CN202923094U - Screen printing machine - Google Patents

Abstract

An object of the present invention is to provide a screen printing machine in which an operator can accurately grasp an abnormal state generated on a mask cleaner and take appropriate countermeasures. Make the mask cleaner (18) perform vacuum suction, measure the suction force of the mask cleaner (18) (step ST1 and step ST6), and measure the suction force of the mask cleaner (18) (in the vacuum tube The flow rate of air passing through the passage ( 41 ) or the pressure in the vacuum pipe ( 41 )) is compared with a predetermined reference value (step ST2 and step ST7 ). As a result, when the measured suction force of the mask cleaner (18) is lower than the reference value, the notifier (45) is made to perform a predetermined notification operation (step ST4 and step ST9).

Description

screen printing machine

technical field

The utility model relates to a screen printing machine and an abnormal detection method of the screen printing machine which transfer paste to a substrate by making a scraper slide on a mask in contact with the substrate.

Background technique

In the screen printing machine, after the substrate is brought into contact with the lower surface of the mask having openings provided corresponding to the arrangement of the electrode portions of the substrate, the slider is slid on the upper surface of the mask, whereby the paste is applied through the openings of the mask. printed on the substrate. After transferring the paste to the substrate in this way, the substrate is separated from the mask to perform mold release. However, if the paste adheres to the lower surface of the mask at this time, printing defects may occur on subsequent substrates. Therefore, a screen printing machine generally includes a mask cleaner that wipes and cleans the paste adhering to the lower surface of the mask after transferring the paste to the substrate (for example, Patent Document 1).

Patent Document 1: (Japanese) Unexamined Patent Application Publication No. 2011-189668

However, in the above-mentioned conventional screen printing machine, there is a problem that the residue of the paste that has passed through the holes of the paper member adheres to the inside of the mask cleaner or a vacuum line connected thereto to cause clogging, or In the abnormal state where the vacuum line is damaged due to changes over time, the adsorption force of the mask cleaner is reduced, and the paste attached to the lower surface of the mask is not wiped sufficiently, and although printing defects may occur on the substrate, it is difficult for the operator to notice this. abnormal state.

Utility model content

Therefore, an object of the present invention is to provide a screen printing machine and an abnormality detection method of the screen printing machine so that an operator can accurately grasp an abnormal state generated on a mask cleaner and take appropriate countermeasures.

The screen printing machine according to the first aspect of the present invention includes: a mask having openings provided corresponding to the arrangement of the electrodes of the substrate; The paste is transferred to the substrate through the opening of the mask; and the mask cleaner is opposed to each other while performing vacuum suction from the suction port while pressing the paper member against the lower surface of the mask. Cleaning the lower surface of the mask by moving relatively to the lower surface of the mask, including: a suction force measuring device for performing vacuum suction on the mask cleaner and measuring the mask cleaner the suction force of the mask cleaner; the control device is notified, which compares the suction force of the mask cleaner measured by the suction force measurement device with a predetermined reference value, and as a result, the suction force measured by the suction force measurement device When the measured suction force of the mask cleaner is lower than the reference value, the notifier performs a predetermined notification operation.

In the screen printing machine according to the second aspect of the present invention, in the first aspect, the suction force measuring device uses The mask cleaner performs vacuum suction, and the suction force of the mask cleaner is measured.

In the screen printing machine according to the third aspect of the present invention, based on the first aspect, the suction force measuring device does not contain the suction port of the mask cleaner and the lower surface of the mask. In a state where the regions of the openings were in contact, the mask cleaner was subjected to vacuum suction, and the suction force of the mask cleaner was measured.

In the present invention, the suction force of the mask cleaner is measured and compared with a predetermined reference value. As a result, when the measured suction force of the mask cleaner is lower than the reference value, a notification is sent Since the predetermined notification operation is performed by the mask cleaner, the operator can accurately grasp the abnormal state generated on the mask cleaner and take appropriate countermeasures. Accordingly, it is possible to prevent the mask from being cleaned in a state where the suction force is insufficient, and it is possible to suppress the occurrence of printing defects on the substrate.

Description of drawings

Fig. 1 is the top view of the screen printing machine of one embodiment of the present utility model;

Fig. 2 is a front view of a screen printing machine according to an embodiment of the present invention;

Fig. 3 is a side view of a screen printing machine according to an embodiment of the present invention;

4 is a perspective view showing a mask and a substrate included in the screen printing machine according to an embodiment of the present invention;

5 is a block diagram showing a control system of a screen printing machine according to an embodiment of the present invention;

6 is a diagram showing the configuration of a mask cleaner included in the screen printing machine according to the embodiment of the present invention;

Fig. 7 is a flow chart showing the sequence of abnormality detection work performed by the screen printing machine according to an embodiment of the present invention;

Fig. 8(a) and (b) are explanatory diagrams of the abnormal detection operation performed by the screen printing machine according to an embodiment of the present invention;

9 is a flowchart showing the sequence of screen printing operations performed by the screen printing machine according to an embodiment of the present invention;

Fig. 10 (a), (b) is a diagram illustrating the execution sequence of the screen printing operation performed by the screen printing machine according to an embodiment of the present invention;

Fig. 11 (a), (b) is a diagram illustrating the execution sequence of the screen printing operation performed by the screen printing machine according to an embodiment of the present invention;

12 is a diagram illustrating a state in which a mask is cleaned by a mask cleaner included in the screen printing machine according to the embodiment of the present invention.

Mark description

1: screen printing machine

2: Substrate

2a: Electrode part

15: mask

15h: opening

17b: Scraper

18: Mask cleaner

20: Control device (notification control device)

32: Paper Parts

33a: Suction port

43: Flow meter (suction force measuring device)

44: Pressure gauge (attractive force measuring device)

45: Announcer

Pt: Paste

Detailed ways

Hereinafter, embodiments of the present invention will be described with reference to the drawings. The screen printing machine 1 shown in FIG. 1, FIG. 2 and FIG. 3 is a device for screen-printing paste Pt such as solder on the electrode portion 2a of the substrate 2. In addition to being equipped with a substrate loading conveyor 11 on the base 10, passing the substrate In addition to the substrate holding unit 13 and the substrate carrying out conveyor 14 that are moved by the holding unit moving mechanism 12, a mask 15 held above the substrate holding unit 13 in a horizontal posture is provided below the mask 15 to move freely. A camera unit 16 , a squeegee unit 17 movably provided above the mask 15 , and a mask cleaner 18 movably provided below the mask 15 are configured.

The substrate carrying conveyor 11 carries in the substrate 2 loaded from the outside of the screen printer 1 and delivers it to the substrate holding unit 13 . The substrate unloading conveyor 14 unloads the substrate 2 received from the substrate holding unit 13 to the outside of the screen printer 1 . That is, the substrate 2 is conveyed in the order of the substrate carrying conveyor 11 , the substrate holding unit 13 , and the substrate carrying conveyor 14 , and the moving direction of the substrate 2 is defined as the X-axis direction (the left-right direction viewed from the operator OP). In addition, the horizontal in-plane direction perpendicular to the X-axis direction is defined as the Y-axis direction (the front-rear direction viewed from the operator OP), and the up-down direction is defined as the Z-axis direction.

In FIG. 4 , the mask 15 has a thin metal mask main body 15 a made of a rectangular plate member, and a resin (for example, polyester) sheet member 15 b attached to the outer edge of the mask main body 15 a. and a rectangular frame-shaped mask frame 15w supporting the outer edge of the sheet member 15b, and a plurality of openings 15h corresponding to the electrode portions 2a of the substrate 2 are provided in the center of the mask main body 15a. In this embodiment, the region including the central portion of the opening 15h in the mask main body 15a is referred to as the opening region R1, and the region not including the peripheral portion of the opening 15h (the region indicated by hatching in FIG. 4 ) is referred to as R1. Non-aperture region R2.

In FIG. 4 , two substrate-side marks 2m are provided at a pair of corner positions on the substrate 2, and two mask-side marks 15m are provided on the mask main body 15a corresponding to the two substrate-side marks 2rn. When the substrate 2 is lifted up and the substrate 2 is brought into contact with the mask 15 in a state where the two substrate-side marks 2 m and the two mask-side marks 15 m face up and down, the electrode portion 2 a of the substrate 2 and the opening provided in the mask 15 The part 15h is in the same state.

In FIG. 2 and FIG. 3 , the substrate holding unit 13 has a base portion 13a that can be raised and lowered relative to the base 10, and a substrate transfer conveyor 13b that is installed on the base portion 13a and transfers the substrate 2 along the X-axis direction (see also 1), a substrate lifting cylinder 13d that lifts and lowers the substrate 2 conveyed by the substrate conveying conveyor 13b and positioned at a predetermined substrate holding position while being supported from below by the lower supporting member 13c, and a substrate lifting cylinder 13d that lifts the substrate 2 up and down. The raised substrate 2 is configured by sandwiching and holding a pair of clamping members 13e (also refer to FIG. 1 ) from the Y-axis direction.

In FIG. 5, the operation control of the substrate carrying-in conveyor 11, the substrate carrying conveyor 13b of the substrate holding unit 13, the substrate carrying-out conveyor 14, the operation control of the substrate elevating cylinder 13d, and the mechanism for driving the pair of clamping members 13e are not shown. Control of the clamping operation of the substrate 2 by the clamping member driving mechanism 13A constituted by an actuator or the like shown above is performed by the control device 20 included in the screen printing machine 1 .

The substrate holding unit moving mechanism 12 is composed of an XYZ manipulator, and is controlled by the control device 20 to move the substrate holding unit 13 in the horizontal plane (including rotation) and at the same time move the substrate holding unit 13 in the up-down direction (Z-axis direction) ( Figure 5).

In FIGS. 1 and 3 , the camera unit 16 includes a downward imaging camera 16 a whose imaging field of view is directed downward, and an upper imaging camera 16 b whose imaging field of view is directed upward. The moving mechanism 16M ( FIG. 5 ) moves the lower part of the mask 15 in the horizontal plane direction.

In FIG. 5 , the operation control of the above-mentioned camera and washer moving mechanism 16M is controlled by the control device 20 . In addition, the image data obtained by the imaging operation of the lower imaging camera 16 a and the image data obtained by the imaging operation of the upper imaging camera 16 b are sent to the control device 20 .

In FIG. 1 , FIG. 2 and FIG. 3 , the squeegee unit 17 has a base that can move freely in the Y-axis direction above the mask 15 by the operation of the squeegee unit moving mechanism 17M composed of a horizontal orthogonal coordinate table. The lower portion 17a has two scrapers 17b facing each other in the Y-axis direction, and each scraper 17b is independently raised and lowered below the base portion 17a by two pneumatic cylinders 17c attached to the base portion 17a. Operation control of the squeegee unit moving mechanism 17M and lift control of the squeegee 17b based on the operation of each pneumatic cylinder 17c are performed by the control device 20 ( FIG. 5 ).

In FIG. 6 , the mask cleaner 18 has two rotating bodies 31a and 31b (rotating body 31a on the draw-out side and rotating body 31b on the winding-up side) installed rotatably around the X-axis in a housing 30 , and hangs The paper member 32 between the two rotating bodies 31a, 31b and the nozzle 33 extending in the X-axis direction protruding upward from the paper member 32 are constituted. By driving the two rotating bodies 31a, 31b in the same direction and By advancing the paper member 32 in the Y-axis direction, the cleaning portion of the paper member 32 located on the upper surface of the nozzle 33 can be renewed. At the upper end of the mouth part 33, a suction port which abuts the lower surface of the mask 15 from below via the paper member 32 is provided. That is, the mask cleaner 18 of the present embodiment has a structure in which the paper member 32 is suspended from the suction port 33a at the upper end.

In FIG. 6 , the mouth 33 of the mask cleaner 18 is connected to a vacuum line 41 connected to a vacuum source 40 , and the opening and closing of the vacuum line 41 by a vacuum suction control valve 42 controlled by the control device 20 controls the operation of the vacuum line 41 . The suction port 33a of the mouth part 33 applies vacuum suction. A flow meter 43 for measuring the flow rate of air passing through the vacuum line 41 and a pressure gauge 44 for measuring the pressure in the vacuum line 41 are connected to the vacuum line 41 . The flow rate value of the air in the vacuum line 41 measured by the flow meter 43 and the pressure value in the vacuum line 41 measured by the pressure gauge 44 are respectively input to the control device 20 ( FIG. 5 ).

The mask cleaner 18 operates in the Y-axis direction together with the camera unit 16 by the camera and cleaner moving mechanism 16M whose operation is controlled by the control device 20 . The operation of moving the paper member 32 and renewing the cleaning part of the paper member 32 hung on the upper surface of the nozzle 33 is performed by the control device 20 operating the rotating body driving motor 31A ( FIG. 5 ) that drives the two rotating bodies 31 a and 31 b. to proceed.

In this screen printer 1 , before the screen printing operation is performed on the substrate 2 , the abnormality detection operation of the mask cleaner 18 is executed in the procedure shown in the flowchart of FIG. 7 . In the abnormality detection operation of the mask cleaner 18 , the control device 20 first opens the vacuum line 41 through the vacuum suction control valve 42 while the mask cleaner 18 is not in contact with the mask 15 ( FIG. 8( a )). , the mask cleaner 18 is vacuum suctioned, and the flow rate of the air passing through the vacuum line 41 is measured by the flow meter 43 (step ST1 shown in FIG. 7 ). Moreover, after the control device 20 measures the flow rate of the air passing through the vacuum line 41 by the flow meter 43, it compares the measured flow rate of the air passing through the vacuum line 41 with a predetermined reference value (shown in FIG. Step ST2), as a result, when the measured air flow rate is above the reference value, the control device 20 makes the notification device 45 connected to the control device 20 (for example, a display device. FIG. It is reported that the flow rate of the air passing through the inside is normal (step ST3 shown in FIG. 7 ). On the other hand, when the measured air flow rate is lower than the reference value, the control device 20 causes the notification device 45 to report that the flow rate of the air passing through the vacuum line 41 is abnormal (step ST4 shown in FIG. 7 ). ).

After the control device 20 finishes checking the flow rate of the air passing through the vacuum line 41, it controls the operation of the camera and the cleaner moving mechanism 16M so that the mask cleaner 18 is brought into contact with the non-opening region R2 of the mask 15 ( Fig. 8(b). Step ST5 shown in Fig. 7). Then, the vacuum line 41 is opened by the vacuum suction control valve 42 , the mask cleaner 18 is vacuum-suctioned, and the pressure in the vacuum line 41 is measured by the pressure gauge 44 (step ST6 shown in FIG. 7 ).

After the control device 20 measures the pressure in the vacuum line 41 with the pressure gauge 44, it compares the measured pressure in the vacuum line 41 with a predetermined reference value (step ST7 shown in FIG. 7 ). When the measured pressure is equal to or higher than the reference value, the control device 20 causes the notification device 45 to report that the pressure in the vacuum line 41 is normal (step ST8 shown in FIG. 7 ). On the other hand, when the measured pressure is lower than the reference value, the control device 20 causes the notification device 45 to report that the pressure in the vacuum line 41 is abnormal (step ST9 shown in FIG. 7 ).

In this way, the control device 20 of the present embodiment measures the suction force of the mask cleaner 18 (the flow rate of the air passing through the vacuum line 41 or the flow rate of the vacuum line 41 pressure inside) is compared with a predetermined reference value, and as a result, when the suction force of the mask cleaner 18 measured by the suction force measuring device is lower than the reference value, the notification device 45 determines The notification control device of the notification operation works.

In such an abnormality detection operation of the mask cleaner 18, when the notifier 45 reports that the flow rate of air passing through the vacuum line 41 is abnormal or the pressure in the vacuum line 41 is abnormal, the operator OP Take appropriate countermeasures. Specifically, the abnormal (low) flow rate of air passing through the vacuum line 41 is considered to be that the paper member 32 itself is clogged, and the residue of the paste Pt passing through the holes of the paper member 32 adheres to the mask cleaning. The inside of the mask cleaner 18 or the inside of the vacuum line 41 may be clogged. Therefore, when this message is reported, the paper member 32 is replaced or the inner wall of the air passage of the mask cleaner 18 is cleaned. In addition, it is considered that the cause of the abnormal (low) pressure in the vacuum line 41 is the breakage of the vacuum line 41 due to the change over time, and therefore, when this message is notified, the vacuum line 41 is repaired, replaced, etc. .

The control device 20 executes the screen printing operation according to the procedure shown in the flowchart of FIG. 9 after the above-mentioned abnormality detection operation (and necessary measures by the operator OP) is completed. When the control device 20 performs the screen printing operation, firstly, the substrate 2 loaded from the outside of the screen printing machine 1 is loaded by the substrate carrying conveyor 11, delivered to the substrate conveying conveyor 13b, and positioned at the above-mentioned predetermined working position. (Board loading process. Step ST11 shown in FIG. 9 ). Furthermore, the lifting of the substrate 2 by the substrate elevating cylinder 13d (arrow A shown in FIG. B) Holding the substrate 2 (substrate loading and holding step. Step ST12 shown in FIG. 9 . FIG. 10( a )).

After holding the substrate 2 as described above, the controller 20 controls the operation of the camera and cleaner moving mechanism 16M to move the camera unit 16 so that the upper shooting camera 16b is positioned directly below the mask side mark 15m provided on the mask 15. , to photograph the mask-side mark 15m while positioning the downward photographing camera 16a directly above the substrate-side mark 2m provided on the substrate 2 to photograph the substrate-side mark 2m (mark photographing process. Step ST13 shown in FIG. 9 ) .

After the control device 20 has photographed the substrate-side marks 2m and the mask-side marks 15m in step ST13, it moves the substrate holding unit 13 in the horizontal direction so that the substrate-side marks 2rn and the mask-side marks 15m face up and down. The alignment of the board|substrate 2 with respect to the horizontal in-plane direction of the mask 15 is performed (alignment process: step ST14 shown in FIG. 9).

After the alignment of the substrate 2 with respect to the mask 15 is completed, the control device 20 controls the operation of the substrate holding unit moving mechanism 12 to raise the substrate holding unit 13 relative to the base 10 (arrows shown in FIG. 10( b ) Mark C1), make the upper surface of the substrate 2 held by a pair of clamping members 13e contact the lower surface of the mask 15, thereby making the substrate 2 contact the mask 15 (contact process. Step ST15 shown in FIG. 9. FIG. 10 ( b)) Thereby, the electrode part 2a on the board|substrate 2 and the opening part 15h of the mask 15 will be in the same state.

After the control device 20 brings the substrate 2 into contact with the mask 15, the squeegee 17b is applied to transfer the paste Pt previously supplied on the mask 15 to the electrode portion 2a of the substrate 2 (transfer process. FIG. 9 ). step ST16 shown). Specifically, this squeegee coating is performed by moving one of the two squeegee blades 17b provided in the squeegee unit 17 downward (arrow D1 shown in FIG. The base part 17a is moved in the horizontal direction in the state where the upper surface abuts (arrow mark E shown in FIG. 11( a )). As a result, the scraper 17b slides on the mask 15, and the paste Pt on the mask 15 is scraped together by the scraper 17b, pushed into the opening 15h of the mask 15, and transferred to the electrode portion 2a of each substrate 2. superior.

That is, in the present embodiment, the paste Pt is transferred onto the substrate 2 through the opening 15 h of the mask 15 by sliding the squeegee 17 b on the mask 15 in contact with the substrate 2 .

After the control device 20 transfers the paste Pt onto the electrode portion 2 a of the substrate 2 , the squeegee 17 b in contact with the mask 15 moves upward (arrow D2 shown in FIG. 11( b )), and holds the substrate The unit moving mechanism 12 operates to lower the substrate holding unit 13, thereby separating the substrate 2 from the mask 15 (arrow C2 shown in FIG. Step ST17. Fig. 11(b)). As a result, the paste Pt remains on the electrode portion 2 a of the substrate 2 , and the paste Pt is printed on the substrate 2 .

The control device 20 controls the operation of the substrate holding unit 13 to release the holding of the substrate 2 after the mold release is performed (hold release process: step ST18 shown in FIG. 9 ). Specifically, the release of the holding of the substrate 2 is performed in such a manner that the control device 20 operates the substrate elevating cylinder 13 d to move the substrate 2 after opening the clamping member 13 e by controlling the operation of the clamping member driving mechanism 13A. Descend to lower both ends of the substrate 2 onto a pair of substrate transfer conveyors 13b (see FIG. 3 ).

After releasing the holding of the substrate 2, the control device 20 operates the substrate holding unit moving mechanism 12 to move the substrate holding unit 13 in the horizontal plane, and after adjusting the direction of the substrate conveying conveyor 13b, the substrate conveying conveyor 13b and the substrate The unloading conveyor 14 operates to unload the substrate 2 to the outside of the screen printing machine 1 (substrate unloading process: step ST19 shown in FIG. 9 ).

After the control device 20 carries out the carrying out of the substrate 2 (in parallel with the carrying out of the substrate 2 ), the mask 15 is cleaned by the mask cleaner 18 (mask cleaning step; step ST20 shown in FIG. 9 ). In this cleaning of the mask 15 , the control device 20 first controls the operation of the camera and the washer moving mechanism 16M so that the cleaned portion of the paper member 32 comes into contact with the lower surface of the mask 15 . Then, the operation control of the vacuum suction control valve 42 is performed so that the nozzle 33 is vacuum suctioned and the mask cleaner 18 is moved in the Y-axis direction (arrow F shown in FIG. 12 ). As a result, the paste Pt (paste Pt residue) adhering to the lower surface of the mask 15 is wiped off by the paper member 32 , and the lower surface of the mask 15 is cleaned, thereby completing the screen printing operation for each substrate 2 .

Thus, in the present embodiment, the mask cleaner 18 moves relative to the lower surface of the mask 15 while performing vacuum suction from the suction port 33a while pressing the paper member 32 against the lower surface of the mask 15 to perform masking. Cleaning under the mold. In addition, the cleaning of the mask 15 by the mask cleaner 18 may be performed for each substrate 1 , but may also be performed for predetermined predetermined sheets.

As described above, the abnormality detection method of the screen printer 1 (mask cleaner 18 ) according to the present embodiment includes a suction gauge that vacuum-suctions the mask cleaner 18 and measures the suction force of the mask cleaner 18 . measurement process (step ST1 and step ST6); compare the suction force of the mask cleaner 18 measured by the suction force measurement process with a predetermined reference value (step ST2 and step ST7), and as a result, the When the suction force of the mask cleaner 18 is lower than the reference value, the notification process of causing the notification device 45 to perform a predetermined notification operation (step ST4 and step ST9 ).

More specifically, in the suction force measurement process of step ST1, the mask cleaner 18 is vacuum-suctioned in a state where the suction port 33a of the mask cleaner 18 is not in contact with the mask 15, and the mask cleaner 18 is measured. 18 suction force (the flow rate of air passing through the vacuum line 41), in the suction force measurement process of step ST6, when the suction port 33a of the mask cleaner 18 is connected to the lower surface of the mask without the opening 15h The mask cleaner 18 was vacuum-suctioned while the regions (non-aperture region R2 ) were in contact, and the suction force of the mask cleaner 18 (the pressure in the vacuum line 41 ) was measured.

As described above, in the screen printing machine 1 (abnormality detection method of the screen printing machine 1 ) of this embodiment, the suction force of the mask cleaner 18 is measured and compared with a predetermined reference value. As a result, When the measured suction force of the mask cleaner 18 is lower than the reference value, the notifier 45 performs a predetermined notification operation, so that the operator OP can accurately grasp the abnormal state generated by the mask cleaner 18. and take appropriate countermeasures. Thereby, it is possible to prevent cleaning of the mask 15 in a state where the suction force is insufficient, and it is possible to suppress occurrence of printing failure on the substrate 2 .

Industrial availability

To provide a screen printing machine and an abnormality detection method of the screen printing machine in which an operator can accurately grasp an abnormal state generated in a mask cleaner and take appropriate countermeasures.

Claims (3)

1. screen process press, it possesses: mask, it has the peristome with the corresponding setting of configuration of the electrode part of substrate; Scraper plate, it is by with slip above the described mask of described substrate contacts and cream is transferred on described substrate via the peristome of described mask; The mask washer, under its state below the paper parts being pressed against described mask on one side from attract mouth carry out vacuum attraction carry out with respect to relatively moving below described mask on one side described mask below cleaning, it is characterized in that possessing:

The attraction measuring device, it makes described mask washer carry out the attraction of vacuum attraction and the described mask washer of instrumentation;

Report control device, it will be compared by the attraction of the described mask washer of described attraction measuring device instrumentation and predetermined a reference value, its result is in the situation that make lower than described a reference value the action of reporting that alarm device stipulates by the attraction of the described mask washer of described attraction measuring device instrumentation.

2. screen process press as claimed in claim 1, is characterized in that,

Described attraction measuring device makes described mask washer carry out vacuum attraction described attraction that makes described mask washer under mouthful state that does not contact described mask, the attraction of the described mask washer of instrumentation.

3. screen process press as claimed in claim 1, is characterized in that,

Described attraction measuring device make described mask washer described attract mouthful with state that the zone that does not contain described peristome below described mask contacts under, make described mask washer carry out vacuum attraction, the attraction of the described mask washer of instrumentation.

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