause changes or changes in the concentration ratio , which affects the quality of silicon material cleaning; in the process of preparing chemicals, because it is manually poured into the chemical tank, the control of the amount of chemicals added is very imprecise; Closed, to a large extent caused a security risk.
因此,如何安全、高效、高质量地清洗硅料,是本领域技术人员目前需要解决的技术问题。Therefore, how to clean silicon material safely, efficiently and with high quality is a technical problem that those skilled in the art need to solve.
实用新型内容Utility model content
本实用新型的目的是提供一种自动加液装置,该装置可以有效提高硅料清洗液配制过程中的安全可靠性,提高清洗液的配制速度和配制质量,保护操作人员安全。The purpose of this utility model is to provide an automatic liquid adding device, which can effectively improve the safety and reliability in the preparation process of silicon material cleaning liquid, improve the preparation speed and quality of cleaning liquid, and protect the safety of operators.
为实现上述实用新型目的,本实用新型提供一种自动加液装置,包括动力泵、进液管、出液管和储液桶,所述进液管的两端分别连接所述动力泵的进口和原料桶,所述出液管连接所述动力泵的出口和储液桶,所述动力泵的外部设有第一防护罩,所述储液桶的外部设有第二防护罩。In order to achieve the purpose of the above utility model, the utility model provides an automatic liquid filling device, including a power pump, a liquid inlet pipe, a liquid outlet pipe and a liquid storage tank, and the two ends of the liquid inlet pipe are respectively connected to the inlet of the power pump and the raw material barrel, the liquid outlet pipe is connected to the outlet of the power pump and the liquid storage barrel, the exterior of the power pump is provided with a first protective cover, and the exterior of the liquid storage barrel is provided with a second protective cover.
优选地,所述储液桶为透明容器,所述第二防护罩为透明罩或至少具有一个观察孔。Preferably, the liquid storage tank is a transparent container, and the second protective cover is a transparent cover or has at least one observation hole.
优选地,所述储液桶具有相应刻度。Preferably, the liquid storage barrel has corresponding scales.
优选地,还包括支撑所述动力泵和储液桶的工作台,该工作台的底部设有滚动轮。Preferably, a workbench supporting the power pump and the liquid storage tank is also included, and rolling wheels are provided at the bottom of the workbench.
优选地,所述工作台位于所述储液桶下部的部分,其外沿设有溢流槽。Preferably, the outer edge of the part of the workbench located at the lower part of the liquid storage tank is provided with an overflow groove.
优选地,所述工作台与所述滚动轮之间设有储物柜。Preferably, a locker is provided between the workbench and the rolling wheels.
优选地,所述动力泵具体为隔膜泵。Preferably, the power pump is specifically a diaphragm pump.
优选地,所述工作台上固定安装有两个支架,所述进液管和所述出液管分别缠绕于两所述支架上。Preferably, two brackets are fixedly installed on the workbench, and the liquid inlet pipe and the liquid outlet pipe are respectively wound on the two brackets.
本实用新型所提供的自动加液装置,包括动力泵、进液管、出液管和储液桶,所述进液管的两端分别连接所述动力泵的进口和原料桶,所述出液管连接所述动力泵的出口和储液桶,所述动力泵的外部设有第一防护罩,所述储液桶的外部设有第二防护罩。需要配制清洗液时,将出液管插入储液桶内,把进液管插入原料桶内,气管接入压缩空气,使其达到所要加的容量即可关闭压缩空气,使用完毕后需用清水将设备清洗干净。第一防护罩和第二防护罩分别隔离了动力泵和储液桶与外部空间的接触,采取了全封闭式的保护装置,有效的防止化学品跟空气接触的几率,既防止了化学品中进入其它杂质,保证了化学品的质量;又预防了化学药品在配制过程中流失,从而保证了化学品浓度配比的准确性,提高清洗液的质量。而且,清洗硅料的液体都是强酸性液体,具有较强的腐蚀性,全封闭的配制环境可以保护操作人员的安全,降低工作风险,提高操作人员的工作环境。The automatic liquid adding device provided by the utility model includes a power pump, a liquid inlet pipe, a liquid outlet pipe and a liquid storage barrel, and the two ends of the liquid inlet pipe are respectively connected to the inlet of the power pump and the raw material barrel, and the outlet The liquid pipe is connected to the outlet of the power pump and the liquid storage barrel, the exterior of the power pump is provided with a first protective cover, and the exterior of the liquid storage barrel is provided with a second protective cover. When it is necessary to prepare the cleaning solution, insert the liquid outlet pipe into the liquid storage barrel, insert the liquid inlet pipe into the raw material barrel, and connect the air pipe to the compressed air to make it reach the capacity to be added, then turn off the compressed air, and clean water is required after use Clean the device. The first protective cover and the second protective cover respectively isolate the contact between the power pump and the liquid storage tank and the external space, adopting a fully enclosed protective device, which effectively prevents the chance of chemicals coming into contact with the air, and prevents the chemicals from being exposed to air. The entry of other impurities ensures the quality of the chemicals; it also prevents the loss of chemicals during the preparation process, thereby ensuring the accuracy of the chemical concentration ratio and improving the quality of the cleaning solution. Moreover, the liquid for cleaning the silicon material is a strong acidic liquid, which is highly corrosive. The fully enclosed preparation environment can protect the safety of operators, reduce work risks, and improve the working environment of operators.
在一种优选的实施方式中,所述储液桶为透明容器,所述第二防护罩为透明罩或至少具有一个观察孔。透过第二防护罩和储液桶的外壳,可以观察储液桶中清洗液的体积,以便准确控制清洗液的质量,提高配制清洗液时的可控性。In a preferred embodiment, the liquid storage tank is a transparent container, and the second protective cover is a transparent cover or has at least one observation hole. Through the second protective cover and the shell of the liquid storage tank, the volume of the cleaning liquid in the liquid storage tank can be observed, so as to accurately control the quality of the cleaning liquid and improve the controllability when preparing the cleaning liquid.
在另一种优选的实施方式中,本实用新型所提供的自动加液装置还包括支撑所述动力泵和储液桶的工作台,该工作台的底部设有滚动轮。具有滚动轮的工作台类似一台工具车,将自动加液装置放置于这种小车上,可以方便清洗液、动力泵等设备转移,提高清洗效率,降低工作人员的劳动强度。In another preferred embodiment, the automatic liquid adding device provided by the utility model further includes a workbench supporting the power pump and the liquid storage tank, and rolling wheels are arranged at the bottom of the workbench. The workbench with rolling wheels is similar to a tool trolley. The automatic liquid filling device is placed on this trolley, which can facilitate the transfer of cleaning fluid, power pump and other equipment, improve cleaning efficiency and reduce the labor intensity of staff.
附图说明Description of drawings
图1为本实用新型所提供自动加液装置一种具体实施方式的结构示意图;Fig. 1 is the structural representation of a kind of specific embodiment of automatic liquid adding device provided by the utility model;
图2为图1所示自动加液装置的侧视图。Fig. 2 is a side view of the automatic liquid filling device shown in Fig. 1 .
具体实施方式Detailed ways
本实用新型的核心是提供一种自动加液装置,该装置可以有效提高硅料清洗液配制过程中的安全可靠性,提高清洗液的配制速度和配制质量,保护操作人员安全。The core of the utility model is to provide an automatic liquid adding device, which can effectively improve the safety and reliability in the preparation process of silicon material cleaning liquid, improve the preparation speed and quality of cleaning liquid, and protect the safety of operators.
为了使本技术领域的人员更好地理解本实用新型方案,下面结合附图和具体实施方式对本实用新型作进一步的详细说明。In order to enable those skilled in the art to better understand the solution of the utility model, the utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
请参考图1和图2,图1为本实用新型所提供自动加液装置一种具体实施方式的结构示意图;图2为图1所示自动加液装置的侧视图。Please refer to Fig. 1 and Fig. 2. Fig. 1 is a schematic structural diagram of a specific embodiment of the automatic liquid filling device provided by the present invention; Fig. 2 is a side view of the automatic liquid adding device shown in Fig. 1 .
本实用新型所提供的自动加液装置,包括动力泵3、进液管、出液管和储液桶,进液管的两端分别连接动力泵3的进口和原料桶,出液管连接动力泵3的出口和储液桶,动力泵3的外部设有第一防护罩1,储液桶的外部设有第二防护罩2。需要配制清洗液时,将出液管插入储液桶内,把进液管插入原料桶内,气管接入压缩空气,使其达到所要加的容量即可关闭压缩空气,使用完毕后需用清水将设备清洗干净。The automatic liquid adding device provided by the utility model includes a power pump 3, a liquid inlet pipe, a liquid outlet pipe and a liquid storage tank. The outlet of the pump 3 and the liquid storage barrel, the power pump 3 is provided with a first protective cover 1 outside, and the liquid storage barrel is provided with a second protective cover 2 outside. When it is necessary to prepare the cleaning solution, insert the liquid outlet pipe into the liquid storage barrel, insert the liquid inlet pipe into the raw material barrel, and connect the air pipe to the compressed air to make it reach the capacity to be added, then turn off the compressed air, and clean water is required after use Clean the device.
第一防护罩1和第二防护罩2分别隔离了动力泵3和储液桶与外部空间的接触,采取了全封闭式的保护装置,有效的防止化学品跟空气接触的几率,既防止了化学品中进入其它杂质,保证了化学品的质量;又预防了化学药品在配制过程中流失,从而保证了化学品浓度配比的准确性,提高清洗液的质量。The first protective cover 1 and the second protective cover 2 respectively isolate the contact between the power pump 3 and the liquid storage tank and the external space, and adopt a fully enclosed protective device to effectively prevent the chance of chemicals coming into contact with the air. The inclusion of other impurities in the chemicals ensures the quality of the chemicals; it also prevents the loss of chemicals during the preparation process, thereby ensuring the accuracy of the chemical concentration ratio and improving the quality of the cleaning solution.
而且,清洗硅料的液体都是强酸性液体,具有较强的腐蚀性,全封闭的配制环境可以保护操作人员的安全,降低工作风险,提高操作人员的工作环境。Moreover, the liquid for cleaning the silicon material is a strong acidic liquid, which is highly corrosive. The fully enclosed preparation environment can protect the safety of operators, reduce work risks, and improve the working environment of operators.
具体地,上述的第一防护罩1和第二防护罩2均可以采用耐酸碱材料制成,且可以自由拆卸,便于使用。同时,第一防护罩1和第二防护罩2也可以都采用透明材料,能够清楚的看到化学品使用量和设备本身运行情况,便于操作人员控制。Specifically, the above-mentioned first protective cover 1 and second protective cover 2 can be made of acid and alkali resistant materials, and can be freely disassembled for easy use. At the same time, both the first protective cover 1 and the second protective cover 2 can also be made of transparent materials, so that the amount of chemicals used and the operation of the equipment itself can be clearly seen, which is convenient for the operator to control.
在一种具体的实施方式中,储液桶为透明容器,第二防护罩2为透明罩或至少具有一个观察孔。透过第二防护罩2和储液桶的侧壁,可以观察储液桶中清洗液的体积,以便准确控制清洗液的质量,提高配制清洗液时的可控性。In a specific embodiment, the liquid storage barrel is a transparent container, and the second protective cover 2 is a transparent cover or has at least one observation hole. Through the second protective cover 2 and the side wall of the liquid storage tank, the volume of the cleaning liquid in the liquid storage tank can be observed, so as to accurately control the quality of the cleaning liquid and improve the controllability when preparing the cleaning liquid.
进一步地,上述的储液桶可以具有相应的精确刻度,以掌握了配制化学品的精确性。即储液桶可以采用带有刻度的、透明的、耐酸碱容器,能够清楚的看到化学品的使用量,从而保证药液浓度配比的准确性。Further, the above-mentioned liquid storage tank may have corresponding accurate scales, so as to grasp the accuracy of preparing chemicals. That is to say, the liquid storage tank can be a graduated, transparent, acid and alkali-resistant container, which can clearly see the amount of chemicals used, so as to ensure the accuracy of the concentration ratio of the liquid medicine.
在一种优选的实施方式中,本实用新型所提供的自动加液装置还包括支撑动力泵3和储液桶的工作台4,该工作台4的底部设有滚动轮5。具有滚动轮5的工作台4类似一台工具车,将自动加液装置放置于这种小车上,可以方便清洗液、动力泵3等设备转移,提高清洗效率,降低工作人员的劳动强度。In a preferred embodiment, the automatic liquid filling device provided by the utility model also includes a workbench 4 supporting the power pump 3 and the liquid storage tank, and the bottom of the workbench 4 is provided with a
具体地,工作台4平面上可铺设耐酸碱塑料,小车后轮可带抱闸功能,小车可设有把手6,把手6处加防滑套,车体采用不锈钢材质制成,以提高小车的可操控性,延长小车的使用寿命。Specifically, acid and alkali-resistant plastics can be laid on the plane of the workbench 4, the rear wheel of the trolley can be equipped with a brake function, the trolley can be provided with
在进一步的技术方案中,工作台4位于储液桶下部的部分,其外沿可设置溢流槽7,溢流槽7能够有效的防止操作过程中由于设备问题引起溢料等事故发生后液体流出,减小泄露的可能,避免造成的人身、物品等伤害。In a further technical solution, the workbench 4 is located at the lower part of the liquid storage tank, and an overflow tank 7 can be provided on its outer edge. The overflow tank 7 can effectively prevent the liquid from overflowing and other accidents caused by equipment problems during operation. flow out, reduce the possibility of leakage, and avoid personal and property injuries.
同时,在工作台4与滚动轮之间可以设置储物柜8,即将小车分为上下两层,其中上层表面为耐酸碱材质,下层设有储物柜8,用于放置防化服、防化靴、防化手套等劳保物品,方便操作人员使用。Simultaneously, locker 8 can be set between workbench 4 and rolling wheel, is about to dolly is divided into upper and lower two layers, and wherein the surface of upper layer is acid and alkali resistant material, and lower layer is provided with locker 8, is used for placing chemical protective clothing, Labor protection items such as chemical-resistant boots and chemical-resistant gloves are convenient for operators to use.
在工作台4上固定安装有两个支架9,进液管和出液管分别缠绕于两支架9上。支架9可以采用耐酸碱材料制成,使用完成后将进液管和出液管均缠绕在支架9上,可以有效避免使用混乱,提高生产车间的整洁度。Two brackets 9 are fixedly installed on the workbench 4, and the liquid inlet pipe and the liquid outlet pipe are wound on the two brackets 9 respectively. The bracket 9 can be made of acid and alkali resistant material. After use, the liquid inlet pipe and the liquid outlet pipe are all wound on the bracket 9, which can effectively avoid confusion in use and improve the cleanliness of the production workshop.
上述的动力泵3具体可以为隔膜泵,隔膜泵又称控制泵,是执行器的主要类型,通过接受调制单元输出的控制信号,借助动力操作去改变流体流量。隔膜泵一般由执行机构和阀门组成。采用压缩空气为动力源,对于各种腐蚀性液体,带颗粒的液体,高粘度、易挥发、易燃、剧毒的液体,均能予以抽光吸尽。因此,利用隔膜泵当动力泵3可以避免用电,不会产生电与酸液发生反应的事故,消除安全隐患。The above-mentioned power pump 3 may specifically be a diaphragm pump, which is also called a control pump, and is the main type of actuator. By receiving the control signal output by the modulation unit, the fluid flow is changed by means of power operation. Diaphragm pumps generally consist of actuators and valves. Using compressed air as the power source, it can pump all kinds of corrosive liquids, liquids with particles, high viscosity, volatile, flammable and highly toxic liquids. Therefore, using the diaphragm pump as the power pump 3 can avoid the use of electricity, and will not cause accidents where electricity reacts with acid, eliminating potential safety hazards.
以上对本实用新型所提供的自动加液装置进行了详细介绍。本文中应用了具体个例对本实用新型的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本实用新型的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本实用新型原理的前提下,还可以对本实用新型进行若干改进和修饰,这些改进和修饰也落入本实用新型权利要求的保护范围内。The automatic liquid adding device provided by the utility model has been introduced in detail above. In this paper, specific examples are used to illustrate the principle and implementation of the present utility model, and the descriptions of the above embodiments are only used to help understand the method and core idea of the present utility model. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the utility model, some improvements and modifications can also be made to the utility model, and these improvements and modifications also fall into the protection of the claims of the utility model. within range.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104617252A (en) * | 2015-02-26 | 2015-05-13 | 无锡市产品质量监督检验中心 | Movable rapid self-control acid adding machine |
| CN118326516A (en) * | 2024-05-29 | 2024-07-12 | 安徽微芯长江半导体材料有限公司 | Alkaline vapor etching silicon carbide wafer equipment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104617252A (en) * | 2015-02-26 | 2015-05-13 | 无锡市产品质量监督检验中心 | Movable rapid self-control acid adding machine |
| CN104617252B (en) * | 2015-02-26 | 2017-08-08 | 无锡市产品质量监督检验院 | Removable quick automatic control acid adding machine |
| CN118326516A (en) * | 2024-05-29 | 2024-07-12 | 安徽微芯长江半导体材料有限公司 | Alkaline vapor etching silicon carbide wafer equipment |
| CN118326516B (en) * | 2024-05-29 | 2025-03-25 | 安徽微芯长江半导体材料有限公司 | Alkaline vapor etching silicon carbide wafer equipment |
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