CN201926504U - Laser power monitoring device - Google Patents
Laser power monitoring device Download PDFInfo
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- CN201926504U CN201926504U CN2010206381752U CN201020638175U CN201926504U CN 201926504 U CN201926504 U CN 201926504U CN 2010206381752 U CN2010206381752 U CN 2010206381752U CN 201020638175 U CN201020638175 U CN 201020638175U CN 201926504 U CN201926504 U CN 201926504U
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Abstract
The utility model provides a laser power monitoring device, which comprises a total reflection mirror used for splitting laser radiated by a laser source. An incidence surface of the total reflection mirror is coated with an appropriate reflecting film, so that most of incident beams are reflected for normal operation, and a small amount of the incident beams are transmitted and led to a luminous power detection element for conducting power detection. Preferably, the laser power monitoring device further comprises a neutral absorption type attenuation piece and a focusing lens, so that the monitoring result is more accurate, and meanwhile, a detection system is simplified, and the cost is lowered.
Description
Technical field
The utility model relates to a kind of laser power monitor device, especially a kind of device that is used for monitoring in real time the power of the laser that is sent by lasing light emitter.
Background technology
Laser is meant the radiation that the light amplification of stimulated emission produces, and has numerous advantages such as directionality is good, brightness is high, energy density is big.Therefore, laser all is widely used in industries such as multiple industry such as processing and manufacturing, medical science, printings.Should various fields to the job requirement of the equipment that uses laser, need be in application process as the case may be the power to laser regulate, this at first monitors the power of laser with regard to requiring.
In existing laser power monitor device, in light channel structure, adopted light beam splitting eyeglass, utilize it that the laser that lasing light emitter produced is divided into two-way, the one tunnel offers laser equipment is used for operate as normal, and another road is used to carry out power monitoring.In order not influence the work efficiency of laser equipment, the amount of laser of wishing to be used to carry out power monitoring usually is low as much as possible.Yet, because cost and technical restriction, the splitting ratio of light beam splitter be difficult to usually to reach one gratifying, for example be 99: 1 ratio.This has just caused the use energy of one side laser beam low excessively, reduced the service efficiency of laser equipment, it is excessive to be used to the beam energy that detects on the other hand, and it is complicated more to make that the power monitoring system has to, and this has just improved the production cost of power monitoring system.
In addition, in existing laser power monitor device, the output mode of laser is limited to some extent, but cause the power monitoring value inaccurate owing to the output facula pattern can change in time.
The utility model content
At the above-mentioned problems in the prior art, the utility model aims to provide a kind of laser power monitor device, and it can only provide very that the incident laser amount of small scale is used for power monitoring, the accuracy rate height of detection.Another purpose of the present utility model provides a kind of laser power monitor device, and it has good repeatability, can simplify the photodetection mode.In addition, it would also be desirable to provide a kind of laser power monitor device, it can solve the problem that the pattern instability is brought to detection in the laser acquisition, and one-piece construction is simple simultaneously.
Provide a kind of laser power monitor device according to the utility model, comprise the completely reflecting mirror that is used to receive the laser that sends by lasing light emitter, the incidence surface of described completely reflecting mirror is coated with reflectance coating, make the part of incident beam be reflected and be used for operate as normal, and another part is guided to the luminous power detecting element to carry out power monitoring by transmission.
According to the utility model, reflectance coating is chosen to make at least 99% in the incident beam to be reflected.Preferably, reflectance coating is chosen to make at least 99.5% in the incident beam to be reflected.In one embodiment, this reflectance coating is optical maser wavelength single-point highly reflecting films.The material of reflectance coating can be that medium, metallic compound or other reach the material that high reflectance requires.The substrate surface of completely reflecting mirror is through polishing, and material can be K9 glass or crown glass.
Like this, because the high reflectance of completely reflecting mirror, the work laser beam is that the energy of the energy of reflect beams of laser light and incident beam is basic identical, makes the work efficiency of laser equipment can remain on very high level; In addition, a few light beams of penetration mirror is that transmitted light beam is directed being used to monitor in real time.Thus, completely reflecting mirror can reach beam split purpose at high proportion.Compare with the light beam splitter that adopts performance of the same race, the cost of laser power monitor device of the present utility model has obtained great reduction, and structure is also simplified simultaneously.
In addition, laser power monitor device of the present utility model is installed between lasing light emitter and the laser equipment, therefore just can carry out real-time monitoring to laser power during the laser equipment operate as normal, can not bring a bit influence to the operate as normal of laser equipment.
According to an embodiment of the present utility model, the laser power real-time monitoring device also comprises the neutral absorption-type attenuator that is arranged between completely reflecting mirror and the luminous power detecting element.On the one hand, particularly for powerful laser power monitor, even if having only 1% or even 0.5% light beam by transmission, specimen beam is that the energy of transmitted light beam is still quite big, increase the neutral absorption-type attenuator sampling laser beam power of decaying quantitatively, be convenient to power monitoring, and can prolong the serviceable life of subsequent element.On the other hand, this neutrality absorption-type attenuator is decayed to light in the mode that absorbs, and can reduce parasitic light, than adopting reflection way to come light is decayed, the utility model can make that power monitoring is more accurate, and light channel structure is further optimized simultaneously.According to the utility model, can use powerful single neutral absorption-type attenuator, or the combination of the neutral absorption-type attenuator of a plurality of low ranges.
According to another embodiment of the present utility model, the laser power monitor device also comprises the condenser lens that is arranged between neutral absorption-type attenuator and the luminous power detecting element, is used for specimen beam is gathered into the minor diameter hot spot.Can eliminate zlasing mode thus and change the de-stabilising effect that laser power monitor is brought.Condenser lens can be fixed with fixture such as pressure ring.By used condenser lens before the luminous power detecting element, the problem that makes the influence of unsettled zlasing mode survey is solved, and the laser of all patterns all is focused photodetection face, reaches the effect of surveying fully.This formed assembly of sequential combination by completely reflecting mirror, neutral absorption-type attenuator and condenser lens three especially can be realized optimum monitoring effect.
In one embodiment, the luminous power detecting element can be an optical detection device.Its object lesson is silicon photocell or silicon diode, can also be other various devices that carry out photodetection.The utility model adopts silicon photocell just can finish the collection of the physical samples of detection data, simplifies the photodetection mode.In one embodiment, photodetection dimensioned area is less than 1 square centimeter.Optical detection device is transferred to the photo-signal treatment circuit with detection signal through electric wire, thereby laser power is demarcated.
In a specific embodiment, become to comprise the lens barrel formula structure of first cylindrical shell and second cylindrical shell according to laser power monitor device construction of the present utility model, wherein said second cylindrical shell is constructed to be permeable to be inserted in described first cylindrical shell.This lens barrel formula structure adopts the materials processing of surface oxidation treatment to form, and forms parasitic light to avoid light in lens barrel, reduces the interference to photo detector signal, stablizes output signal, thereby obtains stable monitoring performance.
In an example, first cylindrical shell is configured to comprise along its longitudinal axis and extends first inner chamber that is used to be inducted into irradiating light beam and transmitted light beam, and is communicated with and is used for second inner chamber of direct reflected light bundle in the mode of angulation α with described first inner chamber.Second cylindrical shell is constructed to be permeable to be inserted in first inner chamber.Described neutral absorption-type attenuator, condenser lens and luminous power detecting element are installed in the inner chamber of described second cylindrical shell.The central axis of the inner chamber of described second cylindrical shell is parallel with the central axis of first inner chamber of described first cylindrical shell but do not overlap.The end face and the angled α of first inner chamber/2 that are used for being inserted into first inner chamber of second cylindrical shell, and completely reflecting mirror is installed in this end face.By this plug-type structure, feasible very compact according to the structure of laser power monitor device of the present utility model, assemble also fairly simple.
According to laser power real-time monitoring device of the present utility model, adopt completely reflecting mirror to replace the light beam splitter, preferably also can increase neutral absorption-type attenuator and condenser lens, making the work laser beam energy compare substantially with the energy of incident laser light beam remains unchanged, simplified detection system simultaneously, and simplified production and debug process, reduced cost, can obtain good linearty.Simultaneously, the output facula pattern of this power monitoring mode and lasing light emitter is irrelevant, therefore still can carry out power monitoring exactly under the situation that does not have pattern to require to the output laser facula.In addition, can be installed in easily on the various instrument and equipments that needs monitor in real time to laser power, can during the laser equipment operate as normal, monitor in real time accurately laser power according to laser power monitor device of the present utility model.
Description of drawings
Accompanying drawing is used to provide further understanding of the present utility model, and constitutes the part of instructions, is used from explanation the utility model with embodiment one of the present utility model, but does not constitute any restriction to the utility model embodiment.Identical in the accompanying drawings member illustrates with identical Reference numeral, wherein:
Fig. 1 is the light path principle figure according to laser power detecting device of the present utility model;
Fig. 2 has shown the one-piece construction according to laser power detecting device of the present utility model; With
Fig. 3 has shown the result who uses twice laser power demarcation being carried out according to laser power detecting device of the present utility model.
Embodiment
Below in conjunction with accompanying drawing preferred embodiment of the present utility model is described, should be appreciated that preferred embodiment described herein only is used for description and interpretation the utility model, is not limited to the utility model.
Fig. 1 has shown the index path according to laser power detecting device of the present utility model.As shown in the figure, laser beam 2 is sent from laser-emitting face 1, at first arrives completely reflecting mirror 3.Completely reflecting mirror 3 is coated with one deck reflectance coating 9 on its plane of incidence, it is chosen to make major part in the laser beam 2 to be reflected and has only sub-fraction by transmission.Wherein, folded light beam 4 is exported to laser equipment and is used for operate as normal, and transmitted light beam 5 is used to offer optical detection device 8 to carry out power monitoring.
In one embodiment, reflectance coating 9 is optical maser wavelength single-point highly reflecting films, and its material can adopt medium, metallic compound or other can reach the membrane structure of high reflectance requirement.Advantageously, reflectance coating 9 should make the reflectivity of completely reflecting mirror 3 reach more than 99%, and is preferred more than 99.5%, so that guarantee that the energy of folded light beam 4 is substantially the same with the energy of incident beam 2.In a specific embodiment, reflectance coating 9 for example can be by employed reflectance coating (reflectivity R＞99.5%@532nm in the GCC-101042 type high reflective mirror of The Institute of Opto-Electronics of Daheng New Epoch Technology, Inc.'s manufacturing, 45 ° of incident angles, dielectric film).The substrate surface of completely reflecting mirror 3 can be K9 glass or the crown glass through polishing.
According to the utility model, adopt to apply the beam split at high proportion that reflectance coating is realized completely reflecting mirror 3, therefore just do not need the light beam splitter of use cost costliness.Simultaneously, this coating reflectance coating implements very easy, safeguards also very simple.In addition, utilize the design of completely reflecting mirror 3 to make light channel structure very simple.
As shown in the figure, completely reflecting mirror 3 is arranged to incident beam angled.This angle can be selected according to the needs of concrete application.In the illustrated embodiment, completely reflecting mirror 3 is arranged to become 45 to spend with incident beam.Like this, folded light beam 4 will penetrate perpendicular to incident beam 2.
Arrive neutral absorption-type attenuator 6 after the transmitted light beam 5.This neutrality absorption-type attenuator 6 is provided with the mode that is used for to absorb light is decayed, than the prior art that light is decayed with reflective attenuator, can reduce parasitic light to a great extent, make the utility model can more accurately monitor laser power.In addition, the setting of neutral absorption-type attenuator 6 is more favourable for high power laser, even if because have only 1% or even 0.5% light beam by transmission, its energy is also very big.In the embodiment shown in fig. 1, the quantity of attenuator is 1, and the decay multiplying power is 1000.Certainly, also can adopt the combination of a plurality of attenuators, to realize required decay multiplying power.This can by those skilled in the art as the case may be needs and suitably select.
Transmitted light beam 5 is leaving neutral absorption-type attenuator 6 back arrival condenser lenses 7.Condenser lens 7 outputs to optical detection device 8 after transmitted light beam being focused into the hot spot of a minor diameter, so that improve detection accuracy further.In one embodiment, this optical detection device is a silicon photocell.8 pairs of beam energies of optical detection device detect, the output photo-signal.This photo-signal is transferred to the photocurrent treatment circuit through electric wire, thereby laser power is demarcated.The value of laser power shows on the display (not shown).
Following table 1 and 2 has shown the data result that uses twice laser power demarcation being carried out according to laser power monitor device of the present utility model.This result is also shown among Fig. 3.
The measurement data of table 1 laser power demarcation for the first time
The measurement data of table 2 laser power demarcation for the second time
Above-mentioned table 1, table 2 and Fig. 3 show to have good linearty and measuring repeatability aspect the monitoring according to laser power detection device of the present utility model, prove that it can solve problem unstable in the laser power measurement, poor accuracy.This just provides effective experiment basis for monitoring laser power in real time.Compare with existing public technology, the utlity model has good novelty, brought significant technique effect.
Introduce structure below in conjunction with Fig. 2 according to a specific embodiment of laser power detection device 50 of the present utility model.This laser power detection device 50 is configured to generally cylindrical body shape, promptly so-called lens barrel formula structure.In this specific embodiment, laser power detection device 50 comprises two parts, i.e. first cylindrical shell 10 and second cylindrical shell 20.
First cylindrical shell 10 is configured to hollow cylinder, wherein defines two inner chambers that intersect vertically 11,12.As shown in the figure, first inner chamber 11 is parallel to the longitudinal axis extension of first cylindrical shell 10.Lasing light emitter 40 can join in first end 14 of first inner chamber 11, and the laser that makes lasing light emitter 40 be sent is parallel to its axis transmission at first inner chamber 11.Second inner chamber 12 is arranged perpendicular to first inner chamber 11, will be along its axis transmission in second inner chamber 12 by folded light beam 4 (see figure 1)s that completely reflecting mirror 3 is reflected.
Second cylindrical shell 20 also is configured to hollow cylinder, and its first end 21 is arranged to the inclined-plane.In embodiment as shown in Figure 2, the surface of first end 21 is arranged to become miter angle with the longitudinal axis of second cylindrical shell 12.The external diameter of first end 21 of second cylindrical shell 20 is chosen to the internal diameter of second end 15 of first cylindrical shell 10, promptly the diameter of first inner chamber 11 is suitable, thereby makes that first end 21 of second cylindrical shell 12 can closely join in first inner chamber 11 of first cylindrical shell 10 when assembling.Second cylindrical shell 20 also comprises the flange of being located on the periphery 23, is used for being bonded on when mounted second end, 15 places of first cylindrical shell 10.Securing members such as screw can be set so that first cylindrical shell 10 and second cylindrical shell 20 are linked together at this joint.Certainly, other connected mode also belongs in the scope of the present utility model.For example, for saving the flange 23 on second cylindrical shell 20 for the purpose of the simplified design.At this moment, can on the periphery of first cylindrical shell 10 and second cylindrical shell 20, through hole and threaded hole be set respectively, first cylindrical shell 10 and second cylindrical shell 20 be linked together with screw.
On the end face of first end 21 of second cylindrical shell 12, completely reflecting mirror 3 as shown in Figure 1 has been installed, has been used for most incoming laser beams 2 are reflexed to second inner chamber 12 of first cylindrical shell 10.Because the setting of the reflectance coating 9 on the completely reflecting mirror 3, a spot of laser will enter into the inner chamber 25 of second cylindrical shell 12 through completely reflecting mirror 3.This part laser is transmitted light beam 5 as shown in Figure 1.In one example, completely reflecting mirror 3 can be fastened on the end face of first end 21 by gland 26.
Need to prove, the longitudinal axis of the inner chamber 25 of second cylindrical shell 12 should be arranged to and the longitudinal axis of first inner chamber 11 of first cylindrical shell 10 between have a side-play amount P.This is that therefore, above-mentioned side-play amount P should be chosen as the skew that equals between incident beam 2 and the transmitted light beam 5 because have a skew between the formed transmitted light beam 5 after incident beam 2 and the process completely reflecting mirror 3.
The inner chamber 25 of second cylindrical shell 12 is divided into the part of two different-diameters by step 32.Particularly, the diameter of the first of the close completely reflecting mirror 3 of inner chamber 25 is less than its diameter away from the second portion of completely reflecting mirror 3.Neutral absorption-type attenuator 6 is fixed on the step 32 by attenuator pressure ring 28.As shown in the figure, attenuator pressure ring 28 is provided with external thread, is used for the screw-internal thread fit with the second portion of inner chamber 25.
Similarly, the inner chamber of attenuator pressure ring 28 is divided into the part of two different-diameters equally by step 34, and it is fixed on condenser lens 7 on the step 34 by condenser lens pressure ring 30.Equally, condenser lens pressure ring 30 is provided with external thread, is used for the screw-internal thread fit with the inner chamber of attenuator pressure ring 28.
Optical detection device gland 18 has been installed at second end, 22 places at second cylindrical shell 20.One end of gland 18 is hollow, and periphery and interior week all be provided with screw thread.Wherein, the screw-internal thread fit of the second portion of the external thread of gland 18 and inner chamber 25 makes gland 18 can be installed in second cylindrical shell 20.
In a similar fashion, in gland 18, installed optical detection device mount pad 16, optical detection device 8 and block the ring 24.Wherein, block ring 24 and be provided with external thread, its internal thread with gland 18 matches, thereby optical detection device 8 and mount pad 16 are fixed in the gland 18.
As from the foregoing, attenuator pressure ring 28 and gland 18 all are provided with internal and external screw thread simultaneously.Like this, on the one hand they can match with the internal thread of second cylindrical shell 20 by external thread and be installed in second cylindrical shell 20, on the other hand also can by internal thread with block encircle 24 and the external thread of condenser lens pressure ring 30 match and corresponding element be installed in their inside.This thread matching structure makes it possible to easily regulate the distance between the elements such as neutral absorption-type attenuator 6, condenser lens 7 and optical detection device 8.
As mentioned above, can realize a kind of very compact structure, help design of miniization according to laser power monitor device 50 of the present utility model.In addition, also very simple according to the assembling of laser power monitor device 50 of the present utility model, reduced assembly cost.
Though the utility model is described, under the situation that does not break away from scope of the present utility model, can carries out various improvement and can replace wherein parts to it with equivalent with reference to preferred embodiment.The utility model is not limited to disclosed specific embodiment in the literary composition, but comprises all technical schemes in the scope that falls into claim.
Claims (9)
1. laser power monitor device, comprise the completely reflecting mirror that is used to receive the laser that sends by lasing light emitter, the incidence surface of described completely reflecting mirror is coated with reflectance coating, wherein the part of incident beam is reflected and is used for operate as normal, and another part is carried out power detection by transmission to guide to luminous power detecting element place.
2. monitoring device as claimed in claim 1 is characterized in that, is provided with neutral absorption-type attenuator between described completely reflecting mirror and described luminous power detecting element.
3. monitoring device as claimed in claim 2 is characterized in that, is provided with condenser lens between described neutral absorption-type attenuator and described luminous power detecting element.
4. as each described monitoring device in the claim 1 to 3, it is characterized in that described reflectance coating is optical maser wavelength single-point highly reflecting films.
5. as each described monitoring device in the claim 1 to 3, it is characterized in that described monitoring device is configured to comprise the lens barrel formula structure of first cylindrical shell and second cylindrical shell, wherein said second cylindrical shell is constructed to be permeable to be inserted in described first cylindrical shell.
6. monitoring device as claimed in claim 5, it is characterized in that, described first cylindrical shell is configured to comprise along its longitudinal axis and extends first inner chamber that is used to be inducted into irradiating light beam, and is communicated with and is used for second inner chamber of direct reflected light bundle in the mode of angulation α with the central axis of described first inner chamber.
7. monitoring device as claimed in claim 6 is characterized in that, being used for of described second cylindrical shell is inserted into central axis angulation α/2 of the end face and described first inner chamber of described first inner chamber, and described completely reflecting mirror is installed in the described end face.
8. monitoring device as claimed in claim 5 is characterized in that, described neutral absorption-type attenuator, condenser lens and luminous power detecting element are installed in the inner chamber of described second cylindrical shell.
9. monitoring device as claimed in claim 6 is characterized in that, the central axis of the inner chamber of described second cylindrical shell is parallel with the central axis of first inner chamber of described first cylindrical shell but do not overlap.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010206381752U CN201926504U (en) | 2010-12-02 | 2010-12-02 | Laser power monitoring device |
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| CN2010206381752U CN201926504U (en) | 2010-12-02 | 2010-12-02 | Laser power monitoring device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102062635A (en) * | 2010-12-02 | 2011-05-18 | 北京心润心激光医疗设备技术有限公司 | Laser power monitoring device |
| CN104251736A (en) * | 2014-09-18 | 2014-12-31 | 武汉凌云光电科技有限责任公司 | On-line power detection method and on-line power detection device for laser |
| CN104729689A (en) * | 2015-03-12 | 2015-06-24 | 西北核技术研究所 | High-energy laser spot on-line monitoring device based on reflector rear surface scattering |
| CN105444879A (en) * | 2015-12-16 | 2016-03-30 | 天津津芯微电子科技有限公司 | Laser energy acquisition method and laser energy acquisition device |
| CN105842832A (en) * | 2016-04-24 | 2016-08-10 | 湖南戴斯光电有限公司 | Attenuation device for measuring distribution of high-power laser focused light beam |
| CN106949961A (en) * | 2017-03-22 | 2017-07-14 | 精微视达医疗科技（武汉）有限公司 | Luminous power monitoring in real time and feedback method and device |
| CN111168234A (en) * | 2018-11-11 | 2020-05-19 | 上海三克激光科技有限公司 | Light beam shaping system and method |
| US11283232B2 (en) | 2019-11-28 | 2022-03-22 | Industrial Technology Research Institute | Power-measuring protection method and laser protection system |
-
2010
- 2010-12-02 CN CN2010206381752U patent/CN201926504U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102062635A (en) * | 2010-12-02 | 2011-05-18 | 北京心润心激光医疗设备技术有限公司 | Laser power monitoring device |
| CN104251736A (en) * | 2014-09-18 | 2014-12-31 | 武汉凌云光电科技有限责任公司 | On-line power detection method and on-line power detection device for laser |
| CN104729689A (en) * | 2015-03-12 | 2015-06-24 | 西北核技术研究所 | High-energy laser spot on-line monitoring device based on reflector rear surface scattering |
| CN105444879A (en) * | 2015-12-16 | 2016-03-30 | 天津津芯微电子科技有限公司 | Laser energy acquisition method and laser energy acquisition device |
| CN105842832A (en) * | 2016-04-24 | 2016-08-10 | 湖南戴斯光电有限公司 | Attenuation device for measuring distribution of high-power laser focused light beam |
| CN106949961A (en) * | 2017-03-22 | 2017-07-14 | 精微视达医疗科技（武汉）有限公司 | Luminous power monitoring in real time and feedback method and device |
| CN111168234A (en) * | 2018-11-11 | 2020-05-19 | 上海三克激光科技有限公司 | Light beam shaping system and method |
| CN111168234B (en) * | 2018-11-11 | 2024-06-21 | 上海三克激光科技有限公司 | Beam shaping system and method |
| US11283232B2 (en) | 2019-11-28 | 2022-03-22 | Industrial Technology Research Institute | Power-measuring protection method and laser protection system |
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