CN201699001U - Silicon Wafer Basket Transfer Line - Google Patents

Abstract

The utility model discloses a silicon wafer basket conveying line, which comprises a conveyor belt (1) for carrying silicon wafer baskets (2) and a control device for controlling running or stop of the conveyor belt (1). The advancing direction of the conveyor belt (1) is opposite to the feeding direction of a washer for washing silicon wafers. The silicon wafer basket conveying line can directly convey empty baskets back to an insertion zone so as to highly efficiently recycle the baskets, thereby reducing labor for pushing carts, saving manpower resources, also more beautifying a silicon wafer washing shop and more increasing space utilization efficiency. The silicon wafer basket conveying line further can reduce dirt of the insertion zone and dust entering a packaging zone, increase cleanness of the packaging zone and washing quality of the silicon wafers, further reduce possibility of basket deformation and damage, reduce purchasing quantity of the baskets, reduce unnecessary economical loss, and save expenses for enterprises.

Description

Silicon Wafer Basket Transfer Line

technical field

The utility model relates to the field of silicon chip production, in particular to a silicon chip material basket transmission line.

Background technique

In the production process of silicon wafers, silicon wafers need to be cleaned, and the cleaned silicon wafers can be applied to corresponding equipment.

The utensils carrying silicon wafer materials such as slide boxes and flower baskets can be called material baskets. Among them, the slide box is used to carry the workpieces of silicon wafers to be washed, and the flower basket is used to carry the workpieces that the slide boxes enter the water tank for cleaning operation. Put the silicon wafers to be washed into the material basket, put them into the automatic tank type silicon wafer cleaning machine together, and clean the silicon wafers after wire cutting in strict accordance with the set cleaning process.

In the existing silicon wafer cleaning process, there are generally narrow aisles between cleaning machines, and there are always many hand carts near the wafer inserting area and the silicon wafer packaging area, which are used to fully load the empty cassettes in the packaging area. And the empty flower baskets are pushed by manpower to the insertion area for reuse, and then the empty trolleys are pushed to the packaging area for loading. Therefore, both empty and full cars must be placed in the silicon wafer packaging area and silicon wafer insertion area to carry out frequent loading, pushing and emptying cycle operations to realize the reuse of empty baskets. As a result, a lot of space is occupied by trolleys, and the scene is particularly chaotic. A large number of empty flower baskets and empty slide boxes in the trolleys cannot be reused efficiently. The logistics cycle is very slow, as well as the waste of human resources and the destruction of the clean environment of the packaging area. .

This kind of trolley needs manpower to carry out repeated pushing operations, the logistics efficiency is low, a large amount of production space is occupied, and the working environment is deteriorated. As mentioned above, usually after a certain amount of empty cassettes and flower baskets are produced in the silicon wafer wrapping link after cleaning, the inserting link will send people to push the carts away, and then push the vacated carts back to the wrapping link. The cycle takes a long time, wastes production space and manpower, and reduces production efficiency.

At the same time, according to statistics, at least half of the slide cassettes in each cleaning line are idle in the trolley waiting to be transported to the insertion area for recycling, and the utilization rate of the slide cassettes is very low. Moreover, a large number of flower baskets and slide boxes need to be purchased to meet production needs. Moreover, the cost of the slide cassette is high and the hardness is high, and it is easy to be bumped, deformed or damaged during a large amount of stacking and pushing by a trolley, resulting in economic losses. In addition, the silicon wafer packaging area has high requirements for environmental sanitation, and the environment of the silicon wafer pre-cleaning and insertion area is poor, and it is difficult to meet the requirements. The dirt and dust in the wafer area are brought to the silicon wafer packaging area, which directly affects the quality of silicon wafer cleaning.

Therefore, how to improve the utilization efficiency of the material basket, reduce the cleaning cost of silicon wafers, and improve the cleaning quality of silicon wafers are technical problems to be solved by those skilled in the art.

Utility model content

The purpose of the utility model is to provide a silicon wafer basket transmission line for the transmission of silicon wafer baskets, the silicon wafer basket transmission line can effectively improve the utilization efficiency of the basket, reduce the cleaning cost of silicon wafers, and improve the cleaning quality.

In order to achieve the above object, the utility model provides a silicon chip basket transmission line, which includes a conveyor belt for carrying the silicon chip basket and a control device for controlling the operation or stop of the conveyor belt, and the forward direction of the conveyor belt is the same as The feeding direction of the cleaning machine for cleaning the silicon wafers is reversed.

Preferably, a guardrail perpendicular to the surface of the conveyor belt is also included.

Preferably, the width of the conveyor belt is equal to the width of the material basket.

Preferably, the length of the conveyor belt is slightly longer than the length of the washing machine.

Preferably, the conveyor belt is a long conveyor belt formed of polytetrafluoroethylene material.

Preferably, the control device includes a detection component that detects whether the material basket is fed into or leaves the conveyor belt, and a control component that receives a detection signal from the detection component and controls the conveyor belt to run or stop.

Preferably, the detection component includes a first detection component provided at the feeding port of the conveyor belt.

Preferably, the detection component includes a second detection component and a third detection component arranged in sequence along the advancing direction of the conveyor belt, and the third detection component is close to the discharge port of the conveyor belt.

Preferably, the detection component is specifically a photoelectric sensor.

The silicon chip basket transmission line provided by the utility model includes a conveyor belt for carrying the silicon chip basket, and a control device for controlling the running or stopping of the conveyor belt, wherein the forward direction of the conveyor belt is related to the cleaning of the silicon chip. The feeding direction of the machine is opposite. In this way, the operator can fill the empty basket with silicon wafers to be washed in the insertion area, and send them into the washing machine. After cleaning, they enter the wrapping area. On the silicon wafer basket transmission line provided by the utility model, since the silicon wafer basket transmission line is opposite to the feeding direction of the washing machine, the silicon wafer basket transmission line can directly send the empty basket back to the inserting area, making the basket Can be recycled efficiently.

After the silicon wafer basket transmission line replaces the traditional trolley, the empty material basket is controlled by the control device to return to the insertion area, which can not only reduce the manpower for pushing the trolley and save human resources; but also avoid the space occupied by the trolley, making the wafer cleaning workshop more beautiful and space-saving The utilization efficiency is higher; it can also effectively prevent workers from flowing between the inserting area and the wrapping area, reduce the dirt and dust in the inserting area from entering the wrapping area, and improve the cleanliness of the wrapping area and the cleaning quality of silicon wafers. At the same time, the use of the silicon wafer basket transmission line can also reduce the influence of human factors during the silicon wafer transportation process, reduce the possibility of deformation and damage of the basket, and reduce unnecessary economic losses. Moreover, after the recycling efficiency of the material basket is improved, the number of material baskets purchased can be reduced, which can further save business expenses.

In a preferred embodiment, the silicon chip basket transmission line provided by the utility model also includes a guardrail perpendicular to the surface of the conveyor belt, so as to prevent the basket from slipping off the conveyor belt during transmission and improve the Transmission reliability, reduce economic losses.

In another preferred embodiment, the control device includes a detection part and a control part, the detection part is used to detect whether the material basket is sent into or out of the conveyor belt, and the control part is used to receive the The detection signal of the detection part is used to control the operation or stop of the conveyor belt. When the detection part detects the signal that the basket is fed into the conveyor belt, the control part controls the operation of the conveyor belt and sends the basket to the insertion area; when the detection part continues to fail to detect the signal that the basket is sent into the conveyor belt, it indicates that the conveyor belt is loaded If there are fewer baskets, the control part can control the conveyor belt to stop running, so as to avoid the transmission line idling and waste resources; when the detection part detects that the material basket leaves the conveyor belt, the conveyor belt runs; when the detection part continues to fail to detect that the material basket leaves the conveyor belt, It shows that there are many baskets on the conveyor belt, and the control unit can also control the conveyor belt to stop running, so as to prevent the baskets from accumulating too much on the conveyor belt and reduce the wear of the conveyor belt.

Description of drawings

Fig. 1 is a schematic structural view of a specific embodiment of the silicon chip basket transmission line provided by the utility model;

Fig. 2 is a partial structural schematic diagram of the silicon chip basket transmission line shown in Fig. 1;

Fig. 3 is a partial top view of the silicon chip basket transmission line shown in Fig. 1;

Fig. 4 is a left side view of the silicon chip basket transmission line shown in Fig. 1 .

Detailed ways

The core of the utility model is to provide a silicon wafer basket transmission line, which is used to transmit silicon wafer baskets. The silicon wafer basket transmission line can effectively improve the utilization efficiency of the basket, reduce the cleaning cost of silicon wafers, and improve the cleaning quality.

The orientation words such as up, down, front, and back involved in this article are defined based on the working state of the silicon wafer basket transmission line. The front is the same as the running direction of the transmission line, and the back is the opposite of the running direction of the transmission line. It should be understood that the orientation words used herein shall not limit the protection scope of this patent.

In order to enable those skilled in the art to better understand the solution of the utility model, the utility model will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

Please refer to Fig. 1, Fig. 1 is a schematic structural diagram of a specific embodiment of the silicon chip basket transmission line provided by the present invention; Fig. 2 is a partial structural schematic diagram of the silicon chip basket transmission line shown in Fig. 1; Fig. 3 is a schematic diagram of the silicon chip basket transmission line shown in Fig. 4 is a left side view of the silicon wafer basket transmission line shown in FIG. 1 . The directions of the arrows in the figure all indicate the advancing direction of the conveyor belt.

The silicon chip basket transmission line provided by the utility model includes a conveyor belt 1 for carrying the silicon chip basket, and a control device for controlling the running or stopping of the conveyor belt, wherein the advancing direction of the conveyor belt 1 is related to the cleaning of the silicon chip. The feeding direction of the machine is opposite. In this way, the operator can fill the empty material basket 2 with silicon wafers to be washed in the insertion area, and send them into the washing machine, and then enter the packaging area after cleaning. 2 placed on the silicon wafer basket transmission line provided by the utility model, since the silicon wafer basket transmission line is opposite to the feeding direction of the cleaning machine, the silicon wafer basket transmission line can directly send the empty basket 2 back to the inserting area, The material basket 2 can be efficiently recycled.

After the silicon wafer basket transmission line replaces the traditional trolley, the empty material basket 2 is controlled by the control device to return to the insertion area, which can reduce the manpower for pushing the trolley and save human resources; it can also avoid the space occupied by the trolley and make the silicon wafer cleaning workshop more beautiful. The space utilization efficiency is higher; it can also effectively prevent workers from flowing between the inserting area and the wrapping area, reduce the dirt and dust in the inserting area from entering the wrapping area, and improve the cleanliness of the wrapping area and the cleaning quality of silicon wafers. At the same time, the use of the silicon chip basket transmission line can also reduce the influence of human factors during the silicon chip transportation process, reduce the possibility of deformation and damage of the material basket 2, and reduce unnecessary economic losses. Moreover, after the recycling efficiency of the material basket 2 is improved, the quantity of the purchased material basket 2 can be reduced, which can further save business expenses.

In a specific embodiment, the silicon chip basket transmission line provided by the utility model can have a guardrail 3 perpendicular to the surface of the conveyor belt 1, so as to prevent the material basket 2 from slipping off the conveyor belt 1 during the transmission process and improve The reliability of the transmission of material basket 2 reduces economic losses.

Further, the width of the conveyor belt 1 can be equal to the width of the material basket 2, so that the conveyor belt 1 can just place the material basket 2, thereby effectively preventing the material basket 2 from moving on the conveyor belt 1, and reducing the collision between the material basket 2 and other components , thereby reducing the possibility of deformation and damage of the material basket 2, and prolonging the service life of the material basket 2.

At the same time, the length of the conveyor belt 1 can be slightly longer than the length of the cleaning machine, so that the material basket 2 conveyed by the conveyor belt 1 can be transported farther than the cleaning machine, which is more convenient for the inserting workers and wrapping workers to operate, and the conveying efficiency is higher .

Specifically, the conveyor belt 1 can be formed of polytetrafluoroethylene material. Polytetrafluoroethylene has the characteristics of small friction coefficient and good wear resistance. Using polytetrafluoroethylene to make the conveyor belt 1 can reduce the friction between the material basket 2 and the conveyor belt 1. Wear and tear, so that the service life of the conveyor belt 1 is longer. Obviously, the conveyor belt 1 can be made of other materials.

In a preferred embodiment, the control device includes a detection component 4 and a control component, the detection component 4 is used to detect whether the material basket 2 is sent into or leaves the conveyor belt 1, the control component is used to receive the detection signal of the detection component 4, and According to the detection signal, the conveyor belt is controlled to run or stop. When the detection part 4 detects the signal that the material basket 2 is sent into the conveyor belt 1, the control part controls the operation of the conveyor belt 1 and sends the material basket 2 to the inserting area; when the detection part 4 continues to fail to detect that the material basket 2 is sent into the conveyor belt When 1, it indicates that there are fewer loading baskets 2 on the conveyor belt 1, and the control part can control the conveyor belt 1 to stop running, so as to avoid the transmission line idling and waste resources; when the detection part 4 detects that the material basket 2 leaves the conveyor belt 1, the conveyor belt 1 runs ; When the detection part 4 continues to detect that the material basket 2 leaves the conveyor belt 1, it indicates that there are more material baskets 2 on the conveyor belt 1, and the control part can also control the conveyor belt 1 to stop running to prevent the material basket 2 from accumulating on the conveyor belt 1 Too much, reduce the wear of conveyor belt 1.

In addition, in the utility model, a 0.75KW three-phase asynchronous motor can be used to provide power for the conveyor belt 1, and a mechanical gearbox can also be used in conjunction with it to conveniently adjust the running speed of the conveyor belt. There are many ways to realize the power part and speed change method of the conveyor belt 1 in the art, and details will not be repeated here.

The photoelectric sensor is taken as an example below to describe the detection components. It should be understood that in the silicon chip basket transmission line provided by the present invention, the detection components include but are not limited to photoelectric sensors.

Specifically, the detection component 4 may include a first detection component 41 disposed at the feed port of the conveyor belt 1, and when the first detection component 41 continues to detect no signal for longer than a predetermined time, the control component controls the conveyor belt 1 to stop. That is, if the first detection part 41 does not detect that the material basket 2 is delivered to the conveyor belt 1 within a predetermined time, the control part can control the conveyor belt 1 to stop. For example, if the first photoelectric sensor does not sense the material basket 2 for 5 minutes, it indicates that there is no material basket 2 on the conveyor belt 1 for 5 minutes. At this time, the control unit can stop the conveyor belt 1 to save power. Also reduces equipment wear and tear. Such a state can be understood as the silicon chip basket transmission line is in a power saving mode. And when the first photoelectric sensor at the feed port senses the material basket 2, the control part will start the conveyor belt 1 in time, the power saving mode ends, and the transmission line operation mode is entered.

Further, the detection component 4 can also include a second detection component 42 and a third detection component 43 arranged in sequence along the advancing direction of the conveyor belt 1, the third detection component 43 is close to the discharge port of the conveyor belt 1; the second detection component 42 When both the third detection part 43 and the third detection part 43 continue to detect the signal of the material basket 2 for more than a predetermined time, the control part controls the conveyor belt 1 to stop. That is, three photoelectric sensors can be arranged sequentially along the running direction of the conveyor belt 1, and the third photoelectric sensor is close to the discharge port, and the second photoelectric sensor is located between the first photoelectric sensor and the third photoelectric sensor. When both the second photoelectric sensor and the third photoelectric sensor continue to detect the signal of the material basket 2, and after a predetermined period of time, such as continuing for 20 seconds, both the second photoelectric sensor and the third photoelectric sensor continue to detect the existence of the material basket 2, at this time The material basket 2 is piled up on the conveyor belt 1, and the operator does not transfer it in time. This mode can be understood as the stacking mode of the transmission line. The control component can also control the conveyor belt 1 to stop, so as to reduce the abrasion between the material basket 2 and the conveyor belt 1 .

More preferably, auxiliary equipment such as alarm bells and light bulbs can be set. When the silicon wafer basket transmission line is in the stacking mode, the auxiliary equipment such as alarm bells and light bulbs are switched on, and the operator is prompted to unload the material basket 2 in time by using sound and light. After the material basket 2 is taken away, the stacking mode ends, auxiliary equipment such as alarm bells and light bulbs are disconnected, and the transmission line returns to the working mode again.

Apparently, the first detection component, the second detection component, and the third detection component mentioned above can exist independently or at the same time. When they exist at the same time, the reliability of the transmission line is better and the work efficiency is higher.

The silicon chip basket transmission line provided by the utility model has been introduced in detail above. In this paper, specific examples are used to illustrate the principle and implementation of the present utility model, and the descriptions of the above embodiments are only used to help understand the method and core idea of the present utility model. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the utility model, some improvements and modifications can also be made to the utility model, and these improvements and modifications also fall into the protection of the claims of the utility model. within range.

Claims (9)

1. A silicon wafer material basket transmission line, is characterized in that, comprises the conveyer belt (1) that is used to carry silicon wafer material basket (2) and is used to control the control device that described conveyer belt (1) runs or stops, so The advancing direction of the conveyor belt (1) is opposite to the feeding direction of the cleaning machine for cleaning the silicon wafers. 2. The silicon chip basket transmission line according to claim 1, characterized in that it further comprises a guardrail (3) perpendicular to the surface of the conveyor belt (1). 3. The silicon chip basket transmission line according to claim 2, characterized in that, the width of the conveyor belt (1) is equal to the width of the basket (2). 4. The silicon chip basket transmission line according to claim 3, characterized in that, the length of the conveyor belt (1) is slightly longer than the length of the washing machine. 5. The silicon chip basket transmission line according to claim 4, characterized in that, the conveyor belt (1) is a long conveyor belt formed of polytetrafluoroethylene material. 6. The silicon wafer material basket transmission line according to any one of claims 1 to 5, characterized in that, the control device includes a device for detecting whether the material basket (2) is sent into or leaves the conveyor belt (1) A detection component (4), and a control component that receives the detection signal of the detection component (4) and controls the running or stopping of the conveyor belt (1). 7. The silicon chip basket transmission line according to claim 6, characterized in that, the detection component (4) comprises a first detection component (41) arranged at the feed inlet of the conveyor belt (1). 8. The silicon chip basket transmission line according to claim 7, characterized in that, the detection component (4) comprises a second detection component (42) and a second detection component (42) arranged in sequence along the advancing direction of the conveyor belt (1). Three detection components (43), the third detection component (43) is close to the discharge port of the conveyor belt (1). 9. The silicon chip basket transmission line according to claim 8, characterized in that, the detection component (4) is specifically a photoelectric sensor.

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