CN201471092U - 皮秒激光加工设备的高精度z轴载物平台 - Google Patents
皮秒激光加工设备的高精度z轴载物平台 Download PDFInfo
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Abstract
本实用新型涉及皮秒激光加工设备的高精度Z轴载物平台，在Z平台底板上固定Z固定板，Z固定板上安装竖立的导轨，在导轨上安装可沿导轨上下运动的升降板，用于控制升降板上下运动的压电陶瓷电机安装在Z平台底板上，在升降板的前侧面固定一竖立的前侧板，在升降板的后侧面固定一竖立的后侧板，前侧板与后侧板为平行对称设置；在Z固定板上设置传感器，在前侧板或后侧板的内侧面上设置传感器感应片；在Z固定板上设置读数头，在前侧板或后侧板的内侧面上贴有光栅尺；在前侧板和后侧板上放置治具板。本实用新型采用分辨率高的压电陶瓷电机控制Z轴启停和升降动作，光栅尺保证其升降定位精度，配重机构解决陶瓷电机动态推力和静态保持力不足的问题。
Description
技术领域
本实用新型涉及皮秒激光精加工设备，尤其涉及皮秒激光加工设备的高精度Z轴载物平台。
背景技术
目前，激光精细加工设备中Z轴载物平台一般由电机旋转运动带动滚珠丝杆进行直线运动，再由滚珠丝杆的直线运动带动载物平台实现垂直升降。Z轴载物平台要求平台在一定行程范围内能随时精确定位，从而满足机器的运动和加工工艺要求；其重复定位精度一般在±3～5um，这个精度远不能满足皮秒激光精细加工设备的升降精度要求。
发明内容
本实用新型的目的是克服现有技术存在的不足，提供一种皮秒激光加工设备的高精度Z轴载物平台，可以很好地满足皮秒激光精细加工设备的升降精度要求。
本实用新型的目的通过以下技术方案来实现：
皮秒激光加工设备的高精度Z轴载物平台，特点是：在Z平台底板上固定Z固定板，所述Z固定板上安装竖立的导轨，在所述导轨上安装一可沿导轨上下运动的升降板，用于控制升降板上下运动的压电陶瓷电机安装在Z平台底板上，所述压电陶瓷电机驱动升降板沿导轨上下运动，在所述升降板的前侧面固定一竖立的前侧板，在所述升降板的后侧面固定一竖立的后侧板，前侧板与后侧板为平行对称设置；还在所述Z固定板上设置传感器，相应地，在前侧板或后侧板的内侧面上设置传感器感应片；在所述Z固定板上设置读数头，相应地，在前侧板或后侧板的内侧面上贴有光栅尺；在所述前侧板和后侧板上放置治具板，在所述治具板上沿横向设置一横定位块、沿纵向设置一纵定位块。
进一步地，上述的皮秒激光加工设备的高精度Z轴载物平台，其中，在所述Z平台底板上且位于前侧板内侧的左右两端分别设置一定滑轮机构，对应地，在所述Z平台底板上且位于后侧板内侧的左右两端也分别设置一定滑轮机构；在前侧板右端的定滑轮机构与后侧板右端的定滑轮机构之间安放右配重块，前侧板的右端连接一钢丝绳，钢丝绳经前侧板右端的定滑轮机构牵引于右配重块，后侧板的右端也连接一钢丝绳，钢丝绳经后侧板右端的定滑轮机构牵引于右配重块；相应地，在前侧板左端的定滑轮机构与后侧板左端的定滑轮机构之间安放左配重块，前侧板的左端连接一钢丝绳，钢丝绳经前侧板左端的定滑轮机构牵引于左配重块，后侧板的左端也连接一钢丝绳，钢丝绳经后侧板左端的定滑轮机构牵引于左配重块。
更进一步地，上述的皮秒激光加工设备的高精度Z轴载物平台，其中，在所述治具板上且与前侧板和后侧板锁固的部位设置有平面度调节螺丝孔。
更进一步地，上述的皮秒激光加工设备的高精度Z轴载物平台，其中，所述Z固定板的顶部设置有止挡螺栓。
再进一步地，上述的皮秒激光加工设备的高精度Z轴载物平台，其中，所述Z固定板呈L形结构，包括一水平面和一垂直面，Z固定板的水平面与Z平台底板固定连接，Z固定板的垂直面上安装竖立的导轨。
再进一步地，上述的皮秒激光加工设备的高精度Z轴载物平台，其中，所述压电陶瓷电机通过电机安装板固定在Z平台底板上，所述电机安装板呈L形结构，包括一水平面和一垂直面，电机安装板的水平面与Z平台底板固定连接，电机安装板的垂直面上安装压电陶瓷电机。
本实用新型技术方案突出的实质性特点和显著的进步主要体现在：
本实用新型设计新颖，采用分辨率高的压电陶瓷电机控制Z轴启停和升降动作，采用光栅尺保证其升降定位精度，用两组配重机构解决压电陶瓷电机动态推力和静态保持力不足的问题，其升降定位精度可达±1um。制造成本低、功能卓越，为一实用的新设计。
附图说明
下面结合附图对本实用新型技术方案作进一步说明：
图1a：在Z平台底板上安装升降机构的示意图；
图1b：图1a的立体结构示意图；
图2a：在图1a的基础上安装侧板的示意图；
图2b：图2a的立体结构示意图；
图3a：在图2a的基础上安装配重机构的示意图；
图3b：图3a的立体结构示意图；
图4a：在图3a的基础上安装治具板的示意图；
图4b：图4a的立体结构示意图。
图中各附图标记的含义见下表：
| 附图标记 | 含义 | 附图标记 | 含义 | 附图标记 | 含义 |
| 1 | Z平台底板 | 2 | Z固定板 | 3 | 导轨 |
| 4 | 升降板 | 5 | 止挡螺栓 | 6 | 电机安装板 |
| 7 | 压电陶瓷电机 | 8 | 前侧板 | 9 | 后侧板 |
| 10 | 传感器 | 11 | 传感器感应片 | 12 | 光栅尺 |
| 13 | 定滑轮机构 | 14 | 钢丝绳 | 15 | 右配重块 |
| 16 | 治具板 | 17 | 横定位块 | 18 | 纵定位块 |
| 附图标记 | 含义 | 附图标记 | 含义 | 附图标记 | 含义 |
| 19 | 平面度调节螺丝孔 |
具体实施方式
皮秒激光加工设备的高精度Z轴载物平台，如图1a、图1b，Z平台底板1为基础部件，在Z平台底板1上固定Z固定板2，Z固定板2呈L形结构，包括一水平面和一垂直面，Z固定板2的水平面与Z平台底板1固定连接，Z固定板2的垂直面上安装竖立的导轨3，在导轨3上安装一可沿导轨3上下运动的升降板4，用于控制升降板4上下运动的压电陶瓷电机7通过电机安装板6固定在Z平台底板1上，电机安装板6呈L形结构，包括一水平面和一垂直面，电机安装板6的水平面与Z平台底板1固定连接，电机安装板6的垂直面上安装压电陶瓷电机7，在升降板4上贴有陶瓷片，当压电陶瓷电机7通电后，压电陶瓷电机7的手指蠕动通过陶瓷片拨动升降板4作上下直线运动，即由压电陶瓷电机7驱动升降板4沿导轨3上下运动；在Z固定板2的顶部设置有止挡螺栓5，作为升降板4上下运动的机械限位。Z平台底板1有四个沉头孔用于固定整个Z平台，且拆装整个Z平台都不用拆卸其它任何零件，安装维护方便。
如图2a、图2b，在升降板4的前侧面固定一竖立的前侧板8，在升降板4的后侧面固定一竖立的后侧板9，前侧板8与后侧板9为平行对称设置；还在Z固定板2上设置传感器10，相应地，在前侧板8或后侧板9的内侧面上设置传感器感应片11；传感器10和传感器感应片11的组合运用，用于升降上下极限的电气限位。在Z固定板2上设置读数头，相应地，在前侧板8或后侧板9的内侧面上贴有光栅尺12；用光栅尺12精确量测升降位置并反馈其升降位置信息给平台的控制系统，使其与压电陶瓷电机配合控制达到精准的定位。
如图3a、图3b，在Z平台底板1上且位于前侧板8内侧的左右两端分别设置一定滑轮机构，对应地，在Z平台底板1上且位于后侧板9内侧的左右两端也分别设置一定滑轮机构；在前侧板8右端的定滑轮机构与后侧板9右端的定滑轮机构之间安放右配重块15，前侧板8的右端连接一钢丝绳14，钢丝绳14经前侧板右端的定滑轮机构13牵引于右配重块15，后侧板9的右端也连接一钢丝绳，钢丝绳经后侧板9右端的定滑轮机构牵引于右配重块15；相应地，在前侧板8左端的定滑轮机构与后侧板9左端的定滑轮机构之间安放左配重块，前侧板8的左端连接一钢丝绳，钢丝绳经前侧板8左端的定滑轮机构牵引于左配重块，后侧板9的左端也连接一钢丝绳，钢丝绳经后侧板9左端的定滑轮机构牵引于左配重块。两配重块的重量用于平衡升降机构包括两侧板、升降板、治具板和待加工工件的总重量，以此确保压电陶瓷电机不至于过载，从而很好地解决了压电陶瓷电机动态推力和静态保持力小的问题。
如图4a、图4b，在前侧板8和后侧板9上放置治具板16，治具板16用于承载待加工工件，在治具板16上沿横向设置一横定位块17、沿纵向设置一纵定位块18，横定位块17和纵定位块18相互垂直固定于治具板16上用于待加工工件的横向和纵向的定位；治具板16和两侧板锁固的每个定位孔旁边均有一个平面度调节螺丝孔，用于调节治具板16的平面度，该结构简单，调节操作方便实用。
具体应用时，设备通电后压电陶瓷电机7自动找光栅原点(载物台自动升降复位到光栅原点位置)，由于压电陶瓷电机是通过AB5伺服驱动器控制，由设备操作人员在软件控制操作面板上输入需要上升或下降的距离，AB5驱动器得到上位机指令后，驱动压电陶瓷电机手指发生蠕动拨动升降板4上的陶瓷片，从而带动升降机构作上升或下降运动。
采用精密压电陶瓷电机控制Z轴载物平台的启停和升降，用交叉滚珠导轨保证其升降的方向和稳定性，用光栅尺保证其升降的定位精度。光栅尺和压电陶瓷电机配合控制，具有很高的定位精度，压电陶瓷电机每步分辨率高于20nm。运用定滑轮原理，采用配重机构平衡升降机构的本身重量，以此确保压电陶瓷电机不至于过载，从而很好地解决了压电陶瓷电机动态推力和静态保持力小的问题。螺纹调节平台的平面度，结构简单，操作方便实用。Z平台是一个整体结构，其底板有安装孔，拆装整个Z平台不用拆卸其它任何零件，安装和维护方便。
综上所述，本实用新型设计独特，结构简洁紧凑，采用分辨率高的精密压电陶瓷电机控制Z轴启停和升降动作，由光栅尺保证其升降定位精度，精度高，成本低，使用简洁，经济效益和社会效应显著，堪称是具有新颖性、创造性、实用性的好技术，市场应用前景广阔。
需要理解到的是：上述说明并非是对本实用新型的限制，在本实用新型构思范围内，所进行的添加、变换、替换等，也应属于本实用新型的保护范围。
Claims (6)
1.皮秒激光加工设备的高精度Z轴载物平台，其特征在于：在Z平台底板(1)上固定Z固定板(2)，在所述Z固定板(2)上安装竖立的导轨(3)，在所述导轨(3)上安装一可沿导轨(3)上下运动的升降板(4)，用于控制升降板(4)上下运动的压电陶瓷电机(7)安装在Z平台底板(1)上，所述压电陶瓷电机(7)驱动升降板(4)沿导轨(3)上下运动，在所述升降板(4)的前侧面固定一竖立的前侧板(8)，在所述升降板(4)的后侧面固定一竖立的后侧板(9)，前侧板(8)与后侧板(9)为平行对称设置；还在所述Z固定板(2)上设置传感器(10)，相应地，在前侧板(8)或后侧板(9)的内侧面上设置传感器感应片(11)；在所述Z固定板(2)上设置读数头，相应地，在前侧板(8)或后侧板(9)的内侧面上贴有光栅尺(12)；在所述前侧板(8)和后侧板(9)上放置治具板(16)，在所述治具板(16)上沿横向设置一横定位块(17)、沿纵向设置一纵定位块(18)。
2.根据权利要求1所述的皮秒激光加工设备的高精度Z轴载物平台，其特征在于：在所述Z平台底板(1)上且位于前侧板(8)内侧的左右两端分别设置一定滑轮机构，对应地，在所述Z平台底板(1)上且位于后侧板(9)内侧的左右两端也分别设置一定滑轮机构；在前侧板(8)右端的定滑轮机构与后侧板(9)右端的定滑轮机构之间安放右配重块(15)，前侧板(8)的右端连接一钢丝绳(14)，钢丝绳(14)经前侧板右端的定滑轮机构(13)牵引于右配重块(15)，后侧板(9)的右端也连接一钢丝绳，钢丝绳经后侧板(9)右端的定滑轮机构牵引于右配重块(15)；相应地，在前侧板(8)左端的定滑轮机构与后侧板(9)左端的定滑轮机构之间安放左配重块，前侧板(8)的左端连接一钢丝绳，钢丝绳经前侧板(8)左端的定滑轮机构牵引于左配重块，后侧板(9)的左端也连接一钢丝绳，钢丝绳经后侧板(9)左端的定滑轮机构牵引于左配重块。
3.根据权利要求1所述的皮秒激光加工设备的高精度Z轴载物平台，其特征在于：在所述治具板(16)上且与前侧板(8)和后侧板(9)锁固的部位设置有平面度调节螺丝孔(19)。
4.根据权利要求1所述的皮秒激光加工设备的高精度Z轴载物平台，其特征在于：所述Z固定板(2)的顶部设置有止挡螺栓(5)。
5.根据权利要求1所述的皮秒激光加工设备的高精度Z轴载物平台，其特征在于：所述Z固定板(2)呈L形结构，包括一水平面和一垂直面，Z固定板(2)的水平面与Z平台底板(1)固定连接，Z固定板(2)的垂直面上安装竖立的导轨(3)。
6.根据权利要求1所述的皮秒激光加工设备的高精度Z轴载物平台，其特征在于：所述压电陶瓷电机(7)通过电机安装板(6)固定在Z平台底板(1)上，所述电机安装板(6)呈L形结构，包括一水平面和一垂直面，电机安装板(6)的水平面与Z平台底板(1)固定连接，电机安装板(6)的垂直面上安装压电陶瓷电机(7)。
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