CN203007409U - Metal plate cooling device of gas-importing nozzle of thin film deposition equipment - Google Patents
Metal plate cooling device of gas-importing nozzle of thin film deposition equipment Download PDFInfo
- Publication number
- CN203007409U CN203007409U CN 201220714826 CN201220714826U CN203007409U CN 203007409 U CN203007409 U CN 203007409U CN 201220714826 CN201220714826 CN 201220714826 CN 201220714826 U CN201220714826 U CN 201220714826U CN 203007409 U CN203007409 U CN 203007409U
- Authority
- CN
- China
- Prior art keywords
- gas
- metal plate
- cooling
- film deposition
- deposition equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000002184 metal Substances 0.000 title claims abstract description 30
- 238000001816 cooling Methods 0.000 title abstract description 15
- 238000000427 thin-film deposition Methods 0.000 title abstract 2
- 239000000498 cooling water Substances 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
- 239000002826 coolant Substances 0.000 claims description 13
- 230000008676 import Effects 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 8
- 239000007789 gas Substances 0.000 abstract description 31
- 239000011521 glass Substances 0.000 abstract description 10
- 239000012528 membrane Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model provides a metal plate cooling device of a gas-importing nozzle of thin film deposition equipment. The metal plate cooling device is arranged oppositely to the surface of photovoltaic glass; meanwhile, a plurality of holes are arranged at the surface opposite to the photovoltaic glass; these holes supply a plurality of membrane gases conveyed from a gas mixing chamber to the photovoltaic glass at the same time; the gas nozzle is a porous metal plate; a cooling chamber is arranged on the mixing chamber; and cooling water is led to the cooling chamber, so that the entire metal member achieves the cooling effect, and meanwhile, an insulating board fastened at the upper layer of the metal plate is cooled and no thermal deformation phenomenon is generated.
Description
Affiliated technical field
The utility model relates to a kind of film deposition equipment gas and imports shower nozzle metal sheet refrigerating unit, uses this type of cooling cooling gas to import the device of shower nozzle.
Background technology
In the film deposition equipment deposit film, utilize PECVD (Plasma Enhance Chemical vapor deposition) to process, carry out the process of film forming on handled object.Carry out having processing vessel and gas tip in this film process equipment.This processing vessel has to load the microscope carrier of photovoltaic glass; This gas tip is oppositely arranged with this microscope carrier, supplies with the required gas of film forming towards photovoltaic glass surface.Form gas flow path in this shower nozzle, multiple film forming gas can be supplied with photovoltaic glass surface equably, these gases mix mutually in mixing chamber, and spread at transverse direction.In addition, shower nozzle is metal sheet (metal diffuser plate), simultaneously, can pass into radio-frequency power supply (RF POWER) on this metal sheet, utilizes the electrode space that forms with microscope carrier to produce plasma body, reaches the advantage of fast filming.
Yet, there is following problem in the gas tip that the multiple film forming gas of above-mentioned supply is used:
Can produce high temperature contact with plasma body for a long time by the fixing metal sheet of trip bolt, this high temperature can produce the physical phenomenon of expanding with heat and contract with cold to the trip bolt on metal sheet, and the while is also to the phenomenon of the fastening insulcrete generation thermal distortion on metal sheet upper strata.Therefore life-time service is screw loosening, both made to tighten screw metal sheet is fitted tightly fully, and therefore insulcrete also can produce the gap, causes gas to enter in mixing chamber fully.Make plasma to external diffusion, can form in the metal sheet outside plasma body of many Yus, and deposit film causes the inconvenience on cleaning in unnecessary place, can produce inhomogeneous phenomenon to the film that deposits on photovoltaic glass simultaneously.
The utility model content
In sum, in order to overcome the prior art deficiency, main purpose of the present utility model is to provide a kind of PECVD film deposition equipment gas to import shower nozzle metal sheet refrigerating unit, provide a kind of at refrigerating unit, that metal sheet is cooling, do not affect again the path that gas imports shower nozzle, can prevent the planarization of the fixed pan of the temperatures involved metal sheet that produces because of isoionic bombardment, the type that simultaneously also prevents insulcrete Yin Gaowen and produce becomes, and produces the gap between contact surface and make different film forming gas mix technology to external leakage.
a kind of film deposition equipment gas of the present utility model imports shower nozzle metal sheet refrigerating unit, the surface of it and photovoltaic glass relatively arranges, simultaneously, on the surface relative with above-mentioned photovoltaic glass, a plurality of holes are set, to supply with simultaneously above-mentioned photovoltaic glass from the multiple film forming gas that gas mixing chamber sends by these holes, this gas tip itself is exactly expanded metal, be provided with cooling chamber in mixing chamber, and pass into water coolant, make whole hardware reach cooling effect, simultaneously also cooling to the fastening insulcrete on metal sheet upper strata, can not produce the phenomenon of thermal distortion.
The water inlet of the utility model water coolant and cooling water outlet are 1/2 cun.
Description of drawings
Fig. 1 is the utility model structural representation.
The primary clustering nomenclature.
11... cavity top cover.
12... gas introduction port.
13... water coolant chamber.
14... cooling water intake.
15... gas mixing chamber.
16... shower nozzle metal sheet.
17... cooling water outlet.
18... dividing plate.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described further.
See also shown in Figure 1, a kind of PECVD film deposition equipment gas imports the shower nozzle refrigerating unit, it comprises that cavity top cover 11, two gas introduction ports 12, water coolant chamber 13, cooling water intake 14, cooling water outlet 17, gas mixing chamber 15, shower nozzle metal sheet 16 and dividing plate 18 form, film forming gas is passed in gas mixing chamber 15, by entering processing vessel via the porous on shower nozzle metal sheet 16 after transverse dispersion by gas introduction port 12.Water coolant passes into water coolant chamber 13 by water coolant admission port 14, flow out from cooling water outlet 17 again, reach the purpose of refrigeration cycle, simultaneously via the isolated water coolant chamber 13 of dividing plate 18 and gas mixing chamber 15, do not make water coolant flow in gas mixing chamber 15.When action of plasma, water coolant can flow into water coolant chamber 13 cooling other hardwares via cooling water intake 14, flow out via cooling water outlet 17 again, reach the purpose of cooling, make the shower nozzle metal sheet 16 can Yin Gaowen and produce the loosening phenomenon of set screw, make whole hardware reach cooling effect, simultaneously also cooling to the fastening insulcrete on metal sheet upper strata, can not produce the phenomenon of thermal distortion.
The above example is to the explanation of technical solutions of the utility model and unrestricted, the modification that is equal to replacement or makes according to prior art of affiliated technical field those of ordinary skill, as long as do not exceed thinking and the scope of technical solutions of the utility model, within all should being included in claim scope of the present utility model.
Claims (2)
1. a film deposition equipment gas imports shower nozzle metal sheet refrigerating unit, and it comprises that cavity top cover, two gas introduction ports, water coolant chamber, cooling water intake, cooling water outlet, gas mixing chamber, shower nozzle metal sheet and dividing plate form.
2. a kind of film deposition equipment gas imports shower nozzle metal sheet refrigerating unit according to claim 1, it is characterized in that, described water coolant water inlet and cooling water outlet are 1/2 cun.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220714826 CN203007409U (en) | 2012-12-23 | 2012-12-23 | Metal plate cooling device of gas-importing nozzle of thin film deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220714826 CN203007409U (en) | 2012-12-23 | 2012-12-23 | Metal plate cooling device of gas-importing nozzle of thin film deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203007409U true CN203007409U (en) | 2013-06-19 |
Family
ID=48599021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220714826 Expired - Fee Related CN203007409U (en) | 2012-12-23 | 2012-12-23 | Metal plate cooling device of gas-importing nozzle of thin film deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203007409U (en) |
-
2012
- 2012-12-23 CN CN 201220714826 patent/CN203007409U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 Termination date: 20141223 |
|
| EXPY | Termination of patent right or utility model |