CN203053851U - Micro-polarizing film array-based digital-electronic speckle shearing interferometer - Google Patents
Micro-polarizing film array-based digital-electronic speckle shearing interferometer Download PDFInfo
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Abstract
The utility model discloses a micro-polarizing film array-based digital-electronic speckle shearing interferometer which comprises a laser, a beam expanding mirror located on an emitting beam path of the laser and a detected object, and further comprises a shearer, a micro-polarizing film array, a photosensitive element and a processing device, wherein the shearer is located on the path of a beam reflected from the surface of the detected object, and used for obtaining two coherent line polarizing lights with vertical polarizing directions, the micro-polarizing film array is arranged on the path of beam emitted from the shearer, the photosensitive element is connected with the micro-polarizing film array, and the processing device is connected with the photosensitive element and used for transmitting and processing signals collected by the photosensitive element. The interferometer provided by the utility model has the advantages that multiple phase shifts can be obtained by exposure at one time, and the real time detection effect can be obtained; the phase shift generating device is simplified in the light path; and the micro-polarizing film subjected to phase shift is directly integrated to the photosensitive element, so that the anti-vibrating demand is lowered.
Description
Technical field
The utility model relates to a kind of electronic cutting speckle interferometer, especially a kind ofly relates to the digital electronic cutting speckle interferometer based on little polaroid array that can obtain four width of cloth phase shifted images in real time harmless, the non-contact detection technical field.
Background technology
Little polaroid array is a kind of for measuring light through the device of difference through the light intensity of each polarization direction behind the polaroid of direction, usually with imageing sensor (for example digital camera) thus collocation uses acquisition to comprise the image of each polarized component that is recorded by this little polaroid array, and can carry out real-time phase shift analysis.Present little polaroid array preparation method mainly contains based on the polyvinyl alcohol film etching, based on photo orientated liquid crystal material and several based on the metal nano grating.
Along with the continuous lifting of product quality and reliability index, need to adopt lossless detection method to study the defective that exists with test material.Owing to possess the whole audience, noncontact and plurality of advantages such as pollution-free, obtained application widely in the Non-Destructive Testing field such as thermal imaging, holographic imaging art, electronic speckle pattern interferometry art (ESPI) and electronic cutting speckle interferometry optical detective technologies such as (ESSPI).
ESSPI is a kind of laser measuring technique based on computer data processing, phase-shifting technique and interferometry, adopt the principle of the identical light beam generation interference fringe of two bundles different with other interference techniques, ESSPI adopts clipper that the same point that the light wave of two points of body surface reflexes on the imaging plane be need not to adopt other reference beam to produce the speckle interference picture, is a kind of self-reference interference system therefore.
The multiple technology that cuts into picture has successively appearred in the digital electronic cutting speckle interferometry: shear Ling Jingfa, the shearing of diplopore out of focus, michelson interferometer optical path image cut and Wollaston prism and shear.Wherein shearing prism method is the method that is used for realizing image cut the earliest, and it is optical prism that its core is sheared original paper.Its device characteristic is to place an optical prism before lens, because optical prism is separated into the two-beam of dislocation with the incident light light intensity, thereby realizes the two-beam shearing.Diplopore out of focus shearing method is the aperture of opening two symmetries at the front or rear near surface of imaging len, according to the lens imaging principle, realizes two image cuts by the out of focus imaging.Michelson interferometer optical path image cut method is to adopt the Michelson light path to realize two image cuts.Wollaston prism is the shearing elements of using always, generally adopts birefringece crystal to make, and utilizes the birefringent characteristic of light, thereby is used in combination the dislocation imaging that polaroid is realized image again, and this method is the Wollaston prism shearing method.
In Chinese patent 200520040730.0, people such as Zhang Xi have proposed a kind of cutting speckle interferometer of Michelson formula, and adopt accurate electric driving element to drive the parallel movement of transmitted light translation mechanism to obtain different phase shift figure, but since whenever move to a station acquisition to image be merely able to obtain a parafacies and move image, therefore can not obtain four width of cloth phase shifted images in real time.This patent has proposed a kind of cutting speckle interferometer based on little polaroid array, can realize that single exposure can obtain four width of cloth phase shifted images.
At non-patent literature " Pixelated phase-mask dynamic interferometer " (SPIE, Vol.5531,2004) in, people such as James Millerd have proposed little polaroid array structure is applied in the holographic interferometry light path, and obtained single exposure and can obtain four width of cloth phase shift figure, but do not see have report with little polaroid arrayed applications in the speckle-shearing interferometry light path.This patent in the speckle-shearing interferometry light path, can be prepared the electronic cutting speckle interferometer based on little polaroid array with little polaroid arrayed applications, can obtain four width of cloth phase shifted images in real time.
Summary of the invention
For solving the problems of the technologies described above, the purpose of this utility model is: proposed to realize that based on little polaroid array single exposure can obtain the digital electronic cutting speckle interferometer of a plurality of phase-shift phases, having solved traditional digital electronic cutting speckle interferometer needs multiexposure, multiple exposure can obtain the problem of a plurality of phase shifted images, simplify the device that is used for producing phase-shift phase in the interferometer in the past simultaneously, can realize real-time detection.
The technical solution of the utility model is based on the digital electronic cutting speckle interferometer of little polaroid array, comprises laser instrument, is positioned at beam expanding lens and testee on the laser emitting beam path; Also comprise the clipper that is positioned on the light path of testee surface beam reflected and is used for obtaining the orthogonal two bundle phase mains polarized lights in polarization direction, little polaroid array, the photo-sensitive cell that links to each other with little polaroid array on the light path of the light beam of clipper outgoing be set and treatment facility that the signal for to the photo-sensitive cell collection that links to each other with photo-sensitive cell transmits and handles.
As further improvement of the utility model, described clipper comprises the lens that are positioned on the light path of testee surface beam reflected, be positioned at the polarization splitting prism on the light path of the light beam that transmits from lens, be positioned at first quarter-wave plate on the beam path that polarization splitting prism transmits, be positioned at first reflecting mechanism on the light path that first quarter-wave plate transmits light beam, be positioned at second quarter-wave plate on the light path of the light beam that polarization splitting prism reflects, be positioned at second reflecting mechanism on the light path that second quarter-wave plate transmits light beam and be positioned at the 3rd quarter-wave plate on the light path of transmission for the second time and the light beam that reflects on the polarization splitting prism.
As further improvement of the utility model, described first quarter-wave plate is vertical with second quarter-wave plate.
As further improvement of the utility model, described the 3rd quarter-wave plate is vertical with first quarter-wave plate and simultaneously parallel with second quarter-wave plate.
As further improvement of the utility model, described first reflecting mechanism and second reflecting mechanism include catoptron and the deflection mechanism that is used for accommodation reflex mirror deflection angle that links to each other with catoptron.
As further improvement of the utility model, described clipper comprises the lens that are positioned on the light path of testee surface beam reflected, be positioned at this prism of Warren on the light path of the light beam that transmits from lens and be positioned at the 3rd quarter-wave plate on the light path of this prism outgoing beam of Warren.
As further improvement of the utility model, described treatment facility is computing machine or microprocessor.
The beneficial effects of the utility model are: 1, single exposure can obtain repeatedly phase shift, can reach the effect of real-time detection; 2, simplified the device that produces phase shift in the light path; 3, directly be integrated on the photo-sensitive cell antivibration requirement reduction owing to produce little polaroid array of phase shift.
Description of drawings
Fig. 1 is little polaroid array structure synoptic diagram.
Fig. 2 is that the little polaroid in little polaroid array produces the principle schematic of four step phase shifts.
Fig. 3 is that the utility model is based on the structural representation of the digital electronic cutting speckle interferometer of the Michelson formula of little polaroid array.
Fig. 4 is that the utility model is based on the structural representation of the digital electronic cutting speckle interferometer of this lens type of Warren of little polaroid array.
Wherein: 1, laser instrument, 2, beam expanding lens, 3, testee, 4, polarization splitting prism, 5, first quarter-wave plate, 6, first reflecting mechanism, 7, second quarter-wave plate, 8, second reflecting mechanism, the 9, the 3rd quarter-wave plate, 10, little polaroid array, 11, photo-sensitive cell, 12, treatment facility, 13, lens, 14, this prism of Warren.
Embodiment
4 pairs of the utility model of 1-accompanying drawing further specify by reference to the accompanying drawings:
The utility model is for realizing that single exposure obtains four phase-shift phases, adhered to little polaroid array 10 in photo-sensitive cell 11 fronts, the synoptic diagram of little polaroid array 10 as shown in Figure 1, each pixel cell all is a polaroid, its transmission direction is direction as shown in the figure, little polaroid array and photo-sensitive cell 10 supporting uses are close to above the photo-sensitive cell 10.The unit size of little polaroid array and photo-sensitive cell 10 pixel cells are measure-alike, i.e. one-to-one relationship.
Digital electronic cutting speckle interferometer based on little polaroid array of the present utility model comprises laser instrument 1, beam expanding lens 2, testee 3, clipper, little polaroid array 10, photo-sensitive cell 11 and treatment facility 12.
Photo-sensitive cell 11 described in the utility model is photo-sensitive cells such as CCD of the prior art or CMOS.
Clipper in the utility model has two kinds of concrete embodiments:
Embodiment one: comprise polarization splitting prism 4, first quarter-wave plate 5, first reflecting mechanism 6, second quarter-wave plate 7, second reflecting mechanism 8, the 3rd quarter-wave plate 9 and lens 13.As shown in Figure 3.
Wherein said polarization splitting prism 4, first quarter-wave plate 5, second quarter-wave plate 7, the 3rd quarter-wave plate 9 and lens 13 are prior art, and its concrete structure the utility model is not done detailed description.
Wherein first reflecting mechanism 6 and second reflecting mechanism 8 include catoptron and the deflection mechanism that is used for accommodation reflex mirror deflection angle that links to each other with catoptron.Aforesaid deflection mechanism is prior art, and concrete structure the utility model is not described in detail.
Embodiment two: comprise lens 13, this prism 14 of Warren and the 3rd quarter-wave plate 9.As shown in Figure 4.
This prism 14 of wherein said Warren is this prism of Warren of the prior art, and its concrete structure the utility model is not done detailed description.
Digital electronic cutting speckle interferometer based on little polaroid array of the present utility model comprises laser instrument 1, is positioned at beam expanding lens 2 and testee 3 on the laser instrument 1 outgoing beam light path; Also comprise the clipper that is positioned on the light path of testee 3 surperficial beam reflected and is used for obtaining the orthogonal two bundle phase mains polarized lights in polarization direction, little polaroid array 10, the photo-sensitive cell 11 that links to each other with little polaroid array 10 on the light path of the light beam of clipper outgoing be set and treatment facility 12 that the signal for to photo-sensitive cell 11 collections that links to each other with photo-sensitive cell 11 transmits and handles.
The embodiment one of clipper:
Clipper comprises the lens 13 that are positioned on the light path of testee 3 surperficial beam reflected, be positioned at the polarization splitting prism 4 on the light path of the light beam that transmits from lens 13, be positioned at first quarter-wave plate 5 on the beam path that polarization splitting prism 4 transmits, be positioned at first reflecting mechanism 6 on the light path that first quarter-wave plate 5 transmits light beam, be positioned at second quarter-wave plate 7 on the light path of the light beam that polarization splitting prism 4 reflects, be positioned at second reflecting mechanism 8 on the light path that second quarter-wave plate 7 transmits light beam and be positioned at the 3rd quarter-wave plate 9 on the light path of transmission for the second time and the light beam that reflects on the polarization splitting prism 4.First quarter-wave plate 5 is vertical with second quarter-wave plate 7.The 3rd quarter-wave plate 9 is vertical and simultaneously parallel with second quarter-wave plate 7 with first quarter-wave plate 5.
The utility model proposes a kind of digital electronic cutting speckle interferometer of the Michelson formula based on little polaroid array based on the structure of the clipper of aforementioned embodiments one, its concrete structure as shown in Figure 3.
The course of work based on the digital electronic cutting speckle interferometer of the Michelson formula of little polaroid array is as described below:
The laser that is sent by laser instrument 1 shines on the object under test 3 after expanding through beam expanding lens 2, object under test 3 irreflexive light are assembled through lens 13 and are arrived polarization splitting prism 4, this moment, incident light was divided into two bundles, and first bundle is transmitted light, and the polarization direction is for being parallel to plane, paper place; Second bundle is reflected light, and the polarization direction is perpendicular to plane, paper place.First the bundle transmitted light after polarization splitting prism 4 transmissions through first quarter-wave plate 5, fast axle became-45 ° (or 45 °) when first quarter-wave plate 5 was placed with paper, being 45 ° (or-45 °) through the light of polarization splitting prism 4 transmissions and the fast axle clamp angle of this quarter-wave plate 5 namely, is left circularly polarized light (or right-circularly polarized light) through the light behind the quarter-wave plate 5 therefore.Left circularly polarized light (or right-circularly polarized light) is reflected after arriving first reflecting mechanism 6, again through first quarter-wave plate 5, light becomes linearly polarized light by left circularly polarized light (or right-circularly polarized light), the polarization direction of this moment becomes 90 ° with the first time through the direction before first quarter-wave plate 5, also namely perpendicular to plane, paper place, satisfy the conditioned reflex of polarization splitting prism 4, the light of reflection arrives the 3rd quarter-wave plate 9.Second the bundle reflected light through polarization splitting prism 4 reflected light through second quarter-wave plate 7, fast axle and plane, paper place (or-45 °) at 45 when this second quarter-wave plate 7 is placed, namely through the light of polarization splitting prism reflection and the angle (or-45 °) at 45 of this second quarter-wave plate 7, therefore the light through second quarter-wave plate 7 is left circularly polarized light (or right-circularly polarized light).Left circularly polarized light (or right-circularly polarized light) is reflected after arriving second reflecting mechanism 8, again through second quarter-wave plate 7, light becomes linearly polarized light by left circularly polarized light (or right-circularly polarized light), the polarization direction of this moment becomes 90 ° with the first time through the direction before second quarter-wave plate 7, also namely be parallel to plane, paper place, satisfy the transmission condition of polarization splitting prism 4, the light of transmission arrives the 3rd quarter-wave plate 9.Therefore the light of process polarization splitting prism 4 transmissions and reflection arrives the 3rd quarter-wave plate 9 for the second time, the polarization direction of two-beam is orthogonal, fast axle became-45 ° (or 45 °) when the 3rd quarter-wave plate 9 was placed with polarization splitting prism transmitted light direction, and the light that sees through the 3rd quarter-wave plate 9 is respectively left circularly polarized light and right-circularly polarized light (or right-circularly polarized light and left circularly polarized light).Through behind little polaroid array 10, introduced four step phase shifts, received by photo-sensitive cell 11 afterwards, the collection signal is transferred to treatment facility 12 and handles.
The digital electronic cutting speckle interferometer of the Michelson formula based on little polaroid array of the present utility model can be realized the adjusting of sensitivity: manually rotate the deflection mechanism of first reflecting mechanism 6 or any one in the deflection mechanism in second reflecting mechanism 8, can realize the misplacing dislocation direction of picture and the variation of angle, this has just realized regulating based on the sensitivity of the digital electronic cutting speckle interferometer of the Michelson formula of little polaroid array.
(amplitude is respectively E1 and E2 when the mutually perpendicular polarized light in two bundle polarization directions, light intensity is I1 and I2, phasic difference is Δ φ) when passing the 3rd quarter-wave plate 9 polarization directions of two bundle polarized lights become respectively with the 3rd quarter-wave plate 9 ± 45 ° the time, the light that sees through the 3rd quarter-wave plate 9 is respectively left circularly polarized light and right-circularly polarized light, two bundle circularly polarized lights are during through little polaroid array 10, and the saturating polarization direction of little polaroid that the light intensity that sees through the little polaroid in little polaroid array 10 and little polaroid array 10 are interior is relevant.As shown in Figure 2.
The transmission direction of supposing the little polaroid in the little polaroid array 10 is α with fast angle of the 3rd quarter-wave plate 10, and then the intensity signal accepted of photo-sensitive cell 11 is
Per four little polaroid unit of little polaroid array 10 of the prior art constitute a super pixel, and the fast axle clamp angle of the polarization direction of these four little polaroids and the 3rd quarter-wave plate is respectively 0,1/4 π, 1/2 π, 3/4 π.
By above-mentioned formula, then obtain following four phase shift formula:
Therefore single exposure can obtain the plot of light intensity picture of four step phase shifts, and the value of phase difference φ is
The utility model has also proposed another kind of clipper, and its structure is: described clipper comprises the lens 13 that are positioned on the light path of testee 3 surperficial beam reflected, be positioned at this prism 14 of Warren on the light path of the light beam that transmits from lens 13 and be positioned at the 3rd quarter-wave plate 9 on the light path of these prism 14 outgoing beams of Warren.
The utility model proposes a kind of digital electronic cutting speckle interferometer of this lens type of Warren based on little polaroid array based on aforesaid another kind of clipper, its concrete structure as shown in Figure 4.
The course of work based on the digital electronic cutting speckle interferometer of this lens type of Warren of little polaroid array is as described below:
Digital electronic cutting speckle interferometer based on this lens type of Warren of little polaroid array comprises laser instrument 1, beam expanding lens 2, testee 3, these prism 14, the three quarter-wave plates 9 of Warren, little polaroid array 10, photo-sensitive cell 11, treatment facility 12 and lens 13.
Wherein this prism 14 of Warren is this prism of Warren of the prior art, and it has birefringent characteristic, for a branch of incident light, emergent light is divided into two bundles, and two-beam forms an angle, and all is linearly polarized light, and the polarization direction is orthogonal, has certain phase difference Δ φ.Classic method is come two-beam is introduced extra phase shift (0,1/4 π, 1/2 π by move this prism of Warren in the x direction, 3/4 π), calculate Δ φ with this, so the plot of light intensity picture of this method when also needing multiexposure, multiple exposure to realize recording several phase differential, can not reach real-time effect.Plot of light intensity picture when this method has realized that by adding little polaroid array 11 single exposure obtains several phase differential.
The laser that is sent by laser instrument 1 shines on the testee 3 after expanding through beam expanding lens 2, the light of testee 3 reflections arrives this prism 13 of Warren, emergent light is divided into two bunch polarized lights, a branch of polarisation of light direction is parallel to plane, paper place, another bundle polarisation of light direction is perpendicular to plane, paper place, this two-beam arrives the 3rd quarter-wave plate 9, fast axle became-45 ° (or 45 °) when the 3rd quarter-wave plate 9 was placed with plane, paper place, and the light that two bunch polarized lights see through behind the 3rd quarter-wave plate 9 is respectively left circularly polarized light and right-circularly polarized light (or right-circularly polarized light and left circularly polarized light).Through behind little polaroid array 10, introduced four step phase shifts, received by photo-sensitive cell 11 afterwards, gathered signal and be transferred to treatment facility 12 and handle.
More than show and described ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; that describes in above-described embodiment and the instructions just illustrates principle of the present utility model; under the prerequisite that does not break away from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall in claimed the utility model scope.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (7)
1. based on the digital electronic cutting speckle interferometer of little polaroid array, comprise laser instrument (1), be positioned at beam expanding lens (2) and testee (3) on laser instrument (1) the outgoing beam light path; It is characterized in that: also comprise the clipper that is positioned on the light path of the surperficial beam reflected of testee (3) and is used for obtaining the orthogonal two bundle phase mains polarized lights in polarization direction, little polaroid array (10), the photo-sensitive cell (11) that links to each other with little polaroid array (10) on the light path of the light beam of clipper outgoing be set and treatment facility (12) that the signal for to photo-sensitive cell (11) collection that links to each other with photo-sensitive cell (11) transmits and handles.
2. the digital electronic cutting speckle interferometer based on little polaroid array according to claim 1 is characterized in that: described clipper comprises the lens (13) that are positioned on the light path of the surperficial beam reflected of testee (3), be positioned at the polarization splitting prism (4) on the light path of the light beam that transmits from lens (13), be positioned at first quarter-wave plate (5) on the beam path that polarization splitting prism (4) transmits, be positioned at first reflecting mechanism (6) on the light path that first quarter-wave plate (5) transmits light beam, be positioned at second quarter-wave plate (7) on the light path of the light beam that polarization splitting prism (4) reflects, be positioned at second reflecting mechanism (8) on the light path that second quarter-wave plate (7) transmits light beam and be positioned at polarization splitting prism (4) and go up the 3rd quarter-wave plate (9) on the light path of transmission for the second time and the light beam that reflects.
3. the digital electronic cutting speckle interferometer based on little polaroid array according to claim 2, it is characterized in that: described first quarter-wave plate (5) is vertical with second quarter-wave plate (7).
4. according to claim 2 or 3 described digital electronic cutting speckle interferometers based on little polaroid array, it is characterized in that: described the 3rd quarter-wave plate (9) is vertical with first quarter-wave plate (5) and simultaneously parallel with second quarter-wave plate (7).
5. the digital electronic cutting speckle interferometer based on little polaroid array according to claim 2 is characterized in that: described first reflecting mechanism (6) and second reflecting mechanism (8) include catoptron and the deflection mechanism that is used for accommodation reflex mirror deflection angle that links to each other with catoptron.
6. the digital electronic cutting speckle interferometer based on little polaroid array according to claim 1 is characterized in that: described clipper comprises the lens (13) that are positioned on the light path of the surperficial beam reflected of testee (3), be positioned at this prism of Warren (14) on the light path of the light beam that transmits from lens (13) and be positioned at the 3rd quarter-wave plate (9) on the light path of this prism of Warren (14) outgoing beam.
7. the digital electronic cutting speckle interferometer based on little polaroid array according to claim 1, it is characterized in that: described treatment facility is computing machine or microprocessor.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103048268A (en) * | 2013-01-10 | 2013-04-17 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
| JP2017111150A (en) * | 2015-12-15 | 2017-06-22 | 住友化学株式会社 | Defect inspection imaging device, defect inspection system, film manufacturing device, defect inspection imaging method, defect inspection method, and film manufacturing method |
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2013
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103048268A (en) * | 2013-01-10 | 2013-04-17 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
| CN103048268B (en) * | 2013-01-10 | 2015-05-27 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
| JP2017111150A (en) * | 2015-12-15 | 2017-06-22 | 住友化学株式会社 | Defect inspection imaging device, defect inspection system, film manufacturing device, defect inspection imaging method, defect inspection method, and film manufacturing method |
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